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COMPRESSOR UNIT
Instruction Manual
C15T
Export Control Policy
Vacuum pumps that pump nitrogen gas at pumping speed of 15000L/S or
more fall under row 2(35) of appended table 1 of Japan's Export Trade
Control Order, which is based on international export control regimes.
Also, when applying a refrigerator system to a cryocooler for optical
sensors, the cryocooler falls under row 10(2) of appended table 1 of Japan's
Export Trade Control Order as well.
Customers must follow all related rules and regulations such as Foreign
Exchange and Foreign Trade Act and take appropriate procedures when
exporting or re-exporting those products.
D/N.MD15T00E, 2020SR01
ULVAC CRYOGENICS INCORPORATED
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Summary of Contents for Ulvac C15T
- Page 1 10(2) of appended table 1 of Japan’s Export Trade Control Order as well. Customers must follow all related rules and regulations such as Foreign Exchange and Foreign Trade Act and take appropriate procedures when exporting or re-exporting those products. D/N.MD15T00E, 2020SR01 ULVAC CRYOGENICS INCORPORATED...
- Page 3 As a general rule, diagnosis of failure should be done on site by customer. However, ULVAC CRYOGENICS or our service network can perform this service for an agreed fee upon the customer’s request. There will be no charge if the cause...
- Page 4 ULVAC CRYOGENICS. (2) Damage during transportation When damage by delivery/transportation is admitted, the product will be repaired free of charge within the range of the guarantee expressed in the sales contract.
- Page 5 2.3 Repair period after production is discontinued ULVAC CRYOGENICS shall accept product repairs for seven years after production of the product is discontinued. 3. Service Form After the products are delivered, please fill out the following information in the blanks. If you have any questions or technical problems please feel free to contact the nearest Customer Support Center or headquarters.
- Page 6 (3) If you have any questions or comments on this document, please do not hesitate to contact us. The phone numbers of local customer support centers are listed at the end of this manual. ULVAC CRYOGENICS INCORPORATED...
- Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage . Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED...
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Page 9: Table Of Contents
Scheduled and Unscheduled Maintenance ·············································· 6-1 Adsorber Replacement ······································································· 6-1 Charging Helium Gas ········································································· 6-5 Appendix A Trouble Shooting ··········································································· A-1 Appendix B Circuit Diagram ············································································· B-1 Appendix C Flexible Hose ··············································································· C-1 Appendix D Flow Diagram ··············································································· D-1 Service Network·························································································· CS-1 ULVAC CRYOGENICS INCORPORATED... - Page 10 Compressor Installation ................3-8 Figure 5-1 Disconnecting Flexible Hose ............... 5-2 Figure 6-1 Adsorber replacement ................. 6-3 Figure B-2 C15T Wiring Diagram .................. B-5 Figure D-1 Flow Diagram ....................D-2 Tables Table 1-1 Compressor Unit Standard Specifications........... 1-1 Table 2-1 Shipping List ....................
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Page 11: Safety Instructions
6 times or less per hour. Do not use startup and shutdown to control the temperature of the Super Trap. Please contact us when it is required to control the Super Trap temperature. ULVAC CRYOGENICS INCORPORATED... - Page 12 ☆We collect used adsorbers. If there is any used absorber, please contact a person in your local dealership or Ulvac Techno Ltd. to have it picked up or send it directory to our Service Engineering Division. We only accept CTI adsorbers and our adsorbers.
- Page 13 2. Input power supply must be disconnected before opening the cover of the compressor to avoid the risk of electrical shock. Also, parts inside the compressor unit are still hot immediately after shutdown. Wait at least 15 minutes to open the cover to avoid the risk of burn injury. ULVAC CRYOGENICS INCORPORATED...
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Page 15: Disposal Considerations
Remove the coupling to make it visible that the adsorber has been depressurized before proceeding to the next step. We provide Safety Data Sheet (called SDS) of our products upon your request. Please contact us if necessary. MDIW001E,2018JE01 ULVAC CRYOGENICS INCORPORATED IW-1... - Page 16 This page intentionally left blank. IW-2 ULVAC CRYOGENICS INCORPORATED...
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Page 17: Compressor Unit Description
The compressor unit supplies and circulates helium continuously in the cryopump system for operation of the refrigerator unit (coldhead). The C15T compressor unit consists of: 1) compressor motor, 2) cooling system, 3) oil separation system and 4) adsorber. See Table 1-1 for the standard compressor specifications. - Page 18 1.7MPaG for 30 seconds from the startup as bypass operation takes place inside the compressor unit. ◆Applicable Model of Cryopump CRYO-U10H, U10HL, U10PU, U10PU-S, U10HSP CRYO-U12H, U12HSP, U12HL (*3) (*3) For 12-inch models of cryopump, the C15T compressor unit can be used only when the load is light. ◆Connector Specifications CONNECTOR MANUFACTURER...
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Page 19: Figure 1-1 Dimensions
５ Ｌ ／ ｍ ｉ ｎ １ ６ ℃ ～ ２ ５ ℃ ４ Ｌ ／ ｍ ｉ ｎ ５ ℃ ～ １ ５ ℃ ３ Ｌ ／ ｍ ｉ ｎ ＷＡＴＥＲ ＯＵＴ 【REAR】 Dimensions Figure 1-1 ULVAC CRYOGENICS INCORPORATED... -
Page 20: Figure 1-2 Major Components
Ｗ Ａ Ｔ Ｅ Ｒ Ｉ Ｎ Cooling Water Inlet (Rc3/8) 冷却水入口(Rc3/8) 水温 冷却水流量 ３３℃以上 使用不可 ２６℃～３２℃ ５Ｌ／ｍｉｎ １６℃～２５℃ ４Ｌ／ｍｉｎ ５℃～１５℃ ３Ｌ／ｍｉｎ Ｗ Ａ ＴＥ Ｒ Ｏ Ｕ Ｔ 冷却水出口(Rc3/8) Cooling Water Outlet (Rc3/8) 【REAR】 Figure 1-2 Major Components ULVAC CRYOGENICS INCORPORATED... - Page 21 ＣＰ１ ＣＰ２ ＦＵＳＥ１ ＦＵＳＥ２ １Ａ １Ａ ヒューズ(FUSE2 1A) Fuse 2 1A Fuse 1 1A ヒューズ(FUSE1 1A) *Remove the control panel on the rear to operate switches on the side of the controller. Major Components (Controller) Figure 1-3 ULVAC CRYOGENICS INCORPORATED...
- Page 22 Compressor Unit Description This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
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Page 23: Inspection
Inspect Compressor Unit Check helium charge pressure on the pressure gauge on the front panel. When charging helium is required, refer to chapter 6.3 for the procedure. If the pressure drops even after charging helium, please contact us. ULVAC CRYOGENICS INCORPORATED... -
Page 24: Inspect Flexible Hoses
When the flexible hoses are stored or not being used, put dust caps and plugs on as they were shipped. Inspect Cables Inspect the cables for damage. If you find any missing parts or damages of the product, please contact us. ULVAC CRYOGENICS INCORPORATED... -
Page 25: Installation
The compressor unit must be operated in proper room temperature (10°C - 38°C). Avoid dust and moist. Leave the spaces as shown in Figure 3-1 for easier maintenance processes including; ・ Pressure gauge inspection. ・ Gas charge valve operation. ・ Adsorber replacement. 1543 Figure 3-1 Maintenance Space(Unit: mm) ULVAC CRYOGENICS INCORPORATED... -
Page 26: Installation
The Japan Refrigeration and Air Conditioning Industry Association. CAUTION ・ Usage of poor quality water causes performance degradation of heat exchanger. ・ If the water quality does not satisfy the requirement, it shortens the lifetime of the heat exchanger. ULVAC CRYOGENICS INCORPORATED... - Page 27 ・The compressor unit will be suspended for longer than a week. ・Shipping the compressor unit. Most of the cooling water can be drained by 30 seconds of blowing air with inlet pressure of 0.2MPaG and outlet opened to the air ULVAC CRYOGENICS INCORPORATED...
- Page 28 A dashed arrow (→) in the above graph shows the water flow rate and pressure (Δ P) required when the water temperature is 30°C. Water flow rate is 4.5L/min and water pressure (Δ P) is 0.1MPa. Cooling Water Requirement Figure 3-2 ULVAC CRYOGENICS INCORPORATED...
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Page 29: Connecting The Compressor Unit To The Cryopump
1.60 opening the gas charge valve very slowly. If indicated pressure is lower than appropriate, add helium gas as 1.50 35 38 described in section 6.3. 温 度 ℃ Temperature (°C) Charge Pressure and Temperature Figure 3-3 ULVAC CRYOGENICS INCORPORATED... - Page 30 Tighten self-sealing coupling with a wrench. Hold here with a wrench. ②Tighten the self-sealing coupling using two wrenches until the fittings are firmly sealed. When using torque wrench, torque the connection to 20N･m. Connecting Flexible Hose Figure 3-4 ULVAC CRYOGENICS INCORPORATED...
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Page 31: Connecting Electrical Cables
Do not connect the compressor to power supply until all wiring and connections are completed. 1. Make the REMOTE/RESPONSE wiring, if necessary. WARNING Disconnect the input power connector at REMOTE/RESPONSE wiring. Failure to observe this precaution could result in damage to, or destruction of, the equipment. ULVAC CRYOGENICS INCORPORATED... - Page 32 Copper wire / 600VAC, 3 conductors with ground INPUT Input power cable 1.25mm POWER (*1) The color of the ground wire is green. CRYOPUMP FLEXIBLE HOSE(SUPPLY) REMOTE/RESPONSE COLD HEAD POWER CABLE INPUT POWER CABLE FLEXIBLE HOSE(RETURN) Cooling water Inlet Outlet Figure 3-5 Compressor Installation ULVAC CRYOGENICS INCORPORATED...
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Page 33: Operation
Helium pressure while the compressor is in operation varies depending on the length of the flexible hoses. Especially, helium pressure tends to be high when flexible hose is longer than 3m. Adjust the pressure by releasing helium from helium charge port. ULVAC CRYOGENICS INCORPORATED... - Page 34 Operation This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
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Page 35: Disconnection And Storage
・Note that when performing helium circuit decontamination of the refrigerator unit, it is required to disconnect the flexible hoses at the compressor unit side immediately after shutdown. MD05001E,2010.06 ULVAC CRYOGENICS INCORPORATED... -
Page 36: Storage
Check the pressure gauge of the compressor unit periodically. Contact our Service Engineering Division or the nearest customer support center if the pressure keeps lower. There is a possibility that a leakage might have occurred. ULVAC CRYOGENICS INCORPORATED... - Page 37 When shipping the compressor unit, pack in the same way as at the time of shipment and avoid excess impact. MD05001E,2010.06 ULVAC CRYOGENICS INCORPORATED...
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Page 39: Maintenance
5. Remove the jam nuts holding the self-sealing coupling (male) .(Figure 6-1 (1)) 6. Remove the rear panel from the compressor by unscrewing 7 screws.(Figure 6-1 (1)) 7. Disconnect the flexible hose from the adsorber inlet. (Figure 6-1 (2)) ULVAC CRYOGENICS INCORPORATED... - Page 40 Section 5.1. 5. Replace the rear panel. 6. Write installation date and elapsed time on the adsorber label. Also write elapsed time for the next replacement of adsorber (plus 30000 hours to the present elapsed time). ULVAC CRYOGENICS INCORPORATED...
- Page 41 (2) Disconnect flexible hose from Loosen the seven bolts to the adsorber inlet. remove the rear panel. (4) Draw the adsorber out of the (3) Remove the adsorber compressor unit. mounting bolt. Figure 6-1 (1) Adsorber replacement ULVAC CRYOGENICS INCORPORATED...
- Page 42 Tilt the adsorber to take out from the compressor. Use cautions not to touch the piping. (5) Install the replacement adsorber following the removal steps in reverse order. (6) Record the elapsed time on the label. Figure 6-1 Adsorber replacement (2) ULVAC CRYOGENICS INCORPORATED...
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Page 43: Charging Helium Gas
If the bottle valve is opened ignoring the above step 1, the air between the regulator and the bottle valve diffuses into the helium bottle and deteriorates the purity of helium gas. Remove the front panel of the compressor unit. Connect the helium charging hose as follows: ULVAC CRYOGENICS INCORPORATED... - Page 44 Charge helium gas slowly to prevent the pressure relief valve from being activated. The pressure relief valve inside the compressor unit is set at 2.5MPaG. Close the charge control valve after charging helium gas. Close the regulator and remove the charging hose from the charge inlet. ULVAC CRYOGENICS INCORPORATED...
- Page 45 Compressor Unit Instruction Manual Front Panel Low pressure High pressure Bottle Charging Hose Valve Regulator Remove the front panel. ® CRYO-U Charging Valve Helium Gas Bottle Flexible Hoses Compressor Figure 6-2 Charging Helium Gas ULVAC CRYOGENICS INCORPORATED...
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Page 47: Table A-1 Troubleshooting Procedures
Contact our Service Engineering Division or the nearest CS center. (The cooling water temperature and the room temperature will be needed.) 3) Thermal protective switches (TS1 Contact our Service Engineering and TS2) are ON. Division or the nearest CS center. ULVAC CRYOGENICS INCORPORATED... - Page 48 Contact our Service Engineering Division or the nearest CS center. Ⅳ Compressor Helium charge pressure is too high. Check helium charge pressure. makes The pressure must not exceed 1.65MPaG (at room temperature abnormal noise during of 20℃). operation. ULVAC CRYOGENICS INCORPORATED...
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Page 49: Table A-2 Operating Log
CRYOPUMP S/N POWER OPERATING COMPRESSOR S/N REFRIGERATOR S/N Cryopump Measuring condition Compressor unit Remarks Temperature Pressure 【Pa】 stage stage 【 【 【 】 】 】 (*) Measure cooling water flow rate with flow meters for each compressor unit. ULVAC CRYOGENICS INCORPORATED... - Page 50 Troubleshooting This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
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Page 51: Appendix Bcircuit Diagram
STOP push button (PB1): lights-out Thermal switch This switch stops the compressor if there is no cooling water supply or cooling water temperature is excessively high. STOP push button (PB1): lights-out ULVAC CRYOGENICS INCORPORATED... - Page 52 This meter displays the elapsed operating hours of the meter compressor unit. ・Momentary power cut shorter than 2 seconds Momentary power failure -> Compressor automatically restarts after power restored ・Momentary power cut longer than 2 seconds restart relay -> Not restart ULVAC CRYOGENICS INCORPORATED...
- Page 53 This timer delays restarting the compressor for 5 seconds to prevent overloading. On delay timer After the compressor unit is set up, this timer keeps the solenoid for SOL valve OPEN for 30 seconds to prevent overloading. ULVAC CRYOGENICS INCORPORATED...
- Page 54 Circuit Diagram This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
- Page 55 While coldhead is suspended, between 11 and 12 is conductive. START STOP C15T CIRCUIT DIAGRAM PB1: Momentary button switch for 1b contact PB2: Momentary button switch for 1a contact Customers are required to supply switch and wiring. Rated 220V, 5A recommended.
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Page 56: Appendix Cflexible Hose
・ Do not twist a flexible hose especially when making continuously bent connections. ・ Keep away from water and salt to prevent corrosion. Do not place heavy objects on flexible hoses in order to prevent deformation or collapse. MD0C001E,2010.06 ULVAC CRYOGENICS INCORPORATED... - Page 57 Flexible Hose This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
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Page 58: Appendix Dflow Diagram
High pressure helium gas comes out from the oil separator enters an adsorber where oil-mist is adsorbed and removed. The Helium gas comes out the adsorber passes through a flexible hose and is supplied to the refrigerator unit. ULVAC CRYOGENICS INCORPORATED... - Page 59 Oil injection exchanger filter Helium RETURN Suction filter Low pressure switch Helium gas flow Helium gas + oil flow Oil flow Cooling water flow (＊1): Open when the compressor unit is in operation. Figure D-1 C15T Flow Diagram ULVAC CRYOGENICS INCORPORATED...
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Page 60: Service Network
Fax: +81-6-6397-0126 <Inquiries about cryostats or LN generators> Kyoto Factory 140-1,Megawa,Makishima-cho,Uji,kyoto,611-0041,Japan T e l : +81-774-28-5595 Fax: +81-774-20-2201 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 T e l : +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC. - Page 61 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...
- Page 62 Compressor Unit Instruction Manual Revision History Date Revision No. Contents 2020/01/16 2020.01 First edition. 2020/09/29 2020SR01 Appendix B. P.B-5/B-6 Circuit Diagram has been modified. ULVAC CRYOGENICS INCORPORATED...
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