1. Manuals
  2. Brands
  3. Ulvac Manuals
  4. Air Compressor
  5. C30F2
  6. Instruction manual

Ulvac C30F2 Instruction Manual

Hide thumbs
Table of Contents

Advertisement

Quick Links

Download this manual
COMPRESSOR UNIT
Instruction Manual
C30F2
Export Control Policy
Vacuum pumps that pump nitrogen gas at pumping
speed of 15000L/s or more fall under row 2(35) of
appended table 1 of Japan's Export Trade Control Order,
which is based on international export control regimes.
Customers must follow all related rules and regulations
such as Foreign Exchange and Foreign Trade Act and
take
appropriate
procedures
when
exporting
or
re-exporting those products.
Original Instructions
ULVAC CRYOGENICS INCORPORATED
D/N.MD30F20E, 2022OR05

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the C30F2 and is the answer not in the manual?

Questions and answers

Subscribe to Our Youtube Channel

Related Manuals for Ulvac C30F2

Summary of Contents for Ulvac C30F2

  • Page 1 Customers must follow all related rules and regulations such as Foreign Exchange and Foreign Trade Act and take appropriate procedures when exporting re-exporting those products. Original Instructions ULVAC CRYOGENICS INCORPORATED D/N.MD30F20E, 2022OR05...
  • Page 3 As a general rule, diagnosis of failure should be done on site by customer. However, ULVAC CRYOGENICS or our service network can perform this service for an agreed fee upon the customer’s request. There will be no charge if the cause...
  • Page 4 ULVAC CRYOGENICS. (2) Damage during transportation When damage by delivery/transportation is admitted, the product will be repaired free of charge within the range of the guarantee expressed in the sales contract.
  • Page 5 2.3 Repair period after production is discontinued ULVAC CRYOGENICS shall accept product repairs for seven years after production of the product is discontinued. 3. Service Form After the products are delivered, please fill out the following information in the blanks. If you have any questions or technical problems please feel free to contact the nearest Customer Support Center or headquarters.
  • Page 6 (3) If you have any questions or comments on this document, please do not hesitate to contact us. The phone numbers of local customer support centers are listed at the end of this manual. ULVAC CRYOGENICS INCORPORATED...
  • Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage . Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED...
  • Page 8 This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...

  • Page 9: Table Of Contents

    5.3 Inspection after Replacing Helium Circulation Components ························ 5-4 5.4 Precautions for when the Compressor Unit is Suspended ·························· 5-5 5.5 When Removing Water from the Compressor Unit ···································· 5-5 5.6 Maintenance Operation for a Compressor Suspended for a Long Period ······· 5-6 ULVAC CRYOGENICS INCORPORATED...
  • Page 10 7.2 Troubleshooting Procedures ································································ 7-1 7.3 STATUS DISPLAY Descriptions ··························································· 7-3 Appendix A Operating log ·············································································· A-1 Appendix B Combination of C30F2 Compressor and Cryopump/Super Trap ············· B-1 Appendix C Compressor Flow Diagram ···························································· C-1 Appendix D C30F2 Schematic Diagram ··························································· D-1 Appendix E C30F2 Self-Certification ································································...
  • Page 11 Figure 6-9 Items for Adding Helium Gas to the Compressor ···························· 6-8 Figure 6-10 Lockout ············································································· 6-11 Figure 6-11 Fuse Locations ···································································· 6-12 Figure 7-1 STATUS DISPLAY indicators ····················································· 7-3 Figure D-1 C30F4 Connection Diagram ····················································· D-2 ULVAC CRYOGENICS INCORPORATED...
  • Page 12 Compressor Unit Instruction Manual List of Tables Table 1-1 C30F2 Compressor General Operating Specifications ···················· 1-1 Table 1-2 Power Supply Ratings ····························································· 1-4 Table 1-3 Cooling Water Requirements ···················································· 1-4 Table 1-4 Installation Environment and Operation Requirements ···················· 1-5 Table 1-5 Approved Regulations ····························································· 1-5 Table 1-6 Minimum Configuration of C30F2 System ····································...
  • Page 13 Compressor failure such as the compressor motor life to be shortened extremely. Do not turn on and off the compressor to control the temperature of super trap. Please contact us when controlling the temperature of super trap is required. ULVAC CRYOGENICS INCORPORATED...
  • Page 14 ☆We collect used adsorbers. If there is any used absorber, please contact a person in your local dealership or Ulvac Techno Ltd. to have it picked up or send it directory to our Service Engineering Division. We only accept adsorbers from CTI or us.
  • Page 15 Also, parts of inside the compressor unit are still hot just after the compressor has been stopped. Wait at least 15 minutes to open the cover to avoid the risk of burns. ULVAC CRYOGENICS INCORPORATED...
  • Page 16 Contact us when the self-sealing coupling is loosened or removed. Servicing for trouble is out of warranty if it occurs while the sealing sticker is not in the original state. The sealing sticker is located inside the panel of the compressor unit. Figure Example of a sealing sticker ULVAC CRYOGENICS INCORPORATED...

  • Page 17: Disposal Considerations

    Remove the coupling to make it visible that the adsorber has been depressurized before proceeding to the next step. We provide Safety Data Sheet (called SDS) of our products upon your request. Please contact us if necessary. MDIW001E,2018JE01 ULVAC CRYOGENICS INCORPORATED IW-1...
  • Page 18 This page intentionally left blank. IW-2 ULVAC CRYOGENICS INCORPORATED...

  • Page 19: Compressor Description

    C30F2 is compressor unit for cryopump systems. NOTE: All personnel involved in installation, operation, adjustment, maintenance and servicing must be familiar with the contents of both the C30F2 compressor and related components. To ensure safe, reliable system performance, read this manual as well as other relevant manuals completely to gain a thorough understanding before beginning work.

  • Page 20: Refrigerator System Documents

    The helium line is a closed circuit and helium gas is cycled to be used. Helium gas is not required to be charged frequently. C30F2 Compressor compresses helium gas in a highly-reliable oil injection type helium compressor. Helium gas recovers its purity as it flows through an oil separator and an adsorber, where contaminants are removed.

  • Page 21: Compressor Specifications

    C30F2 Compressor Unit Instruction Manual C ompressor Specifications 1.5.1 External view Figure 1-1 shows external view of C30F2. (Front) (Rear) Figure 1-1 C30F2 External View 1.5.2 Dimensions Figure 1-2 shows the dimensions. (unit:mm) COMPRESSOR UNIT Ratings C30F2 Model Type： C30F2 Refrigerant：HELIUM(R704) 1.8 ounce...

  • Page 22: Table 1-2 Power Supply Ratings

    Do not place objects or equipments on top of a compressor. It prevents heat to be released from compressors as well as applying unnecessary heat to the equipments placed on it. 1.5.3 Weight C30F2 Compressor : 124kg 1.5.4 General Specifications The tables below show power supply rating, cooling water requirements, installation environment, operation requirements.

  • Page 23: Table 1-4 Installation Environment And Operation Requirements

    Altitude < 1000m Vibration < 0.6G, 10 – 55 Hz Atmosphere C30F2 must be installed indoors, it cannot be installed outdoors. Install in a place where free from metal powder, dust, flammable and corrosive gas Pollution degree Static helium pressure 1.3 - 1.6MPaG...

  • Page 24: Component Descriptions

    ラ グ を 取 付 け て 下 さ い 。 （ 取 扱 説 明 書 参 照 ） ＷＡ ＴＥ Ｒ ＩＮ See the Instruction Manual,for temperature and flow rate of water. 冷却水の温度と流量については 取扱説明書を参照してください ＷＡＴＥＲ ＯＵＴ Figure 1-4 Compressor Rear View ULVAC CRYOGENICS INCORPORATED...
  • Page 25 Model, serial number, and manufactured date are listed. HELIUM FILLING LABEL Helium charge pressure at the time of shipment RATING PLATE Rated values of C30F2 are listed. RECORD SHEET OF THE ADSORBER Write the dates when adsorbers are replaced. REPLACEMENT...
  • Page 26 Cooling water used in the compressor returns from this outlet to COOLING WATER customer’s system. Customers are requested to set up cooling OUTLET water piping as part of the customer’s system. Refer to “Section 4. Installation, Piping and Wiring” for connection of cooling water. ULVAC CRYOGENICS INCORPORATED...

  • Page 27: Connection With Cryo-U Cryopumps

    C onnection with CRYO-U Cryopumps Figure 1-5 shows the system consists of C30F2 compressor unit and one cryopump. The descriptions on the components are in table 1-5. Refer to “Section 4.4 Single cryopump connections” and “4.5 Multiple cryopump connections”...

  • Page 28: Figure 1-5 Configuration And The Connection With A Cryopump System

     D-sub connectors for operation signals, AC power supply cables, signal lines, or cooling water lines are not included in the shipping carton. These are to be supplied by customers.  The signal wiring of D-sub connectors for operation signals is to be provided by customers. 1-10 ULVAC CRYOGENICS INCORPORATED...

  • Page 29: Considerations Before Installation

    The environmental condition to be applied for the system is Overvoltage Category II and Pollution Degree 2. Refer to IEC 61010-1, and IEC 60664-1 for the above items. Protective structure of the compressor case is IP2X. If stronger seal protection is needed, customers are requested to take appropriate measures. ULVAC CRYOGENICS INCORPORATED...

  • Page 30: Figure 2-1 Required Space For Compressor Installation (Unit: Mm) And

    H > 300 D > 50 D > 50 コンプレッサ D > 50 D > 50 C30F4 Compressor C30F2 D>500 Front Gradient< Front ±2 degrees Figure 2-1 Required Space for Compressor Installation (unit: mm) and Levelness ULVAC CRYOGENICS INCORPORATED...

  • Page 31: Requirements For Power Cable And Circuit Breaker

    CAUTION A circuit breaker must be installed as most standards require installing a branch breaker on the upstream of the system to protect power cables connected. Failure to follow this procedure could seriously damage the equipment. ULVAC CRYOGENICS INCORPORATED...

  • Page 32: Figure 2-2 Customer' S Power Circuit

    NOTE: Refer to “Section 4. Installation, Piping and Wiring” for the procedure to wire the above cables. EQUIPMENT-SIDE DISTRIBUTION PANEL AC200/208/220V 3φ L1 L2 L3 PE MCCB MCCB Power Cable L1 L2 L3 PE L1 L2 L3 PE C30F2 Compressor X 2 Figure 2-2 Customer’ s Power Circuit ULVAC CRYOGENICS INCORPORATED...

  • Page 33: Cooling Water Requirements

    0.04MPa. Water flow rate while in operation and pressure drop should be set in a range that works out with the temperature change of cooling water throughout the year. When your cooling water does not satisfy the above requirements, measures to improve water quality may be necessary. ULVAC CRYOGENICS INCORPORATED...

  • Page 34: Figure 2-3 Cooling Water Flow Rate, Water Supply Temperature, And Water

    If the cooling water is cooler than 10°C, stop the water flow when the compressor is suspended. If the cooling water of below 10°C is kept flowing, it may raise viscosity of lubricant oil and the compressor may fail to startup when turned on. ULVAC CRYOGENICS INCORPORATED...

  • Page 35: Figure 2-4 Cooling Water Flow Rate, Supply Temperature, And Pressure Drop

    If the cooling water is cooler than 10°C, stop the water flow when the compressor is suspended. If the cooling water of below 10°C is kept flowing, it may raise viscosity of lubricant oil and the compressor may fail to startup when turned on. ULVAC CRYOGENICS INCORPORATED...

  • Page 36: Length Of Cables And Flexible Hoses

    When OP_EN signal issued by the customer turns on in the above condition, MC in the Compressor turns on by the activation. This means that the Compressor goes into running operation. Compressor Customer Distribution Cabinet Compressor body MCCB (OL) Motor AC Main Figure 2-5 Compressor Main Schematic ULVAC CRYOGENICS INCORPORATED...

  • Page 37: Remote Functions

    CH1 ACK CH2 ACK CH3 ACK COMP_RUN FAULT Figure 2-6 Wiring of Input and Output Lines When the “REMOTE RESPONSE” D-sub connector on the rear panel is wired, the compressor status can be monitored while in operation ULVAC CRYOGENICS INCORPORATED...

  • Page 38: Figure 2-7 Run Three Refrigerator Units In "Level Signal Operation Mode

    Figure 2-7 shows a timing chart (example) when the compressor runs two refrigerators. COMP ON CH1 SEL CH2 SEL CH3 SEL COMP RUN CH1 ACK CH2 ACK CH3 ACK Figure 2-7 Run Three Refrigerator Units in “Level Signal Operation Mode” 2-10 ULVAC CRYOGENICS INCORPORATED...

  • Page 39: Notes For Normal Operation

    Max. 6 times / HOUR COMP_RN 2.7.2 Wait for at least 5 seconds after stopping operation of the compressor unit. This helps prevent the overload fault of the Compressor. COMP ON COMP_RUN 5 seconds ULVAC CRYOGENICS INCORPORATED 2-11...
  • Page 40 Compressor Unit Instruction Manual This page intentionally left blank. 2-12 ULVAC CRYOGENICS INCORPORATED...

  • Page 41: Unpacking, Inspection And Storage

    Inspect the carton before unpacking for evidence of damage such as dents, breakage, wetness and/or signs that the carton has been tipped over. If there is any damage please contact the delivery company immediately. Figure 3-1 Appearance of a Compressor Carton ULVAC CRYOGENICS INCORPORATED...

  • Page 42: Unpacking

    CAUTION After the compressor has been placed at an installation site, ensure to lock all casters of the compressor to prevent bodily injury by from unexpected movement or slipping of the compressor. ULVAC CRYOGENICS INCORPORATED...

  • Page 43: Carton Contents

    The quantity depends on the number of cold heads. When two cold head units are used, two cold head drive cables and four flexible hoses are necessary. (*3) The model of helium manifold is determined by how helium lines branch. (*4) XM2S-2511 is not compliant to UL. ULVAC CRYOGENICS INCORPORATED...

  • Page 44: Inspection Of The Compressor And Accessories

    Do not put any objects on the flexible hose. Leave the dust caps on the self-sealing couplings of the compressor until the flexible hoses are connected to the couplings. Failure to observe this warning may result in damage and/or break down of the equipment. ULVAC CRYOGENICS INCORPORATED...

  • Page 45: Cautions For Transportation And Storage

    Do not throw, give shock, push down, or roll down the packages. Failure to observe this precaution could result in damage of the equipment. Please reconfirm the transferring method of the Compressor and risks referring to “Shipping Carton Inspection” in this section. ULVAC CRYOGENICS INCORPORATED...
  • Page 46 Compressor Unit Instruction Manual This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 47: Installation, Piping, And Wiring

    Points to be Checked after Installation ..........4-14 Disconnecting Wirings and Lines ............4-15 Before Installation This section describes appropriate procedure for installing C30F2 and connecting the ® compressor to a CRYO-U cryopump. The procedure of connecting the compressor to a CRYO-T super trap is the same as connecting to a cryopump;...

  • Page 48: Connecting And Disconnecting Helium Flexible Hoses

    Connecting and Disconnecting Helium Flexible Hoses CAUTION Follow the procedures below to connect and disconnect flexible hoses. Failure to observe this warning may result in damage to the O-ring seals of the coupling and/or leakage of helium gas. ULVAC CRYOGENICS INCORPORATED...
  • Page 49 Tightening the couplings too much may result in breakage of the equipment. 4. Verify the helium filling pressure referring to “Section5.1 Verification of helium static pressure”. Fasten clockwise Hold the nut with another wrench Figure 4-2 Tighten with Hands First 4-3 Tighten with Two Spanners ULVAC CRYOGENICS INCORPORATED...
  • Page 50 To disconnect flexible hoses from the connectors, use only two lipped bowl spanners (bolt width 26mm, 30mm). Do not use other spanners. Loosen the couplings with two spanners and then take them off by both hands. Complete the procedure as quick as possible to minimize helium gas leakage ULVAC CRYOGENICS INCORPORATED...

  • Page 51: Single Cryopump Connection

    Turn it until it won’t turn further to fix it. No.1 SUPPLY Helium supply flexible hose Helium return flexible hose RETURN Cold Head Drive Cable RETURN GAS SUPPLY GAS Cooling water Figure 4-6 A Compressor Connected to One Cryopump ULVAC CRYOGENICS INCORPORATED...

  • Page 52: Multiple Cryopump Connections

    Helium supply flexible hose No.1 No.2 Helium return flexible hose Cold Head Drive Cable Helium RETURN GAS SUPPLY GAS manifold Cooling water Figure 4-7 Connections of A Compressor and Multiple Cryopumps (example with two cryopumps) ULVAC CRYOGENICS INCORPORATED...

  • Page 53: Electrical Connections

    3. Fix electric cables on the tie mount. (Figure 4-10) 4. Connect yellow and green earth wires to earth terminal. (Figure 4-11) 5. Wire power cable with main circuit protector terminal. (Figure 4-12) 6. Close the cover of main circuit protector. (Figure 4-13) ULVAC CRYOGENICS INCORPORATED...
  • Page 54 Remove seven screws to open the cover. Remove screws on the opposite side, too. Main circuit protector MCP Earth terminal Tie mounts for fixing electric cables Hole for cables Figure 4-9 Open the cover of main circuit protector ULVAC CRYOGENICS INCORPORATED...
  • Page 55  Remove the grounding lug and connect with PE terminal directly.  Use a cross slot screwdriver #2.  Torque: 1.7N・m  Crimping terminal: Size R8-4 Figure 4-11 Connect Yellow and Green Earth Wires to Earth Terminal ULVAC CRYOGENICS INCORPORATED...
  • Page 56 Figure 4-12 Wire Power Cables to Main Circuit Protector Terminal CAUTION Use an appropriate size (6mm in width) flathead screwdriver when connecting electric wires to the main circuit protector terminals. Do not use Phillips screwdriver as it may damage the screws. 4-10 ULVAC CRYOGENICS INCORPORATED...
  • Page 57 Section 4 Equipment Installation, Piping, and Wiring Flexible bushing Figure 4-13 Close the Cover of Main Circuit Protector CAUTION Flexible bushing on the cover of main circuit protector is attached to protect power cables. Caution is requested not to drop it. ULVAC CRYOGENICS INCORPORATED 4-11...
  • Page 58 CAUTION Only qualified electrical personnel familiar with the construction and operation of this equipment performs the wiring. Failure to observe this precaution could result in damage to, or destruction of the equipment. C30F2 side connector Name Name CH1_SEL COM(+24V)
  • Page 59 Connector must be soldered by authorized personnel familiar with the kinds of solder and soldering procedure. Failure to observe this warning may result in breakdown of the product, or decrease the life of soldered parts severely. ULVAC CRYOGENICS INCORPORATED 4-13...

  • Page 60: Points To Be Checked After Installation

    Points to be Checked after Installation When installation is completed, check that the necessary space is taken around the compressor unit. Refer to Figure2-1 in Section 2 Considerations before Installation for the required space. 4-14 ULVAC CRYOGENICS INCORPORATED...

  • Page 61: Disconnecting Wirings And Lines

    “Electrical Connections / Installing the Input Power Cable” in this section. 7. Unlock the casters of the Compressor. 8. Refer to “Section 3 Unpacking, Inspection and Storage / Maintenance at Storage Site” for moving the Compressor. ULVAC CRYOGENICS INCORPORATED 4-15...
  • Page 62 Compressor Unit Instruction Manual This page intentionally left blank. 4-16 ULVAC CRYOGENICS INCORPORATED...

  • Page 63: Operation

    If the pressure relief valve blows, stop the operation and leave the compressor for several hours to ensure that the helium filling pressure is in the range which can be still operated. If the helium filling pressure is reduced, please contact us for maintenance. ULVAC CRYOGENICS INCORPORATED...

  • Page 64: Compressor Operation

    Failure to observe this warning may result in severe bodily injury or fatal accident. Check that the main power supply of the customer’s system (equipment side) is turned on. Turn the main circuit protector (MCP) knob from OFF to ON position to turn on the power to the compressor unit. ULVAC CRYOGENICS INCORPORATED...
  • Page 65 Turn on CH1 SEL, CH2 SEL, CH3 SEL to start the operation of refrigerator units (Figure 5-3). COMP COMP Light ON Light OFF Compressor unit turned ON Compressor unit and cold head 1 and 2 are turned ON Figure 5-3 Compressor Unit in Operation ULVAC CRYOGENICS INCORPORATED...

  • Page 66: Inspection After Replacing Helium Circulation Components

    “Section 5.1 Verification of helium static pressure” and check that the helium filling pressure is almost equal to the value before replacing the component. In addition, if the system installation condition has been changed, conduct “Recording the helium pressure during the operation” described above. ULVAC CRYOGENICS INCORPORATED...

  • Page 67: Precautions For When The Compressor Unit Is Suspended

    Refer to “Section 4.2 Connecting Cooling Water Piping” for the connection. CAUTION Do not perform procedure above when the Compressor is ON or the cooling water is flowing. Failure to observe this precaution could result in severe bodily injury or loss of life ULVAC CRYOGENICS INCORPORATED...

  • Page 68: Maintenance Operation For A Compressor Suspended For A Long Period

    Also, operate the refrigerator for ten minutes at a time every six months. Failure to observe this precaution may result in damage to the compressor when restarting operation. NOTE: Circulate cooling water during the above maintenance operation of the compressor. ULVAC CRYOGENICS INCORPORATED...

  • Page 69: Section 6 Maintenance

    Replacement of Adsorber CAUTION The following replacing procedure must be undertaken by authorized personnel familiar with the structure and risk of the product. Failure to observe this warning may result in severe bodily injury or fatal accident. ULVAC CRYOGENICS INCORPORATED...
  • Page 70 (Figure 6-4). See Figure 6-5 for usage of spanners to disconnect the coupling. Disconnect the coupling quickly to minimize helium leakage. 7. Remove the bolts that secure the adsorber to the base of the compressor with the proper spanner (Figure 6-6). ULVAC CRYOGENICS INCORPORATED...
  • Page 71 And then remove the adsorber from the compressor (Figure 6-7). Figure 6-1 Remove Two Nuts from Figure 6-2 Remove All Seven the Helium Gas Connectors Screws from the Rear Panel Remove Hold Figure 6-3 Remove Self-Sealing Coupling Figure 6-4 Remove the Rear Panel ULVAC CRYOGENICS INCORPORATED...
  • Page 72 11. Put the rear panel back on the compressor to align the helium connector of the adsorber with the hole of the rear panel and then remove the rear panel again. Fix the adsorber mounting bolt firmly this time. 12. Replace the rear panel and secure it by tightening the seven screws. ULVAC CRYOGENICS INCORPORATED...

  • Page 73: Adjusting System Helium Pressure

    WARNING Following procedure must be undertaken by authorized electrician and mechanical personnel familiar with the construction and risk of this equipment. Failure to observe this warning may result in severe bodily injury or fatal accident. ULVAC CRYOGENICS INCORPORATED...
  • Page 74 3. Wait until the helium pressure gauge reads the appropriate value described above. When the pressure reaches the desired value, close the valve by turning its knob clockwise. 4. Attach the front panel of the compressor with the six screws removed in the above step. ULVAC CRYOGENICS INCORPORATED...

  • Page 75: Table 6-2 Preparation For Adding Helium Gas

    Table 6-2 shows items and devices required for adding helium gas. Table 6-2 Preparation for Adding Helium Gas Item Specification Helium bottle 99.999% pure or above Pressure regulator For Helium gas (left-hand screw), 0-20MPaG / 0-6MPaG Helium charging hose Terminating in a 1/4 inch female flare fitting ULVAC CRYOGENICS INCORPORATED...
  • Page 76 Service Engineering Division or the nearest customer support center. Pressure regulator Bottle valve Helium bottle 1/4 inch female flare Helium fitting (connect this charging hose Pressure regulator handle side to the Figure 6-9 Items for Adding Helium Gas to the Compressor ULVAC CRYOGENICS INCORPORATED...
  • Page 77 Turn the handle of the pressure regulator counter-clockwise to stop the gas flow. Then disconnect the charging hose from the helium filling fitting of the compressor. 5. Return the front panel of the compressor unit to the original position. ULVAC CRYOGENICS INCORPORATED...

  • Page 78: Regular Maintenance Of Helium Lines, Cooling Water Piping And Electrical Wiring

    When scratch or dirt is detected Maintenance Cycle (*1) S: Scheduled U: Unscheduled NOTE: For more information on planning maintenance, purchasing maintenance parts, diagnosis, and servicing, please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED 6-10...

  • Page 79: Lockout-Tagout

    Figure 6-10 Lockout WARNING This process must be undertaken by authorized electrician and mechanical personnel familiar with the construction and risk of this equipment. Failure to observe this warning may result in severe bodily injury or fatal accident. ULVAC CRYOGENICS INCORPORATED 6-11...

  • Page 80: Fuse Replacement

    Substrate (PCB1) (2A) (2A) (1A) (Front) Figure 6-11 Fuse Locations CAUTION When replacing fuses inside the compressor, Main circuit protector (MCP) must be turned OFF, and lockout-tagout must be performed. Refer to “6.6 Lockout-Tagout” for detail. ULVAC CRYOGENICS INCORPORATED 6-12...
  • Page 81 2. Remove two screws of the sheet metal and remove connectors (four). Remove two screws Remove four connectors. (*)Release the lock mechanism by pressing it in the direction of the arrows above. ULVAC CRYOGENICS INCORPORATED 6-13...
  • Page 82 3. Bring the substrate down 7to the arrow direction, and pull out the fuse from the holder. (1A) (2A) (2A) 4. After replacing fuses, insert the connector to the original position. Insert until the lock mechanism makes a click sound. CN20 CN19 CN13 CN14 5. Fasten two screws to fix the substrate. ULVAC CRYOGENICS INCORPORATED 6-14...

  • Page 83: Troubleshooting

    Troubleshooting Procedures ..............7-1 STATUS DISPLAY Descriptions ............7-3 Problem Types C30F2 compressor indicates the state of warning or failure with the lights of STATUS DISPLAY. NOTE: When a problem occurs, check the STATUS DISPLAY lights. Also, make sure that the power-supply voltage, cooling water flow rate and its temperature, helium gas pressure, input power cable connections, and the remote cable connections are all in an appropriate state.

  • Page 84: Table 7-2 List Of Troubleshooting During Operation

    When a compressor does not need power supply to follow the procedure, shut down the power of the compressor and lock it in the OFF status. Failure to observe this caution may result in severe bodily injury or fatal accident. ULVAC CRYOGENICS INCORPORATED...

  • Page 85: Status Display Descriptions

    TS1 (Yellow): Over Temperature (Overtemperature) TS1 monitors the temperature of helium supply line. When TS1 is working, the compressor has unrecoverable abnormal condition. Please contact us immediately. ULVAC CRYOGENICS INCORPORATED...
  • Page 86 Check the connections of the flexible hoses and the helium filling pressure referring to “Section 4.3 Connecting and disconnecting helium flexible hoses” and “Section 5.1 Verification of helium static pressure”. If the alarm is not cleared by the procedures above, please contact us immediately. ULVAC CRYOGENICS INCORPORATED...

  • Page 87: Appendix A Operating Log

    ® CRYO-U COMPRESSOR S/N OPERATING LOG REFRIGERATOR S/N Cryopump Measuring condition Compressor unit Remarks Temperature Pressure 【Pa】 【 (mV) 【 【 】 】 】 (*) Measure cooling water flow rate with flow meters for each compressor unit. ULVAC CRYOGENICS INCORPORATED...
  • Page 88 Compressor Unit Instruction Manual This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 89: Appendix B Combination Of C30F2 Compressor And Cryopump/Super Trap

    Appendix B Combination of Compressor and Cryopump Appendix B Combination of C30F2 Compressor and Cryopump / Super Trap Table B-1 Combination of C30F2 series compressors and cryopumps Cryopump, Super Trap Specifications Maximum number of refrigerator which can be connected to single compress...
  • Page 90 Compressor Unit Instruction Manual This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 91: Appendix C Compressor Flow Diagram

    – low differential pressure regulating valve under the set value. The set pressure of safety valve at the refrigerator is 1.9MPaG. Please note that the refrigerator safety valve releases gas before the compressor safety valve in actual system. ULVAC CRYOGENICS INCORPORATED...
  • Page 92 Oil heat changer Oil injection filter RETURN Accumulator Low pressure switch Helium filling valve Helium gas flow Helium gas and oil flow Oil flow Cooling water flow Compressor flow diagram Figure C-1 ULVAC CRYOGENICS INCORPORATED...

  • Page 93: Appendix D C30F2 Schematic Diagram

    Appendix D C30F2 Schematic Diagram Appendix D C30F2 Schematic Diagram Schematic diagrams of the C30F2 compressor units are shown in Figure D-1 on the next page. ULVAC CRYOGENICS INCORPORATED...
  • Page 94 Compressor Unit Instruction Manual Figure D-1 C30F2 Connection Diagram ULVAC CRYOGENICS INCORPORATED...

  • Page 95: Appendix E C30F2 Self-Certification

    Appendix E C30F2 Self-certification Appendix E C30F2 Self-certification Self-certification of CE marking of C30F2 is posted on the next page. ULVAC CRYOGENICS INCORPORATED...

  • Page 97: Appendix F China Rohs Hazardous Substances In The Product

    C30F2 Compressor Unit Instruction Manual Appendix F China RoHS Hazardous Substances in the Product 中国 RoHS 产品中有害物质的名称及含量 压缩机 产品中有害物质的名称及含量 有害物质 部件名称 铅 汞 镉 六价铬 多溴联苯 多溴二苯醚 （Pb） （Hg） （Cd） （Cr(VI)） （PBB） （PBDE） 控制箱 压缩泵 配管・配件 压力表 阀 吸附器 低压报警器（LPS）...
  • Page 98 (*1) The list contains accessories that are likely to be shipped along the compressor unit. Note that all the listed accessories are not always included in the package. (*2) The term “Helium Manifold” refers to three valve manifold, fork manifold, L-shaped pipe, or straight pipe. ULVAC CRYOGENICS INCORPORATED...
  • Page 99 ULVAC CRYOGENICS INC. www.ulvac-cryo.com 1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan <Sales> Tel: +81-467-85-8884 <Service Engineering Division> Tel: +81-467-85-9366 Fax: +81-467-83-4838 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC.
  • Page 100 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...
  • Page 101 Service Network has been revised. 2019-03-04 2019MH03 Section 1 Table 1-5 has been modified. 2021-03-29 2021MH04 Descriptions on maximum power consumption and helium charge pressure have been changed. 2022-10-19 2022OR05 “Safety Instructions” has been revised. Section 6 Errors have been corrected. ULVAC CRYOGENICS INCORPORATED...
  • Page 102 C30F2 Instruction Manual This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

This manual is also suitable for:

C30f4

Table of Contents