Download
Share
Print this page
  1. Manuals
  2. Brands
  3. Ulvac Manuals
  4. Air Compressor
  5. C30PMVRT-E1
  6. Instruction manual

Ulvac C30PMVRT-E1 Instruction Manual

Compressor unit
Hide thumbs

Advertisement

Quick Links

Download this manual
COMPRESSOR UNIT
Instruction Manual
C30PMVRT-E1
Export Control Policy
Vacuum pumps that pump nitrogen gas at pumping
speed of 15000L/S or more fall under row 2(35) of
appended table 1 of Japan's Export Trade Control Order,
which is based on international export control regimes.
Customers must follow all related rules and regulations
such as Foreign Exchange and Foreign Trade Act and
take
appropriate
procedures
when
exporting
or
re-exporting those products.
D/N.MD30PM1E,2023NR05
ULVAC CRYOGENICS INCORPORATED

Advertisement

loading
Need help?

Need help?

Do you have a question about the C30PMVRT-E1 and is the answer not in the manual?

Questions and answers

Subscribe to Our Youtube Channel

Related Manuals for Ulvac C30PMVRT-E1

Summary of Contents for Ulvac C30PMVRT-E1

  • Page 1 1 of Japan’s Export Trade Control Order, which is based on international export control regimes. Customers must follow all related rules and regulations such as Foreign Exchange and Foreign Trade Act and take appropriate procedures when exporting re-exporting those products. D/N.MD30PM1E,2023NR05 ULVAC CRYOGENICS INCORPORATED...
  • Page 3 The period of less than one year after installation in your company or your customer’s premises, or a period of less than 18 months (starting from the shipment date) after shipment from ULVAC CRYOGENICS INCORPORATED (hereinafter “UCI”), which is shorter, is selected.
  • Page 4 2.2 Exclusion of opportunity loss from warranty liability Regardless of the gratis warranty term, compensation to opportunity losses incurred to your company or your customers by failures of ULVAC CRYOGENICS products and compensation for damages to products other than ULVAC CRYOGENICS products and other services are not covered under warranty.
  • Page 5 After the products are delivered, please fill out the following information in the blanks. In the event of a fault, please contact us. Refer to SERVICE NETWORK at the end of this book, or visit our web site at www.ulvac-cryo.com to locate our business base close by.
  • Page 6 When unidentified failure occurs, please contact our Service Engineering Division or the nearest customer support center. Refer to the SERVICE NETWORK at the end of this book or visit our website at www.ulvac-cryo.com for our contact information. 6．General Precautions...
  • Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage. Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. ULVAC CRYOGENICS INCORPORATED MZ0F001E 2023JA04...
  • Page 8 This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
  • Page 9 Table of Contents Table of Contents Compressor unit Safety Instructions ································································· S-1 Disposal Considerations ················································································ IW-1 Section 1 C30PMVRT-E1 Compressor Description 1.1 Introduction ························································································ 1-1 1.2 Terminology ······················································································· 1-2 1.3 Cryopump system documents ································································ 1-2 1.4 Roles of compressor in cryopump system ················································· 1-3 1.5 Compressor specifications ····································································...
  • Page 10 Figure 1-4 Compressor rear view ···································································· 1-7 Figure 1-5 Anchor bolts mounting positions (example) ········································· 1-8 Figure 1-6 Cryopump installation with C30PMVRT-E1 compressor ························· 1-11 Figure 2-1 Required space for compressor installation (scale: mm) and levelness ····· 2-2 Figure 2-2 Equipment-side power circuit ··························································· 2-3 Figure 2-3 Cooling water flow rate, water supply temperature, and water pressure loss ·······························································································...
  • Page 11 Figure 4-5 Connections of the compressor and a cryopump (U22HB) ···················· 4-4 Figure 4-6 Connecting input power cable connector ··········································· 4-5 Figure 4-7 Remote connector pin assignments for C30PMVRT-E1 ······················ 4-6 Figure 4-8 “Momentary operating mode” wiring example for cryopump (U22HB) operation ··················································· 4-7 Figure 4-9 Connector parts descriptions ························································...
  • Page 12 Table 8-1 List of troubleshooting before operation ············································ 8-2 Table 8-2 List of troubleshooting related to operation ········································ 8-3 Table A-1 Operating log ·············································································· A-1 Table B-1 Combination of C30PMVRT-E1 compressor and cryopump ·················· B-1 Table C-1 Controller setting and connections ·················································· C-1 ULVAC CRYOGENICS INCORPORATED...
  • Page 13 When operating multiple refrigerators, startup/shutdown must also be less than 6 times as well. Do not attempt to control the temperature of a Super Trap by starting up and shutting down the compressor unit. Please contact us when controlling the temperature of super trap is required. ULVAC CRYOGENICS INCORPORATED...
  • Page 14 It could lead to a serious accident such as electric shock and/or damage to the equipment. ・ Follow recommended sizes for wires and cables. ・ Power lines and signal lines must be wired at least 10cm separate from one another. ULVAC CRYOGENICS INCORPORATED...
  • Page 15 Also, parts of inside the compressor unit are still hot just after the compressor has been stopped. Wait at least 15 minutes to open the cover to avoid the risk of burns. ULVAC CRYOGENICS INCORPORATED...
  • Page 16 The sealing sticker is located inside the panel of the compressor unit. Figure Example of the sealing sticker pasted on the self-sealing coupling ULVAC CRYOGENICS INCORPORATED...
  • Page 17 Remove the coupling to make it visible that the adsorber has been depressurized before proceeding to the next step. We provide Safety Data Sheet (called SDS) of our products upon your request. Please contact us if necessary. ULVAC CRYOGENICS INCORPORATED MDIW001E,2018JE01 IW-1...
  • Page 18 This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED IW-2...
  • Page 19 ® Introduction C30PMVRT-E1 is a compressor unit for cryopump system. C30PMVRT-E1 can change the operation frequency with an inverter installed inside the compressor. Our Cryo MBS Meter MBDI-2 outputs a contact to the inverter and the inverter changes the compressor motor frequency depending on the second stage temperature of the cryopump.
  • Page 20 The cryopump system documents basically consist of two manuals: the cryopump manual and the compressor manual. They are delivered along with the purchased products. Accessories for the system and manuals for optional devices are enclosed depending on the product specifications that the customer orders. ULVAC CRYOGENICS INCORPORATED...
  • Page 21 Section 1 C30PMVRT-E1 Compressor Description Roles of compressor in cryopump system The cryopump system consists of a cryopump and a compressor and is capable of condensing and adsorbing almost all kinds of gas molecule inside the pump. Thus clean high vacuum and ultra high vacuum can be easily created.
  • Page 22 Compressor Unit Instruction Manual Compressor specifications 1.5.1 Dimensions Figure 1-2 shows the dimensions of C30PMVRT-E1. （615） （100） RESET FUN C ST OP DAT A Ｃ３０ ＰMＶ RＴ－Ｅ１ ＰＷ Ｒ ＳＴ Ｓ １ ＲＤ Ｙ ２ ＲＵ Ｎ ３ ＣＨ １...
  • Page 23 Section 1 C30PMVRT-E1 Compressor Description 1.5.2 Weight Table 1-3 shows weight of the compressor. Table 1-3 Compressor weight Model Weight [kg] C30PMVRT-E1 *The weight in this table is of standard compressors. The weight depends on the specifications of the customer’s order.
  • Page 24 ③ Monitoring Port ⑦ Reset Button Ｓ Ｕ ＰＰ Ｌ Ｙ ＰＲ Ｅ ＳＳ Ｕ ＲＥ ヘリウム充てん圧力:1.4MPa(gage) at20℃ ② High Pressure Helium Gas Pressure Gauge ④ Helium Fill Fitting (Inside the panel) ⑤ Casters Figure 1-3 Compressor front view ULVAC CRYOGENICS INCORPORATED...
  • Page 25 Section 1 C30PMVRT-E1 Compressor Description ⑰Inverter-MBDI-2 Cable （Connect to MBDI-2） I N V E R T E R I N P U T P O W E R I N V E R T E R O U T P U T...
  • Page 26 This shows a list of alarm codes indicated by the STS (Status) LED indicators for alarm indication. Refer to “Section 8.3 Alarm code descriptions” for troubleshooting procedure of each alarm code. All status display LED indicators will remain unlit when there is no problem. ULVAC CRYOGENICS INCORPORATED...
  • Page 27 「CH1」 indicator (GREEN) lights up when refrigerator No.1 is in operation. 「CH2」 indicator (GREEN) lights up when refrigerator No.2 is in operation. 「CH3」 indicator (GREEN) is not used with C30PMVRT-E1 compressor. One or more STS LED indicators for alarm indication will light up when malfunction of the compressor is detected.
  • Page 28 Compressor motor frequency is changed by the inverter. Inverter status can be checked using the inverter touch panel. ⑰INVERTER-MBDI-2 CABLE It connects to the SET POINT of the MBDI-2. Depending on each cryopump temperature, the MBDI-2 output a contact to the inverter through INVERTER-MBDI-2 CABLE. 1-10 ULVAC CRYOGENICS INCORPORATED...
  • Page 29 ® cryopump installation C30PMVRT-E1 can operate up to two refrigerators of cryopump units (U22HB) at a time (See Table 1-1). Figure 1-6 depicts a typical cryopump installation with U22HB and single compressor. Please contact us if you wish to connect to cryopumps other than U22HB.
  • Page 30 Compressor Unit Instruction Manual This page intentionally left blank. 1-12 ULVAC CRYOGENICS INCORPORATED...
  • Page 31 Combination of cryopump and compressor Refer to the table in “Appendix B Combination of C30PMVRT-E1 Compressor and Cryopump” for typical combinations of cryopumps and compressor units.
  • Page 32 ATTENTION: Almost any standards require installing a breaker for branch in upstream of equipment and protect power supply line which connects each equipment; circuit breakers must be installed. Failure to observe this warning may result in damage and/or break down of the equipment. ULVAC CRYOGENICS INCORPORATED...
  • Page 33 (*1) cable REMOTE Remote cable Connector #22 AWG Customer supply RESPONSE (*1) Current rating of the refrigerator is less than 0.7A. ATTENTION: Refer to “Section 4 Equipment Installation, Piping, and Wiring” for routing of the cables above. ULVAC CRYOGENICS INCORPORATED...
  • Page 34 If the cooling water of temperature below 10℃ is supplied continuously while stopping the compressor, it may increase viscosity of lubricant oil and cause start up failure of the compressor when the operation command is sent. ULVAC CRYOGENICS INCORPORATED...
  • Page 35 Flow rate lower limit upper limit Operating water temperature range Acceptable temperature (See ATTENTION below) Temperature Lower Limit (2) > 9L/min Water flow rate [L/min.] Figure2-3 Cooling water flow rate, water supply temperature, and water pressure loss ULVAC CRYOGENICS INCORPORATED...
  • Page 36 Table 2-5 Remote interface specifications Item Specification Model Signal Quantity Photo Coupler Isolation Input Maximum voltage: 26VDC, Input Current: less than 8mA C30PMVRT-E1 Rated Voltage: ON:20V and above, OFF:3V or less No-voltage a contact Output Maximum Load: 30VDC / 100mA ULVAC CRYOGENICS INCORPORATED...
  • Page 37 Since it is the contact output, the polarity of DC24V in Figure 2-5 can be reversed. Make provisions for the interface circuit at the equipment side. (Equipment side) SIG1 SIG2 Relay Figure 2-5 Remote output interface circuit ULVAC CRYOGENICS INCORPORATED...
  • Page 38 Turn the command signal ON for more than 0.3 second. (Refer to the description of COMP STOP below). Command signals for refrigerators （CH1 REF and CH2 REF）should be turned ON to start the refrigerators. ULVAC CRYOGENICS INCORPORATED...
  • Page 39 When the compressor starts operation, the answer-back signal is sent to the equipment. Note: Refer to “Section 2.6.6 Signal timing charts –Answer-back signal delay” as well. ALARM（Alarm） When this signal is OFF, the compressor is ready for operation, or in operation. When ULVAC CRYOGENICS INCORPORATED...
  • Page 40 Figure 2-6 Timing chart for Alternate operating mode with two refrigerators (*1) COMP START (*1) COMP STOP CH1, CH2 REF COMP CH1, CH2 REF 1) The holding time is 0.3 seconds or more. Figure 2-7 Timing chart for Momentary operating mode with two refrigerators 2-10 ULVAC CRYOGENICS INCORPORATED...
  • Page 41 Therefore, be sure to set the timeout time of an answer-back signal as 8 seconds or more in order to monitor the operating conditions of the compressor correctly. ULVAC CRYOGENICS INCORPORATED 2-11...
  • Page 42 Figure 2-9 Signal delay when the time period from a stop to a restart is short (In Alternate operating mode) (*1) t≦2seconds Figure 2-10 Timing chart when a short power interruption occurs (In Momentary operating mode) 2-12 ULVAC CRYOGENICS INCORPORATED...
  • Page 43 In “Alternate operating mode”, the compressor restarts as soon as the input power is recovered because there is always the command from the equipment side. ATTENTION: Refer to “Section 4.5.2 Connecting remote cables” for remote signal wiring. ULVAC CRYOGENICS INCORPORATED 2-13...
  • Page 44 Compressor Unit Instruction Manual This page intentionally left blank. 2-14 ULVAC CRYOGENICS INCORPORATED...
  • Page 45 Please read the enclosed cover letter for the details. Depending on your specification, the option part(s) in Table 3-2 is attached. Table 3-1 Carton contents Item Quantity Compressor C30PMVRT-E1 Manual Inverter user’s manual Connector for remote operation Table 3-2 Optional parts Item Quantity...
  • Page 46 Failure to observe this warning may result in damage and/or break down of the equipment. ATTENTION: When carrying the flexible hose, ensure that the bending radius does not become smaller than the minimum value listed above. In the same manner as other equipment, avoid corrosion and condensation when storing. ULVAC CRYOGENICS INCORPORATED...
  • Page 47 Cryopump installation ................. 4-4 Electrical connections ................. 4-5 Wire rooting for compressor and other equipments ......4-10 Before installation This section describes appropriate procedure for installing C30PMVRT-E1 and connecting the compressor to a CRYO-U cryopump. ® Figure 4-1 is the block diagram for the compressor installation.
  • Page 48 Figure 4-3. See Figure 4-4 for usage of two spanners. The torque value is 20N･m for both couplings. Complete the procedure as quick as possible to minimize helium gas leakage. ATTENTION: To over-torque the couplings may result in breakage of the equipment. ULVAC CRYOGENICS INCORPORATED...
  • Page 49 To disconnect flexible hoses from the connectors, use only two lipped bowl spanners (bolt width 26mm, 30mm). Do not use other spanners. Loosen the couplings with two spanners and then take them off by both hands. Complete the procedure as quick as possible to minimize helium gas leakage. ULVAC CRYOGENICS INCORPORATED...
  • Page 50 Helium supply lines SUPPLY Helium return lines RETURN INVERTER-MBDI-2cable COLD HEAD POWER No.1 No.2 No.3 Refrigerator cable Helium manifolds RETURN GAS SUPPLY GAS Compressor C30PMVRT-E1 Figure 4-5 Example of Connections of the compressor and a cryopump (U22HB) ULVAC CRYOGENICS INCORPORATED...
  • Page 51 “INPUT POWER” receptacle on the rear panel of the compressor, turn the rotating part of the plug to the right. Turn it until it won’t turn any more to connect the plug properly. Figure 4-6 Connecting input power cable connector ULVAC CRYOGENICS INCORPORATED...
  • Page 52 COMP START CH1ACK1 CH1ACK2 /COMP STOP CH2ACK1 CH2ACK2 CH3ACK1 (unavailable) CH3ACK2 (unavailable) (GND) COMP RUN1 COMP RUN2 ALARM1 C20 COMP ON/OFF ALARM2 (SRCN6A25-24P) Figure 4-7 Remote Connector Pin Assignments for C30PMVRT-E1 (Side View of the Plug Soldering) ULVAC CRYOGENICS INCORPORATED...
  • Page 53 Section 4 Equipment Installation, Piping, and Wiring Figure 4-8 shows the typical wiring for C30PMVRT-E1 with a cryopump (U22HB) in MOMENTARY OPERATING MODE. REMOTE Equipment RESPONSE Interface CH1REF CH2REF Output Reference COMP START /COMP STOP CH1 ACK1 CH1 ACK2 CH2 ACK1...
  • Page 54 ATTENTION: Clear identification of solder: Listed below are the recommended abbreviations for identifying solders. Labeling the kind of solder clearly helps you to have proper maintenance. Lead eutectic solder SnPb or SP Lead-free solder (Sn-Ag) SnAgCu or SAC Lead-free solder (Sn-Cu) SnCuNi or SCN ULVAC CRYOGENICS INCORPORATED...
  • Page 55 For connecting MBS-C and MBDI-2, please refer to MBDI-2 instruction manual. Cryopump U22HB MBS-C Cryo MBS Meter MBDI-2 MBS-C Relay cable MBS-C Power cable MBS-C Analog cable AC100V×2φ Input power INVERTER-MBDI-2 Cable Remote cable Compressor C30PMVRT-E1 Figure 4-12 Connecting the compressor, MBDI-2, and MBS-C ULVAC CRYOGENICS INCORPORATED...
  • Page 56 C30PMVRT-E1 system is not separated from other equipments it may cause interference to sensitive sensor wires, analog wires, and other high impedance wiring of other equipments.
  • Page 57 If the pressure relief valve blows, stop the operation and leave the compressor for several hours to ensure that the helium filling pressure is in the range which can be still operated. If the helium filling pressure is reduced, please contact us for maintenance. ULVAC CRYOGENICS INCORPORATED...
  • Page 58 If the buzzer keeps ringing after power-on and all eight STS indicators light up, it means that either the following faults has occurred; reversed phase of the input power cable, open phase or low voltage (See Figure 5-3). ULVAC CRYOGENICS INCORPORATED...
  • Page 59 ATTENTION: The compressor is intended for continuous, not intermittent operation. The number of starting/stopping of the compressor pump must be six or less times per hour. Failure to observe this warning may result in damage to and/or life shortening of the compressor. ULVAC CRYOGENICS INCORPORATED...
  • Page 60 The recorded values are used as reference value for maintenance or replacement of the product explained in the following . For reference, the helium pressure during operation of C30PMVRT-E1 (R50RT or RM50T x 2) with 3m flexible hoses are shown in Table 5-1.
  • Page 61 2. Disconnect the water supply pipe from the “COOLING WATER IN” fitting on the compressor. DO NOT disconnect the water pipe from the “COOLING WATER OUT” fitting. Note that cooling water might drip from the pipe when disconnecting it. ULVAC CRYOGENICS INCORPORATED...
  • Page 62 If the value is clearly decreasing compared to the one before, there is a possibility of helium leakage. Please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...
  • Page 63 Failure to observe this warning may result in severe bodily injury. Pressure adjustment must be done when the equipments inside the compressor are at the room temperature. Wait about for three hours until it cools down to adjust the pressure. ULVAC CRYOGENICS INCORPORATED...
  • Page 64 7. Remove the bolts that secure the adsorber to the base of the compressor with the proper spanner (Figure 7-6). 8. Slide the adsorber outward and remove it from the mounting tab on the base of the compressor. And then remove the adsorber from the compressor (Figure 7-7). ULVAC CRYOGENICS INCORPORATED...
  • Page 65 Figure 7-3 Remove the rear panel Figure 7-4 Remove self-sealing coupling Clockwise: Tightening Counter Clockwise: Loosening TURN with 30mm spanner Adsorber HOLD with 26mm spanner Flexible hose (Self-sealing coupling) Figure 7-5 Connecting and disconnecting self-sealing coupling with two spanners ULVAC CRYOGENICS INCORPORATED...
  • Page 66 As a guide for the next replacement, it is recommended to make a note of the value that the current accumulated operation time added to the adsorber replacement cycle hours in ULVAC CRYOGENICS INCORPORATED...
  • Page 67 3. Wait until the helium pressure gauge reads the prescribed standard value described above. When the pressure reaches the standard value, close the valve by turning its knob clockwise. 4. Return the front panel to the compressor with the six screws. ULVAC CRYOGENICS INCORPORATED...
  • Page 68 When charging helium or performing helium circuit decontamination, equipments (regulators, charging hoses, adopters, etc.) that can be used at 2.0MPaG or above are required. Table 7-2 shows items and devices required for adding helium gas. ULVAC CRYOGENICS INCORPORATED...
  • Page 69 3-2 Slowly open the bottle valve, and confirm the helium gas is flowing out from the pressure regulator exit. After confirming the gas flow, close the pressure regulator by turning its handle counter-clockwise and then connect the helium charging hose to the pressure regulator. ULVAC CRYOGENICS INCORPORATED...
  • Page 70 At the inspection, turn off the compressor unit by turning OFF the breaker on the distribution panel at the equipment side. Lock the breaker at OFF status for safety reason. Disconnect the input power cable from the compressor. ULVAC CRYOGENICS INCORPORATED...
  • Page 71 When it is locked by malfunction (*1) Maintenance type S: Scheduled U: Unscheduled ATTENTION: For more information on planning a maintenance, purchasing maintenance parts, diagnosis, and servicing, please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...
  • Page 72 Compressor Unit Instruction Manual This page intentionally left blank. 7-10 ULVAC CRYOGENICS INCORPORATED...
  • Page 73 Alarm code descriptions ..............8-4 Problem types C30PMVRT-E1 compressor indicates the state of warning or breakdown with a buzzer sound and STS indicators. When protective function of the inverter is activated, alarm information will be displayed on the inverter touch panel. (For alarm information details please refer to inverter user’s manual.
  • Page 74 ※ light up. Inverter failure. Inverter malfunction. Call for servicing ※ ※If the problem is not solved, please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...
  • Page 75 Refer to Section 2 and Section 4. After power is Longer electric Compressor needs restart interrupted for longer power interruption manually. than 2 seconds, than set time (2 compressor does seconds). not start operation. ULVAC CRYOGENICS INCORPORATED...
  • Page 76 If the input power supply voltage is low, check the input power line and the user’s power supply that has distributed electric power to the compressor. When there is an open phase(s), all indicators should be blinked or turned off. ULVAC CRYOGENICS INCORPORATED...
  • Page 77 If there is an earth fault or short circuit in the parts above or no identified cause, Please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...
  • Page 78 Check that the helium pressure is not higher than the set value on the helium pressure gauge. Refer to “Section 5.1 Verification of helium static pressure” for helium pressure set value and “Appendix C C30PMVRT-E1 compressor electrical circuit” for OL1 set value.
  • Page 79 ® COMPRESSOR S/N OPERATING LOG REFRIGERATOR S/N Cryopump Measuring condition Compressor unit Remarks Temperature Pressure stage stage 【Pa】 【 【 【 】 】 】 (*) Measure cooling water flow rate with flow meters for each compressor unit. ULVAC CRYOGENICS INCORPORATED...
  • Page 80 Compressor Unit Instruction Manual This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
  • Page 81 Appendix B Combination of C30PMVRT-E1 Compressor and Cryopump Appendix B Combination of C30PMVRT-E1 Compressor and Cryopumps Table B-1 Combination of C30PMVRT-E1 compressor and cryopumps Cryopump Specifications Maximum number of refrigerator that can Refrigerator Cryopump Size be connected to single compress...
  • Page 82 Compressor Unit Instruction Manual This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
  • Page 83 Appendix C C30PMVRT-E1 Schematic Diagram Appendix C C30PMVRT-E1 Schematic Diagram Schematic diagrams of the C30PMV RT-E1 compressor unit are shown in Figure C-1. Controller setting and connections are shown in Table C-1. Table C-1 Controller setting and connections Refrigerator Figure Model Max.
  • Page 84 Compressor Unit Instruction Manual Figure C-1 C30PMVRT Schematic Diagram ULVAC CRYOGENICS INCORPORATED...
  • Page 85 The set pressure of pressure relief valve at the refrigerator is 1.9MPaG. Please ※1 note that the refrigerator pressure relief valve releases gas before the compressor pressure relief valve in actual system. ULVAC CRYOGENICS INCORPORATED...
  • Page 86 Oil heat changer equalization Oil injection filter RETURN Accumulator Low pressure switch Helium filling valve Helium gas flow Helium gas and oil flow Oil flow Cooling water flow Compressor flow diagram Figure D-1 ULVAC CRYOGENICS INCORPORATED...
  • Page 87 ULVAC CRYOGENICS INC. www.ulvac-cryo.com 1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan <Sales> Tel: +81-467-85-8884 <Service Engineering Division> Tel: +81-467-85-9366 Fax: +81-467-83-4838 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC.
  • Page 88 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...
  • Page 89 2013-03-26 2013MH01 “Safety Instructions” No.3 and No.5 have been revised. “SERVICE NETWORK” has been revised. 2013DR02 2013-12-17 P.1-1 Table1-1 “C30PMVRT-E1 Compressor model” has been changed. “Introduction” and “SERVICE NETWORK” has been revised. 2015-11-13 2015NR03 “Safety Instructions” has been revised. Section 1.
  • Page 90 Revisions This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...