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Ulvac C10 Instruction Manual

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COMPRESSOR UNIT
Instruction Manual
C10
Export Control Policy
Vacuum pumps that pump nitrogen gas at pumping
speed of 15000L/s or more fall under row 2(35) of
appended table 1 of Japan's Export Trade Control Order,
which is based on international export control regimes.
Customers must follow all related rules and regulations
such as Foreign Exchange and Foreign Trade Act and
take
appropriate
procedures
when
exporting
or
re-exporting those products.
ULVAC CRYOGENICS INCORPORATED
D/N.MD10Z00E, 2023OR14

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Summary of Contents for Ulvac C10

  • Page 1 1 of Japan’s Export Trade Control Order, which is based on international export control regimes. Customers must follow all related rules and regulations such as Foreign Exchange and Foreign Trade Act and take appropriate procedures when exporting re-exporting those products. ULVAC CRYOGENICS INCORPORATED D/N.MD10Z00E, 2023OR14...
  • Page 3 The period of less than one year after installation in your company or your customer’s premises, or a period of less than 18 months (starting from the shipment date) after shipment from ULVAC CRYOGENICS INCORPORATED (hereinafter “UCI”), which is shorter, is selected.
  • Page 4 2.2 Exclusion of opportunity loss from warranty liability Regardless of the gratis warranty term, compensation to opportunity losses incurred to your company or your customers by failures of ULVAC CRYOGENICS products and compensation for damages to products other than ULVAC CRYOGENICS products and other services are not covered under warranty.
  • Page 5 After the products are delivered, please fill out the following information in the blanks. In the event of a fault, please contact us. Refer to SERVICE NETWORK at the end of this book, or visit our web site at www.ulvac-cryo.com to locate our business base close by.
  • Page 6 When unidentified failure occurs, please contact our Service Engineering Division or the nearest customer support center. Refer to the SERVICE NETWORK at the end of this book or visit our website at www.ulvac-cryo.com for our contact information. 6．General Precautions...
  • Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage. Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. ULVAC CRYOGENICS INCORPORATED MZ0F001E 2023JA04...
  • Page 8 This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
  • Page 9 4.1 Before Operation･･････････････････････････････････････ 4-1 4.2 Normal Operation･････････････････････････････････････ 4-1 SECTION 5 Disconnection and Storage 5.1 Disconnecting Flexible Hose････････････････････････････ 5-1 5.2 Storage･･･････････････････････････････････････････････ 5-2 SECTION 6 Maintenance 6.1 Scheduled and Unscheduled Maintenance･･･････････････ 6-1 6.2 Replacement of Adsorber･･･････････････････････････････ 6-1 6.3 Charging Helium Gas･･････････････････････････････････ 6-5 ULVAC CRYOGENICS INCORPORATED...
  • Page 10 3-4 Static Pressure and Temperature･･･････････････････････････ 3-7 3-5 Compressor Installation･･･････････････････････････････････ 3-8 5-1 Disconnecting Flexible Hose･･･････････････････････････････ 5-2 6-1 Replacement of Adsorber･･･････････････････････････････････ 6-3 6-2 Charging Helium Gas･････････････････････････････････････ 6-7 B-1 C10 Circuit Diagram･･････････････････････････････････････ B-3 B-2 C10 Wiring Diagram･･････････････････････････････････････ B-5 D-1 C10 Flow Diagram･･････････････････････････････････････ TABLES Table 1-1 Compressor Unit Standard Specifications･･･････････････････...
  • Page 11 Do not use startup and shutdown of a compressor unit to control the temperature of the Super Trap. Please contact us when controlling the temperature of super trap is required. ULVAC CRYOGENICS INCORPORATED...
  • Page 12 It could lead to a serious accident such as electric shock and/or damage to the equipment. ・ Use wires and cables of recommended sizes. ・ The distance between power line and signal line must be larger than 100mm. ULVAC CRYOGENICS INCORPORATED...
  • Page 13 2. Input power supply must be disconnected before opening the cover of the compressor to avoid the risk of electrical shock. 3. Also, some parts inside the compressor unit are still hot immediately after shutdown. Wait at least 15 minutes before opening the cover to avoid the risk of burn injury ULVAC CRYOGENICS INCORPORATED...
  • Page 14 The sealing sticker is located inside the panel of the compressor unit. Figure Example of the sealing sticker pasted on the self-sealing coupling ULVAC CRYOGENICS INCORPORATED...
  • Page 15 Remove the coupling to make it visible that the adsorber has been depressurized before proceeding to the next step. We provide Safety Data Sheet (called SDS) of our products upon your request. Please contact us if necessary. MDIW001E,2018JE01 ULVAC CRYOGENICS INCORPORATED IW-1...
  • Page 16 This page intentionally left blank. IW-2 ULVAC CRYOGENICS INCORPORATED...
  • Page 17 This compressor unit consists of: 1) a compressor, 2) a cooling system, 3) an oil separation system and 4) an adsorber. See Table 1-1 for the compressor unit specifications. 1.2. Specifications Table 1-1 C10 Compressor Unit Standard Specifications ϕ AC190 - 220V × 3 × 50Hz Volts×Phase×Hz ϕ...
  • Page 18 When you use a flexible hose with length of 10m to 20m, chose the hose dedicated to C10. If a standard hose of the same length is used, helium charge pressure will be lower than required, inviting the need for charging helium gas.
  • Page 19 Compressor unit instruction manual ◆Dimensions 521 573 【FRONT】 【SIDE】 76.2 108.3 57.2 【REAR】 Figure1-1 Dimensions ULVAC CRYOGENICS INCORPORATED...
  • Page 20 Helium Gas Return Connector Cooling Water Inlet (Rc3/8) Cooling Water Outlet (Rc3/8) 【REAR】 Circuit Protector FUSE(1A) Fuse 【CONTROLLER (REAR)】 ＊When using controller switch, remove the control panel at the rear of the compressor unit. Figure 1-2 Major Components ULVAC CRYOGENICS INCORPORATED...
  • Page 21 Quantity Compressor Unit This Instruction Manual Fuse(250V,1A) Metal Connector (External signal, Remote)(*1) (*1)We provide a compatible cable as optional for C10 compressor previous model which has been sold until February 1999. Table 2-2 Optional Parts Item Quantity ×4cores×3m or customized length) Input Power Cable (1.25mm...
  • Page 22 When the flexible hoses are stored, put the dust cap and the plug on the self-sealing coupling as they were shipped. 2.4. The Cables Check the cables for damage. If there is any shortage or damage, please contact our service engineering department or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...
  • Page 23 2. The compressor unit must be operated in proper room temperature (10℃～38℃). Avoid dust and moist. 3. Leave the spaces as shown in Figure 3-1 to make the following maintenance processes easier; Pressure gauge inspection. Gas charge valve operation. Adsorber replacement. 1543 Figure 3-1 Maintenance Space (Unit: mm) ULVAC CRYOGENICS INCORPORATED...
  • Page 24 The Japan Refrigeration and Air Conditioning Industry Association. CAUTION ・ Usage of poor quality water causes performance degradation of heat exchanger. ・ If the water quality does not satisfy the requirement, it shortens the lifetime of the heat exchanger. ULVAC CRYOGENICS INCORPORATED...
  • Page 25 ・The compressor unit will not be turned on for a long time (more than a week). ・Shipping the compressor unit. Most of the cooling water can be purged from the compressor by blowing air into the compressor for 30 seconds at inlet pressure of 0.2MPaG with the outlet opened. ULVAC CRYOGENICS INCORPORATED...
  • Page 26 EXAMPLE A dashed arrow (→) in the graph shows the minimum required water flow rate (3.5L/min.) and water pressure drop (0.04MPa) when the temperature of the water is 30℃. Figure 3-2 Cooling Water Requirement ULVAC CRYOGENICS INCORPORATED...
  • Page 27 When you use a flexible hose with length of 10m to 20m, the hose should be dedicated to C10. If a standard hose of the same length is used, helium charge pressure will be lower than required, inviting the need for charging helium gas.
  • Page 28 Hold fast with another spanner. ②Tighten the self-sealing coupling using two spanners until the fittings are firmly sealed. When using torque wrench, torque the connection to 20N･m. Figure 3-3 Connecting Flexible Hose ULVAC CRYOGENICS INCORPORATED...
  • Page 29 Appendix B. Always use the momentary switch (contact) for setting START/STOP push button switch (PB1, PB2) in remote operation. ◆RESPONSE WIRING :Be sure to make wiring for RESPONSE signals according to the circuit diagram. The relay specification of response signals is shown in Appendix B. ULVAC CRYOGENICS INCORPORATED...
  • Page 30 Copper wire / 600VAC, 3 conductors with ground INPUT Input power cable 1.25mm POWER (*1) The color of the ground wire is green. CRYOPUMP FLEXIBLE HOSE(SUPPLY) FLEXIBLE HOSE(RETURN) REMOTE/RESPONSE INPUT POWER CABLE COLD HEAD INPUT POWER CABLE COOLING WATER 【C10】 Figure 3-5 Compressor Installation ULVAC CRYOGENICS INCORPORATED...
  • Page 31 4. Cooling water requirements is within the specified values. 5. Helium gas static pressure is within the specified values. 4.2. Normal Operation CAUTION Verify that the operating pressure is within the specified values shown in Table 1-1. ULVAC CRYOGENICS INCORPORATED...
  • Page 32 Operation This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
  • Page 33 ・Note that when performing helium circuit decontamination of the refrigerator unit, it is required to disconnect the flexible hoses at the compressor unit side immediately after shutdown. MD05001E,2010.06 ULVAC CRYOGENICS INCORPORATED...
  • Page 34 Check the pressure gauge of the compressor unit periodically. Contact our Service Engineering Division or the nearest customer support center if the pressure keeps lower. There is a possibility that a leakage might have occurred. ULVAC CRYOGENICS INCORPORATED...
  • Page 35  When shipping the compressor unit, pack in the same way as at the time of shipment and avoid excess impact. MD05001E,2010.06 ULVAC CRYOGENICS INCORPORATED...
  • Page 36 Disconnection and Storage This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
  • Page 37 4. Disconnect the flexible hoses from gas-return and gas-supply connectors at the rear of the compressor. 5. Remove the front panel of the compressor. (Figure 6-1 ①②) *Do Not remove the rear panel. 6. Disconnect the flexible hose from the adsorber inlet and outlet. (Figure 6-1 ③④) ULVAC CRYOGENICS INCORPORATED...
  • Page 38 6. When the adsorber has been replaced, write the date and elapsed time of operation on the adsorber replacement record label at the front panel. Also write elapsed time for the next replacement of adsorber (add 24000 hours to the present elapsed time). ULVAC CRYOGENICS INCORPORATED...
  • Page 39 ＊ After the replacement, put the front panel back on the compressor and fill in the table of the record sheet. ⑤Remove the adsorber mounting bolt. ⑥Slide the adsorber out and remove it from the compressor. Figure 6-1 Replacement of Adsorber ULVAC CRYOGENICS INCORPORATED 6-3/6-4...
  • Page 40 ｃ．Close the regulator. (It can be closed by turning the handle counter clockwise.) CAUTION If the bottle valve is opened without performing the procedure 1, the air between the regulator and the bottle valve diffuses into the helium bottle and lowers the purity of helium gas. ULVAC CRYOGENICS INCORPORATED...
  • Page 41 2.5MPaG. 6. Close the charge valve after charging helium gas. 7. Close the regulator and remove the charging hose from the charge inlet to complete the helium gas charging procedure. ULVAC CRYOGENICS INCORPORATED...
  • Page 42 Compressor Unit Instruction Manual Low pressure High pressure Front Panel side side Bottle Charging Hose Valve Regulator Remove the front panel. ® CRYO-U Charging Valve Helium Bottle Flexible Hoses Compressor Figure 6-2 Charging Helium Gas ULVAC CRYOGENICS INCORPORATED...
  • Page 43 Maintenance This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
  • Page 44 (Refer to section 4.1). Ⅲ Compressor 1) Thermal protective switches (TS1 Check that cooling water flows stops after and TS2) are ON. properly. Also check the cooling several minutes’ water temperature and flow rate operation. (Refer to Figure 3-2). ULVAC CRYOGENICS INCORPORATED...
  • Page 45 (CP1, CP2) are active. Division or the nearest CS center. operation. (The cooling water temperature and (Continued from the room temperature will be asked.) the previous 3) Compressor failure. Contact our Service Engineering page.) Division or the nearest CS center. ULVAC CRYOGENICS INCORPORATED...
  • Page 46 CRYOPUMP S/N POWER OPERATING COMPRESSOR S/N REFRIGERATOR S/N Cryopump Measuring condition Compressor unit Remarks Temperature Pressure 【Pa】 stage stage 【 【 【 】 】 】 (*) Measure cooling water flow rate with flow meters for each compressor unit. ULVAC CRYOGENICS INCORPORATED...
  • Page 47 Troubleshooting This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
  • Page 48 Set pressure: 2.41MPa(gage) (350psig) ― Differential Located in the line between the supply and return helium lines. pressure Regulates the maximum differential pressure during operation. regulating valve Set pressure: 1.34MPa(gage) (195psi) ULVAC CRYOGENICS INCORPORATED...
  • Page 49 ⑥ are open when the compressor unit and the refrigerator unit are in operation. Contact capacities of CR1 are as follows: Maximum voltage AC250V DC125V Maximum current Rated load Resistance load (Induction load) AC220V 5A (2A) DC 24V 5A (2A) Minimum applicable load DC5V 1mA ULVAC CRYOGENICS INCORPORATED...
  • Page 50 Compressor unit instruction manual Figure B-1 ULVAC CRYOGENICS INCORPORATED B-3/B-4...
  • Page 51 Compressor unit instruction manual Figure B-2 Figure B-2 ULVAC CRYOGENICS INCORPORATED B-5/B-6...
  • Page 52 ・ Do not twist a flexible hose especially when making continuously bent connections. ・ Keep away from water and salt to prevent corrosion. Do not place heavy objects on flexible hoses in order to prevent deformation or collapse. ULVAC CRYOGENICS INCORPORATED MD0C001E,2023OR01...
  • Page 53 Flexible Hose This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
  • Page 54 At the same time, high pressure helium gas comes out from oil separator enters an adsorber where oil-mist is adsorbed and removed. The helium gas comes out the adsorber passes through a flexible hose and is supplied to the refrigerator unit. ULVAC CRYOGENICS INCORPORATED...
  • Page 55 Oil injection filter Differential pressure regulating valve Oil injection orifice Solenoid controlled valve (N.C.) Check valve Helium RETURN Helium Gas Flow Oil Flow Helium Gas + Oil Flow Cooling Water Flow Figure D-1 C10 Flow Diagram ULVAC CRYOGENICS INCORPORATED...
  • Page 56 (7 screws on each slide it out from the side) front, remove the side panel to take it out. Adsorber 3. Remove side cover by sliding the cover forward. 4. Slide out/in the adsorber out from right side. ULVAC CRYOGENICS INCORPORATED...
  • Page 57 Attention This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
  • Page 58 ULVAC CRYOGENICS INC. www.ulvac-cryo.com 1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan <Sales> Tel: +81-467-85-8884 <Service Engineering Division> Tel: +81-467-85-9366 Fax: +81-467-83-4838 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC.
  • Page 59 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...
  • Page 60 C10 Compressor Unit Instruction Manual Revision History Date Revision No. Contents 2007-02-15 2007.02 First edition 2009-06-08 2009JE01 “Introduction” has revised. UCN address has changed. “SERVICE NETWORK” has revised. 2009-11-06 2009NR02 RM refrigerator has added. 2011-02-14 2011FY03 Cover: Export control policy has been revised.
  • Page 61 Revision Histor Appendix C A note has been added to flexible hose allowable pressure. ULVAC CRYOGENICS INCORPORATED...