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Ulvac C30HMVRT-E1 Instruction Manual

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COMPRESSOR UNIT
Instruction Manual
C30HMVRT-E1
Export Control Policy
Vacuum pumps that pump nitrogen gas at pumping
speed of 15000L/s or more fall under row 2(35) of
appended table 1 of Japan's Export Trade Control Order,
which is based on international export control regimes.
Customers must follow all related rules and regulations
such as Foreign Exchange and Foreign Trade Act and
take
appropriate
procedures
when
exporting
or
re-exporting those products.
D/N.MD30HM1E,2020JE02
ULVAC CRYOGENICS INCORPORATED

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Summary of Contents for Ulvac C30HMVRT-E1

  • Page 1 1 of Japan’s Export Trade Control Order, which is based on international export control regimes. Customers must follow all related rules and regulations such as Foreign Exchange and Foreign Trade Act and take appropriate procedures when exporting re-exporting those products. D/N.MD30HM1E,2020JE02 ULVAC CRYOGENICS INCORPORATED...
  • Page 3 As a general rule, diagnosis of failure should be done on site by customer. However, ULVAC CRYOGENICS or our service network can perform this service for an agreed fee upon the customer’s request. There will be no charge if the cause...
  • Page 4 ULVAC CRYOGENICS. (2) Damage during transportation When damage by delivery/transportation is admitted, the product will be repaired free of charge within the range of the guarantee expressed in the sales contract.
  • Page 5 2.3 Repair period after production is discontinued ULVAC CRYOGENICS shall accept product repairs for seven years after production of the product is discontinued. 3. Service Form After the products are delivered, please fill out the following information in the blanks. If you have any questions or technical problems please feel free to contact the nearest Customer Support Center or headquarters.
  • Page 6 (3) If you have any questions or comments on this document, please do not hesitate to contact us. The phone numbers of local customer support centers are listed at the end of this manual. ULVAC CRYOGENICS INCORPORATED...
  • Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage . Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED...
  • Page 8 This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...

  • Page 9: Table Of Contents

    Maintenance operation for a compressor stopped for a long period ......5-4 Section 6 Wiring and Piping, Removal and Storage ............6-1 Removal of wiring and piping and displacement of compressor ........ 6-1 Maintenance in storage ....................6-2 ULVAC CRYOGENICS INCORPORATED...
  • Page 10 Compressor rear view ................. 1-6 Figure 1-4 Anchor bolts mounting positions (example) ..........1-7 Figure 1-5 Typical installation of cryopumps and C30HMVRT-E1 ......1-10 Figure 2-1 Required space for compressor installation (scale: mm) and levelness ..2-2 Figure 2-2 Equipment-side power circuit ..............2-3...
  • Page 11 Figure C-1 C30HMVRT-E1 schematic diagram............C-2 Figure D-1 Compressor flow diagram ................D-2 List of Tables Table 1-1 C30HMVRT-E1 Compressor model ............1-1 Table 1-2 Compressor weight ..................1-4 Table 1-3 Power supply rating ..................1-4 Table 1-4 Cooling water requirements................. 1-4 Table 1-5 Installation environment and operation requirements .........
  • Page 12 Compressor Unit Instruction Manual This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 13: Compressor Unit Safety Instructions

    6 times per hour as well. Do not turn on and off the compressor to control the temperature of the Super Trap. Please contact us when Super Trap temperature control is required. ULVAC CRYOGENICS INCORPORATED...
  • Page 14 ☆We collect used adsorbers. If there is any used absorber, please contact a person in your local dealership or Ulvac Techno Ltd. to have it picked up or send it directory to our Service Engineering Division. We only accept CTI adsorbers and our adsorbers.
  • Page 15 Also, parts of inside the compressor unit are still hot just after the compressor has been stopped. Wait at least 15 minutes to open the cover to avoid the risk of burns. ULVAC CRYOGENICS INCORPORATED...
  • Page 16 This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 17: Disposal Considerations

    Remove the coupling to make it visible that the adsorber has been depressurized before proceeding to the next step. We provide Safety Data Sheet (called SDS) of our products upon your request. Please contact us if necessary. MDIW001E,2018JE01 ULVAC CRYOGENICS INCORPORATED IW-1...
  • Page 18 This page intentionally left blank. IW-2 ULVAC CRYOGENICS INCORPORATED...

  • Page 19: Introduction

    Component descriptions ....................1-5 ® CRYO-U cryopump installation ..................1-9 Introduction C30HMVRT-E1 is a compressor unit for cryopump system. C30HMVRT-E1 can change the operation frequency with an inverter installed inside the compressor. Table 1-1 C30HMVRT-E1 Compressor model Number of Compressor...

  • Page 20: Cryopump System Documents

    It is necessary to check the elapsed time of operation and replace adsorber regularly to maintain refrigeration capacity as well as prevent breakdown of the refrigerator. Refer to “Section 7.2 Replacement of adsorber”. The Compressor requires maintenance. Read “Section 7 Maintenance” carefully and conduct regular maintenance. ULVAC CRYOGENICS INCORPORATED...

  • Page 21: Compressor Specifications

    Compressor Description Compressor specifications 1.5.1 Dimensions Figure 1-1 shows the dimensions of C30HMVRT-E1. The appearance of the compressor unit may differ from the figures below depending on customer specifications. The drawings in the customer specific document supersedes if provided. （615）...
  • Page 22 Static helium pressure at 20°C 1.5±0.04MPaG (*1) Sound pressure level during operation < 70 dBA (*1) Refer to “Section5.1 Verification of helium static pressure” for details. (*2) The specifications in the customer specific document supersedes if provided. ULVAC CRYOGENICS INCORPORATED...

  • Page 23: Component Descriptions

    Ｓ Ｕ ＰＰ Ｌ Ｙ ⑦ Reset ＰＲ Ｅ ＳＳ Ｕ ＲＥ ヘリウム充てん圧力:1.4MPa(gage) at20℃ ② High Pressure Helium Gas Pressure Gauge Helium Pressure：1.5MPa(gage) at20℃ ④ Helium Fill Fitting (Inside the panel) ⑤ Casters Figure 1-2 Compressor front view (example) ULVAC CRYOGENICS INCORPORATED...
  • Page 24 Refer to “Section 5.1 Verification of helium static pressure” to verify the helium pressure when the compressor is not in operation. ③COM: MONITORING PORT It is a port for inspection/servicing use only by our engineers. It is not available for customer use. ULVAC CRYOGENICS INCORPORATED...
  • Page 25 This shows a list of alarm codes indicated by the STS (Status) LED indicators for alarm indication. Refer to “Section 8.3 Alarm code descriptions” for troubleshooting procedure of each alarm code. All status display LED indicators will remain unlit when there is no problem. ULVAC CRYOGENICS INCORPORATED...
  • Page 26 「CH1」 indicator (GREEN) lights up when refrigerator No.1 is in operation. 「CH2」 indicator (GREEN) lights up when refrigerator No.2 is in operation. 「CH3」 indicator (GREEN) is not used with C30HMVRT-E1 compressor. One or more STS LED indicators for alarm indication will light up when malfunction of the compressor is detected.

  • Page 27: Cryo-U ® Cryopump Installation

    CRYO-U cryopump installation C30HMVRT-E1 can run up to two refrigerators of cryopump units at a time (See Table 1-1). Figure 1-5 depicts an example of connection with multiple cryopumps and single compressor. For detailed instructions on cryopump installation with compressor, refer to “Section 4.4 Cryopump installation”...

  • Page 28: Figure 1-5 Typical Installation Of Cryopumps And C30Hmvrt-E1

    Compressor Unit Instruction Manual Helium Supply Line Helium Return Line Remote Cable Coldhead Cable Helium Manifolds Cooling Water AC220V×3φ Power Input Compressor C30HMVRT-E1 Figure 1-5 Typical installation of cryopumps and C30HMVRT-E1 1-10 ULVAC CRYOGENICS INCORPORATED...

  • Page 29: Considerations Before Installation

    Also, a space of 500mm back and front of the compressor is needed for maintenance. The space which can work without difficulty is necessary around the power cable on the back of a compressor. Refer to Figure 1-1 in Section 1 for the dimensions of the compressor. ULVAC CRYOGENICS INCORPORATED...

  • Page 30: Wiring Requirements

    Almost any standards require installing a breaker for branch in upstream of equipment and protect power supply line which connects with each equipment; circuit breakers must be installed. Failure to observe this warning may result in damage and/or failure of the equipment. ULVAC CRYOGENICS INCORPORATED...
  • Page 31 AC200/220V 3φ T S R Power cable T S R T S R C30HMVRT-E1 compressor X 2 Figure 2-2 Equipment-side power circuit Table 2-2 shows wire gauges of refrigerator cable and remote cable for use. Table 2-2 Control and signal wire gauges...

  • Page 32: Cooling Water Requirements

    If the cooling water of temperature below 10℃ is supplied continuously while stopping the compressor, it may increase viscosity of lubricant oil and cause start up failure of the compressor when the operation command is sent. ULVAC CRYOGENICS INCORPORATED...

  • Page 33: Figure 2-3 Cooling Water Flow Rate, Water Supply Temperature, And Water Pressure Loss

    If the cooling water of temperature below 10℃ is supplied continuously while stopping the compressor, it may increase viscosity of lubricant oil and cause start up failure of the compressor when the operation command is sent. ULVAC CRYOGENICS INCORPORATED...

  • Page 34: Length Of Cables And Flexible Hoses

    Remote interface specifications Item Specification Model Signal Quantity Photo Coupler Isolation Input Maximum voltage: 26VDC, Input Current: less than 8mA C30HMVRT-E1 Rated Voltage: ON:20V and above, OFF:3V or less No-voltage a contact Output Maximum Load: 30VDC / 100mA ULVAC CRYOGENICS INCORPORATED...
  • Page 35 Since it is the contact output, the polarity of DC24V in Figure 2-5 can be reversed. Make provisions for the interface circuit at the equipment side. (Equipment side) SIG1 SIG2 Relay Figure 2-5 Remote output interface circuit ULVAC CRYOGENICS INCORPORATED...
  • Page 36 Turn the command signal ON for more than 0.3 second. (Refer to the description of COMP STOP below). Command signals for refrigerators （CH1 REF and CH2 REF）should be turned ON to start the refrigerators. ULVAC CRYOGENICS INCORPORATED...
  • Page 37 This is an answer-back signal responding to the compressor pump operation command. When the compressor starts operation, the answer-back signal is sent to the equipment. Note: Refer to “Section 2.6.6 Signal timing charts –Answer-back signal delay” as well. ULVAC CRYOGENICS INCORPORATED...

  • Page 38: Figure 2-6 Timing Chart For Alternate Operating Mode With Two Refrigerators

    Timing chart for Alternate operating mode with two refrigerators (*1) COMP START (*1) COMP STOP CH1, CH2 REF COMP CH1, CH2 REF 1) The holding time is 0.3 seconds or more. Figure 2-7 Timing chart for Momentary operating mode with two refrigerators 2-10 ULVAC CRYOGENICS INCORPORATED...

  • Page 39: Figure 2-8 Signal Delay When Powered On（In Alternate Operating Mode

    Therefore, be sure to set the timeout time of an answer-back signal as 8 seconds or more in order to monitor the operating conditions of the compressor correctly. ULVAC CRYOGENICS INCORPORATED 2-11...
  • Page 40 INPUT POWER SUPPLY COMP START COMP STOP CH1, CH2 REF COMP ACK CH1, CH2 ACK COMP OPERATION CH1, CH2 CH OPERATION (*1) t≦2seconds Figure 2-10 Timing chart when a short power interruption occurs (In Momentary operating mode) 2-12 ULVAC CRYOGENICS INCORPORATED...
  • Page 41 In “Alternate operating mode”, the compressor restarts as soon as the input power is recovered because there is always the command from the equipment side. NOTE: Refer to “Section 4.5.2 Connecting remote cables” for remote signal wiring. ULVAC CRYOGENICS INCORPORATED 2-13...
  • Page 42 Compressor Unit Instruction Manual This page intentionally left blank. 2-14 ULVAC CRYOGENICS INCORPORATED...

  • Page 43: Unpacking And Inspection

    Please read the enclosed cover letter for the details. Depending on your specification, the option part(s) in Table 3-2 is attached. Table 3-1 Carton contents Item Quantity Compressor C30HMVRT-E1 Manual Inverter user’s manual Connector for remote operation Table 3-2 Optional parts Item Quantity Input power cable ( 3m or customized length) １...

  • Page 44: Flexible Hoses And Specifications

    Failure to observe this warning may result in damage and/or break down of the equipment. CAUTION When carrying the flexible hose, ensure that the bending radius does not become narrower than the minimum value listed above. In the same manner as other equipment, avoid corrosion and condensation when storing. ULVAC CRYOGENICS INCORPORATED...

  • Page 45: Equipment Installation, Piping, And Wiring

    Cryopump installation ···················································· 4-4 Electrical connections ···················································· 4-5 Wire rooting for compressor and other equipments ··············· 4-9 Before installation This section describes appropriate procedure for installing C30HMVRT-E1 and ® connecting the compressor to a CRYO-U cryopump. Figure 4-1 is the block diagram for the compressor installation.

  • Page 46: Connecting And Disconnecting Helium Flexible Hoses

    Then tighten the coupling with two spanners as shown in Figure 4-3. See for usage of two spanners. The torque value is 20N･m for both couplings. Complete the procedure as quick as possible to minimize helium gas leakage. ULVAC CRYOGENICS INCORPORATED...
  • Page 47 To disconnect flexible hoses from the connectors, use only two lipped bowl spanners (bolt width 26mm, 30mm). Do not use other spanners. ULVAC CRYOGENICS INCORPORATED...

  • Page 48: Cryopump Installation

    Connect the refrigerator cable to “COLD HEAD POWER NO.2” in the same procedure. Helium Supply Line SUPPLY Helium Return Line RETURN COLD HEAD POWER No.1 No.2 Coldhead Cable Helium RETURN GAS SUPPLY GAS Manifolds C30HMVRT-E1 Compressor Figure 4-5 Example of Connection with Multiple Cryopumps ULVAC CRYOGENICS INCORPORATED...

  • Page 49: Electrical Connections

    “INPUT POWER” receptacle on the rear panel of the compressor, turn the rotating part of the plug to the right. Turn it until it won’t turn any more to connect the plug properly. Figure 4-6 Connecting input power cable connector ULVAC CRYOGENICS INCORPORATED...

  • Page 50: Figure 4-7 Remote Connector Pin Assignments For C30Hmvrt-E1

    /COMP STOP CH2ACK1 CH2ACK2 CH3ACK1 (Not in use) CH3ACK2 (Not in use) (GND) COMP RUN1 COMP RUN2 ALARM1 C20 COMP ON/OFF ALARM2 (SRCN6A25-24P) Figure 4-7 Remote Connector Pin Assignments for C30HMVRT-E1 (Side View of the Plug Soldering) ULVAC CRYOGENICS INCORPORATED...

  • Page 51: Figure 4-8 "Momentary Operating Mode" Wiring Example For A Cryopump Operation

    Section 4 Equipment Installation, Piping, and Wiring Figure 4-8 shows the typical wiring for C30HMVRT-E1 with cryopumps in MOMENTARY OPERATING MODE. REMOTE Equipment RESPONSE Interface CH1REF CH2REF Output Reference COMP START /COMP STOP CH1 ACK1 CH1 ACK2 CH2 ACK1 CH2 ACK2 Answer-back Input etc.

  • Page 52: Figure 4-11 Fix With A Set Screw

    9. Put the solder identification label on the connector or cables. CAUTION For lead-free soldering, use only specified lead-free solder iron and tip. Do not mix lead eutectic solder with lead-free solder. Failure to observe this warning may result in decreasing the life of soldered parts severely. ULVAC CRYOGENICS INCORPORATED...

  • Page 53: Wire Rooting For Compressor And Other Equipments

    : Electromagnetic interference where the C30HMVRT-E1 system, consists of the compressor and the refrigerator, effect to other equipments is not critical, however if the wiring of C30HMVRT-E1 system is not separated from other equipments it may cause interference to sensitive sensor wires, analog wires, and other high impedance wiring of other equipments.
  • Page 54 Compressor Unit Instruction Manual This page intentionally left blank. 4-10 ULVAC CRYOGENICS INCORPORATED...

  • Page 55: Operation

    If the pressure relief valve blows, stop the operation and leave the compressor for several hours to ensure that the helium filling pressure is in the range which can be still operated. If the helium filling pressure is reduced, please contact us for maintenance. ULVAC CRYOGENICS INCORPORATED...

  • Page 56: Compressor Operation

    If PWR LED and RDY LED indicators light up after a few seconds from power-on, the compressor is ready for operation. If the buzzer keeps ringing after power-on and all eight STS indicators light up, it means ULVAC CRYOGENICS INCORPORATED...
  • Page 57 These two recorded values depend on the length of flexible hoses and a kind of the refrigerator mounted on the cryopump system. The recorded values are used as reference value for maintenance or replacement of the product explained in the following. ULVAC CRYOGENICS INCORPORATED...

  • Page 58: Inspection After Replacing Helium Circulation Components

    Also, operate the refrigerator for ten minutes at a time every six months. Failure to observe this precaution may result in damage to the compressor when restarting operation. NOTE: Circulate cooling water during the regular maintenance operation of the compressor. ULVAC CRYOGENICS INCORPORATED...

  • Page 59: Wiring And Piping, Removal And Storage

    For close loop type cooling-water supply system, it is recommended to additionally install a water drain line diverged from the water return line on the equipment in order to release water pressure in the compressor. ULVAC CRYOGENICS INCORPORATED...

  • Page 60: Maintenance In Storage

    Place the compressor on a flat floor and lock all the casters. Remove the piping and wiring from the compressor and put dust caps or dust plugs on the helium line connectors. ULVAC CRYOGENICS INCORPORATED...
  • Page 61 If the value is clearly decreasing compared to the one before, there is a possibility of helium leakage. Please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...
  • Page 62 Compressor Unit Instruction Manual This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 63: Maintenance

    Replacement of adsorber WARNING The following replacing procedure must be undertaken by authorized personnel familiar with the structure and risk of the product. Failure to observe this warning may result in severe bodily injury or fatal accident. ULVAC CRYOGENICS INCORPORATED...
  • Page 64 7. Remove the bolts that secure the adsorber to the base of the compressor with the proper spanner (Figure 7-6). 8. Slide the adsorber outward and remove it from the mounting tab on the base of the compressor. And then remove the adsorber from the compressor (Figure 7-7). ULVAC CRYOGENICS INCORPORATED...
  • Page 65 Remove the rear panel (left) Figure 7-4 Remove self-sealing coupling (right) Clockwise: Tightening Counter Clockwise: Loosening TURN with 30mm spanner Adsorber HOLD with 26mm spanner Flexible hose (Self-sealing coupling) Figure 7-5 Connecting and disconnecting self-sealing coupling with two spanners ULVAC CRYOGENICS INCORPORATED...
  • Page 66 16. Record the date and accumulated operation time when the adsorber was replaced in the adsorber replacement record label on the front panel of the compressor. As a guide for the next replacement, it is recommended to make a note of the value that the ULVAC CRYOGENICS INCORPORATED...

  • Page 67: Adjusting System Helium Pressure

    Allow a slight amount of helium gas to escape. 3. Wait until the helium pressure gauge reads the prescribed standard value described above. When the pressure reaches the standard value, close the valve by turning its knob clockwise. ULVAC CRYOGENICS INCORPORATED...
  • Page 68 When charging helium or performing helium circuit decontamination, equipments (regulators, charging hoses, adopters, etc.) that can be used at 2.0MPaG or above are required. Table 7-2 shows items and devices required for adding helium gas. ULVAC CRYOGENICS INCORPORATED...
  • Page 69 3. Purge the pressure regulator and helium charging hose. (*1) 3-1 Turn the pressure regulator handle in clockwise slowly until it becomes hard to turn. Then turn approximately 1/8 to 1/6 more to slightly open the pressure regulator. ULVAC CRYOGENICS INCORPORATED...

  • Page 70: Regular Maintenance Of Helium Lines, Cooling Water Piping And Electrical Wiring

    Also check that there is no damage in these plumbing. WARNING The following procedure must be undertaken by an authorized electrician familiar with the structure and risk of the product. Failure to observe this warning may result in severe bodily injury or fatal accident. ULVAC CRYOGENICS INCORPORATED...

  • Page 71: Maintenance Parts

    When it is locked by malfunction (*1) Maintenance type S: Scheduled U: Unscheduled NOTE: For more information on planning maintenance, purchasing maintenance parts, diagnosis or servicing, please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...
  • Page 72 Compressor Unit Instruction Manual This page intentionally left blank. 7-10 ULVAC CRYOGENICS INCORPORATED...

  • Page 73: Troubleshooting

    Reverse Phase, LPS Low Helium Open Phase, Pressure Low Volt TS2 Over Temperature CP2 Cold Head Trip TS1 Over Temperature OL1 Comp. Over Current TS3 Over Temperature Controller Fault ●→lit up ○→off Figure 8-1 Alarm status table ULVAC CRYOGENICS INCORPORATED...

  • Page 74: Troubleshooting Procedures

    ※ panel does not failure. again call for servicing light up. ※ Inverter failure. Inverter malfunction. Call for servicing ※If the problem is not solved, please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...
  • Page 75 Refer to Section 2 and Section 4. After power is Longer electric Compressor needs restart interrupted for longer power interruption manually. than 2 seconds, than set time (2 compressor does seconds). not start operation. ULVAC CRYOGENICS INCORPORATED...

  • Page 76: Alarm Code Descriptions

    If the input power supply voltage is low, check the input power line and the user’s power supply that has distributed electric power to the compressor. When there is an open phase(s), all indicators should be blinked or turned off. ULVAC CRYOGENICS INCORPORATED...
  • Page 77 If there is an earth fault or short circuit in the parts above or no identified cause, Please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...
  • Page 78 Check that the helium pressure is not higher than the set value on the helium pressure gauge. Refer to “Section 5.1 Verification of helium static pressure” for helium pressure set value and “Appendix C C30HMVRT-E1 compressor electrical circuit” for OL1 set value.

  • Page 79: Appendix A Operating Log

    CRYO-U COMPRESSOR S/N OPERATING LOG REFRIGERATOR S/N Cryopump Measuring condition Compressor unit Remarks Temperature Pressure 【Pa】 stage stage 【 【 【 】 】 】 (*) Measure cooling water flow rate with flow meters for each compressor unit. ULVAC CRYOGENICS INCORPORATED...
  • Page 80 Compressor Unit Instruction Manual This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 81: Appendix C C30Hmvrt-E1 Schematic Diagram

    Appendix C C30HMVRT-E1 Schematic Diagram Appendix C C30HMVRT-E1 Schematic Diagram Schematic diagrams of the C30HMV RT-E1 compressor unit are shown in Figure C-1. Controller setting and connections are shown in Table C-1. Table C-1 Controller settings and connections Refrigerator Figure Model Max.
  • Page 82 Compressor Unit Instruction Manual Figure C-1 C30HMVRT Schematic Diagram ULVAC CRYOGENICS INCORPORATED...

  • Page 83: Appendix D Compressor Flow Diagram

    – low differential pressure regulating valve under the set value. ※1 The set pressure of safety valve at the refrigerator is 1.9MPaG. Please note that the refrigerator safety valve releases gas before the compressor safety valve in actual system. ULVAC CRYOGENICS INCORPORATED...
  • Page 84 Oil heat changer equalization Oil injection filter RETURN Accumulator Low pressure switch Helium filling valve Helium gas flow Helium gas and oil flow Oil flow Cooling water flow Compressor flow diagram Figure D-1 ULVAC CRYOGENICS INCORPORATED...
  • Page 85 ULVAC CRYOGENICS INC. www.ulvac-cryo.com 1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan <Sales> Tel: +81-467-85-8884 <Service Engineering Division> Tel: +81-467-85-9366 Fax: +81-467-83-4838 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC.
  • Page 86 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...

  • Page 87: Compressor Unit Instruction Manual

    Compressor Unit Instruction Manual Revision History Date Revision No. Contents 2016-01-13 2016.01 First edition. 2018-10-10 2018OR01 SERVICE NETWORK has been revised. 2020-06-24 2020JE02 Table 1.5 has been modified. Notes has been added to “1.6 Component descriptions”. ULVAC CRYOGENICS INCORPORATED...
  • Page 88 Revisions This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

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