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COMPRESSOR UNIT
Instruction Manual
C10AT
Export Control Policy
Vacuum pumps that pump nitrogen gas at pumping
speed of 15000L/s or more fall under row 2(35) of
appended table 1 of Japan's Export Trade Control Order,
which is based on international export control regimes.
Customers must follow all related rules and regulations
such as Foreign Exchange and Foreign Trade Act and
take
appropriate
procedures
when
exporting
or
re-exporting those products.
D/N.MD10AT0E, 2020OR01
ULVAC CRYOGENICS INCORPORATED
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Summary of Contents for Ulvac C10AT
- Page 1 1 of Japan’s Export Trade Control Order, which is based on international export control regimes. Customers must follow all related rules and regulations such as Foreign Exchange and Foreign Trade Act and take appropriate procedures when exporting re-exporting those products. D/N.MD10AT0E, 2020OR01 ULVAC CRYOGENICS INCORPORATED...
- Page 3 As a general rule, diagnosis of failure should be done on site by customer. However, ULVAC CRYOGENICS or our service network can perform this service for an agreed fee upon the customer’s request. There will be no charge if the cause...
- Page 4 ULVAC CRYOGENICS. (2) Damage during transportation When damage by delivery/transportation is admitted, the product will be repaired free of charge within the range of the guarantee expressed in the sales contract.
- Page 5 2.3 Repair period after production is discontinued ULVAC CRYOGENICS shall accept product repairs for seven years after production of the product is discontinued. 3. Service Form After the products are delivered, please fill out the following information in the blanks. If you have any questions or technical problems please feel free to contact the nearest Customer Support Center or headquarters.
- Page 6 (3) If you have any questions or comments on this document, please do not hesitate to contact us. The phone numbers of local customer support centers are listed at the end of this manual. ULVAC CRYOGENICS INCORPORATED...
- Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage . Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED...
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Page 9: Table Of Contents
Charging helium Gas ·········································································· 6-4 Cleaning Heat Exchanger ···································································· 6-7 Appendix A Trouble Shooting ··········································································· A-1 Appendix B Schematic Diagram ······································································· B-1 Appendix C Flexible Hose ··············································································· C-1 Appendix D Flow Diagram ··············································································· D-1 Service Network ························································································ CS-1 ULVAC CRYOGENICS INCORPORATED... - Page 10 Figure 6-5 Adsorber Replacement Record ..............6-3 Figure 6-6 Charging Helium Gas .................. 6-6 Figure B-1 C10AT Circuit Diagram ................B-3 Figure B-2 Connector Wiring for Local Operation ............B-5 Figure B-3 Connector Wiring for Remote Operation ............. B-5 Figure D-1 C10AT Flow Diagram ..................
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Page 11: Safety Instructions
Do not start-up / shutdown operation to control the temperature of Super Trap. Please contact us when it is required to control the temperature of super trap. ULVAC CRYOGENICS INCORPORATED... - Page 12 ☆We collect used adsorbers. If there is any used absorber, please contact a person in your local dealership or Ulvac Techno Ltd. to have it picked up or send it directory to our Service Engineering Division. We only accept CTI and our adsorbers.
- Page 13 Also, parts of inside the compressor unit are still hot just after the compressor has been stopped. Wait at least 15 minutes to open the cover to avoid the risk of burns. ULVAC CRYOGENICS INCORPORATED...
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Page 15: Disposal Considerations
Remove the coupling to make it visible that the adsorber has been depressurized before proceeding to the next step. We provide Safety Data Sheet (called SDS) of our products upon your request. Please contact us if necessary. MDIW001E,2018JE01 ULVAC CRYOGENICS INCORPORATED IW-1... - Page 16 This page intentionally left blank. IW-2 ULVAC CRYOGENICS INCORPORATED...
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Page 17: Compressor Unit Description
The power consumption and current in the above table are standard values when flexible hoses of 3 meters are used. The maximum allowable length is 20m, and the power consumption and current will be larger by 6% with a 20m hose. (*2) JIS B8346 ULVAC CRYOGENICS INCORPORATED... - Page 18 Connection Screw M3.5 (R, S, T, E) Recommended torque to fasten connection screw: 0.8N m Terminal pitch 8.5mm Crimping terminal width 7.0mm or lower * Use the crimping terminal delivered with the C10AT to connect to the compressor side ULVAC CRYOGENICS INCORPORATED...
- Page 19 Helium Supply Connector CP2 (Coldhead) Helium Return Connector Coldhead Connector Electrical Circuit Board Under the Cover REMOTE Connector REMOTE REMOTE COLD HEAD COLD HEAD RESPONSE RESPONSE 全ての接続が完了後、コンプレッサユニット Exhaust Port の充てん圧力に合わせてください ＳＵＰＰＬＹ ＲＥＴＵＲＮ 圧縮機ユニットを輸送するときの注意事項 セルフシールカップリングには全てキャップ又はプ ラグを取り付けて下さい。(取扱説明参照） 【REAR】 Dimensions Figure 1-1 ULVAC CRYOGENICS INCORPORATED...
- Page 20 Compressor Unit Description This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
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Page 21: Unpacking And Inspection
4cores x 3m or customized length) Refrigerator power cable (0.5mm x 4cores x 3m or customized length) Flexible Hose ( 3m or customized length) Single Head Wrench (For connecting flexible hoses) Gasket for Helium Coupling (Spare) ULVAC CRYOGENICS INCORPORATED... -
Page 22: Compressor Unit Inspection
When the flexible hoses are stored, put the dust cap and the plug on the self-sealing coupling as they were shipped. 2.4. The Cables Check the cables for damage. If any items are not included or damaged, please contact our service engineering department or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED... -
Page 23: Installation
・ Check the pressure gauge. ・ Operate gas charge valve. ・ Replace adsorber. Do not block air intake on the front and exhaust port on the back to keep good air-cooling performance. 1494 Figure 3-1 Maintenance Space(Unit: mm) ULVAC CRYOGENICS INCORPORATED... -
Page 24: Connecting The Compressor Unit To The Coldhead
When you use a flexible hose with length of 10m to 20m, chose a hose dedicated to C10. If a standard hose of the same length is used, helium charge pressure will be lower than required, inviting the need for charging helium gas. ULVAC CRYOGENICS INCORPORATED... -
Page 25: Figure 3-2 Connecting Flexible Hose
Tighten self-sealing coupling with a wrench. Hold here with a wrench. ②Tighten the self-sealing coupling using two wrenches until the fittings are firmly sealed. When using torque wrench, torque the connection to 20N·m. Connecting Flexible Hose Figure 3-2 ULVAC CRYOGENICS INCORPORATED... -
Page 26: Connecting Electrical Cables
For LOCAL operation: Follow the circuit diagram and short-circuit 15-16 pins of the remote connector. RESPONSE signal wiring: Follow the circuit diagram and make correct wiring. The specification of the response signal contact is shown in Appendix B. ULVAC CRYOGENICS INCORPORATED... -
Page 27: Table 3-1 Power Cable Specifications
2PNCT 2.0SQR 4C (Taiyo Cabletec) POWER Flexible Hose (ＳＵＰＰＬＹ) Flexible Hose (ＲＥＴＵＲＮ) Coldhead Drive Cable REMOTE/RESPONSE Power Cable Cryocooler Unit REMOTE REMOTE COLD HEAD COLD HEAD RESPONSE RESPONSE 全ての接続が完了後、コンプレッサユニット の充てん圧力に合わせてください ＲＥＴＵＲＮ ＳＵＰＰＬＹ 圧縮機ユニットを輸送するときの注意事項 セルフシールカップリングには全てキャップ又はプ ラグを取り付けて下さい。(取扱説明参照） Ｃ１０ＡＴ Figure 3-4 Compressor Installation ULVAC CRYOGENICS INCORPORATED... - Page 28 Installation This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
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Page 29: Operation
REMOTE Operation Make sure that the Remote signal is OFF and turn ON the remote signal to start-up the compressor unit. Normal Operation CAUTION Verify that the operating pressure is within the appropriate range shown in Table 1-1. ULVAC CRYOGENICS INCORPORATED... - Page 30 Operation This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
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Page 31: Disconnection And Storage
This may activate the pressure relief valve resulting in helium leakage. When performing helium circuit decontamination, disconnect the flexible hoses from the compressor unit immediately after shutdown. ULVAC CRYOGENICS INCORPORATED... -
Page 32: Storage
Check the pressure gauge of the compressor unit periodically. Contact our Service Engineering Division or the nearest customer support center if the pressure keeps lower. There is a possibility that a leakage might have occurred. ULVAC CRYOGENICS INCORPORATED... - Page 33 This is to prevent the damage caused by the lack of the oil when starting the compressor unit again after long-term storage. When transporting the compressor unit, pack it in the same way as at the time of shipment and avoid excess impact. ULVAC CRYOGENICS INCORPORATED...
- Page 34 Disconnection and Storage This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
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Page 35: Maintenance
Remove the rear panel of the compressor unit (Figure 6-1). With a spanner, remove the nuts that fix the SUPPLY and RETURN coupling (male) on the rear panel (two nuts). Remove four flexible hose connected to the port close to adsorber inlet inside compressor unit. ULVAC CRYOGENICS INCORPORATED... - Page 36 (Left) Figure 6-2 Remove the rear panel. (Right) Hold here Turn the bolt Figure 6-3 Disconnect the flexible hose at the adsorber inlet. (Left) Figure 6-4 Remove the adsorber mounting bolt, (Right) and slide out the adsorber. ULVAC CRYOGENICS INCORPORATED...
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Page 37: Figure 6-5 Adsorber Replacement Record
Pull out the rear side of the adsorber from the plate, and slide it out from the compressor unit WARNING When Disposing used adsorber, make sure to remove high pressure helium gas inside completely. NOTE: Use helium charging adaptor to remove helium gas safely. ULVAC CRYOGENICS INCORPORATED... - Page 38 When the gas pressure is lowered, it is necessary to charge helium. Investigate the cause of the pressure reduction before adding helium gas. If there is a leakage, take an adequate measure to stop leakage before charging. Improperly connected self-sealing coupling might be one of the causes. ULVAC CRYOGENICS INCORPORATED...
- Page 39 4. Adjust the low pressure side of the regulator at 1.8 MPaG. 5. Open the charge valve slowly and perform the following instruction according to the state of the compressor. If the compressor unit is running under normal operating conditions, replenish it ULVAC CRYOGENICS INCORPORATED...
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Page 40: Charging Helium Gas
7. Close the regulator and remove the charging hose from the charge inlet. High pressure Low pressure Front Panel side side Bottle Charging Hose Valve Regulator Remove the front panel. ® CRYO-U Charging Valve Helium Gas Bottle Flexible Hoses Compressor Charging Helium Gas Figure 6-6 ULVAC CRYOGENICS INCORPORATED... -
Page 41: Cleaning Heat Exchanger
Use a vacuum cleaner to clean up the dust on the surface of the heat exchanger and the air inlet on the front panel. Use cautions as the heat exchanger has sharp edges on the surface. Attach the front panel. ULVAC CRYOGENICS INCORPORATED... - Page 42 Maintenance This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
- Page 43 2) Overload relay (OL1) or circuit Check the power supply protector (CP1, CP2 ) is active. voltage. Contact us. (Inform the room temperature of the site.) 3) Compressor motor failure Contact us. ULVAC CRYOGENICS INCORPORATED...
- Page 44 Put on the protective cover. If the CP2 is activated repeatedly, please contact us. Protective cover Cable tie Figure A-1 CP2 Cable tie and protective cover Figure A-2 CP2 lever down Figure A-3 P2 lever lifted up ULVAC CRYOGENICS INCORPORATED...
- Page 45 Compressor Unit Instruction Manual Table A-2 Operating Log Ｖ× φ CRYOCOOLER S/N POWER OPERATING COMPRESSOR S/N Cryocooler Measuring condition Compressor unit Notes Temperature Pressure [Pa] stage stage (*) Measure cooling water flow rate with flow meters for each compressor unit. ULVAC CRYOGENICS INCORPORATED...
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Page 47: Appendix Bschematic Diagram
Set pressure: 2.41MPaG (350psi) ― Differential Located between the supply and return line. This valve adjusts pressure maximum differential pressure while the compressor is in regulating valve operation. Set pressure: 1.34MPaG (195psi) ULVAC CRYOGENICS INCORPORATED... - Page 48 Contact capacities of CR1 are as follows: Maximum voltage AC250V DC125V Maximum current Rated load Resistance load (Induction load) AC220V 5A (2A) DC 24V 5A (2A) Minimum applicable load DC5V 1mA ULVAC CRYOGENICS INCORPORATED...
- Page 49 Compressor Unit Instruction Manual COMPRESSOR MOTOR (6A) Color of wiring Figure B-1 C10AT Circuit Diagram 200VAC: Black, 24VDC: Blue, GND: Green / Yellow Wires connected to CN1 11,12 and CN3 4,5: Orange ULVAC CRYOGENICS INCORPORATED B-3/B-4...
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Page 50: Figure B-2 Connector Wiring For Local Operation
Compressor Unit Instruction Manual REMOTE / RESPONSE Circuit <For LOCAL operation> <For REMOTE operation> C10AT unit C10A本体 C10AT unit C10A本体 Remote Connector リモートコネクタ Inner Power Source +24V リモートコネクタ Remote Connector Inner Power Source +24V 内部電源 +24V 内部電源 +24V Operation Switch 運転スイッチ... -
Page 51: Appendix C Flexible Hose
・ Do not twist a flexible hose especially when making continuously bent connections. ・ Keep away from water and salt to prevent corrosion. Do not place heavy objects on flexible hoses in order to prevent deformation or collapse. MD0C001E,2010.06 ULVAC CRYOGENICS INCORPORATED... - Page 52 Flexible Hose This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
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Page 53: Appendix Dflow Diagram
At the same time, the helium from oil separator enters an adsorber. As passing through the adsorber, oil mist contained in helium is removed by adsorption and the helium is supplied to the cold head via flexible hose. ULVAC CRYOGENICS INCORPORATED... - Page 54 Differential pressure ｵｲﾙ ｵｲﾙﾘﾀｰﾝ Oil return 差圧弁 regulating valve ｲﾝｼﾞｪｸｼｮﾝ ｵﾘﾌｨｽ orifice injection 冷却ファン ｵﾘﾌｨｽ orifice Cooling fan 風の流れ Air flow 電磁弁 Solenoid valve Check valve チェックバルブ Heフロー Helium flow オイルフロー Oil flow Figure D-1 C10AT Flow Diagram ULVAC CRYOGENICS INCORPORATED...
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Page 55: Service Network
ULVAC CRYOGENICS INC. www.ulvac-cryo.com 1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan <Sales> Tel: +81-467-85-8884 <Service Engineering Division> Tel: +81-467-85-9366 Fax: +81-467-83-4838 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC. - Page 56 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...
- Page 57 Revision History Date Revision No. Contents 2019/04/15 2019.04 First edition 2020/10/01 2020OR01 Appendix B Circuit Diagram Figure B-1 has been modified. ULVAC CRYOGENICS INCORPORATED...
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