Ulvac C30HMVRT-E4 Instruction Manual

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COMPRESSOR UNIT

Instruction Manual

C30HMVRT-E4

Export Control Policy

Vacuum pumps that pump nitrogen gas at pumping

speed of 15000L/s or more fall under row 2(35) of

appended table 1 of Japan's Export Trade Control Order,

which is based on international export control regimes.

Customers must follow all related rules and regulations

such as Foreign Exchange and Foreign Trade Act and

take

appropriate

procedures

when

exporting

re-exporting those products.

ULVAC CRYOGENICS INCORPORATED

D/N. MD30HM4E, 2023NR03

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Summary of Contents for Ulvac C30HMVRT-E4

Page 1 1 of Japan’s Export Trade Control Order, which is based on international export control regimes. Customers must follow all related rules and regulations such as Foreign Exchange and Foreign Trade Act and take appropriate procedures when exporting re-exporting those products. ULVAC CRYOGENICS INCORPORATED D/N. MD30HM4E, 2023NR03...
Page 3 The period of less than one year after installation in your company or your customer’s premises, or a period of less than 18 months (starting from the shipment date) after shipment from ULVAC CRYOGENICS INCORPORATED (hereinafter “UCI”), which is shorter, is selected.
Page 4 2.2 Exclusion of opportunity loss from warranty liability Regardless of the gratis warranty term, compensation to opportunity losses incurred to your company or your customers by failures of ULVAC CRYOGENICS products and compensation for damages to products other than ULVAC CRYOGENICS products and other services are not covered under warranty.
Page 5 After the products are delivered, please fill out the following information in the blanks. In the event of a fault, please contact us. Refer to SERVICE NETWORK at the end of this book, or visit our web site at www.ulvac-cryo.com to locate our business base close by.
Page 6 When unidentified failure occurs, please contact our Service Engineering Division or the nearest customer support center. Refer to the SERVICE NETWORK at the end of this book or visit our website at www.ulvac-cryo.com for our contact information. 6．General Precautions...
Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage. Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. ULVAC CRYOGENICS INCORPORATED MZ0F001E 2023JA04...
Page 8 This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
Page 9 Section 6 Wiring and Piping, Removal and Storage ·············································· 6-1 Removal of wiring and piping and displacement of compressor ··················· 6-1 Maintenance in storage ······································································ 6-2 Section 7 Maintenance ··················································································· 7-1 Scheduled maintenance ····································································· 7-1 Replacement of adsorber ···································································· 7-1 Adjusting system helium pressure ························································· 7-5 ULVAC CRYOGENICS INCORPORATED...
Page 10 Troubleshooting procedures ································································ 8-2 Alarm code descriptions ······································································ 8-4 Appendix A Operating log ·············································································· A-1 Appendix B Combination of Compressor Unit and Cryopump/Super Trap ················· B-1 Appendix C C30HMVRT-E4 Schematic Diagram ················································ C-1 Appendix D Compressor Flow Diagram ···························································· D-1 ULVAC CRYOGENICS INCORPORATED...
Page 11 Table of Contents List of Figures Figure 1-1 C30HMVRT-E4 Compressor dimensions ·········································· 1-3 Figure 1-2 Compressor front view ··································································· 1-6 Figure 1-3 Compressor rear view ··································································· 1-7 Figure 1-4 Anchor bolts mounting positions (example) ········································ 1-8 Figure 2-1 Space and levelness requirement for the compressor unit ·················· 2-2 Figure 2-2 Customer’s system power circuit ··················································...
Page 12 List of troubleshooting before operation ········································· 8-2 Table 8-2 List of troubleshooting related to operation ····································· 8-3 Table A-1 Operating log ··········································································· A-1 Table B-1 Combination of C30HMVRT-E4 compressors and cryopumps ············ B-1 Table C-1 Controller setting and connections ··············································· C-1 ULVAC CRYOGENICS INCORPORATED...
Page 13 6 times per hour. Do not attempt to control the temperature of a Super Trap by starting up and shutting down the compressor unit. Please contact us when the Super Trap needs temperature control operation. ULVAC CRYOGENICS INCORPORATED...
Page 14 It could lead to a serious accident such as electric shock and/or damage to the equipment. ・ Follow recommended sizes for wires and cables. ・ Power lines and signal lines must be wired at least 10cm separate from one another. ULVAC CRYOGENICS INCORPORATED...
Page 15 Also, parts of inside the compressor unit are still hot just after the compressor has been stopped. Wait at least 15 minutes to open the cover to avoid the risk of burns. ULVAC CRYOGENICS INCORPORATED...
Page 16 The sealing sticker is located inside the panel of the compressor unit. Figure Example of the sealing sticker pasted on the self-sealing coupling ULVAC CRYOGENICS INCORPORATED...
Page 17 Remove the coupling to make it visible that the adsorber has been depressurized before proceeding to the next step. We provide Safety Data Sheet (called SDS) of our products upon your request. Please contact us if necessary. ULVAC CRYOGENICS INCORPORATED MDIW001E,2018JE01 IW-1...
Page 18 This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED IW-2...
Page 19 Roles of compressor in cryopump system ..............1-2 Compressor specifications ....................1-3 Component descriptions ....................1-6 CRYO-U cryopump installation ................... 1-11 ® Introduction The C30HMVRT-E4 compressor unit changes its operation frequency with an inverter installed inside. Table 1-1 C30HMVRT-E4 Compressor model Number of Compressor Cooling Refrigerator...
Page 20 It is necessary to check the elapsed time of operation and replace adsorber regularly to maintain refrigeration capacity as well as prevent breakdown of the refrigerator. Refer to “Section 7.2 Replacement of adsorber”. The Compressor requires maintenance. Read “Section 7 Maintenance” thoroughly and conduct regular maintenance. ULVAC CRYOGENICS INCORPORATED...
Page 21 Section 1 C30HMVRT-E4 Compressor Description Compressor specifications 1.5.1 Dimensions Figure 1-1 shows the dimensions of C30HMVRT-E4. 462.5 （10） P RG RESET FUNC STOP DATA （490）Ｃ３０ＨＭＶＲＴ－Ｅ４ＰＷＲＳＴＳ...
Page 22 Cooling water supply pressure Max. 0.7MPaG Pressure drop (water inlet to water outlet) 0.02 – 0.17MPa (See Fig. 2-3) Alkalinity (pH) 6.5 – 8.0 pH Calcium Carbonate < 75ppm Refer to “Section 2.4 Cooling water requirements” for more details. ULVAC CRYOGENICS INCORPORATED...
Page 23 Section 1 C30HMVRT-E4 Compressor Description Table 1-5 Installation environment and operation requirements Item C30HMVRT-E4 Ambient operating temperature 10 – 35 °C Ambient storage temperature -10 – 55 °C Humidity 5 - 90% (non-condensing) Altitude < 1000m Vibration < 0.6G, 10 – 55 Hz...
Page 24 ヘリウム充てん口より行ってください詳細は取扱説明書を参照してください ③Helium charge pressure label ④Helium gas charge port (Behind the front panel) ⑤Caster Figure 1-2 Compressor front view ULVAC CRYOGENICS INCORPORATED...
Page 25 Section 1 C30HMVRT-E4 Compressor Description ⑰INVERTER Connector I N V E R T E R I N P U T P O W E R I N V E R T E R O U T P U T P O W E R...
Page 26 This shows a list of alarm codes indicated by the STS (Status) LED indicators for alarm indication. Refer to “Section 8.3 Alarm code descriptions” for troubleshooting procedure of each alarm code. All status display LED indicators will remain unlit when there is no problem. ULVAC CRYOGENICS INCORPORATED...
Page 27 Section 1 C30HMVRT-E4 Compressor Description ⑦STATUS DISPLAY and RESET BUTTON There are two kinds of status display, 6 LED indicators for the compressor operation status and 8 STS LED indicators for alarm indication. 「PWR」 indicator (RED) lights up when the compressor is powered ON.
Page 28 Connector port for temperature controller unit. Use this connector when you wish to make inverter frequency be switched according to the cryopump temperature. To use this function, dedicated cables are required. Contact us for the detail. ULVAC CRYOGENICS INCORPORATED 1-10...
Page 29 CRYO-U ® cryopump installation C30HMVRT-E4 can run up to three refrigerators of cryopump units at a time. Refer to the Delivery Specifications tailored for you. Refer to “Section 4.4 Cryopump installation” for the detail of connection between cryopumps and compressors.
Page 30 Compressor Unit Instruction Manual This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED 1-12...
Page 31 Also, a space of 500mm back and front of the compressor is needed for maintenance. The space around the power cable on the back of the compressor unit must be cleared for maintenance work. Refer to Figure 1-1 in Section 1 for the dimensions of the compressor. ULVAC CRYOGENICS INCORPORATED...
Page 32 Almost any standards require installing a breaker for branch in upstream of equipment and protect power supply line which connects with each equipment; circuit breakers must be installed. Failure to observe this warning may result in damage and/or failure of the equipment. ULVAC CRYOGENICS INCORPORATED...
Page 33 AC220V 3φ T S R Power cable T S R T S R C30HMVRT-E4 compressor X 2 Figure 2-2 Customer’s system power circuit Table 2-2 shows wire gauges of refrigerator cable and remote cable. Table 2-2 Control and signal wire gauges...
Page 34 If the cooling water of temperature below 10°C is supplied continuously while stopping the compressor, it may increase viscosity of lubricant oil and cause start up failure of the compressor when the operation command is sent. ULVAC CRYOGENICS INCORPORATED...
Page 35 If the cooling water of temperature below 10°C is supplied continuously while the compressor is suspended, it may increase viscosity of lubricant oil and cause start up failure of the compressor when the operation command is sent. ULVAC CRYOGENICS INCORPORATED...
Page 36 Remote interface specifications Item Specification Model Signal Quantity Photo Coupler Isolation Input Maximum voltage: 26VDC, Input Current: less than 8mA C30HMVRT-E4 Rated Voltage: ON:20V and above, OFF:3V or less No-voltage a contact Output Maximum Load: 30VDC / 100mA ULVAC CRYOGENICS INCORPORATED...
Page 37 Since it is the contact output, the polarity of DC24V in Figure 2-5 can be reversed. Make provisions for the interface circuit at the equipment side. (Equipment side) SIG1 SIG2 Relay Figure 2-5 Remote output interface circuit ULVAC CRYOGENICS INCORPORATED...
Page 38 Turn the command signal ON for more than 0.3 second. (Refer to the description of COMP STOP below). Command signals for refrigerators should be turned ON to start the refrigerators. ULVAC CRYOGENICS INCORPORATED...
Page 39 This is an answer-back signal responding to the compressor pump operation command. When the compressor starts operation, the answer-back signal is sent to the equipment. Note: Refer to “Section 2.6.6 Signal timing charts –Answer-back signal delay” as well. ULVAC CRYOGENICS INCORPORATED...
Page 40 Timing chart for Alternate operating mode with three refrigerators (*1) COMP START (*1) COMP STOP CH1, CH2, CH3 REF COMP CH1, CH2, CH3 REF 1) The holding time is 0.3 seconds or more. Figure 2-7 Timing chart for Momentary operating mode with three refrigerators ULVAC CRYOGENICS INCORPORATED 2-10...
Page 41 Therefore, be sure to set the timeout time of an answer-back signal as 8 seconds or more in order to monitor the operating conditions of the compressor correctly. ULVAC CRYOGENICS INCORPORATED 2-11...
Page 42 INPUT POWER SUPPLY COMP START COMP STOP CH1, CH2,CH3 REF COMP ACK CH1, CH2,CH3 ACK COMP OPERATION CH1, CH2 CH3 OPERATION (*1) t≦2seconds Figure 2-10 Timing chart when a short power interruption occurs (In Momentary operating mode) ULVAC CRYOGENICS INCORPORATED 2-12...
Page 43 In “Alternate operating mode”, the compressor restarts as soon as the input power is recovered because there is always the command from the equipment side. NOTE: Refer to “Section 4.5.2 Connecting remote cables” for remote signal wiring. ULVAC CRYOGENICS INCORPORATED 2-13...
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Page 45 Please read the enclosed cover letter for the details. Depending on your specification, the option part(s) in Table 3-2 is attached. Table 3-1 Carton contents Item Quantity Compressor C30HMVRT-E4 Manual Inverter user’s manual Connector for remote operation Table 3-2 Optional parts Item Quantity...
Page 46 Failure to observe this warning may result in damage and/or break down of the equipment. CAUTION When carrying the flexible hose, ensure that the bending radius does not become narrower than the minimum value listed above. In the same manner as other equipment, avoid corrosion and condensation when storing. ULVAC CRYOGENICS INCORPORATED...
Page 47 WARNING Following procedure must be undertaken by an authorized electrician familiar with the structure and risk of the product. Failure to observe this warning may result in severe bodily injury or fatal accident. ULVAC CRYOGENICS INCORPORATED...
Page 48 Then tighten the coupling with two spanners as shown in Figure 4-3. See Figure 4-4 for usage of two spanners. The torque value is 20N･m for both couplings. Complete the procedure as quick as possible to minimize helium gas leakage. ULVAC CRYOGENICS INCORPORATED...
Page 49 Clockwise: To tighten Helium Connector Counter Clockwise: To loosen SUPPLY GAS/ Tighten with 30mm spanner RETURN GAS Refrigerator Hold with 26mm inch spanner Self-sealing Coupling Figure 4-4 Connecting and disconnecting helium flexible hoses to compressor and refrigerator ULVAC CRYOGENICS INCORPORATED...
Page 50 Turn it until firm enough to fix the plug. Connect the refrigerator cable to “COLD HEAD POWER NO.2 and NO.3” with the same procedure. ULVAC CRYOGENICS INCORPORATED...
Page 51 “INPUT POWER” receptacle on the rear panel of the compressor, turn the rotating part of the plug to the right. Turn it until it won’t turn any more to connect the plug properly. Figure 4-5 Connecting input power cable connector ULVAC CRYOGENICS INCORPORATED...
Page 52 Remote cables must be wired only by authorized electrician familiar with the structure and operation of this equipment. Failure to observe this warning may result in damage to and/or break down of the equipment. C30HMVRT-E4 REMOTE/RESPONSE PIN No Input Signal...
Page 53 Section 4 Equipment Installation, Piping, and Wiring Figure 4-7 shows the typical wiring for C30HMVRT-E4 with cryopumps in MOMENTARY OPERATING MODE. REMOTE Equipment RESPONSE Interface CH1REF CH2REF CH3REF Output Reference COMP START COMP STOP CH1 ACK1 CH1 ACK2 CH2 ACK1...
Page 54 9. Place the solder identification label on the connector or cables. CAUTION For lead-free soldering, use only specified lead-free solder iron and tip. Do not mix lead eutectic solder with lead-free solder. Failure to observe this warning may result in decreasing the life of soldered parts severely. ULVAC CRYOGENICS INCORPORATED...
Page 55 C30HMVRT-E4 system is not separated from other equipments it may cause interference to sensitive sensor wires, analog wires, and other high impedance wiring of other equipments.
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Page 57 If the pressure relief valve blows, stop the operation and leave the compressor for several hours to ensure that the helium filling pressure is in the range which can be still operated. If the helium filling pressure is reduced, please contact us for maintenance. ULVAC CRYOGENICS INCORPORATED...
Page 58 If PWR LED and RDY LED indicators light up after a few seconds from power-on, the compressor is ready for operation. If the buzzer keeps ringing after power-on and all eight STS indicators light up, it means ULVAC CRYOGENICS INCORPORATED...
Page 59 These two recorded values depend on the length of flexible hoses and a kind of the refrigerator mounted on the cryopump system. The recorded values are used as reference value for maintenance or replacement of the product explained in the following. ULVAC CRYOGENICS INCORPORATED...
Page 60 Also, operate the refrigerator for ten minutes at a time every six months. Failure to observe this precaution may result in damage to the compressor when restarting operation. NOTE: Circulate cooling water during regular operation of the compressor. ULVAC CRYOGENICS INCORPORATED...
Page 61 For close loop type cooling-water supply system, it is recommended to additionally install a water drain line diverged from the water return line on the equipment in order to release water pressure in the compressor. ULVAC CRYOGENICS INCORPORATED...
Page 62 Place the compressor on a flat floor and lock all the casters. Remove the piping and wiring from the compressor and put dust caps or dust plugs on the helium line connectors. ULVAC CRYOGENICS INCORPORATED...
Page 63 If the value is clearly decreasing compared to the one before, there is a possibility of helium leakage. Please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...
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Page 65 Replacement of adsorber WARNING The following replacing procedure must be undertaken by authorized personnel familiar with the structure and risk of the product. Failure to observe this warning may result in severe bodily injury or fatal accident. ULVAC CRYOGENICS INCORPORATED...
Page 66 7. Remove the bolts that secure the adsorber to the base of the compressor with the proper spanner (Figure 7-6). 8. Slide the adsorber outward and remove it from the mounting tab on the base of the compressor. And then remove the adsorber from the compressor (Figure 7-7). ULVAC CRYOGENICS INCORPORATED...
Page 67 Figure 7-3 Remove the rear panel Figure 7-4 Remove self-sealing coupling Clockwise: Tightening Counter Clockwise: Loosening TURN with 30mm spanner Adsorber HOLD with 26mm spanner Flexible hose (Self-sealing coupling) Figure 7-5 Connecting and disconnecting self-sealing coupling with two spanners ULVAC CRYOGENICS INCORPORATED...
Page 68 As a guide for the next replacement, it is recommended to make a note of the value that the current accumulated operation time added to the adsorber replacement cycle hours in ULVAC CRYOGENICS INCORPORATED...
Page 69 3. Wait until the helium pressure gauge reads the prescribed standard value described above. When the pressure reaches the standard value, close the valve by turning its knob clockwise. 4. Return the front panel to the compressor with the six screws. ULVAC CRYOGENICS INCORPORATED...
Page 70 When charging helium or performing helium circuit decontamination, equipments (regulators, charging hoses, adopters, etc.) that can be used at 2.0MPaG or above are required. Table 7-2 shows items and devices required for adding helium gas. ULVAC CRYOGENICS INCORPORATED...
Page 71 3. Purge the pressure regulator and helium charging hose. 3-1 Turn the pressure regulator handle in clockwise slowly until it becomes hard (*1) to turn. Then turn approximately 1/8 to 1/6 more to slightly open the pressure regulator. ULVAC CRYOGENICS INCORPORATED...
Page 72 Also check that there is no damage in these plumbing. WARNING The following procedure must be undertaken by an authorized electrician familiar with the structure and risk of the product. Failure to observe this warning may result in severe bodily injury or fatal accident. ULVAC CRYOGENICS INCORPORATED...
Page 73 When it is locked by malfunction Maintenance type (*1) S: Scheduled U: Unscheduled NOTE: For more information on planning maintenance, purchasing maintenance parts, diagnosis or servicing, please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...
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Page 75 Alarm code descriptions ..............8-4 Problem types C30HMVRT-E4 compressor indicates the state of warning or breakdown with a buzzer sound and STS indicators. When protective function of the inverter is activated, alarm information will be displayed on the inverter touch panel. (For alarm information details please refer to inverter user’s manual.
Page 76 ※ light up. Inverter failure. Inverter malfunction. Call for servicing ※ ※If the problem is not solved, please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...
Page 77 Refer to Section 2 and Section 4. After power is Longer electric Compressor needs restart interrupted for longer power interruption manually. than 2 seconds, than set time (2 compressor does seconds). not start operation. ULVAC CRYOGENICS INCORPORATED...
Page 78 If the input power supply voltage is low, check the input power line and the user’s power supply that has distributed electric power to the compressor. When there is an open phase(s), all indicators should be blinked or turned off. ULVAC CRYOGENICS INCORPORATED...
Page 79 If there is an earth fault or short circuit in the parts above or no identified cause, Please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...
Page 80 If the indicator shows the same status after pushing “RST” button and turning OFF and ON the power of the compressor, please contact our Service Engineering Division or the nearest customer support center for replacement and adjustment of the controller immediately. ULVAC CRYOGENICS INCORPORATED...
Page 81 ® COMPRESSOR S/N OPERATING LOG REFRIGERATOR S/N Cryopump Measuring condition Compressor unit Remarks Temperature Pressure stage stage 【Pa】【【【】】】 (*) Measure cooling water flow rate with flow meters for each compressor unit. ULVAC CRYOGENICS INCORPORATED...
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Page 83 Appendix B Combination of C30HMVRT-E4 Compressor and Cryopump Appendix B Combination of C30HMVRT-E4 Compressor and Cryopumps Table B-1 Combination of C30HMVRT-E4 compressor and cryopumps Cryopump Specifications Maximum number of refrigerator that can Refrigerator Cryopump Size run by single compressor Model...
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Page 85 Appendix C C30HMVRT-E4 Schematic Diagram Appendix C C30HMVRT-E4 Schematic Diagram Schematic diagrams of the C30HMVRT-E4 compressor unit are shown in Figure C-1. Controller settings and connections are shown in Table C-1. Table C-1 Controller settings and connections Refrigerator Maximum Figure...
Page 86 Compressor Unit Instruction Manual C30HMVRT-E4 Schematic Diagram 図 C-1 ULVAC CRYOGENICS INCORPORATED...
Page 87 The set pressure of pressure relief valve at the refrigerator is 1.9MPaG. Please ※1 note that the refrigerator pressure relief valve releases gas before the compressor pressure relief valve in actual system. ULVAC CRYOGENICS INCORPORATED...
Page 88 Oil heat changer equalization Oil injection filter RETURN Accumulator Low pressure switch Helium filling valve Helium gas flow Helium gas and oil flow Oil flow Cooling water flow Compressor flow diagram Figure D-1 ULVAC CRYOGENICS INCORPORATED...
Page 89 ULVAC CRYOGENICS INC. www.ulvac-cryo.com 1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan <Sales> Tel: +81-467-85-8884 <Service Engineering Division> Tel: +81-467-85-9366 Fax: +81-467-83-4838 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC.
Page 90 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...
Page 91 “Table 3-3 Flexible Hose Specifications” Descriptions have been added. “Safety Instructions” Description on the sealing sticker has 2023-08-04 2023AT02 been added. 2023-11-07 2023NR03 “Safety Instructions” Description on the adsorber disposal has been modified. Appendix D has been modified. ULVAC CRYOGENICS INCORPORATED...
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