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C30PMVR
Ulvac C30PMVR Manuals
Manuals and User Guides for Ulvac C30PMVR. We have
1
Ulvac C30PMVR manual available for free PDF download: Instruction Manual
Ulvac C30PMVR Instruction Manual (98 pages)
COMPRESSOR UNIT
Brand:
Ulvac
| Category:
Air Compressor
| Size: 4 MB
Table of Contents
General Precautions
6
Table of Contents
9
Compressor Unit Safety Instructions
13
Electrical Wiring Connections
14
Cooling Water
15
Maintenance Precautions
15
Disposal Considerations
17
C30Pmvr_Compressor Description
19
Introduction
19
Terminology
19
Cryopump System Documents
19
Roles of Compressor in Cryopump System
20
Compressor Specifications
20
Figure 1-1 C30PMVR External View
20
Table 1-4 Cooling Water Requirements
22
Component Descriptions
23
Figure 1-3 Compressor Front View
23
CRYO-U ® Cryopump Multiple Installation
28
Considerations before Installation
29
Combination of Cryopump and Compressor
29
Installation Environment Requirements
29
Wiring Requirements
30
Figure 2-1 Required Space for Compressor Installation (Scale: MM) and Levelness
30
Table 2-1 Input Power Cable Specifications
30
Figure 2-2 Equipment-Side Power Circuit
31
Table 2-2 Control and Signal Wire Gauges
31
Cooling Water Requirements
32
Table 2-3 Recommended Cooling Water for Compressor
32
Length of Cables and Flexible Hoses
34
Remote Functions
34
Table 2-4 Standard Cables and Flexible Hoses
34
Table 2-5 Remote Interface Specifications
34
Figure 2-4 Remote Input Interface Circuit
35
Figure 2-5 Remote Output Interface Circuit
35
Table 2-6 Remote Interface Signals
36
Figure 2-6 Timing Chart for Alternate Operating Mode with Two Refrigerators
38
Figure 2-7 Timing Chart for Momentary Operating Mode with Two Refrigerators
39
Figure 2-8 Signal Delay When Powered On(In Alternate Operating Mode
40
Figure 2-9 Signal Delay When the Time Period from a Stop to a Restart Is Short
41
Figure 2-10 Timing Chart When a Short Power Interruption Occurs
41
Unpacking, Inspection and Storage
43
Compressor Carton
43
Shipping Inspection
43
Figure 3-1 Appearance of a Compressor Carton
43
Unpacking
44
Figure 3-2 Remove Cardboard and Insert Forks Underneath the Compressor
45
Carton Contents
46
Inspection of the Compressor and Accessories
46
Table 3-1 Carton Contents
46
Flexible Hoses and Specifications
47
Table 3-2 Flexible Hose Specifications
47
Equipment Installation, Piping, and Wiring
49
Before Installation
49
Figure 4-1 Installation Procedure
49
Connecting Cooling Water Piping
50
Connecting and Disconnecting Helium Flexible Hoses
50
Connecting Procedures
51
Single Cryopump Connections
53
Multiple Cryopump Connections
54
Electrical Connections
55
Figure 4-7 Connecting Input Power Cable Connector
55
Operation
57
Wire Rooting for Compressor and Other Equipments
59
Operation
61
Verification of Helium Static Pressure
61
Compressor Operation
62
Inspection after Replacing Helium Circulation Components
65
Precautions for When Compressor Is Not in Operation
65
Maintenance Operation for a Compressor Stopped for a Long Period
65
Table 5-1 Supply Line Helium Pressure During Operation
65
Wiring and Piping Removal and Storage
67
Removal of Wiring and Piping and Displacement of Compressor
67
Maintenance in Storage
69
Maintenance
71
Scheduled Maintenance
71
Replacement of Adsorber
71
Table 7-1 Scheduled Maintenance
71
Adjusting System Helium Pressure
75
C30PMVR Compressor Unit Instruction Manual
78
Table 7-2 Preparation for Adding Helium Gas
78
Regular Maintenance of Helium Lines, Cooling Water Piping and Electrical Wiring
80
Maintenance Parts
80
Table 7-3 Maintenance Parts
80
Troubleshooting
81
Problem Types
81
Troubleshooting Procedures
82
Appendix A Operating Log
87
Appendix B Combination of C30PMVR Compressor and Cryopump
89
Appendix C C30PMVR Schematic Diagram
91
Appendix D Compressor Flow Diagram
93
Compressor
94
Service Network
95
Revision History
97
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