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D/N.MD30M00E, 2018FY10 ULVAC CRYOGENICS INCORPORATED
COMPRESSOR UNIT
Instruction Manual
C30PZ
Export Control Policy
appropriate
procedures
when
exporting
or
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Table of Contents
Related Manuals for Ulvac C30PZ
Summary of Contents for Ulvac C30PZ
- Page 1 Foreign Exchange and Foreign Trade Act and take appropriate procedures when exporting re-exporting those products. D/N.MD30M00E, 2018FY10 ULVAC CRYOGENICS INCORPORATED ...
- Page 3 As a general rule, diagnosis of failure should be done on site by customer. However, ULVAC CRYOGENICS or our service network can perform this service for an agreed fee upon the customer’s request. There will be no charge if the cause...
- Page 4 ULVAC CRYOGENICS. (2) Damage during transportation When damage by delivery/transportation is admitted, the product will be repaired free of charge within the range of the guarantee expressed in the sales contract.
- Page 5 2.3 Repair period after production is discontinued ULVAC CRYOGENICS shall accept product repairs for seven years after production of the product is discontinued. 3. Service Form After the products are delivered, please fill out the following information in the blanks. If you have any questions or technical problems please feel free to contact the nearest Customer Support Center or headquarters.
- Page 6 (3) If you have any questions or comments on this document, please do not hesitate to contact us. The phone numbers of local customer support centers are listed at the end of this manual. ULVAC CRYOGENICS INCORPORATED...
- Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage . Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED...
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Page 9: Table Of Contents
Maintenance 6.1 Scheduled and Unscheduled Maintenance･･･････････････ 6-1 6.2 Replacement of Adsorber･･･････････････････････････････ 6-1 6.3 Charging Helium Gas･･････････････････････････････････6-3 APPENDIX Ａ Troubleshooting･･･････････････････････････････････････ A-1 Ｂ Control･･･････････････････････････････････････････････ B-1 ULVAC CRYOGENICS INCORPORATED I ... - Page 10 6-1 Charging Helium Gas･････････････････････････････････････ 6-5 B-1 REMOTE Wiring Diagram･････････････････････････････････ B-3 B-2 RESPONSE Wiring Diagram･･･････････････････････････････ B-4 B-3 FAILURE OUT Wiring Diagram････････････････････････････ B-5 B-4 C30PZ Electric Circuit Diagram････････････････････････････ B-7/8 D-1 C30PZ Flow Diagram･･････････････････････････････････････ D-2 TABLES Table 1-1 Compressor Unit Standard Specifications･･･････････････････ 1-2 1-2 ...
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Page 11: Safety Instructions
6 times per hour. Do not attempt to control the temperature of a Super Trap by starting up and shutting down the compressor unit. Please contact us when the Super Trap needs temperature control operation. ULVAC CRYOGENICS INCORPORATED... - Page 12 ☆We collect used adsorbers. If there is any used absorber, please contact a person in your local dealership or Ulvac Techno Ltd. to have it picked up or send it directory to our Service Engineering Division. We only accept CTI adsorbers and our adsorbers.
- Page 13 Also, parts of inside the compressor unit are still hot just after the compressor has been 12.絈 絈 stopped. Wait at least 15 minutes to open the cover to avoid the risk of burns. ULVAC CRYOGENICS INCORPORATED...
- Page 14 This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
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Page 15: Disposal Consideration
We will offer you Material Safety Data Sheet (called MSDS) of our products upon your request. If you have any questions, please contact our Service Engineering Division or the nearest customer support center. MZIW001E,2010.01 ULVAC CRYOGENICS INCORPORATED IW-1... - Page 16 This page intentionally left blank. IW-2 ULVAC CRYOGENICS INCORPORATED...
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Page 17: Introduction
The standard specifications of the compressor unit is described in Table 1-1, the external dimensions of the C30PZ is in Figure 1-1, parts names are in Figure 1-2, and functions of the parts in Table1-2. -
Page 18: Specifications
At starting up, the value increases by approx. 10%. (*1) (*2) Incoming power condition:AC200Vxφ3x60Hz. ULVAC CRYOGENICS INCORPORATED ... - Page 19 ※All connectors meet the UL standard. ※ No.1, 2: Cables will be attached. Please specify the length of the cables at time of order. ※ N o.3〜5: Cables are not attached. ULVAC CRYOGENICS INCORPORATED 1-3 ...
- Page 20 Refer to section 4 for the setting method. (*2) When「HHHH」or「----」is displayed, see Table 1-2 for details. ULVAC CRYOGENICS INCORPORATED ...
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Page 21: Figure 1-1 Dimensions
(120) (76) ＷＡＴ ＥＲ ＩＮ ＷＡＴ ＥＲ ＯＵＴ 【 Rear 】 Dimensions Figure 1-1 ULVAC CRYOGENICS INCORPORATED 1-5 ... - Page 22 Cooling Water Outlet Connector （Rc3／8） 【 Rear 】 Components and Locations (1/3) Figure 1-2 ULVAC CRYOGENICS INCORPORATED ...
- Page 23 DN Key COMP Key ENT Key COLD HEAD Key Components and Locations (2/3) Figure 1-3 ULVAC CRYOGENICS INCORPORATED 1-7 ...
- Page 24 C N- A CP1 CP 2 CP2 Figure 1-4 Components and Locations (3/3) ULVAC CRYOGENICS INCORPORATED ...
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Page 25: Components Descriptions
Display contents：Light off （Parameter is OFF） Lamp Flashing （ALARM activated） Light on （Parameter is ON） (*1) Refer to Table 4-2, 4-4 for descriptions of ALARM code. ULVAC CRYOGENICS INCORPORATED 1-9 ... - Page 26 It is a connector to: REMOTE/ ・input ON/OFF signal for C30PZ and each CH. RESPONSE ・output ON ANS signal for C30PZ and ON ANS and READY signal for each CH. Connector ＊Refer to Figure B-1 and B-2 for details. FAILURE OUT It outputs the alarm signal when the alarm activates.
- Page 27 ＊While C30PZ is operating, if the “ON” command is sent to a CH which is not running, the CH will start. H o w t o S t o p ：C30PZ and all CHs will stop by “COMP OFF” command. ＊ By sending “COMP ON” command once again, all the CHs that were operating before being halt by “COMP...
- Page 28 It shuts off all the refrigerator (cold head) circuits including refrigerator motors and refrigerator cables when short circuit occurs in the refrigerator . (Manual reset) Rated Current：15A ULVAC CRYOGENICS INCORPORATED 1-12...
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Page 29: Inspection
(*3)Two sets of standard Helium manifold of with four branch pipes are shipped. The number of branch pipes and the number of the manifold change with your specification. ULVAC CRYOGENICS INCORPORATED 2-1 ... -
Page 30: Cables
If you find any missing parts or damages of the product, please contact our Service Engineering Division or the nearest Customer Support Center. ULVAC CRYOGENICS INCORPORATED... -
Page 31: Installation
4. Ensure to connect inlet/outlet to the right place. Do not connect them the wrong way around. CAUTION Make sure that all water connections are tight. ULVAC CRYOGENICS INCORPORATED... -
Page 32: Cooling Water
It is highly recommended to use cooling tower to circulate the water containing a large amount of carbonic acid. ULVAC CRYOGENICS INCORPORATED ... -
Page 33: Cooling Water Requirement
A dashed arrow (→) in the graph shows the minimum required water flow rate (9L/min.) and water pressure drop (0.06MPa) at the water supply temperature of 30 ℃. Cooling Water Requirement Figure 3-2 ULVAC CRYOGENICS INCORPORATED 3-3 ... - Page 34 Most of the cooling water can be purged from the compressor by blowing air into the compressor for 30 seconds at inlet pressure of 0.2MPaG with the outlet opened. ULVAC CRYOGENICS INCORPORATED ...
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Page 35: Connecting The Super Trap(Refrigerator Unit) To The Compressor Unit･･･････････････････････････････････････3-5
Section 6.3 in this manual. CAUTION Do not operate the compressor unit when helium gas is overcharged (exceed 1.24 MPaG at 20℃ room temperature). ULVAC CRYOGENICS INCORPORATED 3-5 ... - Page 36 ②Tighten the self-sealing coupling using two spanners until the fittings are firmly sealed. When using torque wrench, the recommended torque value is 20N･m. Connecting Flexible Hose Figure 3-3 ULVAC CRYOGENICS INCORPORATED ...
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Page 37: Connecting Electrical Cables
Remote wiring (Refer to Appendix B-1,2) Wire the REMOTE/RESPONSE and FAILURE OUT. Set the REMOTE/LOCAL switch on the front panel as REMOTE. RS232C wiring. Wire RS232C (Refer to Appendix B-4) ULVAC CRYOGENICS INCORPORATED 3-7 ... - Page 38 ＷＡ ＴＥ Ｒ ＩＮ ＷＡ ＴＥ Ｒ ＯＵ Ｔ (SUPPLY) Connecting Piping Cooling (Flexible Hoses) Water Line Figure 3-5 C30PZ Connections ULVAC CRYOGENICS INCORPORATED ...
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Page 39: Operation
＊ Set the parameter if you need to change the default because the parameter will be initialized at this time. cPu1 Return the compressor to ULVAC CRYOGENICS INC. cPu2 Return the compressor to ULVAC CRYOGENICS INC. ... -
Page 40: Parameter Settings
(Temperature control operat the cryopump operation. (Temperature control operation showed in Figure4-1 is ion showed in Figure4-1 is inapplicable). pplicable). ULVAC CRYOGENICS INCORPORATED ... - Page 41 CH8 Temp. Control Range (Parameter No.32) are unavailable, and thereby not showed on the display. *2 : Displayed only when DIP switch ② is ON. ULVAC CRYOGENICS INCORPORATED 4-3 ...
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Page 42: Alarm Codes List
Stop only CH5 Contact us. *1 *2 Stop only CH6 Contact us. Stop only CH7 Contact us. Stop only CH8 Contact us. ULVAC CRYOGENICS INCORPORATED ... - Page 43 ４．REMOTE/LOCAL switch meets the requirements for use. ５．All connections are tight. ６．Using cooling water that meets the requirements. ７．Helium gas static pressure is within allowable range. ULVAC CRYOGENICS INCORPORATED 4-5 ...
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Page 44: Dip Switch Functions
Undefined（needless to set） ７ Communication timer 3 seconds 10 seconds Without line feed With line feed (LF) ８ Communication LF character (LF) character character ULVAC CRYOGENICS INCORPORATED ... - Page 45 Compressor Unit Instruction Manual １ ２ ３ ４ ５ ６ ７ ８ DIP Switch Default Position Figure 4-2 ULVAC CRYOGENICS INCORPORATED 4-7 ...
- Page 46 Operation This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED ...
- Page 47 It might cause a helium leakage also. ・However, only when carrying out helium circuit decontamination procedures for the refrigerator unit, disconnect the flexible hoses from helium gas supply and return connectors at the compressor unit side right after shutdown. MD05001E,2010.06 ULVAC CRYOGENICS INCORPORATED...
- Page 48 6. Check the pressure gauge of the compressor unit periodically. Contact o ur Service Engineering Division or the nearest customer support center if the pressure keeps lower. There is a possibility that a leakage mig ht have occurred. ULVAC CRYOGENICS INCORPORATED...
- Page 49 -term storage. ◆ When shipping the compressor unit, pack as it was shipped from us and avoid extreme shock. MD05001E,2010.06 ULVAC CRYOGENICS INCORPORATED...
- Page 50 Disconnection and Storage This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
- Page 51 5. Remove the jam nuts holding the self-sealing coupling (male) on the rear panel. 6. Remove the rear panel from the compressor by unscrewing 7 screws. 7. Disconnect the flexible hose from the adsorber inlet. ULVAC CRYOGENICS INCORPORATED 6-1 ...
- Page 52 6. Write installation date and elapsed time on the adsorber label. Also write elapsed time for the next replacement of adsorber (plus 24000 hours to the present elapsed time). ULVAC CRYOGENICS INCORPORATED ...
- Page 53 ｃ．Open the regulator until the outlet pressure reaches 0.1 to 0.2 MPaG. Allow ｃ．Open the regulator until the outlet pressure reaches 0.1 to 0.2 MPaG. Allow ULVAC CRYOGENICS INCORPORATED 6-3 ...
- Page 54 7. Close the regulator and remove the charging hose from the charge inlet. The replenishment work of the gas for the compressor has been completed with this. ULVAC CRYOGENICS INCORPORATED ...
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Page 55: Charging Helium Gas
STOP OF F Model C30PZ HEAD MANUAL COOL D OWN AL RAM READY ARARM LOCAL E NT COM P COLD RE SET HEAD Ｈｅ Charging Valve Helium Bottle Flexible Hoses Charging Helium Gas Figure 6-1 ULVAC CRYOGENICS INCORPORATED 6-5 ... - Page 56 Maintenance This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED ...
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Page 57: Troubleshooting Fault Diagnosis
Ⅲ． The helium static pressure is high. Do not charge helium gas over Compressor makes 1.24MPaG(at20℃). unusual noise during the normal operation. ULVAC CRYOGENICS INCORPORATED ... -
Page 58: Operating Log
(*) Measure cooling water flow rate with flow meters for each compressor unit. ULVAC CRYOGENICS INCORPORATED ... - Page 59 3 Error Codes･･･････････････････････････････ B-17 4 Communication Time-out･･･････････････････ B-17 ULVAC CRYOGENICS INCORPORATED B-1 ...
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Page 60: Remote/Response Description
COMP ON and CH1 ON〜CH8 ON(Pin No.1〜9) signals. In this case COMP OFF and CH1 OFF〜CH8 OFF(Pin No.26〜34)signals should not be used for the operation. ULVAC CRYOGENICS INCORPORATED ... - Page 61 Figure B-1 REMOTE Wiring Diagram ULVAC CRYOGENICS INCORPORATED B-3 ...
- Page 62 ＋ 25 DC24V − 50 C30PZ side Sink Current：Max. 100mA Figure B-2 RESPONSE Wiring Diagram ULVAC CRYOGENICS INCORPORATED ...
- Page 63 Sink Current: Max. 100mA Figure B-3 FAILURE OUT Wiring Diagram ULVAC CRYOGENICS INCORPORATED B-5 ...
- Page 64 Appendix B Control This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED ...
- Page 65 RELAY BOARD COMPCTRL CHN1 CHN2 CHN3 CHN4 CHN5 CHN6 CHN7 CHN8 169A169B 169A169B 169A169B 169A169B 169A169B 169A169B 169A169B 169A169B U V W VALVE 1015 AWG16 COLD HEAD POWER Figure Ｂ-４ Ｃ３０ＰＺ Electric Circuit Diagram COMPRESSOR CN-A ULVAC CRYOGENICS INCORPORATED B-7/B-8...
- Page 66 5 pin (SG) 5 pin (SG) ULVAC CRYOGENICS INCORPORATED B-9 ...
- Page 67 C ontrol commands can be sent even if the CH is invalid by its parameter setting, but effective only when the CH is valid. When the C30PZ is in CP operation mode (CH:1〜6, CP: 8), a command to CH7 can be sent but not effective. ...
- Page 68 Error code No.: 0〜8 Echo back ULVAC CRYOGENICS INCORPORATED B-11 ...
- Page 69 S tatuses can be read even if the CHs are invalid by its parameter setting. When the C30PZ is in CP operation mode (CH:1〜6, CP: 8), the status of CH7 can also be read. However, invalid CH(s) by the parameter settings and CH7 will not operate. ...
- Page 70 Real Time Temperature: 45K〜400K (When disconnected: 400K) Echo back ULVAC CRYOGENICS INCORPORATED B-13 ...
- Page 71 When the current is 20A, the following message will appear. ： ＣＭＰ，Ｉ ； ２００ ， ０ ＣＲ Example Error code No.: 0〜8 Real Time Current: 0〜500 （×0.1A） Echo back ULVAC CRYOGENICS INCORPORATED B-14...
- Page 72 Preset Temperature Range: 45K〜350K （When CH 1〜8 have individual settings: ＊＊＊） Echo back ULVAC CRYOGENICS INCORPORATED B-15 ...
- Page 73 ７ ８ 0: NOT READY 1: READY Echo back NOTE：READY status is a state within the preset temperature＋READY setting (default: 20K). ULVAC CRYOGENICS INCORPORATED B-16...
- Page 74 ULVAC CRYOGENICS INCORPORATED B-17 ...
- Page 75 Appendix B Control This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED B-18...
- Page 76 ・ Avoid twisting the flexible hose especially when making final connection. ・ Keep away from water and salt to prevent corrosion. Do not put heavy things on the flexible hoses in order to prevent modification and crushing of them. MD0C001E,2010.06 ULVAC CRYOGENICS INCORPORATED...
- Page 77 Flexible Hose This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
- Page 78 The set pressure of safety valve at the refrigerator is 1.9MPaG. Please note that the refrigerator safety valve releases gas before the compressor safety valve in actual system. ULVAC CRYOGENICS INCORPORATED D-1 ...
- Page 79 Helium gas + Oil flow Oil flow Cooling water flow Figure D-1 C30PZ Flow Diagram ULVAC CRYOGENICS INCORPORATED ...
- Page 80 ULVAC CRYOGENICS INC. www.ulvac-cryo.com 1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan <Sales> Tel: +81-467-85-8884 <Service Engineering Division> Tel: +81-467-85-9366 Fax: +81-467-83-4838 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC.
- Page 81 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...
- Page 82 Section 6.3 Charging Helium Gas The description on charging procedure has been modified. Appendix B “3.4 Message Formats” The table has been modified. 2018FY10 2018-02-19 “1. Compressor Description” has been modified. “Service Network” has been revised. ULVAC CRYOGENICS INCORPORATED R-1 ...
- Page 83 Revisions This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
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