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Ulvac C30HVRT Instruction Manual

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COMPRESSOR UNIT
Instruction Manual
C30HVRT
Export Control Policy
Vacuum pumps that pump nitrogen gas at pumping
speed of 15000L/S or more fall under row 2(35) of
appended table 1 of Japan's Export Trade Control Order,
which is based on international export control regimes.
Customers must follow all related rules and regulations
such as Foreign Exchange and Foreign Trade Act and
take
appropriate
procedures
when
exporting
or
re-exporting those products.
D/N.MD30HXRE, 2016NR03
ULVAC CRYOGENICS INCORPORATED

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  • Page 1 1 of Japan’s Export Trade Control Order, which is based on international export control regimes. Customers must follow all related rules and regulations such as Foreign Exchange and Foreign Trade Act and take appropriate procedures when exporting re-exporting those products. D/N.MD30HXRE, 2016NR03 ULVAC CRYOGENICS INCORPORATED...
  • Page 3 As a general rule, diagnosis of failure should be done on site by customer. However, ULVAC CRYOGENICS or our service network can perform this service for an agreed fee upon the customer’s request. There will be no charge if the cause...
  • Page 4 ULVAC CRYOGENICS. (2) Damage during transportation When damage by delivery/transportation is admitted, the product will be repaired free of charge within the range of the guarantee expressed in the sales contract.
  • Page 5 2.3 Repair period after production is discontinued ULVAC CRYOGENICS shall accept product repairs for seven years after production of the product is discontinued. 3. Service Form After the products are delivered, please fill out the following information in the blanks. If you have any questions or technical problems please feel free to contact the nearest Customer Support Center or headquarters.
  • Page 6 (3) If you have any questions or comments on this document, please do not hesitate to contact us. The phone numbers of local customer support centers are listed at the end of this manual. ULVAC CRYOGENICS INCORPORATED...
  • Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage . Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED...
  • Page 8 This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
  • Page 9 Below is a description of this manual and the main personnel for each section. Compressor unit safety instructions This section describes safety precautions. All personnel must read this section. Section 1 C30HVRT Compressor description This section describes types and models of the compressor. It also contains specifications and component descriptions. personnel involved...
  • Page 10 C30HVRT Compressor Installation, Operation, Maintenance and Troubleshooting Section 8 Troubleshooting This section explains troubleshooting procedures and describes alarms and failure information that a compressor indicates. Authorized servicing personnel must read this section. Also trained operator of the cryocooler system should read this section to be able to conduct troubleshooting.

  • Page 11: Table Of Contents

    C30HVRT Compressor Unit Instruction Manual Table of Contents Compressor unit Safety Instructions ·································································· S-1 Disposal Considerations ················································································· IW-1 Section 1. C30HVRT_Compressor Description ............1-1 Introduction ......................1-1 Terminology ......................1-1 Cryocooler system documents ................1-1 Roles of compressor in cryocooler system............1-1 Compressor specifications .................
  • Page 12 Signal delay when the time period from a stop to a restart is short ..2-11 Figure 2-10 Timing chart of C30HVRT when a short power interruption occurs ... 2-12 Figure 3 1 Appearance of a Compressor Carton ............ 3-1 Figure 3 2 Remove Cardboard and Insert Forks underneath the Compressor ..
  • Page 13 Connections of the compressor and the cryocooler ......4-5 Figure 4-6 Connecting input power cable connector ..........4-6 Figure 4-7 Remote connector pin assignments for C30HVRT ......4-7 Figure 4-8 (C30HVRT) “Alternate operating mode” wiring example for Single cryocooler operation ..............4-7 Figure 4-9 Connector parts descriptions ...............
  • Page 14 Table 7-3 Maintenance Parts ................7-10 Table 8-1 List of troubleshooting before operation ..........8-2 Table 8-2 List of troubleshooting during operation ..........8-3 Table A-1 Operating log ..................A-1 Table C-1 Setting and connections of controller ........... C-1 ULVAC CRYOGENICS INCORPORATED...

  • Page 15: Compressor Unit Safety Instructions

    6 times per hour as well. Do not turn on and off the compressor to control the temperature of Super Trap. Please contact us when temperature control of Super Trap is required. ULVAC CRYOGENICS INCORPORATED...
  • Page 16 ☆We collect used adsorbers. If there is any used absorber, please contact a person in your local dealership or Ulvac Techno Ltd. to have it picked up or send it directory to our Service Engineering Division. We only accept CTI adsorbers and our adsorbers.
  • Page 17 Also, parts of inside the compressor unit are still hot just after the compressor has been stopped. Wait at least 15 minutes to open the cover to avoid the risk of burns. ULVAC CRYOGENICS INCORPORATED...
  • Page 18 This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 19: Disposal Considerations

    We will offer you Material Safety Data Sheet (called MSDS) of our products upon your request. If you have any questions, please contact our Service Engineering Division or the nearest customer support center. MDIW001E,2010.06 ULVAC CRYOGENICS INCORPORATED IW-1...
  • Page 20 This page intentionally left blank. IW-2 ULVAC CRYOGENICS INCORPORATED...

  • Page 21: C30Hvrt_Compressor Description

    C30HVRT is our compressor for cryocoolers. NOTE: All personnel involved in installation, operation, adjustment, maintenance and servicing must be familiar with the contents of both the C30HVRT compressor and related components. To ensure safe, reliable system performance, read this manual as well as other relevant manuals completely to gain a thorough understanding before beginning work.

  • Page 22: Compressor Specifications

    Refer to “Section 7.2 Replacement of adsorber”. The Compressor requires maintenance. Read “Section 7 Maintenance” thoroughly and conduct regular maintenance. Compressor specifications 1.5.1 External view Figure 1-1 shows external view of C30HVRT. (Front) (Rear) Figure 1-1 C30HVRT External view ULVAC CRYOGENICS INCORPORATED...
  • Page 23 1.5.2 Dimensions Figure 1-2 shows the dimensions. (Front) (Side) Figure 1-2 C30HVRT Compressor dimensions 1.5.3 Weight Table 1-1 shows weights of different types of compressor. Table 1-1 Compressor weight Model...

  • Page 24: Table 1-3 Cooling Water Requirements

    Section 1 C30HVRT Compressor Description 1.5.4 General specifications The tables below show power supply rating, cooling water requirements, installation environment, operation requirements and electromagnetic environment resistance characteristics. (Tables 1-2～1-5) Table 1-2 Power supply rating Item C30HVRT Rated working voltage 50Hz 190 –...

  • Page 25: Component Descriptions

    Compressor front view is shown in Figure 1-3 and rear view in Figure 1-4. ①ELAPSED TIME METER FRONT PANEL ②HIGH PRESSURE HELIUM GAS PRESSURE GAUGE ③ OM :MONITORING PORT ⑥ALARM STATUS TABLE ④HELIUM FILL FITTING ⑦ STATUS DISPLAY and (inside the panel） RESET BUTTON ⑤CASTERS Figure 1-3 Compressor front view ULVAC CRYOGENICS INCORPORATED...
  • Page 26 Section 1 C30HVRT Compressor Description ⑧INPUT POWER CABLE ⑮REMOTE INPUT-OUTPUT ⑨CIRCUIT PROTECTOR RECEP TACLE RECEPTACLE ⑩CRYOCOOLER CABLE RECEPTACLE ⑪ HIGH PRESSURE HELIUM SUPPLY CONNECT ⑫LOW PRESSURE HELIUM RETURN CONNECTOR ⑭COOLING WATER INLET ⑬COOLING WATER OUTLET Figure 1-4 Compressor rear view Listed below are the descriptions of components on the front panel of the compressor.

  • Page 27: Figure 1-5 Anchor Bolts Mounting Positions (Example)

    This shows a list of alarm codes indicated by the STS (Status) LED indicators for alarm indication. Refer to “Section 8.3 Alarm code descriptions” for troubleshooting procedure of each alarm code. All status display LED indicators will remain unlit when there is no problem. ULVAC CRYOGENICS INCORPORATED...
  • Page 28 Section 1 C30HVRT Compressor Description ⑦STATUS DISPLAY and RESET BUTTON There are two kinds of status display, 4 LED indicators for the operation status of the compressor and 8 STS LED indicators for alarm indication. 「PWR」 indicator (RED) lights up when the compressor is powered ON.
  • Page 29 ⑩CRYOCOOLER CABLE RECEPTACLE （COLD HEAD POWER NO.1） Connect the cryocooler cable for its operation to the receptacle. C30HVRT has one receptacle (No.1). ⑪HIGH PRESSURE HELIUM SUPPLY CONNECTOR （SUPPLY GAS） High pressure helium gas is supplied to the cryocooler through this connector. A 1/2 self-sealing coupling is used.
  • Page 30 Section 1 C30HVRT Compressor Description This page intentionally left blank. 1-10 ULVAC CRYOGENICS INCORPORATED...
  • Page 31 C30HVRT Compressor Instruction Manual Section 2 Considerations before Installation Installation Environment ..............2-1 Wiring requirements ................2-2 Cooling water requirements ..............2-3 Length of cables and flexible hoses ............ 2-6 Remote functions ................2-6 This section provides the information which should be considered before installing the compressor.

  • Page 32: Section 2 Considerations Before Installation

    Section 2. Considerations before Installation Refer to Figure 1-2 in Section 1 for the dimensions of the compressor. Front view view D>500 H > 300 Wall, C30HVRT, or D>50 D>50 Wall, Compressor other C30HVRT, C30HVRT equipment D > 50 other D >...

  • Page 33: Cooling Water Requirements

    C30HVRT Compressor Instruction Manual equipment-side distribution panel AC200/220V 3φ T S R Power cable T S R T S R C30HVRT compressor X 2 Figure 2-2 Equipment-side power circuit Table 2-2 shows wire gauges of cryocooler cable and remote cable for use.

  • Page 34: Table 2-3 Table

    For example, from the graphs in Figure 2-3, the allowable range of the flow rate for C30HVRT is from 9 to 15L/min at water temperature of 30℃. Also you can see the water pressure drop between the cooling water inlet and outlet is 0.06MPa at a flow rate of 9L/min.

  • Page 35: Figure 2-3 Cooling Water Flow Rate, Water Supply Temperature, And Water Pressure Loss

    C30HVRT Compressor Instruction Manual (3) 0.06MPa Water flow rate [L/min.] Temperature upper limit (1)When water temperature is at 30℃ Flow Flow rate lower limit rate upper Operating water limit temperature range Acceptable temperature (See ATTENTION Temperature Lower Limit above) (2) > 9L/min Water flow rate [L/min.]...

  • Page 36: Length Of Cables And Flexible Hoses

    Item Specification Model Signal Quantity Photo Coupler Isolation Input Maximum Input voltage: 26VDC, Input Current: less than Input C30HVRT Rated Input Voltage: ON:20V and above, OFF:3V or less No-voltage a contact Output Maximum Load: 30VDC / 100mA ULVAC CRYOGENICS INCORPORATED...
  • Page 37 C30HVRT Compressor Instruction Manual 2.5.2 Remote input interface circuit Figure 2-4 shows the remote input interface circuit. 24VI (Equipment side) SIG. Photo Coupler Figure 2-4 Remote input interface circuit Note that the 0VI is not connected to the ground line inside the compressor in the input circuit.
  • Page 38 Turn the command signal ON for more than 0.3 second. (Refer to the description of COMP STOP below). For C30HVRT, when the compressor pump starts operation, the cryocooler starts at the same time.
  • Page 39 With Alternate operating mode, turning this signal ON starts operation of the compressor pump and OFF stops all the cryocoolers and the compressor. With C30HVRT, when the compressor pump starts operation, the cryocooler starts operation at the same time. CAUTION Do not switch between ON and OFF frequently.

  • Page 40: Figure 2-6 Figure 2-6 Timing Chart For Alternate Operating Mode

    Therefore the compressor will neither recognize nor output any remote signal with the equipment for a maximum of 5 seconds. For reference, the signal delay when powered on in Alternate operating mode is shown in Fig. 2-8. 2-10 ULVAC CRYOGENICS INCORPORATED...

  • Page 41: Figure 2-8 Signal Delay When Powered On（In Alternate Operating Mode

    Alternate operating mode when the time period from a stop to a reboot is short, and Figure 2-10 shows the timing chart of C30HVRT when a short power interruption has occurred in Momentary operating mode.

  • Page 42: Figure 2-10 Timing Chart Of C30Hvrt When A Short Power Interruption Occurs

    For C30HVRT, cryocooler operation is synchronized with the compressor operation as shown in Figure 2-10. In “Alternate operating mode”, the compressor restarts as soon as the input power is recovered because there is always the command from the equipment side.

  • Page 43: Section 3 Unpacking, Inspection And Storage

    Inspect the carton before unpacking for evidence of damage such as dents, breakage, wetness and/or signs that the carton has been tipped over. If there is any damage please contact the delivery company immediately. Figure 3-1 Appearance of a Compressor Carton ULVAC CRYOGENICS INCORPORATED...

  • Page 44: Unpacking

    CAUTION After the compressor has been placed at an installation site, ensure to lock all casters of the compressor to prevent bodily injury by from unexpected movement or slipping of the compressor. ULVAC CRYOGENICS INCORPORATED...

  • Page 45: Carton Contents

    Table 3-2 Optional parts Item Quantity Input power cable ( 3m or customized length) Refrigerator cable( 3m or customized length) Flexible hose ( 3m or customized length) Lipped bowl spanner (flexible hoses installing tool) Gasket for helium coupling (spare) ULVAC CRYOGENICS INCORPORATED...

  • Page 46: Inspection Of The Compressor And Accessories

    Leave the dust caps on th e self-sea ling couplings of the compressor until the flexible hoses are connected to the couplings. Failure to observe this warning may result in damage and/or break down of the equipment. ULVAC CRYOGENICS INCORPORATED...
  • Page 47 Compressor Unit Instruction Manual CAUTION When carr ng flexible hoses, keep appropriate bend radius. When storing them, avoid corrosion and condensation in the same manner to handle other equipments. ULVAC CRYOGENICS INCORPORATED...
  • Page 48 Section 3 0BUnpacking, Inspection and Storage This page intentionally left blank.  ULVAC CRYOGENICS INCORPORATED...

  • Page 49: Figure 4-1 Installation Procedure

    Electrical connections ................. 4-5 Wire rooting for compressor and other equipments ......4-10 Prior to installation This section describes appropriate procedure for installing C30HVRT and connecting the compressor to a cryocooler. Figure 4-1 is the block diagram for the compressor installation.

  • Page 50: Installation, Piping, And Wiring

    Connecting and disconnecting helium flexible hoses CAUTION Follow the procedures below to connect and disconnect flexible hoses. Failure to observe this warning may result in damage to the O-ring seals of the coupling and/or leakage of helium gas. ULVAC CRYOGENICS INCORPORATED...

  • Page 51: Figure 4-2 Tighten With Hands First

    C30HVRT Compressor Unit Instruction Manual Connecting procedures 1. Remove all dust plugs and caps from the compressor, couplings and flexible hoses of the cryocooler. Check the connections and ensure that there is no dust or dirt on helium coupling gasket and around it. If there is any dust, remove it. Ensure that helium coupling gasket goes in the male coupling and there is no gasket for female coupling.

  • Page 52: Cryocooler Connections

    “COLD HEAD POWER NO.1” receptacle on the rear panel of the compressor and then turn the rotating part of the plug to the right. Turn it until it won’t turn any more to connect the plug properly. ULVAC CRYOGENICS INCORPORATED...

  • Page 53: Electrical Connections

    C30HVRT Compressor Unit Instruction Manual RETURN HELIUM RETURN FLEXIBLE HOSE HELIUM SUPPLY FLEXIBLE HOSE SUPPLY NO.1 CRYOCOOLER POWER CABLE SUPPLY GAS RETURN GAS COOLING WATER Figure 4-5 Connections of the compressor and the cryocooler Electrical connections Refer to “Single cryopump installation” in previous page to connect the cryocooler cable.
  • Page 54 CAUTION Remote cables must be wired only by authorized electrician familiar with the structure and operation of this equipment. Failure to observe this warning may result in damage to and/or break down of the equipment. ULVAC CRYOGENICS INCORPORATED...
  • Page 55 Remote connector pin assignments for C30HVRT (View of from the plug soldering side) A typical wiring for C30HVRT with a single cryocooler in “Alternate operating mode” is shown in Figure 4-8. Also, a typical wiring for C30MVR with three cryopumps in “Momentary operating mode”...

  • Page 56: Figure 4-9 Connector Parts Descriptions

    Section 4 Installation, Piping, and Wiring C30HVRT wiring precautions (1) In Alternate operating mode, the pins number 15 and 16 should be wired as operation command signals but not 6, 7, 8 and 9. Conversely, in Momentary operating mode the pins number 6, 7, 8, and 9 should be wired as operation command signals but not 15 and 16.

  • Page 57: Figure 4-11 Fix With Set Screw

    C30HVRT Compressor Unit Instruction Manual 5. If the bundle of the cables’ diameter is smaller than that of the clamp saddle, wrap cables with tape to adjust the size of diameter so that it can be fixed in the clamp saddle.

  • Page 58: Wire Rooting For Compressor And Other Equipments

    300mm or more between each wiring. NOTE: Electromagnetic interference where the C30HVRT system, consists of the compressor and the cryocooler, effect to other equipments is not critical, however if the wiring of the system is not separated from other equipments it may cause interference to sensitive sensor wires, analog wires, and other high impedance wiring of other equipments.

  • Page 59: Operation

    C30HVRT Compressor Unit Instruction Manual Section 5 Operation Verification of helium static pressure ............ 5-1 Compressor operation ................5-2 Inspection after replacing helium circulation components ....5-5 Precautions for when compressor is not in operation ......5-5 Maintenance operation for a compressor stopped for a long period ....................

  • Page 60: Compressor Operation

    （３）Inspection of phase and voltage of an input power supply If PWR LED and RDY LED indicators light up after a few seconds from power-on, the compressor is ready for operation (See Figure 5-2.) Although the figure shows the example ULVAC CRYOGENICS INCORPORATED...
  • Page 61 C30HVRT Compressor Unit Instruction Manual of C30MVR, the same is applied to C30HVRT. (Figure5-3 and 5-4 are the same.) If the buzzer keeps ringing after power-on and all eight STS indicators light up, it means that either the following faults has occurred; reversed phase of the input power cable, open phase or low voltage.

  • Page 62: Figure 5-4 Status Display During Operation

    The recorded values are used as reference value for maintenance or replacement of the product explained in the following . For reference, the helium pressure during operation of C30HVRT (with a cryocooler UR4K10) with 3m flexible hoses is shown in Table 5-1.

  • Page 63: Inspection After Replacing Helium Circulation Components

    C30HVRT Compressor Unit Instruction Manual Inspection after replacing helium circulation components After replacing a component such as a cryocooler, a flexible hose, and a compressor refer to “Section 5.1 Verification of helium static pressure” and check that the helium filling pressure is almost equal to the value before replacing the component.
  • Page 64 Section 5 Operation This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 65: Section 6 Wiring And Piping Removal And Storage

    C30HVRT Compressor Unit Instruction Manual Section 6 Wiring and Piping Removal and Storage 6.1 Removal of wiring and piping and displacement of compressor ....6-1 6.2 Maintenance in storage ................6-2 Removal of wiring and piping and displacement of compressor It is necessary to remove the cooling water piping, helium lines, and electrical wiring before changing the compressor installation place or removing the system.
  • Page 66 Remove the piping and wiring from the compressor and put dust caps or dust plugs on Remove the piping and wiring from the compressor and put dust caps or dust plugs on the helium line connectors. the helium line connectors. ULVAC CRYOGENICS INCORPORATED...
  • Page 67 C30HVRT Compressor Unit Instruction Manual Protect the removed components such as flexible hoses and cables with covers or boxes. Store them with the compressor. Ensure that cooling water has been completely drained out from the compressor. To store the compressor, cover it with a plastic sheet or package cardboard. Before storing the compressor, write down the value of the helium pressure gauge.
  • Page 68 Section 6 Wiring and Piping Removal and Storage   This page intentionally left blank.  ULVAC CRYOGENICS INCORPORATED...

  • Page 69: Section 7 Maintenance

    C30HVRT Compressor Unit Instruction Manual Section 7 Maintenance Scheduled Maintenance ............... 7-1 Replacement of Adsorber ..............7-1 Adjusting System Helium Pressure ............7-5 Regular Maintenance of Helium Lines, Cooling Water Piping and Electrical Wiring ..............7-10 Maintenance Parts ................7-10 Scheduled Maintenance The table below shows the required maintenance on the cryopump system.
  • Page 70 (Figure 7-4). See Figure 7-5 for usage of spanners to disconnect the coupling. Disconnect the coupling quickly to minimize helium leakage. 7. Remove the bolts that secure the adsorber to the base of the compressor with the proper spanner (Figure 7-6). ULVAC CRYOGENICS INCORPORATED...

  • Page 71: Figure 7-1 Remove Two Nuts From The Helium Gas Connectors

    C30HVRT Compressor Unit Instruction Manual 8. Slide the adsorber outward and remove it from the mounting tab on the base of the compressor. And then remove the adsorber from the compressor (Figure 7-7). Figure 7-1 Remove Two Nuts from Figure 7-2 Remove All Seven...

  • Page 72: Figure 7-5 Connecting And Disconnecting Self-Sealing Coupling With Two Spanners

    11. Put the rear panel back on the compressor to align the helium connector of the adsorber with the hole of the rear panel and then remove the rear panel again. Fix the adsorber mounting bolt firmly this time. 12. Replace the rear panel and secure it by tightening the seven screws. ULVAC CRYOGENICS INCORPORATED...

  • Page 73: Adjusting System Helium Pressure

    C30HVRT Compressor Unit Instruction Manual 13. Put the two removed nuts back on to the “SUPPLY GAS” and “RETURN GAS” connectors at the rear panel of the compressor and tighten each nut using the two spanners. 14. Connect the flexible hoses to the “SUPPLY GAS” and “RETURN GAS” connectors at the rear panel of the compressor.
  • Page 74 3. Wait until the helium pressure gauge reads the appropriate value described above. When the pressure reaches the desired value, close the valve by turning its knob clockwise. 4. Attach the front panel of the compressor with the six screws removed in the above step. ULVAC CRYOGENICS INCORPORATED...

  • Page 75: Figure 7-8 Locations Of Front Panel Screws And Components Inside The Compressor

    C30HVRT Compressor Unit Instruction Manual Loosen six screws and remove the front panel. Knob of the Helium charge control valve Helium charge fitting (Upper view) Helium pressure gauge Figure 7-8 Locations of Front Panel Screws and Components inside the Compressor...

  • Page 76: Figure 7-9 Items For Adding Helium Gas To The Compressor

    Service Engineering Division or the nearest customer support center. Pressure Bottle valve regulator Helium bottle 4 inch female flare Helium fitting (connect this charging hose Pressure regulator handle side to the Figure 7-9 Items for Adding Helium Gas to the Compressor ULVAC CRYOGENICS INCORPORATED...
  • Page 77 C30HVRT Compressor Unit Instruction Manual Connecting helium supply line and air purging procedures 1. Remove the front panel of the compressor. 2. Attach the pressure regulator to a helium bottle. 3. Purge the pressure regulator and helium charging hose. (*1) 3-1 Turn the pressure regulator handle in clockwise slowly until it is felt hit.

  • Page 78: Regular Maintenance Of Helium Lines, Cooling Water Piping And Electrical Wiring

    When scratch or dirt is detected (*1) Maintenance Cycle S: Scheduled U: Unscheduled NOTE: For more information on planning maintenance, purchasing maintenance parts, diagnosis, and servicing, please contact our Service Engineering Division or the nearest customer support center. 7-10 ULVAC CRYOGENICS INCORPORATED...

  • Page 79: Troubleshooting

    Troubleshooting procedures ............... 8-2 Alarm code descriptions ..............8-4 Problem types C30HVRT compressor indicates the state of warning or breakdown with a buzzer sound and STS indicators. NOTE: When a problem occurs, check the status of STS indicators. Also, make sure that...

  • Page 80: Troubleshooting Procedures

    “STS” indicators needs reset. of compressor for servicing ※ do not light up. caused by power failure or other reasons. ※If the problem is not solved, please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...
  • Page 81 C30HVRT Compressor Unit Instruction Manual 2. Troubles during operation Table 8-2 List of troubleshooting during operation Problem Status Possible cause Corrective action “RDY” indicator is Remote signal Remote input-output Correct pin number of ON but remote fault. cable is not...

  • Page 82: Alarm Code Descriptions

    TS2 Over Temperature (Over temperature) TS2 monitors the temperature of the compressor pump. If TS2 is activated it means the compressor pump is in an unrecoverable abnormal condition. Please contact our Service Engineering Division or the nearest customer support center immediately. ULVAC CRYOGENICS INCORPORATED...
  • Page 83 Check that the helium pressure is not higher than the set value on the helium pressure gauge. Refer to “Section 5.1 Verification of helium static pressure” for helium pressure set value and “Appendix C C30HVRT compressor electrical circuit” for OL1 set value.
  • Page 84 If the indicator shows the same status after pushing “RST” button and turning OFF and ON the power of the compressor, please contact our Service Engineering Division or the nearest customer support center for replacement and adjustment of the controller immediately. ULVAC CRYOGENICS INCORPORATED...

  • Page 85: Appendix A Operating Log

    φ OPERATING LOG REFRIGERATOR S/N Cryocooler Measuring condition Compressor unit Remarks Temperature Current Cooling High water pressure flow rate helium gas L/min(*) MPaG ℃ (*) Measure cooling water flow rate with flow meters for each compressor unit. ULVAC CRYOGENICS INCORPORATED...
  • Page 86 C30HVRT Compressor Installation, Operation, maintenance and troubleshooting This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 87: Appendix C C30Hvrt Schematic Diagram

    Appendix C C30HVRT Schematic Diagram Appendix C C30HVRT Schematic Diagram Schematic diagram of the C30HVRT compressor unit is shown in Figure C-1. In addition, setting and connections are shown in Table C-1. Table C-1 Setting and connections of controller Refrigerator...

  • Page 88: Figure C-1 C30Hvrt Schematic Diagram

    C30HVRT Installation, Operation, Maintenance, and Troubleshooting Figure C-1 C30HVRT schematic diagram ULVAC CRYOGENICS INCORPORATED...

  • Page 89: Appendix D C30Hvrt Compressor Flow Diagram

    Appendix D C30HVRT Compressor Flow Diagram Appendix D C30HVRT Compressor Flow Diagram Low pressure helium gas returning from the cryocooler enters the compressor. Lubricant oil is injected into the compressor with the low pressure helium; the gas containing the oil is then compressed by the compressor pump turning it into high temperature high pressure helium gas.
  • Page 90 C30HVRT Compressor Installation, Operation, Maintenance and Troubleshooting Safety valve Cooling water Pressure gauge Adsorber Oil separator ﾞ SUPPLY Helium heat exchanger Oil return filter Oil return orifice Compressor pump Differential pressure Solenoid valve regulating valve for pressure Oil heat changer...
  • Page 91 ULVAC CRYOGENICS INC. www.ulvac-cryo.com 1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan <Sales> Tel: +81-467-85-8884 <Service Engineering Division> Tel: +81-467-85-9366 Fax: +81-467-83-4838 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC.
  • Page 92 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...
  • Page 93 C30HVRT Compressor Unit Instruction Manual Revision History Date Revision No. Contents 2013-03-29 2013.03 First edition. 2013-05-28 2013MY01 P.1-4 Table 1-2,Stationary power consumption and Stationary electric current consumption have been changed. 2014MY02 “Introduction” and “SERVICE NETWORK” have been revised. 2014-05-23 2016-11-15 2016NR03 Cover: The title has been changed.
  • Page 94 Revision History This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

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