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C30HMVRT-E3
Ulvac C30HMVRT-E3 Manuals
Manuals and User Guides for Ulvac C30HMVRT-E3. We have
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Ulvac C30HMVRT-E3 manual available for free PDF download: Instruction Manual
Ulvac C30HMVRT-E3 Instruction Manual (92 pages)
COMPRESSOR UNIT
Brand:
Ulvac
| Category:
Air Compressor
| Size: 4 MB
Table of Contents
General Precautions
6
Table of Contents
9
Compressor Unit Safety Instructions
13
Electrical Wiring Connections
14
Cooling Water
15
Maintenance Precautions
15
Disposal Considerations
17
C30HMVRT-E3 Compressor Description
19
Introduction
19
Terminology
19
Cryopump System Documents
20
How the Compressor Works in Cryopump System
20
Compressor Specifications
21
Power Supply Rating
22
Cooling Water Requirements
22
Component Descriptions
23
CRYO-U® Cryopump Installation
27
Figure 1 5 Typical Installation of Cryopumps and C30HMVRT-E3
28
Considerations before Installation
29
Combination of Cryopump and Compressor
29
Installation Environment Requirements
29
Wiring Requirements
30
Cooling Water Requirements
32
Figure 2 3 Cooling Water Flow Rate, Water Supply Temperature, and Water Pressure
33
Length of Cables and Flexible Hoses
34
Remote Functions
34
Figure 2 4 Remote Input Interface Circuit
35
Figure 2 6 Timing Chart for Momentary Operating Mode with Two Refrigerators
38
Figure 2 7 Timing Chart for Alternate Operating Mode with Two Refrigerators
39
Figure 2 8 Signal Delay When Powered On(In Alternate Operating Mode
39
Figure 2 9 Signal Delay When the Time from a Stop to a Restart Is Short
40
Figure 2 10 Timing Chart When a Short Power Interruption Occurs
41
Unpacking and Inspection
43
Carton Contents
43
Inspection of the Compressor and Accessories
43
Flexible Hoses and Specifications
44
Equipment Installation, Piping, and Wiring
45
Before Installation
45
Installation Procedure
45
Connecting Cooling Water Piping
46
Connecting and Disconnecting Helium Flexible Hoses
46
Cryopump Installation
48
Electrical Connections
49
Figure 4 6 Connecting Input Power Cable Connector
49
Figure 4 7 Remote Connector Pin Assignments for C30HMVRT-E1
50
Figure 4 8 "Momentary Operating Mode" Wiring Example for a Cryopump Operation
51
Wire Rooting for Compressor and Other Equipment
53
Operation
55
Verification of Helium Static Pressure
55
Compressor Operation
56
Inspection after Replacing Helium Circulation Components
58
Precautions for When Compressor Is Not in Operation
58
Maintenance Operation for a Compressor Stopped for a Long Period
58
Wiring and Piping, Removal and Storage
59
Removal of Wiring and Piping and Displacement of Compressor
59
Maintenance in Storage
60
Maintenance
63
Scheduled Maintenance
63
Replacement of Adsorber
63
Adjusting System Helium Pressure
67
Regular Maintenance of Helium Lines, Cooling Water Piping and Electrical Wiring
70
Maintenance Parts
71
Troubleshooting
73
Problem Types
73
Troubleshooting Procedures
74
Alarm Code Descriptions
76
Control the Inverter
79
Compressor Frequency
79
Contact Connections
80
Connector Pin Assignments
81
Frequency Adjustment
82
Appendix A Operating Log
83
Appendix C C30HMVRT-E3 Schematic Diagram
85
Appendix D Compressor Flow Diagram
87
Service Network
89
Compressor Unit Instruction Manual
91
Revision History
91
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