Ulvac MS Series Manuals

Manuals and User Guides for Ulvac MS Series. We have 1 Ulvac MS Series manual available for free PDF download: Instruction Manual

Ulvac MS Series Instruction Manual (94 pages)

Dry Vacuum Pump

Brand: Ulvac | Category: Water Pump | Size: 4 MB

Safety Indications
3
Definition of Pictograms
3
Warning Label Types and Display Positions
4
Warning Label Display Position
5
Warranty Terms
6
Warranty Product
6
Disclaimer
6
Response
6
Others（Warranty Terms
7
About this Manual
7
Applicable Model
8
Compatible Specification
8
Table of Contents
10
For Safety Use
13
Handling of His Machine
13
Acceptance/Transfer/Storage
14
Acceptance
14
Transfer
15
Storage
15
Installation/Operation
15
Disposal
16
Protective Device
16
Safety Measures and Waring Risk
16
Vacuum Pumping and Exhaust of Hazardous Gases or Substances
16
Transfer of Heavy Object
17
Electrical Shock
17
High Temperature
17
Ruptures
17
Leakage of High-Temperature Cooling Water
18
Safety Data Sheet
18
Product Overview
19
Application
19
Naming
19
Efforts Related to Rohs Directive and
20
Regulated Hazardous Substances
20
Performance Curve
21
Pumping Speed
21
Power Consumption
22
Name and Function of Parts
23
Detailed Functions of Parts
25
Summary of Controller
25
Stop Switch
28
System Configuration
29
Power System
30
Control System
30
Installation
32
Before Installation
32
Responsibility for Work from Shipping to Startup
32
Storage Environment Requirements
33
Environmental Requirements for Installation and Operation
33
Unpacking
34
Precautions for Unpacking
34
Confirmation after Unpacking
34
Transfer
35
How to Hoist Using Crane
36
How to Transport Using Pallet Truck
37
Installation
38
Leveling
38
Earthquake Countermeasures
38
Piping and Wiring
40
Inlet/Exhaust Port Piping
40
Dedicated Silencer (Separate Packaging)
41
Cooling Water Piping
42
Purge Gas
44
Drain
45
Electric Wiring
46
Wiring for Remote Control
48
Electrical Communication
54
Operation
56
Precautions on Operation
56
Preparation for Operation
59
Pre-Operation Check
59
How to Switch between LOCAL (Manual) and REMOTE (Remote)
59
How to Start/Stop
61
LOCAL Operation
61
REMOTE Operation
61
Monitor Display
62
How to Operate Monitor Display
62
State History
63
Parameter List
63
Setting Mode 1
63
Setting Mode 2
65
Setting Item List
66
Maintenance and Inspection
68
Daily Inspection
68
Inspection after Long-Term Storage
68
Overhaul
69
Notes on Transportation
69
Troubleshooting
70
Trouble with Basic Operation
70
Alarm Status and Measures
71
Alarm List
71
Inverter Alarm Code List
73
How to Restart the Pump after an Alarm
78
Specifications
79
Performance Specifications
79
External Dimensions
80
Appendix
81
Major Replacement Parts
81
For EMC Directive
82
Communication System Supplement
82
Communication Connector Connection Diagram
82
Communication Command Details
84
System's Start/Stop Status Readout(A0)
84
Stop(A1)
84
Start(A2)
84
Status Readout(A3)
85
MBP Starts(A4)
86
Valve's Readout(A5)
86
Remote/Local Switching(A8)
86
Alarm Reset(A9)
86
Operation Display's Readout (B1)
87
Alarm Record's Readout (B2)
87
Warning's Readout (B3)
89
Alarm's Readout (B4)
89
Operation Record's Readout (B8)
90
Current Status's Readout (B9)
91
Operation Record-2'S Readout (BA)
92
IP ADDRESS Setting(C8)
93
Model's Readout(D0)
93
Time's Readout(D4)
93

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