Ulvac RMG-1303 Manuals

Manuals and User Guides for Ulvac RMG-1303. We have 1 Ulvac RMG-1303 manual available for free PDF download: Instruction Manual

Ulvac RMG-1303 Instruction Manual (110 pages)

Matching unit integrated High-Frequency Power Supply

Brand: Ulvac | Category: Power Supply | Size: 3 MB

Safety Precautions
3
Table of Contents
7
Contents
7
For Safe Operation
10
Precautions When Handling the System
10
Warning Label / Nameplate Locations
12
Contacting ULVAC
12
Overview
13
Introduction
13
Features
13
Hazardous Substances Regulated by the Rohs Directive
13
System Configuration
14
Specifications of the Main Unit
15
Controller Specifications
17
VPP/VDC Sensor Specifications
17
Set up
18
Checking the Accessories
18
Precautions in Installation
18
How to Install
19
How to Install（Connector Output
22
System Wiring
23
Connection of each Cable
23
Input Power Supply Wiring
24
Connecting the Earth Terminal
25
Installation Environment Conditions
26
Storage Environment and Transportation Conditions
26
Function Description
27
Function of the Main Unit
27
Controller Functions
30
Protective Function
31
Interlock Function
32
Alarm Function (List of Alarms)
33
Warning Function
35
External Analog Control Function
36
Pin Assignment for External Analog Operation
36
External Serial Communication Control Function (RS-232C)
38
Communication Function in RS232-C Operation Mode
38
RS232C Operation Mode Connector Pin Assignment
38
RS-232C Operation Mode Commands
39
Instantaneous Voltage Drop
43
RF Pulse Function
45
Reference Value of Usable Range of Pulse Function
45
Setting of Various Parameter
47
Maintenance Mode Setting
47
Settings on the Main Screen
47
Settings on the Operation Mode Screen
50
Settings on the Variable Capacitor Limit Setting Screen
52
Settings on the Menu Mode Screen
54
Settings on the Pulse Mode Selection Screen
55
Settings on the Arc Parameteretting Screen
57
Settings on the Alarm Threshold Setting Screen
58
Settings on the Monitor Value Offset Setting Screen
59
Settings on the Auto-Matching Operation Setting Screen
60
Settings on the Security Setting Screen
61
Settings on the Control Mode Setting Screen
62
Settings on the Fan Speed Setting Screen
63
Settings on the External Analog VDC Output Setting Screen
64
Setting on the Variable Capacitor Speed Setting Screen
65
Setting on the Matching Circuit Constant Setting Screen
66
Monitor Value Offset Setting Screen
68
Analog Input Adjust Setting Screen
69
Setting on the Model Confirmation Screen
70
Software Version Confirmation Screen
71
Alarm History Confirmation Screen
72
Setting on the Auto-Matching Constant Setting Screen
73
List of Parameters
75
Operation
78
Power Activation
78
Operation Method with Controller
78
Selection of the Controller Operation Mode
78
Preset Operation
79
Setting the Output Power
79
Setting the Matching Mode
80
RF ON-OFF Operation
80
Operation Method Using External Analog Control
81
Selection of External Analog Control Mode
81
Preset Operation
81
Setting the Matching Mode
82
RF ON-OFF Operation
82
Timing Chart for External Analog Control
82
Operating Method with RS-232C Communication
84
Selection of RS-232C Communication Control Operation Mode
84
Preset Operation
84
Setting the Output Power
84
Setting the Matching Mode
85
RF-ON Operation
85
How to Perform Special Operations
86
Matching Adjustment
87
Matching Adjustment Overview
87
Matching Fundamentals
87
Method of Matching Adjustment
88
Matching Box Internal Adjustment Method
91
How to Adjust the Number of Coil Shorts
92
How to Add a Fixed Capacitor
93
Power Derating
95
Maintenance
97
Maintenance and Inspection
97
Troubleshooting
98
Reference Materials
104
People's Republic of China Electronic Industry Standard SJ / T11364-2014
108

Ulvac Categories

Water Pump Air Compressor

Power Supply Measuring Instruments Industrial Equipment

More Ulvac Manuals

Ulvac RMG-1303 Manuals

Ulvac RMG-1303 Instruction Manual (110 pages)

Table of Contents

Related Products

Ulvac Categories