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SMC Networks XMH Series Operation Manual

High vacuum angle valve / straight valve
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Doc. no.XM-OMP0005-B
PRODUCT NAME
High Vacuum Angle Valve / Straight Valve
MODEL / Series / Product Number
XMH/XYH Series

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Summary of Contents for SMC Networks XMH Series

  • Page 1 Doc. no.XM-OMP0005-B PRODUCT NAME High Vacuum Angle Valve / Straight Valve MODEL / Series / Product Number XMH/XYH Series...

  • Page 2: Table Of Contents

    Contents Safety Instructions - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1. Product Specific Precautions 1 - - - - - - - - - - - - - - - - - - - - - - - - - - - - (Precautions on Design, Selection, Mounting, Piping, Maintenance) 2.

  • Page 3: Safety Instructions

    Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.” They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC) , and other safety regulations.

  • Page 4: Limited Warranty And Disclaimer/Compliance Requirements

    Safety Instructions Caution We develop, design, and manufacture our products to be used for automatic control equipment, and provide them for peaceful use in manufacturing industries. Use in non-manufacturing industries is not covered. Products we manufacture and sell cannot be used for the purpose of transactions or certification specified in the Measurement Act.

  • Page 5: Product Specific Precautions

    1. Product Specific Precautions 1 Common Specific Precautions 1 Be sure to read before handling. Precautions on Design Warning ●All models 1. The body material is SCS13, the bellows is SUS316L, and other metal seal material is SUS304. Standard seal material in the vacuum section is FKM that can be changed to the other materials (please refer “How to Order”).

  • Page 6: Product Specific Precautions

    5. When removing the valve seal and external seal, take care not to damage the sealing surfaces. When installing the valve seal and external seal, be sure that the O-ring is not twisted. (Refer to Section 7 Parts Replacement Procedure (pages 10 to 12) for details.) 2.

  • Page 7: Specifications

    3. Specifications Table 4 Model XMH-25 XMH-40 XMH-50 XMH-16 Note 1 XYH-25 XYH-40 XYH-50 Flange (valve) size 16,CF034 40,CF070 Actuating type Manual Fluid Inactive gas under vacuum Operating temperature 5 to 150 Operating pressure Pa (abs) Atmospheric pressure to 1 x 10 Conductance l/s Note 2 1.3 x 10...

  • Page 8: Construction / Operation

    (Material: SUS316L) Valves (Material: SUS304) Valve seal (Maintenance parts) Body (Material: SCS13) XMH series / Angled Valve Construction of XMH series and XYH series are the same except the Body shape. XYH series / Straight Valve 4-2. Operation The valve opens by rotating the handle assembly counterclockwise.

  • Page 9: Dimensions

    5. Dimensions XMH series / Angled Valve L2 (Fc) Flange Flange H G Table 5 Unit: Model P.C.D L1 XMH-16 100.5 P.C.D 27 6x4.4 XMH-25 21.5 XMH-40 162.5 P.C.D 58.7 6x6.6 XMH-50 179.5 XYH series / Straight Valve G H Fn...

  • Page 10: Period And Scope Of Warranty

    6. Period and Scope of Warranty The warranty period is 100,000 cycles (under SMC's endurance test conditions), 1 year in service or within 1.5 years after delivery, whichever comes first. If the valve has been used outside of the specifications, or if a failure occurs as a result of mounting onto a machine or replacement of an assembly, Seal material etc.

  • Page 11: Parts Replacement Procedure

    7. Parts replacement procedure 7-1. Precautions Be sure to follow [1. Precautions 1] when disassembling the product for maintenance. Along with the precautions above, comply with the following precautions too. Warning • If it is expected that product materials may get stuck to the product, ensure safety is assured before handling.

  • Page 12: Disassembly Procedure

    7-2. Disassembly procedure Step 1 Step 2 Bolt O-ring Handle assembly Bottom surface of groove discharge gas. Body Loosen the bolt gradually in numerical order with the Remove the O ring from the groove for discharging gas valve opened a little to disassemble the body and the using a tool (plastic) whose height is the same as the handle assembly.

  • Page 13: Assembly Procedure

    7-3. Assembly Procedure Step2 Step 1 Step 3 O ring groove Body Clean cloth O ring Ethanol Assemble parts eliminating dust. Eliminate the dust of O ring groove Wipe off the dust on the valve seal O Wipe off dust with a clean cloth of pilot valve.
  • Page 14 Revision history Limited warranty and Disclaimer 2013.01 Front cover, back cover, safety precautions Correction 2024.08 1st Printing :2011.7 Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. ©...

This manual is also suitable for:

Xyh seriesXmh-16Xmh-25Xyh-25Xmh-40Xyh-40 ... Show all

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