Download Print this page
SMC Networks XGT312-50336 Series Operation Manual

SMC Networks XGT312-50336 Series Operation Manual

High vacuum slit valve

Advertisement

Quick Links

Doc. no. GV*-OMH0003-C
PRODUCT NAME
High Vacuum Slit Valve
MODEL / Series / Product Number
XGT312-50336-**
XGT313-50336-**
B

Advertisement

loading
Need help?

Need help?

Do you have a question about the XGT312-50336 Series and is the answer not in the manual?

Questions and answers

Subscribe to Our Youtube Channel

Summary of Contents for SMC Networks XGT312-50336 Series

  • Page 1 Doc. no. GV*-OMH0003-C PRODUCT NAME High Vacuum Slit Valve MODEL / Series / Product Number XGT312-50336-** XGT313-50336-**...
  • Page 2: Table Of Contents

    Contents Safety Instructions 2 to 3 1. Specifications 2. How to order 3. Construction/Operation 6 to 8 4. Precautions 9 to 10 5. Replacement Part List 6. Maintenance 7. Troubleshooting Attachment・・・Procedure for Maintenance 13 to 15 - 1 -...
  • Page 3: Safety Instructions

    SLIT VALVE Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.” They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC) , and other safety regulations.
  • Page 4 SLIT VALVE Safety Instructions Caution The product is provided for use in manufacturing industries. The product herein described is basically provided for peaceful use in manufacturing industries. If considering using the product in other industries, consult SMC beforehand and exchange specifications or a contract if necessary.
  • Page 5: Specifications

    1. Specifications Opening angle 50mm×336mm Working pressure Atmospheric pressure to 10 Operating pressure 0.45 to 0.6 Internal leakage amount O-ring material : FKM 6.5×10 Pa・m /sec O-ring material : Kalrez   6.5×10 Pa・m /sec O-ring material : FKM 6.5×10 Pa・m /sec Internal leakage amount...
  • Page 6: How To Order

    2. How to order ¥ XGT 3 1 2 - 50336 - 1 C Auto switch and connector (See below) Material of O-ring of gate  1 : FKM 2 : Kalrez 4079  Kalrez is a registered trademark of DuPont Performance Elastomers.
  • Page 7: Construction/Operation

    3. Construction / Operation 3-1 Construction - 6 -...
  • Page 8 3-2 Operation Figure 1A and B are front view of a slit valve. In these figures, the slit valve closes an opening (slit) ○ 2 3 which transfers workload and a gate ② (seal material ③) does not clamp (seal) a seating face ⑲.
  • Page 9 3-2-3 Clamping (Sealing) (Figure 2B to Figure 2C) The roller bearing A ⑯ gets into the fulcrum groove ⑰ and makes the lever ⑫, the shaft ⑱ and the gate ② stop. On the other hand, as the piston rod ⑧ and the roller block ⑨ rise further overcoming force of spring ⑬, the roller bearing B ⑪...
  • Page 10: Precautions

    4.Precautions Caution 4-1. Pressure piping After connecting one-touch fitting with Rc1/8 screw specification or speed controller (SPICON) to piping port (Rc1/8), connect the tube holding its fitting part lightly. Do not give excessive force to the fitting by connection. And the operation by air supply should be operated by 5 port 2 position valve.
  • Page 11 4-6.Operation of valve ※ Please confirm in regulated difference pressure it and do the opening and shutting operation when you open and shut the valve. (1) Opened condition of gate When the gate is fully opened, the indicator light of the auto switch at opening side is lighting on.
  • Page 12: Replacement Part List

    5.Replacement parts list XGT312-50336- Special parts Name Order No. Application Remarks - Body ASSY XGT300-1-1AS XGT313-50336- Special parts Name Order No. Application Remarks - Body ASSY XGT300-1-1-3AS Common exchange parts Name Order No. Application Remarks XGT311-50336A1-1 For XGT31-50336- XGT311-50336A1-1A For XGT31-50336-A Bonnet ASSY XGT311-50336A1-1C For XGT31-50336-C...
  • Page 13: Maintenance

    6.Maintenance Please refer to valve maintenance procedure in the attached documents. 7.Troubleshooting Condition Assumed cause Countermeasure Gate Pressure should be 0.45MPa or Operating pressure is low Internal leakage more. Lowering of air pressure Air leaks over specified value while (Working of end lock) end lock is working Flaws on gate seal Replace gate...
  • Page 14 - 13 -...
  • Page 15 - 14 -...
  • Page 16 - 15 -...
  • Page 17 Revision history C version : Change of connector and bonnet ASSY part number. November 2021 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. ©...

This manual is also suitable for:

Xgt313-50336 series