SMC Networks XGTP Series Manual

300
For wafer
mm
Parallel Seal Type Slit Valve
Long service life
3 million
(at ordinary temperature)
Maintenance
Replaceable bellows
Top accessible
(Made to order)
Air saving
Made to order
Air consumption reduced by
Low pressure operation possible during normal operation
(when back pressure is absent.)
Operating environmental pressure
Atmospheric pressure to
Cassette type (Standard)
Interchangeable with the current
XGT product
XGTP
Series
cycles Reduced by
(compared with the current product)
Safety measures
Mechanical end lock
mechanism is adopted.
Gate is held in opened or closed position in case of emergency stop.
Lightweight
14
22
%
(For cassette type)
Opening window size
1.0 x 10 -6 Pa (abs) 50
Transfer chamber
Process chamber
Parallel seal type
slit valve
This product is suitable for the partition valve
between the load lock chamber and the trans-
fer chamber or between the transfer chamber
and the process chamber in semiconductor
equipment or other equipment.
Low particle generation
1/5
kg
336
mm x mm
Insert type (Without body)
RoHS
or more
Seal material:
FKM/Kalrez ® 4079
∗ Kalrez
® is a registered
trademark of E. I. du
Pont de Nemours and
Company or its affili-
ates.
CAT.ES140-9A
A