Related Manuals for Edwards T-Station 85
Summary of Contents for Edwards T-Station 85
- Page 1 T-Station 85 INSTRUCTION MANUAL Original instructions D39594880A – Remastered 2023...
- Page 2 Decades of Expertise: With 30+ years in the industry, Ezzi Vision is highly experienced in vacuum technology and its applications. Quality Assurance: We ensure that every Edwards pump meets the highest standards of performance and reliability. Innovative Solutions: Leading in technological advancements, we provide the latest Edwards pumps, known for their innovation and efficiency.
- Page 3 ©Edwards Limited 2023. All rights reserved. Published: 2/8/2023 Trademark credit Edwards and the Edwards logo are trademarks of Edwards Limited, Innovation Drive, Burgess Hill, West Sussex RH15 9TW. Disclaimer The content of this manual may change from time to time without notice. We accept no liability for any errors that may appear in this manual nor do we make any expressed or implied warranties regarding the content.
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Page 4: Table Of Contents
Contents 1. Safety and compliance ................7 1.1 Definition of Warnings and Cautions ..............7 1.2 Safety symbols ....................8 2. General description ................. 9 2.1 Overview ......................9 3. Technical data ..................10 3.1 Operating and storage conditions ..............10 3.2 Mechanical data .................... - Page 5 5.3.6 Units screen..................32 5.4 Gas ballast control (E2M1.5) ................32 5.5 Electrical supply failure ................... 33 6. Maintenance ..................34 6.1 Maintenance safety..................34 6.2 Maintenance plan ................... 34 6.3 Inspect the hoses, pipelines and connections ..........35 6.4 Factory default settings ..................
- Page 6 List of Figures Figure 1: General view of the T-Station 85................9 Figure 2: Dimensions - pump ....................11 Figure 3: Max allowed rate of pressure rise during venting: pressure against time (pump initially at full speed) ......................14 Figure 4: Pin connections for 15-way sub-miniature 'D' type socket.
- Page 7 List of Tables Table 1: Operating and storage conditions ................10 Table 2: Mechanical data ...................... 10 Table 3: Pump performance data - nEXT85H ............... 11 Table 4: Pump performance data - nEXT85D ............... 12 Table 5: Vent gas specification and vent control ..............14 Table 6: Electrical connections .....................
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Page 8: Safety And Compliance
D39594880A – Remastered 2023 - Safety and compliance 1. Safety and compliance For safe operation from the start, read these instructions carefully before you install or commission the equipment and keep them safe for future use. Read all the safety instructions in this section and the rest of this manual carefully and make sure that you obey these instructions. -
Page 9: Safety Symbols
D39594880A – Remastered 2023 - Safety and compliance 1.2 Safety symbols The safety symbols on the products show the areas where care and attention is necessary. The safety symbols that we use on the product or in the product documentation have the following meanings: Warning/Caution An appropriate safety instruction must be followed or caution to a po-... -
Page 10: General Description
E2M1.5 rotary vane pump. Both system variants use a nEXT85 turbomolecular pump. The T-Station 85 is controlled by an easy to use touch pad control module. A single gauge input included can be connected to a range of our active gauges allowing for pressure measurement and/or control management of the turbomolecular pump. -
Page 11: Technical Data
D39594880A – Remastered 2023 - Technical data 3. Technical data Note: The operating, storage conditions and performance of the T-Station 85 may depend on the type of backing pump used. Refer to the technical data in the appropriate supplementary publications as listed in General description on page 9. -
Page 12: Pump Performance Data
D39594880A – Remastered 2023 - Technical data Figure 2 Dimensions - pump A. T-Station 85H wet with E2M1.5 backing pump B. T-Station 85H dry with XDD1 backing pump All measurements indicated are shown in mm (inches) 3.3 Pump performance data Table 3 Pump performance data - nEXT85H Turbomolecular pump type nEXT85H ISO63... -
Page 13: Pumped Media
D39594880A – Remastered 2023 - Technical data Turbomolecular pump type nEXT85H ISO63 nEXT85H CF63 nEXT85H NW40 < 5 E-09 mbar < 5 E-10 mbar < 5 E-09 mbar With rotary vane backing pump § < 5 E-08 mbar < 5 E-09 mbar <... -
Page 14: Venting Gas Specification And Vent Control Data
D39594880A – Remastered 2023 - Technical data CAUTION: CONDENSABLE MEDIA Risk of damage to equipment. Do not use the pump to pump particulates or condensable media. Deposition may occur within the pump which will degrade pump performance and reduce the pump life. CAUTION: FAILURE OF PUMP Risk of damage to equipment. -
Page 15: Materials Exposed To Gases Pumped
D39594880A – Remastered 2023 - Technical data Refer to the nEXT85 turbo pump manual (B8G000880) for the vent valve connection. Refer to Vent valve screen on page 28 for configuring the venting options. Table 5 Vent gas specification and vent control Vent gas specification and control Reference data Dry air, nitrogen, argon or other inert... -
Page 16: Electrical Connections
D39594880A – Remastered 2023 - Technical data ▪ Fire retardant polypropylene ▪ Polyamide ▪ 3.7 Electrical connections Table 6 Electrical connections Parameter Value Electrical supply ▪ Inlet plug type IEC60320 ▪ Integral fuse rating 10 A Type T, 20 mm Backing pump ▪... -
Page 17: Electrical Data
D39594880A – Remastered 2023 - Technical data Function Screen Power supply common Power supply common Normal signal input Figure 5 Pin connections for an 8-way RJ45 Table 8 Active gauge connector pin-out Function Power supply positive Power supply common Signal input Identification Signal common Control line 1... - Page 18 D39594880A – Remastered 2023 - Technical data Current (A) Supply Voltage Power (W) 50/60 Hz Full load Start E2M1.5 / nEXT85 13.6 3.92 12.0 Page 17...
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Page 19: Installation
D39594880A – Remastered 2023 - Installation 4. Installation 4.1 Installation safety WARNING: INSTALLATION SAFETY Risk of injury or damage to equipment. Follow the safety instructions and take note of all appropriate precautions. ▪ When referring to a manual supplied as a Supplementary Publication, all of the WARNING and CAUTION instructions in the manual must be obeyed. -
Page 20: Locate The Pumping System
There are two M8 fixing points located at the rear of the pumping system base (refer to Figure: General view of the T-Station 85, item 7). Using suitable brackets or straps (not supplied), securing the T-Station 85 to the bench top is recommended to prevent excessive movement in the unlikely event of a pump failure. Note: Straps or brackets cannot be provided as the best type fixing for the customer bench top location cannot be determined. -
Page 21: Fill The Pump With Oil
D39594880A – Remastered 2023 - Installation 4.5 Fill the pump with oil If the pumping system uses an E2M1.5 rotary vane pump, it must be filled with the correct quantity of oil (supplied) before operating the equipment. For further information refer to the EM Rotary Vane Pump manual A37132880. Fill the pump with oil as follows: Remove the oil filler plug. -
Page 22: Connect To The Exhaust Extraction System
D39594880A – Remastered 2023 - Installation 4.7 Connect to the exhaust extraction system WARNING: DANGEROUS GASES Risk of injury or damage to equipment. Vent dangerous gases and gas mixtures safely. Do not expose people to these gases. If pumping hazardous gases or vapours, observe the safety recommendations of the supplier of the gas/vapour. -
Page 23: Turbo Pump Delay
D39594880A – Remastered 2023 - Installation If system off is selected: ▪ The backing pump will turn off. ▪ The turbomolecular pump drive will turn off and the pump will start to decelerate. ▪ The TAV vent valve will open fully from 50% of full rotational speed. 4.9.1 Turbo pump delay The pumping system can be configured to delay the turbo pump after the backing pump has started. -
Page 24: Commission The System
D39594880A – Remastered 2023 - Installation 4.10 Commission the system After installing the T-Station 85, the system must be tested. Use the following procedure to test the system: Make sure that all the electrical connections are secure. Switch on the electrical supply and the exhaust extraction system (if available). -
Page 25: Operation
D39594880A – Remastered 2023 - Operation 5. Operation WARNING: ROTATING PARTS Risk of injury or damage to equipment. Do not attempt to move the pumping system while the turbo pump is rotating. Doing so may cause severe damage to the pump and could cause injury. -
Page 26: Start The System
Units screen 5.2 Start the system When applying power to the T-Station 85 all LEDs in the display will light for 2 seconds to confirm operation. The software version will then be displayed for a further 2 seconds. If you need to contact us for support regarding the T-Station 85, please have this software version number available. -
Page 27: Turbo Screen
D39594880A – Remastered 2023 - Operation Figure 7 Menu structure 5.3.1 Turbo screen When the turbo screen is selected, the turbo LED is lit and the speed of the turbomolecular pump is displayed in percentage of full speed. If no turbo pump is connected the display shows "---". Page 26... -
Page 28: Gauge Screen
D39594880A – Remastered 2023 - Operation Figure 8 Turbo screen Start the pump with the turbo screen When you push the START/STOP key, both the turbo and backing pumps start. The display shows the turbo pump is accelerating by flashing the top left portion of the percentage sign. -
Page 29: Vent Valve Screen
D39594880A – Remastered 2023 - Operation Connect a gauge When a gauge is first connected the display shows "ID" followed by a number to identify the new gauge. If the gauge is an Active Strain Gauge (ASG), the display then goes to ASG range select, otherwise the display reverts to showing the pressure reading. -
Page 30: Turbo Setpoint Screen
D39594880A – Remastered 2023 - Operation To change the vent valve setting press the ENTER key, then use the NEXT key to choose between 50%, Ctrld and FAN. Press the ENTER key again to confirm the selection. Table 15 Vent valve screen Normally open vent valves. -
Page 31: Figure 11 Turbo Setpoint Screen
D39594880A – Remastered 2023 - Operation When time delay is selected the display will show the delay time in seconds. The default time is 120 seconds. This means that the turbo pump will start after a delay of 120 seconds from when the START key is pressed. To change the value of the delay time press and hold the ENTER key to start number entry mode. -
Page 32: Calibrate Gauge Screen
D39594880A – Remastered 2023 - Operation Figure 12 Turbo setpoint number entry mode Table 17 Turbo setpoint screen key actions Keys Short press Long press START Go to turbo screen Enter edit mode, or con- ENTER Enter number entry mode firm selection Next TSP option, next Scroll through TSP options in edit mode, scroll... -
Page 33: Units Screen
D39594880A – Remastered 2023 - Operation Table 18 Calibrate gauge screen key actions Keys Short press Long press START Go to turbo screen ENTER Calibrate gauge NEXT Go to units screen Scroll through menu screens 5.3.6 Units screen When the units screen is selected, the menu LEDs are unlit and the currently selected units LED is lit. -
Page 34: Electrical Supply Failure
D39594880A – Remastered 2023 - Operation When operating the pump with the gas ballast control open, there will be an increased rate of oil loss from the pump. 5.5 Electrical supply failure WARNING: IMPELLER SPIN Risk of injury or death. If the power supply fails when the pump is running, the impeller could continue to spin for approximately 10 minutes. -
Page 35: Maintenance
HD high tensile class 12.9 must be used. If this warning is ignored and the turbo pump seizes, the stored energy in the turbo pump may cause some or all of the screws to fail. This may result in the turbo pump being ejected from the T-Station 85 base. -
Page 36: Inspect The Hoses, Pipelines And Connections
D39594880A – Remastered 2023 - Maintenance More frequent maintenance may be necessary if the pumping system has been used to pump corrosive or abrasive gases and vapour. If necessary, adjust the maintenance plan according to your experience. 6.3 Inspect the hoses, pipelines and connections Inspect all of the electrical connections and check that they are secure. -
Page 37: Fault Finding
D39594880A – Remastered 2023 - Fault finding 7. Fault finding Table 20 Fault finding Condition The pumping system has failed to start on page 36 Ultimate pressure cannot be reached on page 36 The backing pump is noisy on page 37 The backing pump is leaking oil on page 37 The turbo pump is very noisy or there is excessive vibration or both... -
Page 38: Error Numbers
D39594880A – Remastered 2023 - Fault finding Fault The backing pump is noisy Cause The pump is noisy. Refer to the Fault finding section of the backing pump manual. See General Remedy description on page 9. Fault The backing pump is leaking oil Cause There is oil leak in the backing pump Refer to the Fault finding section of the backing pump manual. - Page 39 D39594880A – Remastered 2023 - Fault finding Error Meaning Possible cause/remedy Number APGX filament failure Errors specific to APGX. Refer to the APGX manual for de- APGX cal err tails. Press the ENTER key to clear the error from the display once the fault has been corrected.
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Page 40: Storage
D39594880A – Remastered 2023 - Storage 8. Storage Use the following procedure to store the pumping system. Shut down the pumping system as described in Stop the pump with the turbo screen. Isolate the pumping system from the electrical supply and disconnect it from the vacuum system. -
Page 41: Disposal
D39594880A – Remastered 2023 - Disposal 9. Disposal Dispose of the pumping system and any components and accessories safely and in accordance with all local and national safety and environmental requirements. Particular care must be taken with any components that have been contaminated with dangerous process substances. -
Page 42: Service
D39594880A – Remastered 2023 - Service 10. Service Our products, spares and accessories are available from our companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A and a world-wide network of distributors. The majority of these centres employ Service Engineers who have undergone our comprehensive training courses. - Page 43 D39594880A – Remastered 2023 - Service NOTICE: If we do not receive a completed form, your equipment cannot be serviced. Page 42...
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Page 44: Spares
D39594880A – Remastered 2023 - Spares 11. Spares CAUTION: REDUCED RELIABILITY Use of spares, not supplied by us, may result in reduced reliability and performance and will invalidate product warranty. The spares available for the turbo pump and backing pumps are listed in the CD instruction manuals supplied with your equipment. -
Page 45: Accessories
D39594880A – Remastered 2023 - Accessories 12. Accessories 12.1 TAV vent valve and vent port adaptor (for nEXT85 turbo pump) A solenoid operated vent valve is available for system venting. The valve is a 24 V d.c., normally-open or normally-closed and can be driven by the turbo pump podule. - Page 46 D39594880A – Remastered 2023 - Accessories Page 45...
- Page 47 EU authorised to assemble the technical file, that the product(s) T-Station 85 T S 8 5 - X X – 0 X X The material numbers cover a family of products where the following features may vary:- turbomolecular pump inlet flanges, electrical supply and backing pumps.
- Page 49 edwardsvacuum.com...
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