Edwards nEXT 85 Instruction Manual

Turbomolecular pumps

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Safety and Compliance
Definition of Warnings and Cautions
Safety Symbols
Trained Personnel
Introduction
Overview
Pump Model Description
Motor Controller
Figure 1 Pump Model Description
Operational Features
Power Limit Setting
Standby Speed
Timer
Analogue Output
Automatic Vent Options
Normal Speed Setting
Electronic Braking
Logic Interface
USB Interface
Parallel Control and Monitoring
Serial Control and Monitoring
Serial Control with Parallel Monitoring
Parallel Control with Serial Monitoring or Serial Configuration
Motor Controller Configuration (Serial Configuration)
Technical Data
General Technical Data
Figure 2 Dimensions - Next85 ISO63
Figure 3 Dimensions - Next85 CF63
Figure 4 Dimensions - Next85 ISO100
Figure 5 Dimensions - Next85 DN40
Figure 6 Typical Base View
Figure 7 Dimensions - Next55D ISO63 NW16 80W
Operating and Storage Conditions
Figure 8 Dimensions - Next55D CF63 NW16 80W
Figure 9 Typical Base View
Vent Gas Specification and Vent Control Data
Purge Gas Specification
Figure 10: Maximum Allowed Rate of Pressure Rise During Venting: Pressure against Time (with Pump Initially at Full Rotational Speed)
Cooling Water
Electrical Data
Pumping Media
Figure 11 Maximum Relative Humidity to Avoid Condensation with Water Cooling
Materials Exposed to Gases Pumped
Logic Interface Connector
Motor Controller Auxiliary Connector Socket
Figure 12 Interface Circuits for Next Turbo Pump Controllers
Indicator Leds
Figure 13 Valve Connector
Pump Performance Data Next85
Figure 14 Next85 Pumping Speed Versus Inlet Pressure Performance Graph
Figure 15 Next85 Compression Ratio Versus Backing Pressure Graph
Pump Performance Data Next55
Figure 16 Next55 Pumping Speed Versus Inlet Pressure Performance Graph
Figure 17 Next55 Compression Ratio Versus Backing Pressure Graph
Installation
Unpack and Inspect
Figure 18 Typical Pumping System with a Next Pump
Connect to the Vacuum System
Remove and Replace the Inlet Screen
Mount the Pump
Backing Port Connection
Figure 19 Allowable Pump Orientation
Interstage Connection
Purge Gas Connection
Recommended Purge Gas Flow
Connect the Purge Gas
Electrical Installation
Ground the Connections
Connect the Logic Interface to the TIC or TAG
Connect the Logic Interface to the Control Equipment
Connect the Parallel Control and Monitoring
Connection for Serial Control and Monitoring
Connect the Serial Interface to the Customer Control Equipment
Figure 20 Logic Interface Connections - Parallel Control
Figure 21 Motor Controller Status Information
Serial Enable
Figure 22 Logic Interface Connections - RS232 Serial Control
Figure 23 Logic Interface Connections - RS485 Serial Control
Serial Protocol
Command Set
Multi-Drop Operation
Figure 24 Conceptual Diagram for Multi-Drop Connection Using RS232 Interface
Connection for Mixed Parallel and Serial Operation
Figure 25 RS485 Multi-Drop Connection
Cooling
Cooling Requirements
Figure 26 Logic Interface Connection - Mixed Parallel and Serial Operation
Forced Air Cooling
Water Cooling
Configuration
Configure the Pump Using Serial Commands
Message Structure
Command and Reply Table Definitions
Power Limit Setting
Power Supply to the Fan from the Motor Controller
Controlled Venting Options
Standby Speed Setting
Normal Speed Setting
Timer Setting and Options
Analogue Signal Options
Electronic Braking Options
Factory Settings
Assigning a Multi-Drop Address
Configure the Pump Using a TIC
Operation
Before Starting the Pump
Close the Vent Valve
Pre-Start Sequence
Vent Options, Vent Valve Connection and Control
Manual Vent Valve
TAV5 Solenoid Vent Valve
Vent Valve Control
Alternative Valve Connected to the Vacuum System
Operation with Parallel Control and Monitoring
Start the Pump
Figure 27 Auxiliary Interface Connection
Run the Pump at Standby Speed
Stop the Pump
Parallel Monitoring
Operation with Serial Control and Monitoring
Delayed Start
Start the Pump
Run the Pump at Standby Speed
Stop the Pump
Monitor Temperature Readings
Monitor Link Parameter Readings
Monitor Measured Motor Speed
Mixed Parallel and Serial Operation
Operation with a TIC or TAG
Decelerating and Venting
Figure 28 Serial and Parallel Control Flowchart
Operation at Extreme Conditions
Operation with High Inlet Pressure
Operation at High Temperatures
Protection against Over-Speed
Electrical Supply Failure
Bakeout
Shut down the Pump Manually
Maintenance
Bearing and Oil Cartridge Maintenance
Rotor Life
Cleaning the Pump
Decoding Service Status Words
Controller Run Time
Pump Run Time
Pump Cycles
Bearing Run Time
Oil Cartridge Run Time
Fault Finding
Command Set Error Codes
Flashing Service Codes
Flashing Error Codes
Decoding System Status Words
Service Information
Storage
Disposal
Service
Return the Equipment or Components for Service
Bearing and Oil Cartridge On-Site Maintenance
Spares
Inlet Screen
Inlet Strainer
Inlet Flange Seals and Integrated Inlet Screens
NW16 and NW25 Ports
Accessories
Air Cooler
Water Cooler
Figure 29 Accessories
Flange Heater
TAV5 Vent Valve
VRX Vent Restrictor
Vent Port Adaptor
PRX Purge Restrictor
Interface Cable
Nst PC Program
Auxiliary Connector
Auxiliary Extension Cable
Auxiliary 'Y' Cable Adaptor
Base Mounting Adaptor

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nEXT Turbomolecular Pumps

nEXT 55/85

INSTRUCTION MANUAL

B8G000880_E

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