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Edwards Manuals
Water Pump
nEXT1230
Instruction manual
Edwards nEXT1230 Instruction Manual
Turbomolecular pumps
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Contents
Table of Contents
Bookmarks
Table of Contents
Table of Contents
Safety and Compliance
Definition of Warnings and Cautions
Safety Symbols
Trained Personnel
Important Safety Information
Mechanical Hazards
Electrical Hazards
Thermal Hazards
Danger through Materials and Substances
Dangers in Connection with Safety-Related Measures and Precautions
Overview
Ordering Information
Figure 1 Next Model Overview
Motor Controller
Operational Features
Power Limit Setting
Standby Speed
Timer
Analogue Output
Automatic Vent Options
Normal Speed Setting
Electronic Braking
Bearing Monitoring
Logic Interface
USB Interface
Parallel Control and Monitoring
Serial Control and Monitoring
Serial Control with Parallel Monitoring
Parallel Control with Serial Monitoring or Serial Configuration
CAN Interface
Motor Controller Configuration (Serial Configuration)
Technical Data
Operating and Storage Conditions
General Technical Data
Pumping Speed Curves
Figure 2 Pumping Speed Curves for Next730H
Figure 3 Pumping Speed Curves for Next730Q/730D
Figure 4 Pumping Speed Curves for Next930Q/930D
Figure 5 Pumping Speed Curves for Next1230H
Figure 6 Dimensional Drawing for Next730/930
Figure 7 Dimensional Drawing for Next1230H
Pumping Media
Vent Gas Specification and Vent Control Data
Materials Exposed to Gases Pumped
Figure 8 Maximum Allowed Rate of Pressure Rise During Venting: Pressure against Time
Purge Gas Specification
Water Cooling
Figure 9 Maximum Relative Humidity to Avoid Condensation with Water Cooling
Figure 10 Cooling Requirements for Nitrogen for Next730H
Figure 11 Cooling Requirements for Argon for Next730H
Figure 12 Cooling Requirements for Nitrogen for Next730Q/930Q
Figure 13 Cooling Requirements for Argon for Next730Q/930Q
Figure 14 Cooling Requirements for Nitrogen for Next730D/930D
Figure 15 Cooling Requirements for Argon for Next730D/930D
Electrical Data
Figure 16 Cooling Requirements for Nitrogen for Next1230H
Figure 17 Cooling Requirements for Argon for Next1230H
Logic Interface Connector
Serial Protocol
Figure 18 Interface Circuits for Next Turbo Pump Controllers
Command Set
Multi-Drop Operation
Figure 19 Conceptual Diagram for Multi-Drop Connection Using RS232 Interface
Motor Controller Auxiliary Connector Socket
Figure 20 RS485 Multi-Drop Connection
Indicator Leds
Figure 21 Valve Connector
Installation
Unpack and Inspect
Connect to the Vacuum System
Figure 22 Typical Pumping System with a Next Pump
Remove and Replace the Inlet Screen
Figure 23 Connections and Controls
Mounting Orientation
Figure 24 Mounting Orientation for Next1230H
Figure 25 Mounting Orientation for Next1230H INV
Mount the Pump
Figure 26 Mounting High Vacuum ISO-F Flange Connection with Clearance Hole
Figure 27 Mounting High Vacuum ISO-F Flange Connection with Blind Hole Thread
Figure 28 Mounting High Vacuum Flange ISO-K Flange at ISO-F Flange with Collar Flange
Figure 29 Mounting High Vacuum Flange ISO-K Flange at ISO-K Flange
Figure 30 Mounting High Vacuum Flange ISO-K Flange at ISO-F Flange with Claws
Figure 31 Mounting High Vacuum CF Flange Connection with Clearance Hole
Backing Port Connection
Figure 32 Mounting High Vacuum CF Flange Connection with Blind Hole Thread
Purge Gas Connection
Recommended Purge Gas Flow
Connect the Purge Gas
Electrical Installation
Earth (Ground) Connections
TIC or TAG Logic Interface Connections
Connect the Logic Interface to Control Equipment
Figure 33 Controller View
Connect the Electrical Supply
Connect the Parallel Control and Monitoring
Figure 34 Power Supply Connector
Connection for Serial Control and Monitoring
Figure 35 Logic Interface Connections - Parallel Control
Figure 36 Simplified Logic Interface Connections - Parallel Control
Connect the Serial Interface to the Customer Control Equipment
Serial Enable
Figure 37 Logic Interface Connections - RS232 Serial Control
Figure 38 Logic Interface Connections - RS485 Serial Control
Connection for Mixed Parallel and Serial Operation
Cooling
Cooling Requirements
Figure 39 Logic Interface Connection - Mixed Parallel and Serial Operation
Forced Air Cooling
Water Cooling
Configuration
Configure the Pump Using Serial Commands
Message Structure
Command and Reply Table Definitions
Power Limit Setting
Powering a Fan from the Motor Controller
Controlled Venting Options
Standby Speed Setting
Normal Speed Setting
Timer Setting and Options
Analogue Signal Options
Electronic Braking Options
Factory Settings
Assigning a Multi-Drop Address
Configure the Pump Using a TIC
Operation
Before Starting the Pump
Close the Vent Valve
Pre-Start Sequence
Vent Options, Vent Valve Connection and Control
Manual Vent Valve
TAV5 or TAV6 Solenoid Vent Valve
Vent Valve Control
Alternative Valve Connected to the Vacuum System
Operation with Parallel Control and Monitoring
Start the Pump with Parallel Control
Run the Pump at Standby Speed with Parallel Control
Stop the Pump with Parallel Monitoring
Parallel Monitoring
Operation with Serial Control and Monitoring
Delayed Start with Serial Control
Start the Pump with Serial Control
Run the Pump at Standby Speed with Serial Control
Stop the Pump with Serial Control
Monitor Temperature Readings with Serial Control
Monitor Link Parameter Readings with Serial Control
Monitor Measured Motor Speed with Serial Control
Mixed Parallel and Serial Operation
Operation with a TIC or TAG
Decelerating and Venting
Operation at Extreme Conditions
Operation with High Inlet Pressure
Operation at High Temperatures
Protection against Over-Speed
Electrical Supply Failure
Bakeout
Shut down the Pump Manually
Maintenance
Bearing Maintenance
Rotor Life
Cleaning the Pump
Decoding Service Status Words
Controller Run Time
Pump Run Time
Pump Cycles
Bearing Run Time
Storage
Disposal
Fault Finding
Command Set Error Codes
Flashing Service Codes
Flashing Error Codes
Flashing Inactivity Service Codes (Blue Bearing LED)
Decoding System Status Words
Service Information
Service
Return the Equipment or Components for Service
Bearing Monitoring and Conditioning System
Bearing On-Site Maintenance
Bearing Run in Mode
Service Counter Reset
Spares
Inlet Screen
Inlet Flange Seals and Integrated Inlet Screens
Accessories
Air Cooler
Water Cooler
Flange Heater
TAV5 and TAV6 Vent Valves
VRX Vent Restrictor
Vent Port Adaptor
PRX Purge Restrictor
Interface Cable
Nst2 PC Program
Auxiliary Connector
Auxiliary Extension Cable
Auxiliary 'Y' Cable Adaptor
EPS 800 Power Supply
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edwardsvacuum.com
Turbomolecular pumps
nEXT730, nEXT930, nEXT1230
INSTRUCTION MANUAL
Original instructions
B8J200880_E
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