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C30F2
Ulvac C30F2 Manuals
Manuals and User Guides for Ulvac C30F2. We have
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Ulvac C30F2 manual available for free PDF download: Instruction Manual
Ulvac C30F2 Instruction Manual (102 pages)
Brand:
Ulvac
| Category:
Air Compressor
| Size: 4 MB
Table of Contents
Table of Contents
9
Disposal Considerations
17
Compressor Description
19
Introduction
19
Terminology
19
Table 1-1 C30F2 Compressor General Operating Specifications
19
Refrigerator System Documents
20
Roles of a Compressor in Cryopump System
20
Compressor Specifications
21
Figure 1-1 C30F2 External View
21
Figure 1-2 C30F2 Compressor Dimensions
21
Table 1-2 Power Supply Ratings
22
Table 1-3 Cooling Water Requirements
22
Table 1-4 Installation Environment and Operation Requirements
23
Table 1-5 Approved Regulations
23
Component Descriptions
24
Figure 1-3 Compressor Front View
24
Figure 1-4 Compressor Rear View
24
Connection with CRYO-U Cryopumps
27
Table 1-6 Minimum Configuration of C30F2 System
27
Figure 1-5 Configuration and the Connection with a Cryopump System
28
Considerations before Installation
29
Installation Environment
29
Figure 2-1 Required Space for Compressor Installation (Unit: MM) and
30
Requirements for Power Cable and Circuit Breaker
31
Figure 2-2 Customer' S Power Circuit
32
Table 2-2 Control and Signal Wire Gauges
32
Cooling Water Requirements
33
Table 2-3 Recommended Cooling Water for Compressor
33
Figure 2-3 Cooling Water Flow Rate, Water Supply Temperature, and Water
34
Figure 2-4 Cooling Water Flow Rate, Supply Temperature, and Pressure Drop
35
Length of Cables and Flexible Hoses
36
Main Circuit of the Compressor
36
Figure 2-5 Compressor Main Schematic
36
Table 2-4 Standard Cables and Flexible Hoses
36
Remote Functions
37
Figure 2-6 Wiring of Input and Output Lines
37
Table 2-5 Remote Response Specifications
37
Figure 2-7 Run Three Refrigerator Units in "Level Signal Operation Mode
38
Notes for Normal Operation
39
Figure 2-8 /FAULT Behavior at Powering on and after Momentary Power
39
Unpacking, Inspection and Storage
41
Compressor Carton
41
Shipping Inspection
41
Figure 3-1 Appearance of a Compressor Carton
41
Unpacking
42
Carton Contents
43
Figure 3-2 Remove Cardboard and Insert Forks Underneath the Compressor
43
Table 3-1 Carton Contents
43
Inspection of the Compressor and Accessories
44
Flexible Hoses and Specifications
44
Table 3-2 Flexible Hose Specifications
44
Cautions for Transportation and Storage
45
Installation, Piping, and Wiring
47
Before Installation
47
Connecting Cooling Water Lines
47
Figure 4-1 Installation Procedure
47
Connecting and Disconnecting Helium Flexible Hoses
48
Single Cryopump Connection
51
Multiple Cryopump Connections
52
Electrical Connections
53
Points to be Checked after Installation
60
Disconnecting Wirings and Lines
61
Operation
63
Verification of Helium Static Pressure
63
Compressor Operation
64
Inspection after Replacing Helium Circulation Components
66
Precautions for When the Compressor Unit Is Suspended
67
When Removing Water from the Compressor Unit
67
Maintenance Operation for a Compressor Suspended for a Long Period
68
Section 6 Maintenance
69
Scheduled Maintenance
69
Replacement of Adsorber
69
Table 6-1 Scheduled Maintenance
69
Adjusting System Helium Pressure
73
Table 6-2 Preparation for Adding Helium Gas
75
Regular Maintenance of Helium Lines, Cooling Water Piping and Electrical Wiring
78
Maintenance Parts
78
Table 6-3 Maintenance Parts
78
Lockout-Tagout
79
Fuse Replacement
80
Table 6-4 Fuse Specifications
80
Troubleshooting
83
Problem Types
83
Troubleshooting Procedures
83
Table 7-1 List of Troubleshooting before Operation
83
Table 7-2 List of Troubleshooting During Operation
84
STATUS DISPLAY Descriptions
85
Appendix A Operating Log
87
Appendix B Combination of C30F2 Compressor and Cryopump/Super Trap
89
Appendix C Compressor Flow Diagram
91
Appendix D C30F2 Schematic Diagram
93
Appendix E C30F2 Self-Certification
95
Appendix F China Rohs Hazardous Substances in the Product
97
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