Operation Panel - Ulvac ECO-SHOCK ES10 Instruction Manual

1.6 Operation Panel

V1
V4
No. Component
Basic unit
M1 Time counter
M2 Start (power) switch
M3 Control connector
M4 Power connector
Valve unit connecting port
M5
(OUTLET)
Valve unit connecting port
M6
(INLET)
M7 Internal cooling fan
Valve unit
Exhaust line connecting port
V1
(duct side)
V2 Upper port
V3 Lower port
Exhaust line connecting port
V4
(pump side)
M5
V2
M6
M7
V3
Displays running time.
Starts the system.
For remote start (interlocked action with pump) and
output of alarm signal.
Connect power.
Connect this to valve unit upper port.
Connect this to valve unit lower port.
Cools internal parts（suction type）.
Connect this to the duct side of the exhaust line.
Connect this to the M5 port in the basic unit.
Connect this to the M6 port in the basic unit.
Connect this to the pump side of the exhaust line.
Function
4 Instruction Manual ECO-SHOCK
M1
!
M2
M3
M4