Maximum Quantity Of Sucked Gas Processable By Cryopump - Ulvac CRYO-U Series Instruction Manual

CRYO-U Cryopump Instruction Manual
®
The maximum quantity of sucked gas which is instantaneously processable is given by the
lim it value at which the cryopump can res
v alue which controls the cryopanel temperature not to exceed 20K is used as the
maximum allowable crossover pressure.
The maximum quantity of sucked gas which is instantaneously processable varies with
the heat load on the cryopump and the quantity of the gas condensed in the cryopump.
(Refer to Table 5-2.)
Table 5-2
Mode
CRYO-U
[Example] When U22WB is used
allowable c rossover pressure
Maximum allowable crossover
pressure (Pa)
In order to restrict the stored quantity of gas an
rec ommended to

Maximum Quantity of Sucked Gas Processable by Cryopump

Maximum quantity of sucked gas spontaneously
l
Limit quantity for the temperature of 20K or les
®
22WB
and the vacuum chamber volume is 100L, the m
is calculated as follows
† For reference †
control the actual crossover pressure to 40Pa or less.
ULVAC CRYOGENICS INCORPORATED
tore the evacuation performanc
(Guideline Quantity to the Air)
processable (Pa•L)
133000
133000（Pa･L）
≦
00（L）
1
d extend
e. Normally, a
s
=1330（Pa）
the regeneration cycle, it is
aximum
5-5