Ulvac CRYO-U 22WB Manuals

Manuals and User Guides for Ulvac CRYO-U 22WB. We have 1 Ulvac CRYO-U 22WB manual available for free PDF download: Instruction Manual

Ulvac CRYO-U 22WB Instruction Manual

Ulvac CRYO-U 22WB Instruction Manual (102 pages)

CRYOPUMP

Brand: Ulvac | Category: Water Pump | Size: 3 MB

Table of Contents

Table of Contents
9
Safety Instructions
13
Disposal Consideration
25
SECTION 1 Cryopump Description

27
- General
  27
- Specifications
  28
- Environmental Requirements
  29
- Major Components
  32
SECTION 2 Inspection

33
- 2.1 Shipping List
  33
- 2.2 First Inspection of Cryopump
  34
SECTION 3 Quick Installation

35
- Quick Installation
  35
- Quick Installation Process Flow
  36
  - Auxiliary Equipments Required
    37
  - Installation
    38
SECTION 4 Installation

37
- Examples of Cryopump Installation
  39
- Connecting Flexible Hoses
  45
  - Prior to Startup
    47
  - Rough Pumping
    47
  - Pressure Buildup Test
    48
  - Startup and Cooldown
    48
  - Operation
    48
  - Rough Pumping
    48
  - Normal Operation
    49
- Cryopump Temperature Indication
  49
  - Crossover
    50
- Maximum Quantity of Sucked Gas Processable by Cryopump
  51
  - Shutdown Procedures
    52
  - Handling of Hazardous Materials
    52
SECTION 6 Regeneration

53
SECTION 8 Maintenance

65
- Scheduled and Unscheduled Maintenance
  65
- Consumables
  67
- CRYO-U ® 22WB Consumables
  67
  - Cleaning the Cryopump
    68
  - Charging Helium Gas
    69
- Charging Helium Gas
  71
  - Helium Circuit Decontamination
    72
    
    A Troubleshooting
    72
    
    B Flexible Hose
    73
Appendices

72
- Disconnecting Flexible Hose
  73
- Connecting Flexible Hoses
  77
- Operating Log
  85
  - C Conversion of Thermometer Readings
    89
  - D Principle of Cryopump Operation
    91
- Vapor Pressure of Various Kinds of Gas
  92
  - E Principle of Refrigerator Operation
    93
- Principle of Refrigeration
  93
- Two-Stage Refrigerator
  96
  - F Dew Condensation
    97
- Dew-Point Temperature
  98
Service Network

99

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