Related Manuals for Brooks Instrument GF100 Series
Summary of Contents for Brooks Instrument GF100 Series
- Page 1 Installation & Operation Manual GF100, GF120xHT, GF101 Series Mass Flow Controllers & Meters Beyond Measure...
- Page 2 Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
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Page 3: Table Of Contents
In-Line Filter ............................26 Mechanical Installation ........................26 Flow Controller Installation Arrangement ................... 27 Purge the Gas Supply Line Before GF100 Series Installation ............28 Position and Mount the GF100/GF120xHT/GF101 Series ..............30 Perform a Leak Test .......................... 32 Zeroing Setup Process ........................32 Zeroing the GF100/GF120xHT/GF101 Series ................... - Page 4 2-15 Example of GF100 Series with 9-Pin Analog Connector ............38 2-16 Analog 9-Pin Connector, Alternate Pin-out Options Available ........... 38 2-17 Example of GF100 Series with EtherCAT Commnications, M8 Power Connector Location ..39 2-18 M8 Power Connector Drawing ....................39 2-19 GF100 Series Electrical Interface Options ................
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Page 5: Introduction
® Optional model variations including—pressure transient insensitivity (PTI), Safe Delivery System (SDS), Zero Leak Valve (ZLV), and High Temperature (HT). GF100 Series Downport/Analog Example GF120xHT Series Downport/DNET Example GF101 Series Faceseal/DNET Example Figure 1-1 GF100, GF120xHT, and GF101 Series High Performance Mass Flow Controller & Meter... -
Page 6: Product Support References
Product warranty information can be found on the Back Cover of this Manual and on the Brooks website at www.BrooksInstrument.com. This information provides general warranty information, limitations, disclaimers, and applicable warranty periods according to product group. How to Order a GF100 Series Device Refer to Section 5. Industry Standard References Refer to Table 1-1. -
Page 7: Industry Standard References
Section 1 Introduction Brooks Instrument Table 1-1 Industry Standard References Reference Number Reference Description Method 514.4, Category 1, Transportation Requirement MIL-STD-810 Method 516.4, Procedure 1, Functional Shock Test Requirement SEMI E12 Standard temperature and pressure SEMI E16 Guideline for determining and describing MFC leak rates... - Page 8 A process technology where a pure silicon crystalline structure is deposited or “grown” on a bare wafer, enabling a high-purity starting point for building the semiconductor device. Horizontal Base Down High Temperature GF100 Series Integrated Flow Controller F.S. Full Scale Light Emitting Diode Mass Flow Controller...
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Page 9: Description
*Software, MultiFlo Configurator A331710003 Cable Assembly 2.5mm 214F027AAA USB-RS485 Converter with DB-9 female A332295001 Power Supply MFC A332297002 Cable, Power, 9-Pin A332297001 Cable, Power, DeviceNet * MultiFlo Configurator Software is available on the Brooks Instrument website at: www.BrooksInstrument.com/MultiFlo https://www.brooksinstrument.com/en/documentation Manual GF100/GF120xHT/GF101 Series... - Page 10 Enhanced pressure transient is achieved through faster sensing, quicker processing, and a reduction in internal dead-volume between the sensors and valve orifice. GF101/121/126 based on the same technology and design as the low flow GF100 series (same sensor, same electronics, low power support) •...
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Page 11: Lcd Display
Extensive Mechanical Configurations GF Series supports all metal seal/UHP industry gas connection interface standards for full OEM and process coverage. GF100 Series: • Downport 79.8mm and 92mm C-seal 1-1/8” and 1-1/2” bodies • Downport 79.8mm and 92mm W-seal 1-1/8” and 1-1/2” bodies •... -
Page 12: Specifications For Gf100/Gf120Xht/Gf101 Series Devices
64 devices for DeviceNet and 32 devices for RS485 to be connected on the same network. Brooks Instrument’s DeviceNet profile has been certified by the ODVA™ (Open DeviceNet Vendor’s Association). EtherCAT is an Ethernet based communications system know for its high cycle time and cost efficient cabling and master application solutions. -
Page 13: Specifications For Gf100/Gf120/Gf125 Series With Analog And Dnet Communications
Brooks Instrument Section 1 Introduction Table 1-3 Specifications for GF100/GF120/GF125 Series with Analog and DNET Communications GF100 GF120 GF125 GF120XSL GF120XSD Performance Full Scale Flow Ranges 3 sccm to 55 slm 4 sccm to 25 sccm >25 sccm to 1 slm Flow Accuracy ±1% S.P. - Page 14 Brooks Instrument Section 1 Introduction Table 1-3 Specifications for GF100/GF120/GF125 Series with Analog and DNET communications (continued) GF100 GF120 GF125 GF120XSL GF120XSD Electrical Electrical Connection RS485/Analog via 9-Pin “D” connector, DeviceNet via 5-Pin “M12” connector Digital Communication RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models) Diagnostics/Service Port RS485 via 2.5mm jack...
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Page 15: Specifications For Gf100/Gf120/Gf125 Series With Ethercat Communications
Brooks Instrument Section 1 Introduction Table 1-4 Specifications for GF100/GF120/GF125 Series with EtherCAT Communications GF100 GF120 GF125 GF120XSL GF120XSD Performance Full Scale Flow Ranges 3 sccm to 55 slm 4 sccm to 25 sccm >25 sccm to 1 slm Flow Accuracy ±1% S.P. - Page 16 Brooks Instrument Section 1 Introduction Table 1-4 Specifications for GF100/GF120/GF125 Series with EtherCAT Communications (continued) GF100 GF120 GF125 GF120XSL GF120XSD Electrical Electrical Connection Power via 5-pin M8 Connector, EtherCAT via RJ45 jacks Digital Communication EtherCAT Diagnostics / Service Port Micro-USB Power Supply / Consumption 320 mA max.
- Page 17 Brooks Instrument Section 1 Introduction Table 1-5 Specifications for GF101/GF121/GF126 Series with Analog and DNET Communications GF101 GF121 GF126 Performance Full Scale Flow Range 55 slm to 300 slm Flow Accuracy ±1% S.P. > 35-100%; ±0.35% F.S. 2-35% Repeatability & Reproducibility <...
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Page 18: Specifications For Gf101/Gf121/Gf126 Series With Ethercat Communications
Brooks Instrument Section 1 Introduction Table 1-6 Specifications for GF101/GF121/GF126 Series with EtherCAT Communications GF101 GF121 GF126 Performance Full Scale Flow Range 55 slm to 300 slm Flow Accuracy ±1% S.P. > 35-100%; ±0.35% F.S. 2-35% Repeatability & Reproducibility < ± 0.15% S.P. -
Page 19: Specifications For Gf120Xht Series
Section 1 Introduction Brooks Instrument Table 1-7 Specifications for GF120xHT Series GF120xHT Performance Full Scale Flow Range 50 sccm to 5 slm Flow Accuracy ±1% S.P. >35-100%, ±0.35% F.S. 2-35% Repeatability & Reproducibility 5-100% = ±0.15% of S.P., 2-5% = ±0.015% of F.S. -
Page 20: Dimensions - Gf100/Gf120/Gf125 Series
Section 1 Introduction Brooks Instrument GF100/GF120/GF125 Downport Configurations Electrical Connector Electrical Connector Electrical Connector G1/GX/TX Specific Dimensions SX Specific Dimensions DX/BB Specific Dimensions 3.67in 93mm 4.45in 113mm Fitting Option Code Seal Type Dim A Dim B Dim C Dim D... -
Page 21: Dimensions - Gf101/Gf121/Gf126 Series
Section 1 Introduction Brooks Instrument GF101/GF121/GF126 Downport Configurations DNET RS485 RS485/RJ11 5.84 4.50 3/8” C-SEAL Fitting Option Code Seal Type Dim A Dim B 3/8” C-Seal 92 mm [3.62 in] 106 mm [4.17 in] 3/8” C-Seal 114 mm [4.49] 127 mm [5.00 in]... -
Page 22: Dimensions - Gf100/Gf120/Gf125, Gf101/Gf121/Gf126 Series With Ethercat Communications
Section 1 Introduction Brooks Instrument EtherCAT, Downport Configurations Fitting Option Code Model Seal Type Dim A Dim B Dim C Dim D Dim E Dim F GF100/120/125 C-Seal 3.62 [92] 4.13 [105] 0.86 [21.7] 1.12 [28.4] 3.55 [90.2] 1.00 [25.4]... - Page 23 PART FOR ANY PURPOSE OTHER THAN FOR EVALUATION, PROVIDED CONCENTR. = 0.005" FIM WELDING DIM'S. = ± 0,2 THAT, IF A CONTRACT IS AWARDED TO BROOKS INSTRUMENT LLC, DEGREES = ± 1/2° WELDING DIM'S. = ± 1/16" AS A RESULT OF OR IN CONNECTION WITH THE SUBMISSION OF SUCH DEGREES = ±...
- Page 24 Section 1 Introduction Brooks Instrument HEET DOWNPORT GF120xHT Series - Flow Module Configurations DOWNPORT 3.22in 3.22in 82mm 81.8mm 3.55in 3.66in 3.66in 3.55in 90.2mm 93mm 93mm 90mm .50in 12.7mm PIN (LX OPTION ONLY) 4X 8-32 UNC 0.12 [3.0mm] Fitting Option Code...
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Page 25: Section 2 Installation
If the packing case is damaged, the local carrier should be notified at once regarding his liability. A report should be submitted to the nearest Brooks Instrument location listed on the Global Service Network page on our website: BrooksInstrument.com/GlobalSupportCenters... -
Page 26: Transit Precautions
Section 2 Installation Brooks Instrument Transit Precautions To safeguard against damage during transit, transport the device to the installation site in the same container used for transportation from the factory, if circumstances permit. Removal from Storage Upon removal of the device from storage, a visual inspection should be conducted to verify its “as-received”... -
Page 27: Flow Controller Installation Arrangement
Section 2 Installation Brooks Instrument The GF125 Series is equipped with PTI technology, which reduces the effect of pressure fluctuations on gas flow. In PTI technology, a signal from an integrated pressure transducer is combined with the standard thermal sensor output. The combined signals allow precise and stable flow, even when the line pressure is fluctuating. -
Page 28: Purge The Gas Supply Line Before Gf100 Series Installation
Section 2 Installation Brooks Instrument Purge the Gas Supply Line Before GF100/GF120xHT/GF101 Series Installation CAUTION For additional safety, it is recommended to close the two valves between the charged gas line and the GF100/GF120xHT/GF101 Series to be installed. See Figures 2-1 and 2-2 for more details. -
Page 29: Gf100 Series Mounting Attitude Positions
Brooks Instrument Section 2 Installation Figure 2-3 GF100 Series Mounting Attitude Positions Figure 2-4 GF120xHT Series Mounting Attitude Positions Manual GF100/GF120xHT/GF101 Series... -
Page 30: Position And Mount The Gf100/Gf120Xht/Gf101 Series
Section 2 Installation Brooks Instrument Position and Mount the GF100/GF120xHT/GF101 Series Position the GF100/GF120xHT/GF101 Series so that the gas flow is pointed in the direction of the flow arrow on the GF100/GF101 Series rear S/N label. The various mounting positions are described in Figure 2-3 The standard orientation for the GF100/GF101 Series is Horizontal Base Down (HBD). -
Page 31: Gf100 Series Mounted To K1 Series Substrate Blocks
Section 2 Installation Brooks Instrument Figure 2-5 GF100 Series Mounted to K1 Series Substrate Blocks Figure 2-6 Mounting Screws Torque Pattern* Table 2-1 K1 Series Fasteners* Fastener Size Connection K1R2 GF100/ M4 x 34mm M5 x 30mm M5 x 37mm... -
Page 32: Perform A Leak Test
Section 2 Installation Brooks Instrument Perform a Leak Test WARNING Before operating the flow controller, ensure all gas connections have been properly tightened and, where applicable, all electrical connections have been properly terminated. It is critical to leak test the gas supply lines and GF100/GF120xHT/GF101 Series connections before turning on the process gas supply after any new installation. -
Page 33: Zeroing The Gf125/Gf126 Series Pressure Transducer From The Lcd Display Panel
Section 2 Installation Brooks Instrument Make sure you perform the zeroing set-up process outlined in “Zeroing Setup Process” before zeroing the GF100/GF120xHT/GF101 Series. Shut-off valves, whether upstream or downstream from the GF100/GF120xHT/GF101 Series, should be programmed to turn on before the GF100/GF120xHT/GF101 Series is turned on and turned off after the GF100/GF120xHT/GF101 Series is turned off. -
Page 34: Zeroing Gf100/Gf120Xht/Gf101 Series Flow From Lcd Display Panel
Section 2 Installation Brooks Instrument Zeroing GF100/GF120xHT/GF101 Series Flow from LCD Display Panel 1. Place the GF100/GF120xHT/GF101 Series under normal inlet operating pressure. Close the down stream valve to prevent any flow. 2. Looking at the top of the GF100/GF120xHT/GF101 Series, press the “Display” button until the LCD display label is “%FS”... -
Page 35: Introduction To The Multiflo Tm Configurator
Gas Flow Range GF Series Configurations (N2 Equivalent) Code SH40 010C 3-10 sccm SH41 030C 11-30 sccm SH42 092C 31-92 sccm GF100 series from SH43 280C 93-280 sccm SH40-SH50 bins SH44 860C 281-860 sccm SH45 2.6L 861-2600 sccm SH46 7.2L 2601-7200 sccm... -
Page 36: Diagnostic Port Locations
Section 2 Installation Brooks Instrument Figure 2-11 MultiFlo Cable Adapter Figure 2-12 USB-RS485 Converter (214F027AAA) Connect the USB end of the converter to a laptop or PC. For GF100/GF101 devices with EtherCAT communication, the diagnostic port must be used to interface with the MultiFlo Configurator. -
Page 37: Electrical Connections
DO NOT apply more than 10 Inch-Pounds of torque to the cable coupling when connecting the cable to the device or damage may result to the connector. Figure 2-14 Example of GF100 Series with a DeviceNet Communication Manual GF100/GF120xHT/GF101 Series... -
Page 38: Analog/Rs485 Connections
The GF100/GF120xHT/GF101 Series devices are available with Analog 9-Pin D-Connectors shown in Figure 2-15. Analog 9-Pin Connector (Refer to Figure 2-15 for Pin-Out Details) Figure 2-15 Example of GF100 Series with 9-Pin Analog Connector Connection Valve Control Output (0-5 Vdc) +15 Vdc +24Vdc... -
Page 39: Ethercat Connections
Refer to Figures 2-17 and 2-18 below. M8 Connector (Refer to Figure 2-18 for Pin-Out Details) Figure 2-17 Example of GF100 Series with EtherCAT Communications, M8 Power Connector Location. Figure 2-18 M8 Power Connector Drawing... - Page 40 Other adapter options are available for the GF Series. Please contact Brooks Customer Service for more information. Flow Out AGND GPIO CAP0 GHD Earth All Base I/O options include: Diagnostic port communication RS485 via 2.5mm jack Figure 2-19 GF100 Series Electrical Interface Options Manual GF100/GF120xHT/GF101 Series...
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Page 41: Gf120Xht Series Electrical Interface Options
Section 2 Installation Brooks Instrument Base I/O Options Adapter Cables with Base I/O Option Model Code Option: E0 Description +24V Power Common Description: Industry Standard EtherCAT interface EtherCAT diagnostic port communication via micro-USB A range of low profile adapter cables have been... -
Page 42: Section 3 Operation
Section 3 Operation Brooks Instrument General After the device has been properly installed in the process, it is ready for operation. When initiating flow, slowly open any upstream shutoff valve to avoid a flow surge. A bypass is helpful in bringing the flow on smoothly. Avoid starting a pump to supply the device without the use of a valve upstream of the device. - Page 43 3. The two summed signals cancel each other out. 4. The resulting sensor signal is used to control the valve. 5. The flow of process gas is undisturbed by incoming pressure fluctuations. Figure 3-1 GF100 Series Operating Principles Manual GF100/GF120xHT/GF101 Series...
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Page 44: Section 4 Maintenance & Troubleshooting
Section 4 Maintenance & Troubleshooting Brooks Instrument Overview No routine maintenance is required on the Brooks GF100/GF120xHT/GF101 Series devices. If an in-line filter is used, the filtering elements should be periodically replaced or cleaned. Any precision unit such as a flow controller requires occasional servicing, especially if it has been operating for an extended period of time. - Page 45 Section 4 Maintenance & Troubleshooting Brooks Instrument If it becomes necessary to remove the controller from the system after exposure to toxic, pyrophoric, flammable or corrosive gas, purge the controller thoroughly with a dry inert gas such as Nitrogen before disconnecting the gas connections. Failure to correctly purge the controller could result in fire, explosion or death.
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Page 46: Troubleshooting
Section 4 Maintenance & Troubleshooting Brooks Instrument Troubleshooting This section includes a Troubleshooting Checklist and a GF100/GF120xHT/GF101 Series Troubleshooting Guide that identifies symptoms, possible causes, and corrective actions. OEM tool problems are often caused by something other than the GF100/GF120xHT/GF101 Series. Therefore, Brooks recommends... -
Page 47: Gf100/Gf120Xht/Gf101 Series Troubleshooting Guide
Section 4 Maintenance & Troubleshooting Brooks Instrument GF100/GF120xHT/GF101 Series Troubleshooting Guide Table 4-2 GF100/GF120xHT/GF101 Series Troubleshooting Guide Symptoms & Possible Causes Corrective Action 1. No gas flow. Is the gas supply turned on? Check shut-off valve and pressure readout. Open the gas supply. - Page 48 Section 4 Maintenance & Troubleshooting Brooks Instrument Table 4-2 GF100/GF120xHT/GF101 Series Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 4. No gas flow above some set-point. NOTE: When the setpoint is increased beyond this point, the GF100/GF120xHT/GF101 Series signal remains at some value lower than the set-point.
- Page 49 Section 4 Maintenance & Troubleshooting Brooks Instrument Table 4-2 GF100/GF120xHT/GF101 Series Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 6.Gas low, or GF100/GF120xHT/GF101 Series pressure reading oscillates. Are inlet and outlet pressures stable? If outlet pressure is unstable, check for (no oscillation or hunting) a faulty vacuum pump, or hunting at a downstream valve.
- Page 50 Section 4 Maintenance & Troubleshooting Brooks Instrument Table 4-2 GF100/GF120xHT/GF101 Series Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 10. Calibration Drift. Gas box temperature too high? Is it linear offset? Zero is not correct. NOTE: If using the GF120xHT Series: Are process...
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Page 51: Section 5 Product Description Code
Brooks Instrument Section 5 Product Description Code Overview Reference Tables 5-1 through 5-5 for specific Product Description Codes. Table 5-1 GF100, GF120 & GF125 Series Product Description Code with Analog and DNET Communications Code Description Code Option Option Description I. Base Model Code High Purity/Ultra High Purity Digital Mass Flow Controllers II. - Page 52 Brooks Instrument Section 5 Product Description Code Table 5-1 GF100, GF120 & GF125 Series Product Description Code with Analog and DNET Communications (Continued) Code Description Code Option Option Description X. Communications/Connector Cable adapter to 15 pin D Brooks (Unit “B”,”N”); adapts G1 base Cable adapter to card edge (w/out VTP), RS485 through RJ11 jacks (Unit ”E”;...
- Page 53 Brooks Instrument Section 5 Product Description Code Table 5-2 GF100, GF120 & GF125 Series Communications Product Description Code with EtherCAT Communications Code Description Code Option Option Description I. Base Model Code High Purity/Ultra High Purity Digital Mass Flow Controllers II. Package / Finish Specifications Flow range 3 sccm - 55 slpm N Eq.;...
- Page 54 Brooks Instrument Section 5 Product Description Code Table 5-3 GF101, GF121 & GF126 Code with Analog and DNET Communications Code Description Code Option Option Description I. Base Model Code High Purity/Ultra High Purity Digital Mass Flow Controllers II. Package / Finish Specifications Flow range 55 - 300 slm N Eq.;...
- Page 55 Brooks Instrument Section 5 Product Description Code Table 5-3 GF101, GF121 & GF126 Code with Analog and DNET Communications (Continued) Code Description Code Option Option Description X. Communications/Connector Cable adapter to 15 pin D Brooks (Unit “B”,”N”); adapts G1 base Cable adapter to card edge (w/out VTP), RS485 through RJ11 jacks (Unit”E”;...
- Page 56 Brooks Instrument Section 5 Product Description Code Table 5-4 GF101, GF121 & GF126 Series Communications Product Description Code EtherCAT Communications Code Description Code Option Option Description I. Base Model Code High Purity/Ultra High Purity Digital Mass Flow Controllers II. Package / Finish Specifications Flow range 55 - 300 slm N Eq.;...
- Page 57 Brooks Instrument Section 5 Product Description Code Table 5-5 GF120xHT Series Communications Product Description Code Code Description Code Option Option Description I. Base Model Code Ultra High Purity Digital Mass Flow Controller and Meter II. Package / Finish Specifications Flow range 50 SCCM - 5 SLPM N III.
- Page 58 Brooks Instrument Section 5 Product Description Code Table 5-5 GF120xHT Series Communications Product Description Code (Continued) XI. Customer Special Request XXXX Customer Special Request Number; required with "DX" Conn. Option to define DNet settings XII. Auto Shut-Off Auto Shut-Off (Included) Auto Shut-Off (Not Included) (Must be selected for meter) XIII.
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Page 59: Gf100 Series Ordering Instructions
Section 5 Product Description Code Brooks Instrument GF100 Series Ordering Instructions Refer to the Product Description Codes on the previous pages. Starting from the left, choose the product code options as follows: 1. Required performance model. a. Standard Performance, non-PTI: GF100 b. - Page 60 Section 5 Product Description Code Brooks Instrument 15. Operating Temperature in Degrees C (for GF120xHT product only) a. Operating temperature in five degree intervals from 10°C to 150°C: 150 16. Operating Temperature in Degrees C (for GF120xHT product only) a. 3ft: X b.
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Page 61: Appendix A: Gf100 Series Patents
Appendix A: GF100/GF101 Series Patents Brooks Instrument GF100/GF120xHT/GF101 Series Patents The GF100/GF120xHT/GF101 Series may be protected by the following US patents and their international filings. Table A-1 GF100/GF120xHT/GF101 Series Patents Patent/Pub. No. Title 6343617 System and method of operation of a digital mass flow controller... - Page 62 Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons. Please contact your nearest sales representative for more details. Due to Brooks Instrument’s commitment to continuous improvement of our products, all specifications are subject to change without notice.