Related Manuals for Brooks Instrument SLAMf Series
Summary of Contents for Brooks Instrument SLAMf Series
- Page 1 X-TMF-SLAMf-Series-RevB-MFC-eng Part Number: 541B188AAG September, 2019 SLAMf Series Elastomer Sealed, Thermal Mass Flow Meters and Controllers Installation & Operation Manual Model SLAMf50...
- Page 2 Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
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Page 3: Table Of Contents
Contents Section 1 Introduction Scope ............................1 Purpose ............................1 Specifications ..........................1-4 Biotech Option..........................5-19 Section 2 Installation General............................20 Receipt of Equipment ........................20 Recommended Storage Practice ....................20 Return Shipment .......................... 20 Transit Precautions ........................21 Removal from Storage ......................... 21 Gas Connections .......................... - Page 4 SLAMf Series Profibus Terminal Connections ................10 SLAMf Series DeviceNet Terminal Connections ................11 SLAMf Series EtherNet/IP M12, 4 Pole Female D Connector for In-Out Port ......12 EtherNet/IP 5 Pin M8 Male Nano-change Connector for Power ..........12 EtherNet/IP Layout under the Top Cover ..................12 1-10 Model SLAMf50, EtherNet/IP .......................
- Page 5 Contents Tables 1-1 SLAMf Series Specifications ......................2 1-2 SLAMf Series Electrical Specifications..................3 1-3 SLAMf Series Specifications for Biotech Option ................4 1-4 SLAMf Series Agency Certifications ....................5 Recommended Filter Size ......................21 Typical Resistor Values for Calibration Selection ................ 3-5 Bench Troubleshooting Circuit ..................... 44 Sensor Troubleshooting ....................... 45 Troubleshooting ..........................46...
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Page 6: Section 1 Introduction
Section 1 Introduction Scope Thank you for purchasing a Brooks Instrument Digital Mass Fow Product. This manual, X-TMF-SLAMf-Series-RevB-MFC-eng is an installation and operation manual for your instrument. Purpose The SLAMf Series are mass flow measurement devices designed for ac- curately measuring (MFM's) and rapidly controlling (MFC's) flows of gases. This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain the Brooks MFC and MFM. - Page 7 Section 1 Introduction Table 1-1 SLAMf Series Standard Specifications Flow Ranges and Pressure Ratings: Mass Flow Mass Flow Flow Ranges Maximum Operating PED Module H Controller Meter N2 Eq. Ratings Pressure psi/bar Category ¹ ¹ Model Model Min. F.S. Max. F.S.
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Page 8: Specifications
Section 1 Introduction Electrical Specifications Table 1-2 SLAMf Series Electrical Specifications EtherNet/IP Communication Protocol RS485 Profibus DeviceNet ® 1x 5-pin M8 Male Nano Electrical Connection 1 x 15-pin Male Sub-D, 1 x 15-pin Male Sub-D/ 1 x M12 with Change Connector /... - Page 9 Section 1 Introduction SLAMf Series Biotech Table 1-3 SLAMf Specifications Performance SLAMf50/60 SLAMf51/61 SLAMf53/63 Min. F.S. Max. F.S. Min. F.S. Max. F.S. Min. F.S. Max F.S. ¹ Available Flow Ranges (N2, Eq) 5 sccm 50 lpm 15 lpm 150 lpm 100 lpm 2500 lpm ²...
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Page 10: Biotech Option
Premium - that include a number of enhanced features designed for the biotech industry and for bioreac- tors/fermenters specifically. The specifications are shown in Table 1-3. Instructions for changing between the four available gasses are included in Section 3 on page 32 of this manual. Table 1-4 SLAMf Series Agency Certifications Mark Agency... - Page 11 PC-based Support Tools Brooks Instrument offers a variety of PC-based process control and service tools to meet the needs of our customers. Smart Interface may be used with any unit supporting RS485 S-P protocol in a multidrop configuration, thus allowing users to control and monitor their Brooks devices. Brooks Expert Sup- port Tool (BEST) may be used to monitor, diagnose, tune and calibrate Brooks devices.
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Page 12: Figures 1-1 General Wiring
Section 1 Introduction Figure 1-1 General Wiring Fast Response Performance The curves in Figure 1-2 depict the MFC output signal and actual transitional flow to steady-state when gas flow enters into process chamber, under a step response command condition. Brooks devices also feature adaptive (optimized) PID control, including fast response. and linear ramp-up and/or ramp-down control characteristics. Calibration Selection Select one of 6 calibrations via Brooks Expert Support Tool (BEST) or digital signal (See communications protocol for your digital coms). -
Page 13: Response Performance Of Brooks Digital Mfc
Section 1 Introduction Figure 1-2 Response Performance of Brooks Digital MFC Figure 1-3 Linear Ramp-up or Ramp-up/down from 200% Per Second Down to 0.5 % Per Second Setpoint Change... -
Page 14: Slamf Series Rs485 Analog Terminal Connections
Section 1 Introduction Note: Aux Input is used for Remote Trans- ducer Pressure Controllers only. Figure 1-4 SLAMf Series RS485/Analog Terminal Connections Communication Interfaces The SLAMf Series supports 0-5 Vdc, 4-20 mA, DeviceNet, Profibus & Ether- Net/IP communication protocols. DeviceNet, Profibus, and RS485 are multi- drop connections that allow a maximum of 64 devices for DeviceNet, 128 devices for Profibus and 32 devices for RS485 to be connected on the same network. -
Page 15: Slamf Series Profibus Terminal Connections
Section 1 Introduction Note: Aux Input is used for Remote Trans- ducer Pressure Controllers only. Figure 1-5 SLAMf Series Profibus Terminal Connections Profibus Communications The Brooks SLAMf is now equipped to support the Profibus communication protocol. Profibus is a fieldbus-based automation standard of Profibus and Profinet International (PI). Via a single bus cable, Profibus links controller or control systems with decentralized field devices (sensors and actuators) on the field level and also enables consistent data exchange with higher ranking communication systems. Profibus digital signal connects externally through an M12 connector (Figure 1-5), power via PG11/Conduit (also VOR Analog Signal). -
Page 16: Slamf Series Devicenet Terminal Connections
DeviceNet is an open digital protocol capable of high speeds and easy system connectivity. Brooks Instrument has several of its devices available on this popular networking standard, and is a member of ODVA (Open DeviceNet Vendors Association), the governing standard body for DeviceNet. -
Page 17: Slamf Series Ethernet/Ip M12, 4 Pole Female D Connector For In-Out Port
Section 1 Introduction EtherNet/IP Communication Figure 1-7 EtherNet/IP M12, 4 Pole Figure 1-8: EtherNet/IP 5 Pin M8 Male Nano- Female D connector for In-Out ports change Connector for Power Figure 1-9 EtherNET IP layout under the Top Cover EtherNet/IP Communications ™... -
Page 18: Model Slamf50, Ethernet/Ip
Section 1 Introduction Figure 1-10 Model SLAMf50, EtherNet/IP Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-11 Model SLAMf50, Analog/RS485... -
Page 19: Model Slamf60, Analog/Rs485
Section 1 Introduction Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-12 Model SLAMf60, Analog/RS485 Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-13 Model SLAMf51, DeviceNet... -
Page 20: Model Slamf61, Analog/Rs485
Section 1 Introduction Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-14 Model SLAMf61, Analog/RS485 Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-15 Model SLAMf60, Profibus... -
Page 21: Model Slamf53, Profibus
Section 1 Introduction Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-16 Model SLAMf53, Profibus Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-17 Model SLAMf63, DeviceNet... -
Page 22: Model Slamf64, Analog/Rs485,1-1/2" Or 2" Fnpt
Section 1 Introduction Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-18 Model SLAMf64, Analog/RS485,1-1/2" or 2" FNPT Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-19 Model SLAMf64, DeviceNet,1-1/2" or 2" FNPT... -
Page 23: Model Slamf64, Profibus,1-1/2" Or 2" Fnpt
Section 1 Introduction Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-20 Model SLAMf64, Profibus,1-1/2" or 2" FNPT Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-21 Model SLAMf64, DeviceNet, 3" to 8" RF Flange... -
Page 24: Model Slamf64, Analog/Rs485,1-1/2" Or 2" 150 Lb Rf Flange
Section 1 Introduction Note: Aux Input is used for Remote Transducer Pres- sure Controllers only. Figure 1-22 Model SLAMf64, Analog/RS485,1-1/2" or 2" 150 lb RF Flange... -
Page 25: Section 2 Installation
When the equipment is received, the outside packing case should be checked for damage incurred during shipment. If the packing case is damaged, the local carrier should be notified at once regarding his liability. A report should be submitted to the nearest Brooks Instrument location listed on the Global Service Network page on our website: BrooksInstrument.com/GlobalSupportCenters Remove the envelope containing the packing list. -
Page 26: Transit Precautions
Section 2 Installation Transit Precautions To safeguard against damage during transit, transport the instrument to the installation site in the same container used for transportation from the factory if circumstances permit. Removal from Storage Upon removal from storage, a visual inspection should be conducted to verify the condition of the equipment is “as received.”... - Page 27 Section 2 Installation Recommended installation procedures: a. The Brooks Digital MFC or MFM should be located in a clean, dry atmosphere relatively free from shock and vibration. b. Leave sufficient room for access to Self-zero function push-button. c. Install in such a manner that permits easy removal if the instrument requires servicing.
- Page 28 Section 2 Installation Special considerations for high pressure installations: The SLA-Series mass flow devices are capable of operation in high pressure applications. To ensure proper operation the user must be aware of the pres- sure conditions specified for the device. Inlet and outlet pressure conditions can be found on the device label and calibration sheet. The device was sized and tuned to operate at the specified pressure conditions. If the differential pressure during start up exceeds the specified differential pressure, hydraulic forces may keep the valve from opening and/or controlling properly.
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Page 29: Electrical Interface
Section 2 Installation back pressure. Following careful startup and venting procedures will contribute to a long problem free life of your SLAMf53 controller. Stable Operating Conditions: As stated above, the SLAMf53 model utilizes a pressure operated main valve. Valve performance is dependant on stable system pressures. Oscillating or unstable upstream or downstream pressures are likely to cause the device flow control to become unstable. For the best performance, it is important to create a stable pressure environment by utilizing quality inlet and back pres-... -
Page 30: Analog I/O Pin Connctions, Top View Uncovered
Section 2 Installation Note: Aux Input is used for Remote Trans- ducer Pressure Controllers only. Figure 2-1 Analog I/O Pin Connections, Top View Uncovered... -
Page 31: Recommended Wiring Configuration For Current Signals (Non-Isolated Power Supply)
Section 2 Installation Figure 2-2 Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply) Figure 2-3 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply) -
Page 32: Rs485 Multidrop Interconnection Tmfs And Pc
Section 2 Installation Figure 2-4 RS485 Multidrop Interconnection TMFs and PC RS485 is a multidrop connection and allows a maximum of 32 devices to be connected to a computer system. Personal computers are not equipped with RS485 ports as standard. An RS232 to RS485 converter or RS485 interface board is therefore required to connect an RS485 to a standard PC. -
Page 33: Operation Check Procedure: Analog I/O
Section 2 Installation Operation Check Procedure: Analog I/O a. Mount the MFC/MFM in its final orientation. b. Apply power to the MFC/MFM and allow approximately 45 minutes for the instrument to completely warm up and stabilize its temperature. c. Do NOT supply gas to the MFC/MFM. Ensure that the differential pres- sure across the MFC/MFM is zero. -
Page 34: Operation Check Procedure: Digital I/O
Section 2 Installation Operation Check Procedure: Digital I/O a. Mount the MFC/MFM in its final orientation. b. Apply power to the MFC/MFM and allow approximately 45 minutes for the instrument to completely warm up and stabilize its temperature. c. Turn on the gas supply. A positive flow signal may be present due to slight valve leak-thru (MFC only). d. Provide the proper UOM setpoint between 20% and 100% FS to the MFC via the digital network controller. -
Page 35: Section 3 Operation
The analog interface matches that of Brooks' popu- lar analog MFCs so it can be retrofitted into tools using analog MFCs. Other versions of the SLAMf Series can provide a variety of digital protocols. The Brooks SLAMf is capable of storing up to 6 different sets of gas calibra- tion data. -
Page 36: Biotech Option
Section 3 Operation SLAMf Series Biotech The SLAMf Biotech Options ship with 4 sets of gas calibration data for N2, CO2 , Air, and O2, which are the 4 BioTech gasses. The standard BioTech Options ship with calibration curves obtained by use of N2 as a surrogate gas. -
Page 37: Tm End Connections Shown)
Section 3 Operation Analog I/O Setpoint (MFC Only) This input allows the user to establish the MFC setpoint. Several input types are available: Setpoint Signal Type Full Scale Minimum Signal Maximum Signal 0 to 5 Vdc 5 Vdc 5.5 Vdc = 110% 1 to 5 Vdc 5 Vdc 5.5 Vdc = 111%... -
Page 38: Communications Features
DeviceNet is an open digital protocol capable of high speeds and easy system connectivity. Brooks Instrument has several of its devices available on this popular networking standard, and is a member of ODVA (Open DeviceNet Vendors Association), the governing standard body for... -
Page 39: Profibus Communications Features
Section 3 Operation DeviceNet is similar to the RS485 standard in that it is a multi-drop connection that allows a maximum of 64 devices to be connected on the same network. Baud rate selections for DeviceNet products are 125K, 250K and 500K and can be selected via rate switch mounted on the device. The DeviceNet communication link also provides access to many of the Brooks SLAMf Digital Series functions for “control and monitor”... -
Page 40: Ethernet/Ip Communications Features
Section 3 Operation EtherNet/IP Communications Features The SLAMF IP-66 Series is now available with the state-of-the-art EtherNet/IP™ communications interface. For more description of the benefits of Brooks' Implementation of the communication platform reference the following supplemental manual: EtherNet/IP manual X-DPT-EtherNetIP- SLA5800-SLAMF5x-Series-RevB-MFC-eng Part Number: 541B227AAG Alarms (Analog versions only) This section outlines alarms associated with the Analog versions of the Brooks SLAMf Digital Series. - Page 41 Section 3 Operation when the monitored value first exceeds the specified conditions, and will continue to be indicated until the user clears the alarm. If the user clears the alarm while the monitored value still exceeds the specified conditions, then the alarm will be re-latched and continue to be indicated. Contact Enable - If the alarm condition is detected and the alarm contact is enabled, then the alarm contact (Pin 3) is “closed”.
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Page 42: Diagnostic Alarms (Analog Versions Only)
Section 3 Operation Diagnostic Alarms (Analog versions only) A Diagnostic Alarm will be indicated when any of the diagnostics below detect a failure providing a visual indication via the red LED. The diagnostic test or tests that have detected a problem and caused the Diagnostic Alarm to occur can be determined only by reading alarm status via the Diagnostics Port. -
Page 43: General Alarms (Analog Versions Only)
Section 3 Operation General Alarms (Analog versions only) Several alarms are available to indicate unexpected process control events as follows: Flow Alarms Two flow alarms are provided. Each allows the user to set a minimum and maximum flow limit range. Whenever flow is not within the range, the alarm will occur. These two general flow alarms provide more flexibility than having specific low and high flow alarms. These two alarms may be used to cre- ate separate low and high flow alarms, or used to provide banding around a flowrate. If the device is a controller, then this alarm is disabled if the setpoint is not within the specified flow limits or if the valve override is active. No Flow Indication Alarm The No Flow Indication Alarm will occur when the measurement of flow indi- cates flow less than a value that can be configured to 0 - 2%. If the device is a controller, setpoint must exceed the configured limit and valve override must not be active for this alarm to occur. Setpoint Deviation Alarm The Setpoint Deviation Alarm monitors the difference between Setpoint and Flow and sets the alarm when the difference exceeds the specified limits... -
Page 44: Calibration/Configuration Sets
Section 3 Operation Device Overhaul Due The Device Overhaul Due alarm occurs after the specified elapsed hours with gas flowing greater than 0.5% of full scale. The default setting is 8760 hours, equivalent to one year. The alarm will be cleared either by disabling it or changing the setting. Calibration/Configuration Sets All Flow Calibration parameters and some of the device configuration param- eters are saved in the device Non-Volatile Memory as “sets”. Up to 6 sets of calibration/configuration sets can be saved in order to have a unit pre-con- figured for multiple gas calibration, different pressure conditions, or multiple scalings of the same gas. -
Page 45: Special Features
Section 3 Operation Special Features Special Features may be adjusted by an advanced user via the Diagnostics Port using a special software application available from Brooks. Reference the Brooks Expert Support Tool User Manual (BEST) for more information about the Diagnostic Port and software application. External Voltage dmRtAuxiliaryInput value with Page... -
Page 46: Flow Totalizer
A Flow Totalizer is provided and maintained in Non-Volatile Memory. The update rate of the totalizer in Non-Volatile Memory is 5 seconds. PC-based Support Tools Brooks Instrument offers PC-based process control and service tools to meet the needs of our customers which may be used with any unit supporting RS485 in a multidrop configuration, thus allowing users to control and monitor their Brooks devices. -
Page 47: Section 4 Maintenance & Troubleshooting
Section 4 Maintenance & Troubleshooting 4-1 Maintenance and Troubleshooting No routine maintenance is required on the Brooks SLAMf Digital MFC's and MFM's. If an in-line filter is used, the filtering elements should be periodically replaced or cleaned. This section contains suggestions to help diagnose simple MFC/MFM related problems in the gas distribution system and answers commonly asked ques- tions. -
Page 48: System Checks
Section 4 Maintenance & Troubleshooting System Checks The Brooks SLAMf Series Flowmeters and Controllers are generally used as a component in gas handling systems, which can be complex in nature. It can therefore be very difficult to isolate a malfunction in the system. An inaccurate- ly diagnosed malfunction can cause many hours of unnecessary downtime. -
Page 49: Bench Troubleshooting Circuit
Section 4 Maintenance & Troubleshooting Figure 4-1 Bench Troubleshooting Circuit Tables 4-1 and 4-2 list possible malfunctions which may be encountered dur- ing bench troubleshooting. For Analog Controller Models Only: Apply +5 Vdc to the valve override pin (pin 12) and verify that the output exceeds 100%. Connect the valve override pin to the power supply common (pin 9) and verify that the output signal falls below 2%. -
Page 50: Cleaning Procedures
The calibration of Brooks Digital Series Mass Flow devices is not described in this manual. Such calibration requires accurate and traceable calibration equipment in addition to digital communications. If your device needs calibration Brooks Instrument can provide this service at one of its service locations. Visit www.BrooksInstrument.com to locate the service location nearest to you. However, if traceable calibration equipment is available at your facility, Brooks Expert Support Tool (BEST), along with train- ing, is available for purchase. - Page 51 Clean sensor. Refer to cleaning procedures (regardless of Setpoint) and on preceding pages. there is flow through the meter/controller Defective electronic board Contact Brooks Instrument Flow cannot be achieved Clogged Control Valve Return the device to the factory regardless of Setpoint. (applicable to MFC)
- Page 52 Qualité du câble d’interconnexion, des presse-étoupes et connecteurs : Brooks Instrument fournit un ou des câbles de qualité supérieure qui répondent aux spécifications exigées pour la certification CE. Si vous utilisez votre propre câble d’interconnexion, ce câble doit être protégé par un blindage intégral.
- Page 53 German ESD (Elektrostatische Entladung) ACHTUNG: Dieses Gerät enthält elektronische Komponenten, die durch elektrostatische Entladungen beschädigt werden können. Ordnungsgemäße Verfahrensanweisungen müssen während des Ausbaus, der Installation oder anderer Handhabung der eingebauten Platinen oder Geräte eingehalten werden. Verfahrensanweisung: Trennen Sie das Gerät von der Stromversorgung. Das Personal ist vor dem Einbau, Ausbau oder der Einstellung von Platinen oder anderen internen Komponenten durch ein entsprechendes Armband mit dem Erdpotential zu verbinden.
- Page 54 Los instrumentos de medición más pequeños que 25 mm o 1 pulgada siguen la Práctica Aceptada de Ingeniería (SEP). Directriz Europea respecto a la Compatibilidad Electromagnética (EMC) Las instalaciones de Brooks Instrument (eléctricas/electrónicas) merecedores de la categoría CE cumplieron con éxito las pruebas que verifican las exigencias de la compatibilidad electromagnética (directiva de EMC 2014/30/EU).
- Page 55 Brooks Instrument can provide seminars and dedicated training to engineers, end users and maintenance persons. Please contact your nearest sales representative for more details. Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice. TRADEMARKS Brooks is a trademark of Brooks Instrument, LLC All other trademarks are the property of their respective owners.
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