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Troubleshooting
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Summary of Contents for Brooks Instrument SLAMf Series
- Page 1 Installation & Operation Manual SLAMf Series Mass Flow Controllers & Meters...
- Page 2 Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP). European Electromagnetic Compatibility (EMC) The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC directive 2014/30/EU).
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Page 3: Table Of Contents
Electrical Interface for Communications ....................26 Communications Connections for Hazardous Area Devices ............... 28 Protective Earth Connections: ......................29 Operation Check Procedure: Analog I/O ..................... 29 Operation Check Procedure: Digital I/O ....................30 Digital Configuration ..........................30 Installation Manual SLAMf Series... - Page 4 PC-based Support Tools ........................42 Section 4 Maintenance & Troubleshooting Maintenance and Troubleshooting ..................... 43 Troubleshooting Analog or Digital ....................... 44 System Checks ........................... 45 Cleaning Procedures .......................... 49 Calibration Procedure .......................... 49 Warranty, Local Sales/Service Contact Information ...............Back Cover Installation Manual SLAMf Series...
- Page 5 Response Performance of Brooks Digital MFC ................9 Linear Ramp-up or Ramp-up/down from 200% Per Second Down to 0.5 % Per Second Setpoint Change ............................9 SLAMf Series RS485/Analog Terminal Connections ..............10 SLAMf Series Profibus Terminal Connections ................11 SLAMf Series DeviceNet Terminal Connections ................ 12 Device side view with M12 Power connector ................
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Page 6: Section 1 Introduction
Brooks Instrument Section 1 Introduction Scope Thank you for purchasing a Brooks Instrument Digital Mass Flow Product. This manual, X-TMF-SLAMf-Series-RevB-MFC-eng is an installation and operation manual for your instrument. Purpose The SLAMf Series are mass flow measurement devices designed for accurately measuring (MFM's) and rapidly controlling (MFC's) flows of gases. -
Page 7: Hazardous Area Certifications
Brooks Instrument Product Specifications Section 1 Introduction Table 1-1 SLAMf Series Standard Specifications Flow Ranges and Pressure Ratings: Mass Flow Mass Flow Flow Ranges Maximum Operating PED Module H Controller Meter N2 Eq. Ratings Pressure psi/bar Category ¹ ¹ Model Model Min. -
Page 8: Electrical Specifications
The Alarm Output may be set to indicate any one of various alarm conditions. ** The Valve Override Signal (VOR) is implemented as an analog input which measures the voltage at the input and controls the valve based upon the measured reading as shown in this section. Installation Manual SLAMf Series... -
Page 9: Slamf Series Biotech Specifications
Brooks Instrument Section 1 Introduction Table 1-3 SLAMf Series Biotech Specifications Performance SLAMf5850/60 SLAMf5851/61 SLAMf5853/63 ¹ Full Scale Flow Ran 100 - 1100 slpm >1100 - 2500 slpm 5 sccm -50 slpm 15 -150 slpm (N₂, Eq. 0 Deg C Ref) Gasses Supported Air, CO2, Nitrogen &... -
Page 10: Slamf Series Agency Certifications
EN:61326-1:2013 Directive 2011/65/EU RoHS ATEX/IECEx Special Conditions: Please see Certi cation section of the SLAMf Series Installation & Operations Manual Note: Not all certi cations are available for all SLAMF speci cations and con gurations. ATEX Special Conditions: The equipment shall only be used in an area of not more than pollution degree 2, as defined in EN 60664-1. - Page 11 Then run the braided steel cable around the capture The cable lock is now captured. piece with bolts as shown below. Next, place the straight washer over the cable and both bolts and secure with the two provided nuts. The nuts are 7mm. Installation Manual SLAMf Series...
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Page 12: Reference Conditions
PC-based Support Tools Brooks Instrument offers a variety of PC-based process control and service tools to meet the needs of our customers. Smart Interface may be used with any unit supporting RS485 S-P protocol in a multidrop configuration, thus allowing users to con- trol and monitor their Brooks devices. -
Page 13: Fast Response Performance
These problems are virtually eliminated with the soft start feature. Linear ramp-up or ramp-up/down (Figure 1-3) is set by user via software tools or digital commands. Linear ramp-up/ramp-down is adjustable at 200% per second down to 0.5% per second setpoint change. Installation Manual SLAMf Series... -
Page 14: Response Performance Of Brooks Digital Mfc
Brooks Instrument Section 1 Introduction Figure 1-2 Response Performance of Brooks Digital MFC Figure 1-3 Linear Ramp-up or Ramp-up/down from 200% Per Second Down to 0.5 % Per Second Setpoint Change Installation Manual SLAMf Series... -
Page 15: Communication Interfaces
Figure 1-4 SLAMf Series RS485/Analog Terminal Connections Communication Interfaces The SLAMf Series supports 0-5 Vdc, 4-20 mA, DeviceNet, Profibus, EtherNet/IP and PROFINET communication protocols. DeviceNet, Profibus, and RS485 are multidrop connections that allow a maximum of 64 devices for DeviceNet, 128 devices for Profibus and 32 devices for RS485 to be connected on the same network. -
Page 16: Profibus Communications
Brooks Instrument Section 1 Introduction Figure 1-5 SLAMf Series Profibus Terminal Connections Profibus Communications The Brooks SLAMf is now equipped to support the Profibus communication protocol. Profibus is a fieldbus-based automation standard of Profibus and Profinet Interna- tional (PI). Via a single bus cable, Profibus links controller or control systems with decentralized field devices (sensors and actuators) on the field level and also enables consistent data exchange with higher ranking communication systems. -
Page 17: Devicenet Communications
The Brooks SLAMf Digital Series is also available with DeviceNetTM communication capability. DeviceNet is an open digital protocol capable of high speeds and easy system connectivity. Brooks Instrument has several of its devices available on this popular networking standard, and is a member of ODVATM (Open DeviceNet Vendors Association), the governing standard body for DeviceNet. -
Page 18: Communication And Power Connections - Hazardous Area Certification
Communication and Power Connections – Hazardous Area Certification Figure 1-7 Device side view with M12 Power connector See figure 1-9 for M12 Communications Connectors Figure 1-8 Layout under the Top Cover Figure 1-9 M12, 4 Pole Female D connector for In-Out ports Installation Manual SLAMf Series... - Page 19 Brooks Instrument Section 1 Introduction Figure 1-10: 5 Pin M8 Male Nano-for Legacy devices Figure 1-11 Layout under the Top Cover Installation Manual SLAMf Series...
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Page 20: Ethernet/Ip™ & Profinet Communications
• 2.5 mm female jack for RS485 diagnostic port, which is located under the top cover (Figure 1-11) Embedded Browser Interface: • Network address is 192.168.1.100. • EtherNet/IP Network configuration is DHCP. • PROFINET: The default name is ‘sla-mfc’ Installation Manual SLAMf Series... - Page 21 19.5 / .77 113.2 / 4.46 200.0 / 7.87 216.2 / 8.51 200.0 / 7.87 210.9 / 8.30 211.4 / 8.32 124.1 / 4.89 49.5 / 1.95 19.5 / .77 1-12 Models SLAMf40, 50, 51, 60, 61 Installation Manual SLAMf Series...
- Page 22 132.8 / 5.23 144.9 / 5.70 MF63 191.6 / 7.54 220.8 / 8.69 237.0 / 9.33 220.8 / 8.69 220.8 / 8.69 232.2 / 9.14 86.0 / 3.39 144.9 / 5.70 Figure 1-13 Models SLAMf53, 63 Installation Manual SLAMf Series...
- Page 23 Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-14 Model SLAMf64, Analog/RS485, 1-1/2" or 2" FNPT Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-15 Model SLAMf64, DeviceNet,1-1/2" or 2" FNPT Installation Manual SLAMf Series...
- Page 24 Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-16 Model SLAMf64, Profibus,1-1/2" or 2" FNPT Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-17 Model SLAMf64, DeviceNet, 3" to 8" RF Flange Installation Manual SLAMf Series...
- Page 25 Brooks Instrument Section 1 Introduction Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-18 Model SLAMf64, Analog/RS485, 1-1/2" or 2" 150 lb RF Flange Installation Manual SLAMf Series...
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Page 26: Section 2 Installation
Brooks also require a Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument. Failure to provide this information will delay processing of the instrument. Instrument must have been purged in accordance with the following: Installation Manual SLAMf Series... -
Page 27: Transit Precautions
10 to 30 lpm 40 micron SLAMf51/61 10 to 100 lpm 40 micron SLAMf53/63 100 lpm Consult factory SLAMf64 100 lpm Consult factory Note: Brooks provides many filter options. For those not listed here, please consult factory. Installation Manual SLAMf Series... - Page 28 If possible, have at least ten pipe diameters of straight tubing upstream of the mass flow controller or meter. Installation Manual SLAMf Series...
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Page 29: Special Considerations For High Pressure Installations
For higher pressure applications, and especially those with the low force bellows, it is important to bring the pressure up in a con- trolled manner in order to prevent a possible pressure spike to the bellows spring and main valve diaphragm. Installation Manual SLAMf Series... -
Page 30: Stable Operating Conditions
Brooks does not supply sanitary clamps with the products. Customers shall select the appropriate sanitary clamps and follow the manufacturers installation instructions to achieve the needed pressure ratings. Installation Manual SLAMf Series... -
Page 31: Special Considerations To Be Taken When Installing The Slamf64 Mfm
Acc. Std flange ratings Acc. Std flange ratings PN16 Up to elastomeric Acc. Std flange ratings Acc. Std flange ratings PN25 Up to elastomeric Acc. Std flange ratings Acc. Std flange ratings PN64 Up to spiral wound Installation Manual SLAMf Series... -
Page 32: Electrical Interface For Communications
20 mA output signal to the load. The output signal is “driven” by the MFC into the customer load. Reference Brook’s device specifications for maximum load capacity.) Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 2-1 Analog I/O Pin Connections, Top View Uncovered Installation Manual SLAMf Series... - Page 33 Brooks Instrument Section 2 Installation BROOKS Figure 2-2 Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply) BROOKS Figure 2-3 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply) Installation Manual SLAMf Series...
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Page 34: Communications Connections For Hazardous Area Devices
Figure 2-4. Communications Connections for Hazardous Area Devices EtherNet/IP and PROFINET™ : SLAMf Series MFC’s ordered with UL Listed Certification (only) are supplied with “Clamshell” En- closures for the M12 communication cable connectors (supplied separately). -
Page 35: Protective Earth Connections
0 to 5 Vdc (0 - 5 Vdc setpoint) or 0 to 10 Vdc (0 - 10 Vdc setpoint) 1 to 5 Vdc (1 - 5 Vdc setpoint) 0 to 20 mA (0 - 20 mAsetpoint) 4 to 20 mA (4 - 20 mAsetpoint) Installation Manual SLAMf Series... -
Page 36: Operation Check Procedure: Digital I/O
100/0.27 = 370.4 ccm. This may require a pressure increase to make this flow rate. Digital Configuration NOTE: This information and all other detailed communication informa- tion is available in the appropriate communication supplement instruc- tion manual. Installation Manual SLAMf Series... -
Page 37: Section 3 Operation
The analog interface matches that of Brooks' popular analog MFCs so it can be retrofitted into tools using analog MFCs. Other versions of the SLAMf Series can provide a variety of digital protocols. The Brooks SLAMf is capable of storing up to 6 different sets of gas calibration data. -
Page 38: Analog I/O Mode Of Operation
#1. Before operating the MFC/MFM, apply power and warm-up the instrument for approximately 45 minutes. After warm-up, apply gas pressure, then proceed by following the instructions in the following sections. Installation Manual SLAMf Series... - Page 39 A successful zeroing operation is indicated by the Status LED being a steady green. The zeroing operation can take up to 10 seconds to complete. The zero button can be disabled by setting DmOverride04=1. When DmOverride04=0 the device should zero properly. Installation Manual SLAMf Series...
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Page 40: Communications Features
RS485 Communications (Analog versions only) Digital communication, designed to emulate the Brooks S-series "S-protocol" or pseudo-HART communications is available on the Brooks SLAMf Digital Series via RS485. For information specifically for RS485 Communications, reference RS485 supplemental manual located at https://www.brooksinstrument.com/en/documentation Installation Manual SLAMf Series... -
Page 41: Devicenet Communications Features
The Profibus-DP communication option supports the following message types: • Cyclic data exchange (Write/Read data). • Read inputs (e.g. status, flow, temperature, totalizer, etc.). • Read outputs (e.g. commands, setpoint). • Global control commands (e.g. fail safe, sync). Installation Manual SLAMf Series... -
Page 42: Ethernet/Ip & Profinet Communications Features
For information describing alarms specifically for Brooks Profibus units, reference the Profibus Supplemental Manual located at https://www.brooksinstrument.com/en/documentation For information describing alarms specifically for Brooks EtherCAT, EtherNet IP™ & PROFINET units, reference the appropriate supplemental manuals at Brooksinstrument.com. Installation Manual SLAMf Series... -
Page 43: Alarms (Analog Versions Only) - Configuration Attributes
High Limit (%) Error Hours Diagnostic High Flow Low Flow No Flow Indication Setpoint Deviation Setpoint Deviation Totalizer Overflow Internal Power Supply Failure Valve Drive Out of Limits Device Calibration Due 8760 Device Overhaul Due 8760 Installation Manual SLAMf Series... -
Page 44: Diagnostic Alarms (Analog Versions Only)
RAM Test Failure Byte by byte test of RAM detects bad memory location Program Memory Corrupt Checksum failure Non-Volatile Memory Byte by byte test of Non-Volatile Memory; detects bad memory location Figure 3-2 Open Collector Alarm Output Installation Manual SLAMf Series... -
Page 45: General Alarms (Analog Versions Only)
Internal supply voltages must be within their nominal limits. Valve Drive Out of Limits The Valve Drive Out of Limits alarm will occur when the valve drive is below the low limit or above the high limit. Installation Manual SLAMf Series... -
Page 46: Calibration/Configuration Sets
Gas Correction Factor Calibration Scaling User Calibration Polynomial Configuration Options The following configuration parameters are stored in the Calibration/ Configuration Sets: P, I, and D Valve Offset, Span, and Leaktight Offset Pole Compensation and filtering Installation Manual SLAMf Series... -
Page 47: Special Features
Cutoff parameter, the Flow Output will be set to zero. Adaptive Control Adaptive Valve Control is a means of dynamically adjusting valve offset and span in response to changing process conditions. Options for Adaptive Control are: On/Off, Adjust Offset Only, Adjust Offset and Span. Installation Manual SLAMf Series... -
Page 48: Flow Totalizer
PC-based Support Tools Brooks Instrument offers PC-based process control and service tools to meet the needs of our customers which may be used with any unit supporting RS485 in a multidrop configuration, thus allowing users to control and monitor their Brooks devices. -
Page 49: Section 4 Maintenance & Troubleshooting
Section 4 Maintenance & Troubleshooting Maintenance and Troubleshooting No routine maintenance is required on the Brooks SLAMf Digital MFC's and MFM's. If an in-line filter is used, the filtering elements should be periodically replaced or cleaned. Installation Manual SLAMf Series... -
Page 50: Troubleshooting Analog Or Digital
Set this pin to its normal level before setting a setpoint. 6. Flow/Flow signal 'Unstable' Model SLAMF Series MFC performance is tuned during calibration at the conditions specified on the order. If the... -
Page 51: System Checks
Brooks DeviceNet Supplement Instruction Manual. System Checks The Brooks SLAMf Series Flow meters and Controllers are generally used as a component in gas handling systems, which can be complex in nature. It can therefore be very difficult to isolate a malfunction in the system. -
Page 52: Bench Troubleshooting Circuit
For Analog Controller Models Only: Apply +5 Vdc to the valve override pin (pin 12) and verify that the output exceeds 100%. Connect the valve override pin to the power supply common (pin 9) and verify that the output signal falls below 2%. Installation Manual SLAMf Series... - Page 53 Pin 5 to Pin 1 Nominal 1000 ohm reading. Pin 6 to Pin 7 Nominal 580 ohm reading. For troubleshooting of the Digital Communications including Profibus, DeviceNet, EtherNet/IP, & PROFINET, please see the dedicated supplemental manuals for these protocols. Installation Manual SLAMf Series...
- Page 54 Pressure drop or inlet pressure Adjust pressures to original specifications (applicable to MFC) deviates from calibrated values Valve out of adjustment Contact Brooks Instrument Unstable inlet pressure Check external pressure regulator Defective PC board Contact Brooks Instrument Installation Manual SLAMf Series...
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Page 55: Cleaning Procedures
The calibration of Brooks Digital Series Mass Flow devices is not described in this manual. Such calibration requires accurate and traceable calibration equipment in addition to digital communications. If your device needs calibration Brooks Instrument can provide this service at one of its service locations. Visit www.BrooksInstrument.com... - Page 56 Brooks Instrument can provide seminars and dedicated training to engineers, end users and maintenance persons. Please contact your nearest sales representative for more details. Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice. TRADEMARKS Brooks is a trademark of Brooks Instrument, LLC All other trademarks are the property of their respective owners.
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