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Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
®
Brooks
Model SLA5840
October, 2017
®
Brooks
Digital Remote Transducer
Pressure Controller/Flowmeter
Model SLA5840
Model SLA5840
Model SLA5840
Model SLA5840
With RS485 Communications
With Profibus
®
Communications
With DeviceNet
®
Communications
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Table of Contents
Troubleshooting
Related Manuals for Brooks Instrument SLA5840
Summary of Contents for Brooks Instrument SLA5840
- Page 1 Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 October, 2017 ® Brooks Digital Remote Transducer Pressure Controller/Flowmeter Model SLA5840 Model SLA5840 Model SLA5840 Model SLA5840 With RS485 Communications With Profibus ® Communications With DeviceNet ® Communications...
- Page 2 Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
- Page 3 We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
- Page 4 Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 October, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 5: Table Of Contents
Contents Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG Brooks ® Model SLA5840 October, 2017 Paragraph Page Number Number Section 1 Introduction Scope ............................1-1 Purpose ............................1-1 Description ..........................1-1 Specifications ..........................1-2 Section 2 Installation General ............................2-1 Receipt of Equipment ......................... - Page 6 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply) ..... 2-5 Model SLA5840 System Block Diagram ..................3-1 Model SLA5840 Downstream and Upstream Applications ............3-2 Typical Application of Downstream Controller ................3-3 Typical Application of Upstream Controller................. 3-3 Externally Accessible Zero for all Meters/Controllers ..............
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Page 7: Section 1 Introduction
PID control electronics and control valve, will maintain a desired set pressure. The Model SLA5840 can also be configured as a mass flow controller for calibration or test purposes. Brooks now offers control interface with DeviceNet and Profibus, two high- speed digital communication networks. -
Page 8: Specifications
X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 October, 2017 simplified customer ordering and factory configuration, enabling Brooks to more easily meet the ever changing needs of our global customers. Brooks' production flexibility translates into reduced lead times for our customers. - Page 9 Section 1 Introduction Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 October, 2017 Table 1-1 SLA5840 Flow Ranges and Pressure Ratings Pressure Controller Pressure Controller Pressure Controller Pressure Controller Pressure Controller Pressure Controller Pressure Controller Pressure Controller...
- Page 10 Section 1 Introduction Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 October, 2017 Table 1-3 SLA5840 Series Communication Protocols Communication Protocol Communication Protocol Communication Protocol Communication Protocol Communication Protocol RS485 RS485 RS485 Profibus Profibus Profibus ® ® ® ® ®...
- Page 11 Section 1 Introduction Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 October, 2017 Table 1-4 SLA58XX Series Certifications Applicable Mark Agency Certification Standard Details Class I, Div 2, Group A, B, C, D Class I, Zone 2, IIC T4 UL &...
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Page 12: Sla5840 Analog/Rs485 Connections And Pinouts
Model SLA5840 October, 2017 Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-1 SLA5840 Analog/RS485 Connections and Pinouts RS485 Communications The Brooks Digital Series is equipped with RS485 communication capability. Refer to Figure 1-2 (Analog I/O pin connections), that enables the device to communicate via a personal computer for process control. -
Page 13: Sla5840 Profibus Connections And Pinouts
Profibus Communications The Brooks SLA5840 is now equipped to support the Profibus communication protocol. Profibus is a fieldbus- based automation standard of Profibus and Profinet International (PI). Via a single bus cable, Profibus links controller or control systems with decentralized field devices (sensors and actuators) on the field level and also enables consistent data exchange with higher ranking communication systems. -
Page 14: Sla5840 Devicenet Connections And Pinouts
The Brooks SLA5840 is also available with DeviceNet communication capability. DeviceNet is an open digital protocol capable of high speeds and easy system connectivity. Brooks Instrument has several of its devices available on this popular networking standard, and is a member of ODVA (Open DeviceNet Vendors Association), the governing standard body for DeviceNet. -
Page 15: Model Sla5840, Thru-Flow, Rs485
Section 1 Introduction Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 October, 2017 Figure 1-4 Model SLA5840, Thru-Flow, RS485 Figure 1-5 Model SLA5840, Thru-Flow, Profibus... -
Page 16: Model Sla5840, Thru-Flow, Devicenet
Section 1 Introduction Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 October, 2017 Figure 1-6 Model SLA5840, Thru-Flow, DeviceNet 1-10... -
Page 17: Section 2 Installation
If the packing case is damaged, the local carrier should be notified at once regarding his liability. A report should be submitted to the nearest Brooks Instrument location listed on the Global Service Network page on our website: BrooksInstrument.com/GlobalSupportCenters... -
Page 18: Removal From Storage
Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 October, 2017 2-5 Removal from Storage Upon removal from storage, a visual inspection should be conducted to verify the condition of the equipment is “as received.” If the equipment has... -
Page 19: In-Line Filter
X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 October, 2017 2-8 In-Line Filter (See Table 2-1) It is recommended that an in-line filter be installed upstream from the mass flow controller or meter to prevent the possibility of any foreign material entering the flow sensor or control valve. -
Page 20: D-Connector Shielded Cable Hookup Diagram - Voltage I/O Options
Section 2 Installation Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 October, 2017 Figure 2-1 D-Connector Shielded Cable Hookup Diagram - Voltage I/O Options Figure 2-2 Common Electrical Hookups Voltage I/O Version... -
Page 21: Recommended I/O Wiring Configuration For Current Signals (Non-Isolated Power Supply)
Section 2 Installation Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 October, 2017 Figure 2-3 Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply) Figure 2-4 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply) -
Page 22: Operation Check Procedure
Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 October, 2017 2-10 Operation Check Procedure a. Mount the RT in its final orientation. b. Apply power to the RT and allow approximately 45 minutes for the instrument to completely warm up and stabilize its temperature. -
Page 23: Section 3 Operation
Mass Flow sensor for flow indication. This device will control the pressure in a vessel or feed or exhaust line by using the remote transducer output signal as the transducer input of the SLA5840. This user supplied pressure transducer can have a full scale pressure as low as10 mTorr or as high as several hundred psi and a full scale output signal of 5 or 10 Vdc. -
Page 24: Features
Not all features are available on all instruments. The SLA5840 is a full-featured digital Remote Transducer Pressure Controller. The SLA5840 performs much like a traditional analog RT, but with improved accuracy, step response and valve control. The analog interface matches that of Brooks' popular analog 5866RTs so it can be retrofitted into tools using analog RTs. -
Page 25: Typical Application Of Downstream Controller
Section 3 Operation Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 October, 2017 Figure 3-3 Typical Application of Downstream Controller Figure 3-4 Typical Application of Upstream Controller... -
Page 26: Analog I/O Mode Of Operation
A. Functional Description When configured in Pressure Control mode, the SLA5840 will utilize the remote transducer signal in it’s internal PID control. When configured in Mass Flow Control mode, the device utilizes the internal thermal sensor for mass flow control. -
Page 27: Externally Accessible Zero For All Meters/Controllers
(max. = 15 Vdc), the valve will be forced to its open state. E. Mode Select The SLA5840 RT can operate in either a Remote Transducer mode (PID response to the connected remote transducer) or in the Mass Flow Controller mode (PID response to the on board thermal mass flow sensor) Switching between modes can only be done by use of a software tool called BEST (available for download on the Brooks Instrument website). -
Page 28: Communications Features
PC-RT-eng) for more details regarding the capabilities of this communication interface. 3-5-2 Profibus Communications Features The Brooks SLA5840 is now equipped to support the Profibus communication protocol. The communication electronics allows for automatic baud rate detection ranging from 9600 baud to 12 Mbaud, thus making the need for any hardware baud rate selection methods not required. -
Page 29: Devicenet Communications Features
DeviceNet is an open digital protocol capable of high speeds and easy system connectivity. Brooks Instrument has several of its devices available on this popular networking standard, and is a member of ODVA (Open DeviceNet Vendors Association), the governing standard body for DeviceNet. - Page 30 Section 3 Operation Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 October, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 31: Section 4 Maintenance & Troubleshooting
X-PR-SLA5840-Series-RevB-RT-eng & Troubleshooting Part Number: 541B201AAG Brooks ® Model SLA5840 October, 2017 4-1 Overview No routine maintenance is required on the Brooks Digital RT's. If an in-line filter is used, the filtering elements should be periodically replaced. This section provides the following information: •... - Page 32 The Brooks SLA5840 (RT) can operate in mass flow mode as a mass flow controller utilizing the on board thermal flow sensor, or it can operate in pressure control mode utilizing the user supplied external pressure transducer.
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Page 33: Bench Troubleshooting Circuit
& Troubleshooting Part Number: 541B201AAG Brooks ® Model SLA5840 October, 2017 Figure 4-1 Bench Troubleshooting Circuit (Flow mode) a. Problem: No response to input commands/No output status signal. 1. The unit may not be receiving power. Check that module status LED is green. - Page 34 Model SLA5840 October, 2017 4-3 Gas Conversion Factors (SLA5840 Only) If an RT is operated in flow control mode on a gas other than the gas it was calibrated with, a scale shift will occur in the relation between the output signal and the mass flow rate.
- Page 35 Section 4 Maintenance Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng & Troubleshooting Part Number: 541B201AAG Brooks ® Model SLA5840 October, 2017 Table 4-1 Conversion Factors (Nitrogen Base). GAS NAME FORMULA SENSOR ORIFICE DENSITY (KG/m FACTOR FACTOR @0°C, 1 atm Acetylene 0.615 0.970 1.173...
- Page 36 Section 4 Maintenance Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng & Troubleshooting Part Number: 541B201AAG ® Brooks Model SLA5840 October, 2017 Table 4-1 Conversion Factors (Nitrogen Base) Continued. GAS NAME FORMULA SENSOR ORIFICE DENSITY (KG/m FACTOR FACTOR @0°C, 1 atm Ethylene 0.619 1.000...
- Page 37 Section 4 Maintenance Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng & Troubleshooting Part Number: 541B201AAG Brooks ® Model SLA5840 October, 2017 Table 4-1 Conversion Factors (Nitrogen Base) Continued. GAS NAME FORMULA SENSOR ORIFICE DENSITY (KG/m FACTOR FACTOR @0°C, 1 atm Perfluoropropane 0.179 2.591...
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Page 38: Restrictor Sizing
All SLA5840 Restrictor Assemblies are factory adjusted to provide a specific pressure drop for each flow rate. This corresponds to the desired full scale flow rate. A list of restrictor assemblies used in the SLA5840 mass flow controllers/meters are shown in Table 4-2... - Page 39 Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng & Troubleshooting Part Number: 541B201AAG Brooks ® Model SLA5840 October, 2017 Table 4-2 Standard Restrictors. Size No Restrictor ( ALL BODY SIZES) Restrictor size selected from the table below is based on sensor Nitrogen equivalent flow Plug (Nitrogen equivalent flows of 8.022 SCCM or less)
- Page 40 Section 4 Maintenance Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng & Troubleshooting Part Number: 541B201AAG ® Brooks Model SLA5840 October, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK 4-10...
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Page 41: Section A Essential Instructions
Section A Essential Instructions Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG October, 2017 ® Brooks Model SLA5840 Bulgarian Brooks Instrument Brooks Instrument. Brooks Instrument : (1) . (2) Brooks Instrument (PED) 0,5 bar (g) 25 mm 1" (inch), (PED). - Page 42 P ed instalací si p e t te následující instrukce! Spole nost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standard . P ístroje musí být ádn nainstalovány, používány a udržovány tak, aby byl zajišt n jejich nep etržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující...
- Page 43 X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG October, 2017 ® Brooks Model SLA5840 Dansk Grundlæggende vejledninger Læs disse før anvendelse! Brooks Instruments designer, fremstiller og afprøver sine produkter således, at de tilpasser sig både de indenrigs og internationale standarder. Disse udstyr bør installeres, bruges og repareres omhyggeligt, så at de kan virke tilsvarende deres normale anvendelsesperiode. De følgende regler skal overholdes og implementeres under installeringen samt ved brug og reparation.
- Page 44 Lees ze voordat u verder gaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken.
- Page 45 Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljudele riiklikele ja rahvusvahelistele standarditele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrumenti toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi.
- Page 46 Perusohjeet Lue ensin ohjeet huolellisesti! Brooks Instrument suunnittelee, valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainvälisten standardien vaatimuksia. Tuotteet tulee asentaa, käyttää ja huoltaa käyttöohjeiden mukaan jotta niiden toimivuus taataan. Brooks Instrumentin laitteiden asennuksessa, käytössä ja huollossa on noudatettava soveltuvia määräyksiä ja ohjeita, lisäksi mainitut ohjeet on huomioitava työsuojelun ohjeistuksessa.
- Page 47 AVERTISSEMENT: n’utilisez pas cet instrument au-delà des spécifications énumérées dans le manuel d’utilisation. Le non-respect de cet avertissement peut entraîner de graves blessures et / ou endommager l’équipement. • Si vous ne comprenez pas l’une des instructions, prenez contact avec un représentant de Brooks Instrument pour obtenir des explications. •...
- Page 48 Produkte mit einer Größe von 25 mm oder 1“ (inch) oder kleiner sind Sound Engineering Practice (SEP). Europäische Verordnung zur elektromagnetischen Verträglichkeit (EMV) Geräte von Brooks Instrument (elektrischer und elektronischer Art) mit CE-Zeichen haben den Test auf Einhaltung der Verordnung zur elektromagnetischen Verträglichkeit (EMV Richtlinie 2014/30/EU) erfolgreich bestanden.
- Page 49 Section A Essential Instructions Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG October, 2017 ® Brooks Model SLA5840 Greek Brooks Instrument Brooks Instrument. ’ Brooks Instrument. : (1) . (2) Brooks Instrument. (PED) 0,5 bar (g) 25 mm (PED). PED.
- Page 50 üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál m ködési tartományuknak megfelel en üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése, üzemeltetése és karbantartása során.
- Page 51 Direttiva europea relativa alla compatibilità elettromagnetica (EMC) Le apparecchiature (elettriche/elettroniche) Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilità elettromagnetica (Direttiva EMC 2014/30/EU). In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE.
- Page 52 Lai nodrošin tu šo izstr d jumu turpm ku darb bu atbilstoši noteiktajiem parametriem, tie ir pareizi j uzst da, j lieto un j apkopj. Uzst dot, lietojot „Brooks Instrument” izstr d jumus un veicot to apkopi, ir j iev ro šie nor d jumi un j iek auj tie j su droš bas programm .
- Page 53 SP JIMAS: nenaudokite šio prietaiso viršydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis. Nesilaikydami šio sp jimo galite sunkiai susižeisti ir (arba) sugadinti rang . Jei nesuprantate koki nors nurodym , kreipkit s „Brooks Instrument“ atstov , kad paaiškint . Paisykite vis sp jim , persp jim ir nurodym , pažym t ant gaminio arba pateikt su juo.
- Page 54 Produkty o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom „Uznanej Praktyki In ynierskiej” (SEP). Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej (EMC) Urz dzenia elektryczne / elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE, przesz y pozytywnie testy pod k tem spe niania przez nich wymogów kompatybilno ci elektromagnetycznej (Dyrektywa EMC 2014/30/EU).
- Page 55 Ler antes de proceder! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização. As instruções seguintes devem ser, durante a instalação, uso e/ou manutenção dos equipamentos da Brooks Instrument, apreendidas e integradas no plano de...
- Page 56 În m sura în care indica iile c r ii ma inii nu sunt suficient de l muritoare, lua i leg tura cu reprezentantul Brooks Instrument pentru clarificarea problemei.
- Page 57 Pre íta pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalova , prevádzkova a udržiava , na zabezpe enie ich spo ahlivej a normálnej prevádzky v celom pracovnom rozsahu.
- Page 58 Pred servisom morate odstraniti tlak v obdelovalni liniji. e potrebujete rezervne dele, zagotovite, da usposobljeno osebje uporablja rezervne dele, ki jih je odobrila družba Brooks Instrument. Neodobreni deli in postopki lahko vplivajo na u inkovitost delovanja izdelka ali ogrozijo varno upravljanje postopka.
- Page 59 ¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento.
- Page 60 Läs detta innan du fortsätter! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls.
- Page 61 Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 October, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Page 62 Brooks Instrument can provide seminars and dedicated training to engineers, end users and maintenance persons. Please contact your nearest sales representative for more details. Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice. TRADEMARKS Brooks is a trademark of Brooks Instrument, LLC All other trademarks are the property of their respective owners.