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Summary of Contents for Brooks Instrument GF40 Series
- Page 1 Installation & Operation Manual GF40 Series Mass Flow Controllers & Meters Beyond Measure...
- Page 2 Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
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Page 3: Table Of Contents
Gas Connections ..........................2-2 In-Line Filter ............................2-2 Mechanical Installation ........................2-2 2-10 Flow Controller Installation Arrangement ..................2-3 2-11 Purge the Gas Supply Line Before GF40 Series Installation ............2-4 2-12 Position and Mount the GF40 Series ....................2-5 2-13 Perform a Leak Test ........................2-5 2-14 Performance Checks ........................2-5... - Page 4 Troubleshooting Checklist .......................4-3 GF40 Series Troubleshooting Guide ....................4-4 Section 5 Product Description Code ....................... 5-1 Appendix A: GF40 Series Gas Table ....................... A-1 Appendix B: GF40 Series Patents ......................B-1 Appendix C: Essential Instructions ......................C-1 Warranty, Local Sales/Service Contact Information ................Back Cover...
- Page 5 GF40 Series Troubleshooting Guide ....................4-4 GF40 Series Product Description Code Table .................5-1 GF40 Series Gas Table - Codes 1-102, Bins SA40 to SA44 ............A-1 GF40 Series Gas Table - Codes 1-102, Bins SA45 to SA50 ............A-2 GF40 Series Gas Table - Codes 104-636, Bins SA40 to SA44 ............A-3 GF40 Series Gas Table - Codes 104-636, Bins SA45 to SA50 ............
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Page 6: Section 1 Introduction
Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 1-1 Introduction Based upon Brooks award-winning GF100 Series, the GF40 Series is a performance/value MFC platform designed for OEM applications, delivering the following class leading features: • MultiFlo™ process gas and flow range programmability, enabling customers to re-configure the MFC for new gases and full scale flow rates for unparalleled process flexibility. • A high-performance, corrosion-resistant flow measurement sensor delivers improved reproducibility and stability. -
Page 7: Product Support References
It is recommended that this manual be read in its entirety before attempting to operate or repair these devices. 1-3 Product Support References Refer to www.BrooksInstrument.com for Brooks sales and service locations and to obtain other documents that support the GF40 Series. Those documents include: • Brooks MultiFlo Configurator Quick Start Manual (X-SW-MultiFlo-Config-QS-eng; part number 541B167AAG) -
Page 8: How To Order A Gf40 Series Device
Manual and on the Brooks website at www.BrooksInstrument.com. This information provides general warranty information, limitations, disclaimers, and applicable warranty periods according to product group. 1-6 How to Order a GF40 Series Device Refer to Section 5. Table 1-1 Industry Standard References... - Page 9 “grown” on a bare wafer, enabling a high-purity starting point for building the semiconductor device Horizontal Base Down Horizontal Label Down Horizontal Label Up Horizontal Upside Down GF40 Series MultiFlo capable digital device F.S. Full Scale Light Emitting Diode Mass Flow Controller MultiFlo Configurator I/O communication software package that configures...
- Page 10 GF40 Devices ® Feburary, 2023 1-10 Description Control The GF40 Series brings together Brooks high-performance, patented ultra-fast T-rise flow sensor, high-speed ARM based digital architecture, and a fast-acting diaphragm-free solenoid valve to deliver: • Fast reproducible transitions between setpoints without overshoot or ringing • User-programmable ramp functions for processes requiring a slow- ramp in flow or time critical transitions •...
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Page 11: Industry Standard References
Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 1-7 Industry Standard References Refer to Table 1-1. 1-8 GF40 Devices Gas Table Refer to Appendix A. 1-9 Glossary of Terms and Acronyms Refer to Table 1-2 778Z013ZZZ GF0xx EtherCAT MultiFlo ®... - Page 12 • A convenient Zero button to enable easy re-zeroing during scheduled maintenance Communication Interfaces The GF40 Series supports 0-5 Vdc, 0-10 V, 4-20 mA, 0-20 mA, RS485, DeviceNet, EtherCAT, and Profibus communication protocols. DeviceNet, Profibus, EtherCAT and RS485 are multi-drop connections that allow a maximum of 64 devices for DeviceNet, 128 devices for Profibus, 32 devices for RS485, and 65,535 devices for EtherCAT to be connected on the same network.
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Page 13: Specifications For Gf40 Series Devices
Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 1-11 Specifications for GF40 Series Devices See Table 1-3 for specifications for the GF40 Series. See Figure 1-2 for dimensions for the GF40 Series. - Page 14 Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 Table 1-3 Specifications for Standard GF40 Series GF40 GF40 GF40 GF40 GF40 Performance Performance Performance Performance Performance Full Scale Flow Range (N Full Scale Flow Range (N...
- Page 15 Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 Table 1-4 GF40 Series Electrical Specifications Communication Protocol Communication Protocol Communication Protocol Communication Protocol Communication Protocol RS485* RS485* RS485* RS485* RS485* Profibus Profibus Profibus Profibus Profibus ®...
- Page 16 Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 Figure 1-2 Dimensions - GF40 Series...
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Page 17: General
® Feburary, 2023 2-1 General This section provides installation instructions for the Brooks GF40 Series Thermal Mass Flow Devices. The installation process consists of purging the gas supply line prior to installation, unpacking and inspecting the device, connecting the device to the gas supply line and testing for leaks. -
Page 18: Transit Precautions
Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 2-5 Transit Precautions To safeguard against damage during transit, transport the device to the installation site in the same container used for transportation from the factory, if circumstances permit. 2-6 Removal from Storage Upon removal of the device from storage, a visual inspection should be conducted to verify its "as-received"... -
Page 19: Flow Controller Installation Arrangement
Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 The GF40 Series also utilizes MultiFlo technology that allows the user to ® configure standard configurations ("SAs") or "blanks" for a variety of pure gases and mixtures. As a result, MultiFlo technology enables the user to ® reduce unique inventory requirements. 2-10 Flow Controller Installation Arrangement Typical gas supply arrangements are shown in Figure 2-1. -
Page 20: Purge The Gas Supply Line Before Gf40 Series Installation
GF40 Devices ® Feburary, 2023 2-11 Purge the Gas Supply Line Before GF40 Series Installation Before operating the GF40 Series, the gas supply line must be completely purged with nitrogen or argon to ensure the line is free from toxic or flammable gases, contaminants, moisture, and oxygen. The purge gas must be free of moisture and oxygen to less than 100 ppb. Purge the gas lines as follows or in accordance with prescribed company and safety procedures. -
Page 21: Position And Mount The Gf40 Series
Tighten the fittings to manufacturer recommendations. 2-13 Perform a Leak Test It is critical to leak test the gas supply lines and GF40 Series connections before turning on the process gas supply after any new installation. Check for leaks using a helium leak detector or any other appropriate leak test method. Follow leak test specifications as defined by integrator. -
Page 22: Zeroing Setup Process
2. Make sure that the GF40 Series has been installed inside the equipment (panel) for at least four hours and powered up at least one hour prior to zeroing. This insures that the GF40 Series is in its "use attitude" and is operating at normal temperature. If the GF40 Series is subjected to a vacuum purge for more than one minute, turn off the GF40 Series (i.e., provide a zero setpoint) for a time period of twice the... -
Page 23: Auto Shut-Off
2-18 Using the MultiFlo Configurator The MutliFlo Configurator application is used to configure the gas and range of the GF40 Series devices. The MultiFlo Configurator application allows communication to GF40 Series devices through personal computer with serial COM Port and a Windows XP or Windows 7 operating system. It’s primary function is to configure gas and flow ranges within defined standard configurations. - Page 24 Connect the RS485 end of the converter to the 15-pin RS485 end of the MultiFlo Cable Adapter. Connect the USB end of the converter to the USB Port of a laptop or PC. The latest MutliFlo Configurator Software and Databases and MultiFlo Configurator Quick Start Guide are available on the Brooks Instrument website at: www.BrooksInstrument.com/MultiFlo. Please reference the MultiFlo Configurator Quick Start Guide for installation and operation details. Download the MultiFlo Configurator software into your computer from the Brooks Instrument website www.BrooksInstrument.com/MultiFlo. Install the MultiFlo Configurator as described in the MultiFlo Configurator Quick Start Guide and use the guide as a reference for operation details.
- Page 25 Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 Figure 2-3 MultiFlo Cable Adaptor Table 2-1 Gas and Flow Ranges - MultiFlo Configurable - N2 Equivalent Figure 2-4 USB-RS485 Converter (P/N 214F027AAA)
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Page 26: Electrical Connections
Obtain a DeviceNet communication cable (Micro M-12) and fasten it to the 5-pin connector as shown in Figure 2-6. DeviceNet 5-Pin (M-12) Connector (M) Figure 2-6 GF40 Series DeviceNet Connection and Pinouts... -
Page 27: Analog/Rs485 Connector
® Feburary, 2023 2-19-2 Analog/RS485 Connections The GF40 Series devices are available with the Analog/RS485 15-Pin D-Connector shown in Figure 2-7. It is recommended that when using -15 Vdc & 0, the wiring hook-up should be: -15V is connected to Pin 9 (POWER COMMON) and 0 is connected to Pin 5 (POWER SUPPLY(+12 to +24 VDC)). -
Page 28: Profibus Connections
Figure 2-8. Profibus Connectors Figure 2-8 GF40 Series Profibus Connections and Pinouts 2-19-4 EtherCAT Connections The GF40 Series devices are available with the EtherCAT connections as shown in Figure 2-9. EtherCAT Connectors Figure 2-9 GF40 Series EtherCAT Connections and Pinouts... -
Page 29: Alarm Output (Analog I/O Version Only)
Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 2-19-5 Alarm Output (Analog I/O versions only) The Alarm Output is an open collector or "contact" type that is CLOSED (on) whenever an alarm is active. The Alarm Output may be set to indicaqte any one of various conditions. -
Page 30: Section 3 Operation
Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 3-1 General After the device has been properly installed in the process, it is ready for operation. When initiating flow, slowly open any upstream shutoff valve to avoid a flow surge. A bypass is helpful in bringing the flow on smoothly. Avoid starting a pump to supply the device without the use of a valve upstream of the device. - Page 31 Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 Figure 3-1 GF40 Series Operating Principles...
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Page 32: Overview
Brooks GF40 Devices ® Feburary, 2023 4-1 Overview No routine maintenance is required on the Brooks GF40 Series devices. If an in-line filter is used, the filtering elements should be periodically replaced or cleaned. Any precision unit such as a flow controller requires occasional servicing, especially if it has been operating for an extended period of time. If reactive gases are being used, it is recommended that you send the device to a Brooks Service Center for cleaning and recalibration. -
Page 33: Troubleshooting
Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 4-3 Troubleshooting This section includes a Troubleshooting Checklist and a GF40 Series Troubleshooting Guide that identifies symptoms, possible causes, and corrective actions. Maintenance, Factory Calibration and Service, and On-Site Service. -
Page 34: Troubleshooting Checklist
Table 4-1. 2. Check supply voltage and check for a consistent ground. 3. Insure OEM tool setpoint matches the setpoint at the GF40 Series. Observe for consistency. 4. Verify isolations valves are open and the gas supply is turned on. Then verify operating pressures are within operating ranges. - Page 35 Is the MOD LED light on the GF40 Series Observe the LED at the top of the GF40 device. lit solid green? If the LED light is not lit, cycle power the device to reboot.
- Page 36 X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 Table 4-2 GF40 Series Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 2. Flow out of range (Continuted). Is the device zero correct? Zero the device according to zeroing procedure in Section 2-16.
- Page 37 X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 Table 4-2 GF40 Series Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 5. No gas flow below some setpoint. NOTE: When the setpoint is decreased below this point, the...
- Page 38 Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 Table 4-2 GF40 Series Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 7. OEM tool does not read correct GF40 Series zero reading. Is the differential pressure across the GF40 Series valve leakage.
- Page 39 Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 5 Product Description Code Table 5-1 GF40 Series Product Description Code Table Code Description Code Description Code Description Code Description Code Description Code Option Code Option...
- Page 40 X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 A GF40/GF80 Series Gas Table Table A-1 GF40 Series Gas Table - Codes 1-102, Bins SA40 to SA44 Min inlet pressure for vac. SA40 SA41 SA42 SA43 SA44 exhaust (PSIA)
- Page 41 Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 Table A-2 GF40 Series Gas Table - Codes 1-102, Bins SA45 to SA50 Min inlet pressure for vac. SA45 SA46 SA47 SA48 SA50 exhaust (PSIA) Gas Symbol...
- Page 42 Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 Table A-3 GF40 Series Gas Table - Codes 104-636, Bins SA40 to SA44 Min inlet pressure for vac. SA40 SA41 SA42 SA43 SA44 exhaust (PSIA) Gas Symbol...
- Page 43 Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 Table A-4 GF40 Series Gas Table - Codes 104-636, Bins SA45 to SA50 Min inlet pressure for vac. SA45 SA46 SA47 SA48 SA50 exhaust (PSIA) Gas Symbol...
- Page 44 Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 Table A-5 GF40 Series Gas Table - Codes 640-948, Bins SA40 to SA44 Min inlet pressure for vac. SA40 SA41 SA42 SA43 SA44 exhaust (PSIA) Gas Symbol...
- Page 45 Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 Table A-6 GF40 Series Gas Table - Codes 640-948, Bins SA45 to SA50 Min inlet pressure for vac. SA45 SA46 SA47 SA48 SA50 exhaust (PSIA) Gas Symbol...
- Page 46 Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 Table A-7 GF40 Series Gas Table - Codes 949-5022, Bins SA40 to SA44 Min inlet pressure for vac. SA40 SA41 SA42 SA43 SA44 exhaust (PSIA) Gas Symbol...
- Page 47 Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 Table A-8 GF40 Series Gas Table - Codes 949-5022, Bins SA45 to SA50 Min inlet pressure for vac. SA45 SA46 SA47 SA48 SA50 exhaust (PSIA) Gas Symbol...
- Page 48 Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 B GF40 Series Patents The GF40 Series may be protected by the following US patents and their international filings. Table B-1 GF40 Series Patents...
- Page 49 Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 Bulgarian Brooks Instrument Brooks Instrument. Brooks Instrument : (1) . (2) Brooks Instrument (PED) 0,5 bar (g) 25 mm 1" (inch), (PED). „ ” 2014/34/EU. Brooks Instrument 25 mm 1"...
- Page 50 P ed instalací si p e t te následující instrukce! Spole nost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standard . P ístroje musí být ádn nainstalovány, používány a udržovány tak, aby byl zajišt n jejich nep etržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující...
- Page 51 Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 Dansk Grundlæggende vejledninger Læs disse før anvendelse! Brooks Instruments designer, fremstiller og afprøver sine produkter således, at de tilpasser sig både de indenrigs og internationale standarder. Disse udstyr bør installeres, bruges og repareres omhyggeligt, så...
- Page 52 Lees ze voordat u verder gaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken.
- Page 53 Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljudele riiklikele ja rahvusvahelistele standarditele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrumenti toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi.
- Page 54 Perusohjeet Lue ensin ohjeet huolellisesti! Brooks Instrument suunnittelee, valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainvälisten standardien vaatimuksia. Tuotteet tulee asentaa, käyttää ja huoltaa käyttöohjeiden mukaan jotta niiden toimivuus taataan. Brooks Instrumentin laitteide n asennuksessa, käytössä ja huollossa on noudatettava soveltuvia määräyksiä ja ohjeita, lisäksi mainitut ohjeet on huomioitava työsuojelun ohjeistuksessa.
- Page 55 AVERTISSEMENT: n’utilisez pas cet instrument au-delà des spécifications énumérées dans le manuel d’utilisation. Le non-respect de cet avertissement peut entraîner de graves blessures et / ou endommager l’équipement. • Si vous ne comprenez pas l’une des instructions, prenez contact avec un représentant de Brooks Instrument pour obtenir des explications. •...
- Page 56 Wichtige Anweisungen Bitte zuerst lesen! Brooks Instrument entwickelt, produziert und testet seine Produkte derart, dass sie viele nationale und internationale Standar ds erfüllen. Nur bei korrektem Einbau sowie richtiger Bedienung und Wartung dieser Produkte ist ein Betrieb unter Einhaltung der Standardvorgaben sichergestellt.
- Page 57 Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks GF40 Devices ® Feburary, 2023 Greek Brooks Instrument Brooks Instrument. ’ Brooks Instrument. : (1) . (2) Brooks Instrument. (PED) 0,5 bar (g) 25 mm (PED). PED. 2014/34/EU. Brooks Instrument 25 mm PED.
- Page 58 üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál m ködési tartományuknak megfelel en üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése, üzemeltetése és karbantartása során.
- Page 59 Direttiva europea relativa alla compatibilità elettromagnetica (EMC) Le apparecchiature (elettriche/elettroniche) Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilità elettromagnetica (Direttiva EMC 2014/30/EU). In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE.
- Page 60 Lai nodrošin tu šo izstr d jumu turpm ku darb bu atbilstoši noteiktajiem parametriem, tie ir pareizi j uzst da, j lieto un j apkopj. Uzst dot, lietojot „Brooks Instrument” izstr d jumus un veicot to apkopi, ir j iev ro šie nor d jumi un j iek auj tie j su droš bas programm .
- Page 61 SP JIMAS: nenaudokite šio prietaiso viršydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis. Nesilaikydami šio sp jimo galite sunkiai susižeisti ir (arba) sugadinti rang . Jei nesuprantate koki nors nurodym , kreipkit s „Brooks Instrument“ atstov , kad paaiškint . Paisykite vis sp jim , persp jim ir nurodym , pažym t ant gaminio arba pateikt su juo.
- Page 62 Produkty o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom „Uznanej Praktyki In ynierskiej” (SEP). Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej (EMC) Urz dzenia elektryczne / elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE, przesz y pozytywnie testy pod k tem spe niania przez nich wymogów kompatybilno ci elektromagnetycznej (Dyrektywa EMC 2014/30/EU).
- Page 63 Ler antes de proceder! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização. As instruções seguintes devem ser, durante a instalação, uso e/ou manutenção dos equipamentos da Brooks Instrument, apreendidas e integradas no plano de...
- Page 64 În m sura în care indica iile c r ii ma inii nu sunt suficient de l muritoare, lua i leg tura cu reprezentantul Brooks Instrument pentru clarificarea problemei.
- Page 65 Pre íta pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalova , prevádzkova a udržiava , na zabezpe enie ich spo ahlivej a normálnej prevádzky v celom pracovnom rozsahu.
- Page 66 Pred servisom morate odstraniti tlak v obdelovalni liniji. e potrebujete rezervne dele, zagotovite, da usposobljeno osebje uporablja rezervne dele, ki jih je odobrila družba Brooks Instrument. Neodobreni deli in postopki lahko vplivajo na u inkovitost delovanja izdelka ali ogrozijo varno upravljanje postopka.
- Page 67 ¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento.
- Page 68 Läs detta innan du fortsätter! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls.
- Page 69 In many cases this service can be provided under in-situ conditions, and the results will be traceable to the relevant international quality standards. SEMINARS AND TRAINING Brooks Instrument can provide seminars and dedicated training to engineers, end users and maintenance persons. Please contact your nearest sales representative for more details. Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice.
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