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RFS-2775L
Ulvac RFS-2775L Used RF Generator Manuals
Manuals and User Guides for Ulvac RFS-2775L Used RF Generator. We have
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Ulvac RFS-2775L Used RF Generator manual available for free PDF download: Instruction Manual
Ulvac RFS-2775L Instruction Manual (93 pages)
Solid-State RF Power Supply Matching Box
Brand:
Ulvac
| Category:
Power Supply
| Size: 3.93 MB
Table of Contents
Table of Contents
7
For Safe Operation
9
Precautions When Handling the System
9
Warning Label/Nameplate Locations
10
Contact Information
10
Overview
11
Introduction
11
Features
11
Configuration
12
Specifications
14
Setup
29
Accessories
29
Installation and Drilling Rack Holes
30
RF Power Supply Mounting Structure
30
Matching Box Installation
31
Matching Box Installation Location
31
Installation
31
Automatic Matching Controller Installation
31
System Wiring
32
Connecting Cables
32
Input Power Supply Wiring
34
Connecting the Ground Terminal
35
Connecting the Water Cooling Tube
36
Functions
37
RF Power Supply
37
RF Power Supply Part Names and Functions
37
Control Panel Functions and Explanations
38
Measurement Display
39
Protective Functions
39
External Control Terminal Pin Assignments
40
Caution When Using the External Control Terminal (INTERFACE)
43
RF Power Supply Parameters
44
Automatic Matching Controller Functions
46
Automatic Matching Controller Part Names and Functions
46
Control Panel Functions and Explanations
47
Automatic Matching Controller AMC.EXT Pin Assignments
48
Automatic Matching Controller PRESET Pin Assignments
49
Caution When Using the External Control Terminals (AMC.EXT/PRESET)
52
Matching Controller Parameters
53
Operation
54
Operating the RF Power Supply
54
Setup before Operation
54
Local Operation Method (Panel Operation)
55
Remote Operation Method (External Control)
57
RF Output Timing
58
Measurement Value Display
59
Automatic Matching Controller Operation
60
Local Operation Method (Panel Operation)
60
Remote Operation Method (External Control)
63
Remote Operation Method (External Preset Operation)
64
Matching Adjustment
66
Matching Fundamentals
66
Matching Adjustment
67
Increasing and Decreasing the Number of Coil Short Circuits
68
Adding a Fixed Capacitor
69
Maintenance
70
RF Power Supply Maintenance and Inspection
70
Matching Box Maintenance and Inspection
71
Troubleshooting
73
Troubleshooting Related to the RF Power Supply
73
Troubleshooting Related to the Matching Box
74
Reference Materials
75
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