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Summary of Contents for Pfeiffer Vacuum TPH 1201 P
- Page 1 Betriebsanleitung • Operating Instructions Turbomolecular Pump With Electronic Drive Unit TC 750 TPH 1201 P / PC TPU 1201 P / PC...
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Page 2: Table Of Contents
Index Page Page 1. Safety Instructions ......3 4.8. Operations With The DCU 001/DCU 600 or HPU 001 ............. 20 1.1. For Your Orientation ......... 3 4.9. Operations With The Remote Control Unit..21 1.2. Pictogram Definitions ........3 Venting Release (Optional) ......21 Understanding The Pumps Motor, Turbopump ......... -
Page 3: Safety Instructions
1. Safety Instructions ☞ Read and follow all instructions in this manual. 1.1. For Your Orientation ☞ Inform yourself regarding: – Hazards which can be caused by the pump; Instruction in the text – Hazards which can be caused by your system. ➡... -
Page 4: Understanding The Pumps
– The turbopump must be connected to a backing pump in accordance with Section 3.3.. Bearings – Only Pfeiffer Vacuum power supplies may be used to High vacuum side: Wear free permanent magnetic bearing. operate the TC 750. The use of other power supplies requi-... -
Page 5: Improper Use
– Operating the pumps in areas there is a danger of F F e e a a t t u u r r e e TPH 1201 P / P C TPU 1201 P / P C radionactivity. High vacuum flange... -
Page 6: Installation
U U s s e e a a P P f f e e i i f f f f e e r r V V a a c c u u u u m m s s p p l l i i n n t t e e r r s s h h i i e e l l d d o o r r p p r r o o t t e e c c t t i i v v e e s s c c r r e e e e n n absorbed by the system and the high vacuum The use of a Pfeiffer Vacuum splinter shield or protective flange. - Page 7 ISO-F flange The components for installing the tuebopumps are special Hexagon screw with flange Centering ring, coated designs from Pfeiffer Vacuum Splinter shield – The minimum strength of 170 N/mm of the flange material Protective screen needs to be observed.
- Page 8 Variant 3 - Stud screw and clearance hole Hexagon screw and clearance hole ➡ If used: Insert the splinter shield and protective screen in Stud screw and clearance hole the high vacuum flange with the clamping lugs downward (towards the pump). ISO-F flange ➡...
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Page 9: Connecting The Fore-Vacuum Side
Permissible installation positions for the turbopump Recommendation: Dry backing pumps or rotary vane 11 Vacuum chamber vacuum pumps from the Pfeiffer Vacuum range. Connecting the backing pump All connections of the fore-vacuum line: With the usual small flange components or screwed hoses. -
Page 10: Connecting The Cooling Unit
3.4. Connecting The Cooling Unit Cooling with the Recycled Water Cooling Unit TZK (Accessory) The Turbopumps TPH 1201 P / P C have been designed to be water cooled as standard. (cooling water connections please Connection refer to Section 9.1. Dimensions Diagram) Dirt traps are not permissible in the lines. -
Page 11: Connecting The Electronic Drive Unit Tc 750
3.6. Connecting The Electronic 3.7 Installing The Power Supply Drive Unit TC 750 Voltage may only be supplied with the Pfeiffer CAUTION Vacuum power supplies (please see Section 11. The turbopump and the Electronic Drive Unit PLEASE NOTE Accessories). TC 750 are connected and together form a The use of other power supplies requires the single unit. -
Page 12: Installing The Cover Plate For The Tc 750
3.8. Installing The Cover Plate For Inserts and Screw fittings The TC 750 Screw Blank PG 16; for fitting disc The turbomolecular pump with integrated Electronic Drive cable Ø6 Unit TC 750 has an IP 30 protection class rating. Insert (scope of delivery When the turbopump is water cooled the enclosed cover 1 piece E 153/8... -
Page 13: Connecting The Venting Valve
3.9. Connecting The Venting Valve 3.10. Connecting The Sealing Gas Valve The venting valve (see Section 11. Accessories) provides For protection pruposes the turbopumpe should be operated automatic venting in the event of a power failure and with sealing gas, particularly where corrosive and dusty switching off. -
Page 14: Connecting The Remote Control Unit
3.11. Connecting The Remote Pin occupancy remote plug Control Unit Remote control options for various functions are provided with the connection ”REMOTE” on the TC 750 via the 15 pole D-Sub connector. Shielded cable must be used. Shielding is on the plug side of the TC 750 connected to the TC 750 casing. The inputs 2 - 6 are activated by connecting them to the + 24V on pin 1 (active high) (please see Section 3.13. -
Page 15: Connecting The Serial Interface Rs 485
3.12. Connecting The Serial Connecting The RS 485 Interface RS 485 Connecting to a fixed bus system: An external operating component DCU 001/DCU 600 o o r r ➡ Connect all units with D+ (pin 5/RS 485) and HPU 001 o o r r – using a level converter – an external computer D- (pin7/RS 485) to the bus. -
Page 16: Connections Diagram
3.13. Connections Diagram TC 600 TC 750 n.c. +24 VDC* / max. 200 mA (supply voltage, DCU) n.c. n.c. RS 485 RS 485+/ (DO/RI) GND* (mass connection, DCU) RS 485- / (DO/RI) n.c. +24 VDC*/max. 50 mA Venting release Motor TMP Contact current: Pumping station max. -
Page 17: Operations
4. Operations 4.1. Filling In The Lubricant 4.2. Before Switching ON Turbopumps must be filled with lubricant before Sections 4.2 to 4.6. refer only to operating the pump in its CAUTION being operated. condition on delivery, without the DCU/HPU operating unit. If possible fill in the lubricant in the fitting The bridges ”venting release”, ”motor, TMP ON”... -
Page 18: Switching On
4.3. Switching ON 4.4. Gas Type Dependent Operations ➡ Switch on the turbopump with switch S1 on the power Where high level gas loads and rotation speeds are involved, supply. the resulting friction subjects the rotor to the effect of great –... -
Page 19: Operation With Cooling Water Temperature ≠ 25°C
Operation with cooling water The following gas type characteristics lines enable you to adjust the power properly. At a cooling water temperature temperature ≠ ≠ 25°C between 25 °C and 35 °C you have to draw your own gas type This chapter does only apply to the TPH version. -
Page 20: Circulatory Lubrication
(please power supply at the same time with switch S1. get in touch with Pfeiffer Vacuum Service). Where corrosive gas processes are involved, the sealing Usability of the F3 lubricant is 4 years without gas supply should be shut off at the earliest after operation. -
Page 21: Operations With The Remote Control Unit
4.9. Operations With The Remote Control Standby Unit The pump can be operated optionally at 66% of its nominal rotation speed (standby ON) or at its nominal rotation speed Remote control operations can be performed via the connec- (standby OFF). tion with the designation “REMOTE”... -
Page 22: Monitoring Operations
5. Monitoring Operations 5.1. Operations Display Via LED 5.2. Turbopump Temperature Monitoring Certain operations modes of the turbopump and the TC 750 Where impermissible motor temperatures are involved or the can be ascertained via the two integrated LEDs located on temperature of the casing is too high, the motor current is the front panel of the TC 750. -
Page 23: What To Do In Case Of Breakdowns
• Check the power supply mains connection – Supply voltage short circuit to earth • Check the power supply voltage for short circuit to earth 1) Without a DCU or HPU inform Pfeiffer Vacuum Service to check the cause of trouble. -
Page 24: Service
➡ A copy of the completed declaration must accompany the unit; any additional copies must be sent to your local Pfeif- fer Vacuum Service Center. Please get in touch with your local Pfeiffer Vacuum represen- tatives if there are any questions regarding contamination. -
Page 25: Maintenance/Replacement
Electronic Drive Unit TC 750 yourself. screw 71. Please contact your local Pfeiffer Vacuum Service for all other maintenance and service work. Ensure no mechanical forces act on the Filling in the lubricant CAUTION Electronic Drive Unit TC 750. -
Page 26: Cleaning The Lubricant Pump
For cleaning the lubricant pump please contact your local power supply. Pfeiffer Vacuum Service Center. Order number for the Electronic Drive Unit TC 750, see 8.3. Replacing The Lubricant Pump Section 10. Spare Parts. -
Page 27: Technical Data
9. Technical Data Feature Unit TPH 1201 P TPH 1201 P C TPU 1201 P TPU 1201 P C Connection nominal diameter Inlet DN 200 ISO-K/ DN 200 ISO-K/ DN 200 CF-F DN 200 CF-F DN 200 ISO-F DN 200 ISO-F... -
Page 28: Dimensions Diagram
9.1. Dimensions Diagram TPH 1201 P / P C DN 200 ISO-K G1/8" Ø 264 DN 200 ISO-K Ø 240 (M6) DN 40 ISO-KF Ø 200... - Page 29 TPH 1201 P / P C DN 200 ISO-F G1/8" Ø 285 DN 200 ISO-F Ø 264 (M6) DN 40 ISO-KF Ø 200...
- Page 30 TPU 1201 P / P C DN 200 CF-F G1/8" Ø264 DN 200 CF-F Ø253 (M6) DN 40 ISO-KF Ø200...
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Page 31: Spare Parts
10. Spare Parts Pos. Description Pieces Size Number Comments Ordering Quantity Spare parts TPH/TPU 1201 P, TPH/TPU 1201 P C Electronic Drive Unit TC 750 PM C01 713 Remote plug P 0920 668 E Seal ring for water connections P 3529 133 -A Lubricant filler screw N 3191 382 X see Section 4. -
Page 32: Accessories
11. Accessories Description Size Number Comments/ Order Quantity Operating Instructions C C o o m m p p o o n n e e n n t t s s f f o o r r c c o o o o l l i i n n g g Dirt trap R 3/8”... -
Page 33: Declaration Of Contamination
Declaration of Contamination of Vacuum Equipment and Components The repair and/or service of vacuum components will only be The manufacturer could refuse to accept any equipment carried out if a correctly completed declaration has been without a declaration. submitted. Non-completion will result in delay. This declaration can only be completed and signed by authorised and qualified staff: 1. -
Page 34: Manufacturer's Declaration
The product specified below is in correspondence to the EU directives Machin- ery 98/37/EEC, Electromagnetic Compatibility 89/336/EEC and Low Voltage 2006/95/EEC. TPH 1201 P / TPH 1201 PC TPU 1201 P / TPU 1201 PC Guidelines, harmonised standards, national standards in languages and specifi-... -
Page 35: Www.pfeiffer-Vacuum.net
Roots pumps Dry compressing pumps Leak detectors Valves Components and feedthroughs Vacuum measurement Gas analysis System engineering Service Pfeiffer Vacuum Technology AG · Headquarters/Germany Tel. +49-(0) 64 41-8 02-0 · Fax +49-(0) 64 41-8 02-2 02 · info@pfeiffer-vacuum.de · www.pfeiffer-vacuum.net...
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