Ulvac CR16B Instruction Manual page 69

YK16-0010-DI-002-02
Gas ballast option code: 1 manual valve (Needle valve) and air filter
Fig. 6 Explanatory diagram of gas ballast option : 1 manual valve
Gas ballast option code: Solenoid valve + manual valve (Needle valve)
and air filter
Fig. 7 Explanatory diagram of gas ballast option: Solenoid valve + manual valve
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