MKS Automated SENTRY 1000 Installation And Operation Manual
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MKS Automated SENTRY 1000 Installation And Operation Manual

MKS Automated SENTRY 1000 Installation And Operation Manual

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Automated SENTRY
1000
TM
and Tool Interface Module (TIM)
with Automatic Set Point Control
Installation and Operation Manual
Instruction Manual part number 122251
Revision E – February 2020
© 2020 MKS Instruments, Inc. All rights reserved.
®
Granville-Phillips
is a registered trademark of MKS Instruments, Inc.
SENTRY
TM
is a trademark of MKS Instruments, Inc. All other trademarks
and registered trademarks are the properties of their respective owners.
1
Instruction Manual #122251

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Summary of Contents for MKS Automated SENTRY 1000

  • Page 1 © 2020 MKS Instruments, Inc. All rights reserved. ® Granville-Phillips is a registered trademark of MKS Instruments, Inc. SENTRY is a trademark of MKS Instruments, Inc. All other trademarks and registered trademarks are the properties of their respective owners. Instruction Manual #122251...
  • Page 2 Notice This product is intended for use by industrial customers and should be serviced only by MKS trained representatives. The service manuals and related materials are provided in English at no charge and are intended for use by experienced technicians. It is the responsibility of the user to obtain and assure the accuracy of any needed translations of manuals.

  • Page 3: Warranty Information

    This document contains confidential proprietary information belonging to MKS Instruments, Inc. This information is not for publication and has been provided to MKS on the condition that it not be copied, reproduced or disclosed, either wholly or in part, to third parties without the expressed written consent of MKS Instruments, Inc.

  • Page 4: Table Of Contents

    Table of Contents Warranty Information ......................3 Safety Information ........................ 5 General Safety Considerations ....................6 Safety Alert Labels ........................7 Grounding ..........................8 Responsibility ..........................8 Installation ........................... 10 Installation Check List ......................10 Unpacking - Contents ......................13 Unpacking – Part Names ......................14 Unpacking - Shipping Material Removal ................16...

  • Page 5: Safety Information

    Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of design, manufacture, and intended use of the instrument. MKS Instruments, Inc. disclaims all liability for the customer's failure to comply with these requirements. •...

  • Page 6: General Safety Considerations

    General Hazards Failure to review the Safety chapter and follow the safety warnings can result in serious injury or death. Do not attempt to perform installation, operation, or maintenance procedures on the product until you have read and understand the information in the Safety Chapter. Read and understand each procedure before performing the procedure.

  • Page 7: Safety Alert Labels

    This equipment contains no user serviceable part. Refer all repairs to MKS. Do not operate this equipment without proper exhaust connections. 2.2 Safety Alert Labels Safety labels and identification labels are placed on the robot and controller to provide operators with information. This section describes each label and identifies its location.

  • Page 8: Grounding

    It is the responsibility of the end user to provide sufficient lighting at work to meet local regulations. Operation and Service of this equipment in strict accordance with the methods and procedures supplied by MKS is the responsibility of the Customer. Instruction Manual #12279 Rev. A – February 2014...
  • Page 9 Return the product to a service facility designated by MKS for service and repair to ensure that safety features are maintained. Do not use this product if it has unauthorized modifications.

  • Page 10: Installation

    3 Installation 3.1 Installation Check List If you are familiar with the SENTRY 1000 Automated system and have previously installed the same model, you may wish to photocopy this checklist onto clean room paper and refer to it during the installation. Please review the notes and cautions located throughout the manual prior to installation.
  • Page 11 4.1.2. Mount the SENTRY 1000 to the support structure using the bolt holes located on the support base. 4.1.3. Align the SENTRY 1000 input port (top port), which can be rotated, facing towards the process tool exhaust connection. 4.1.4. Connect the SENTRY 1000 Input and Output connections. 4.1.5.
  • Page 12 WEIGHT CALCULATION WORKSHEET 60 CFM 100 or 130 Model CFM Model  Enter the desired maximum pressure here.  Multiply the value in step  by this 0.84 1.40 value.  Enter the result here ( X  = ). ...

  • Page 13: Unpacking - Contents

    3.2 Unpacking - Contents Having unpacked the SENTRY system, make sure none of the contents shown below are missing or damaged. Report damage or missing components to the OEM or distributor from which the system was purchased. You may also contact Technical Support directly at the telephone number listed on page 2 of this manual.

  • Page 14: Unpacking - Part Names

        Automated SENTRY 1000 The Automated SENTRY 1000 is an innovative process exhaust controller. It is a pressure regulator designed to respond almost instantaneously to changes in static exhaust pressure. This maintains a constant exhaust condition at the process tool.
  • Page 15  Piston Reference Port The piston reference port senses the ambient static pressure of the process tool environment controlled by the SENTRY 1000. It also provides a piston air-bearing which is critical to the proper operation of the SENTRY 1000. ...

  • Page 16: Unpacking - Shipping Material Removal

    3.4 Unpacking - Shipping Material Removal The SENTRY 1000 is packaged to protect the piston from damage during shipment. Removal of this packaging is needed prior to installation. Notice The piston/cylinder assembly is critical to the proper functioning of the SENTRY 1000.

  • Page 17: Installation Guidelines

    3.5 Installation Guidelines Before beginning to design an installation layout, one should consider the following general installation features, guidelines and limitations. 1) The SENTRY 1000 can only be mounted with the support base () at the   bottom and the automated throttle () at the top. 2) For ease of installation, the SENTRY 1000 input () can be rotated relative to the output () in order to better align with the tool or the facility plumbing.

  • Page 18: Installation Layout

    3.6 Installation Layout Design an installation layout and mounting strategy for the SENTRY 1000, TIM- 100/120, process pressure sense line, reference tube, cables and grounding connections. Refer to the appropriate dimensional prints of the system components in the drawings section at the end of this manual. Choose a location for mounting the SENTRY 1000 controller.

  • Page 19: Installation - Sentry 1000

    3.7 Installation - Sentry 1000 Align the SENTRY 1000 Output The bottom port of the SENTRY 1000 is the output and must be plumbed to the facility exhaust. Align the SENTRY 1000 output port facing towards the facility exhaust connection. Mount the SENTRY 1000 Having selected a location for the SENTRY 1000, mount the SENTRY 1000 to the support structure using the bolt holes located on the support base.

  • Page 20: Connect The Sentry 1000 Input And Output

     Rotate the top of the SENTRY 1000 until the input is facing towards the process tool exhaust connection. Notice • 60 CFM Model: The input rotates at 45 increments. • 100/130 CFM Model: The input rotates a full 360 ...

  • Page 21: Ground The Sentry 1000

    It is recommended that all upstream and downstream dampers be open. An optional booster fan is available from MKS for facilities that do not meet the minimum exhaust requirements.

  • Page 22: Installation - Booster Fan

    3.8 Installation - Booster Fan (Optional Configuration) Connect the Booster Fan Power Supply The SENTRY 1000 may have been purchased with an integrated booster fan to provide point-of-use increased exhaust. The booster fan and motor assembly, when present, are integrated to the output side of the SENTRY 1000 controller and replace the standard output port.

  • Page 23: Installation - Reference Tube

     Connect the power cord line lead to the terminal labeled “U1” (Red).  Connect the power cord neutral lead to the safety cut- off. The cut-off is connected to the terminal labeled “V1” (Yellow).  Connect the power cord ground lead to the chassis ground terminal.
  • Page 24 The process is enclosed in a mini-environment  reference tube is and the mini-environment pressure moves in not required tandem with the clean room pressure. The process is enclosed in a mini-environment  reference tube is but the mini-environment pressure does not required reference the clean room pressure.

  • Page 25: Connect The Reference Tube (If Required)

    Notice Do not block or restrict the reference port even if the use of a reference tube is not required. Connect the Reference Tube (If Required) If the use of a reference tube was determined to be required, install the reference tube to the SENTRY 1000.

  • Page 26: Installation - Sense Tube

    Clean Chase Room  Tool    Clean Clean Chase Chase Room Room Tool Tool   3.10 Installation - Sense Tube Connect the Process Pressure Sense Tube The process pressure sense tube connects the onboard differential pressure transducer to the process exhaust to be controlled. Notice Do not pinch or pressurize the sense line because damage to the transducer may occur.

  • Page 27: Installation - Tim-100/120

        Clean  Chase Room Tool  3.11 Installation - TIM-100/120 (As Required) Attach the Mounting Brackets to the TIM 100/120 The TIM 100/120 is shipped with mounting brackets and fasteners.  Carefully place the TIM 100/120 face down onto a flat surface. ...

  • Page 28: Ground The Tim 100/120

    Power Supply Notice MKS systems are sold with and without a power supply. If the system being installed includes the MKS Universal Power Supply, the following applies: • The line voltage requirement of the unit is listed on the power supply label.

  • Page 29: Installation - Sentry Cables

    Other suitable cords may be used with the power supply, but it is up to the user to select an appropriate, approved cord according to their local electrical code specifications. MKS does not assume responsibility for damage to the equipment caused by cords other than the ones that are available for purchase through MKS.

  • Page 30: Connect The Tim-100/120 Power And/Or Tool Interface

    Electrical Shock Prior to installing or removing SENTRY 1000 system cabling, turn the TIM-100/120 power switch to the OFF (0) state.  Connect the 25-pin male DB (CE) or the 18-pin male circular (non-CE) connector labeled “P3” to the right hand connector on the TIM-100/120 labeled “TO SENTRY CONTROLLER”.
  • Page 31 Electrical Shock Prior to installing or removing SENTRY 1000 system cabling, turn the TIM-100/120 power switch to the OFF (0) state. Stand-Alone Power Supply:  Connect the 9-pin female DB (CE) or the 10-pin male circular (non-CE) connector to the left hand connector on the TIM 100/120 labeled “POWER IN/ANALOG INTF”.

  • Page 32: (Optional Configuration) Connect The Serial Communication Cable

    (Optional Configuration) Connect the Serial Communication Cable The TIM 100/120 is capable of RS422/485 serial communications. The communications can be with the process tool or with a host computer. Programming of the tool or host computer with the proper protocol is required in order to use this option.
  • Page 33  Turn the TIM 100/120 to the OFF (0) state and disconnect the power cable.  Connect the RJ12 connector on the serial communications cable to the corresponding socket on the TIM 100/120.  Adjust the hexadecimal address as needed. This value is preset at the factory to “00”.

  • Page 34: Installation - System Start-Up

    3.13 Installation - System Start-Up 4.7.1 Power ON the TIM-100/120  Turn the TIM-100/120 to the ON (1) state.  Use the contrast knob (2) to adjust the display. Select Communication Operating Mode The TIM-100 communication operating mode must be selected before set points can be properly received and interpreted.

  • Page 35: Installation - Weight Kit

    3.14 Installation - Weight Kit Determine If Weight Installation is Required For the system to reach set points within its operating range, it may be necessary to install one or more weights (included). The number of weights required to reach a desired set point is installation dependent. However, since the tool and exhaust plumbing typically does not change after installation, weight installation is only required once during initial setup.

  • Page 36: Determine The Number Of Weights (If Required)

    SENTRY 1000 model may be too small for the intended application. Review the troubleshooting section of this manual for possible causes. Contact MKS technical support if additional help is required. • Make sure to use the appropriate column and chart for the SENTRY model installed.

  • Page 37: Install The Weights (If Required)

    SENTRY 1000 Automated 60 CFM Model (Epoxy Piston) 3.06 (add 6 weights) 2.73 (add 5 weights) 2.31 (add 4 weights) 1.96 (add 3 weights) 1.58 (add 2 weights) 1.21 (add 1 weight) 0.84 (Piston Only) Facility Exhaust Pressure (inches H SENTRY 1000 Automated 100 or 130 CFM Models (Epoxy Piston) •2.30 (add 6 weights) •2.15 (add 5 weights)
  • Page 38 Remove the piston-cylinder assembly  If it is present, temporarily close the exhaust manual damper or shut-off associated with this SENTRY 1000   installation.   If it is present, remove the reference tube and fitting.  Remove the outer screws from the base of the SENTRY 1000.

  • Page 39: Operation

    4 Operation 4.1 Introduction The SENTRY 1000 has been designed to operate with minimal operator involvement. In most cases, once the unit is installed, only routine maintenance is required. 4.2 Operational Theory The SENTRY 1000 theory of operation can be explained in the four-diagram sequence below.
  • Page 40 Affect of Forces on the Piston Once the facility exhaust provides a sufficient static •A exhaust pressure, the upward force will become > F larger than the downward force. Once this occurs, the piston lifts and accelerates upwards due to the net upward force on the piston.

  • Page 41: Manual Mode Operation Of The Sentry 1000

    4.3 Manual Mode Operation of the SENTRY 1000 Manual (Stand-Alone) Operation Manual operation of the SENTRY 1000 is accomplished by using the TIM- 100/120 keypad. For the TIM-120, access to the keypad and display requires the use of the TIM-200 program module. Use the keypad to enter changes to the menu items provided by the TIM-100/120.

  • Page 42: Tool Interfaced Operation Of The Sentry 1000

    4.4 Tool Interfaced Operation of the SENTRY 1000 Analog Interfaced Operation When the SENTRY system is configured for analog operation, the process exhaust pressure set points are entered through the process tool. The analog interface operates on a standard 0 to 5 volt full scale (equivalent to 0 to 2” H O or 0 to 50.8 mm H O) command signal.

  • Page 43: Maintenance

    Preventative Maintenance (PM) Inspection and Cleaning Schedules All process environments and production usage vary greatly from site to site. Therefore, MKS recommends checking the SENTRY 1000 piston and canister for foreign material once every two weeks during the first quarter-year of operation and quarterly thereafter.

  • Page 44: Troubleshooting

    5.2 Troubleshooting Troubleshooting Guide Many problems associated with the SENTRY 1000 or TIM-100/120 can be traced to improper setup, installation or cabling. The following troubleshooting table will assist the user in identifying and correcting some of the most common problems. Reference section and page numbers are included in the corrective action column.
  • Page 45 Adjust contrast using contrast knob. (4.7.1, 34) Booster fan not Power not supplied Connect power. (3.8, 22) operating Fuse requires Replace fuse (international fan replacement only) or contact MKS for additional assistance. Instruction Manual #12279 Rev. A – February 2014...
  • Page 46 6 Appendix A: Factory Recommended TIM 100/120 Command Menu Settings (Typical Settings – May Vary by Installation) SENTRY TIM 100/120 MENU PARAMETERS PRODUCT: Automated SENTRY 1000 Version: G1.9a and 2.1dx (Please refer to appropriate list.) APPLICATION: 60 CFM unit Version...
  • Page 47 Factory Recommended TIM 100/120 Command Menu Settings (Typical Settings – May Vary by Installation) SENTRY TIM 100/120 MENU PARAMETERS PRODUCT: Automated SENTRY 1000 Version: G1.9a and 2.1dx (Refer to the appropriate list.) APPLICATION: 100/130 CFM units Pres Sp4 Version Default Value...
  • Page 48 Application: 120 CFM, SENTRY 3000 Software Version: G2.3 “Universal Fast Set Point” Version Default Value Note FiltRate G2.3 X = Not Applicable LookBand Menu R = Read Only BalDelta Pres Sp CtrlInv IncDec Flow Sp Gain GainFine Pos Sp Integral Pressure IntgSum Flow...

  • Page 49: Appendix B: Specifications And Facility Requirements

    7 Appendix B: Specifications and Facility Requirements English Metric English Metric Specifications Specifications Nominal 100 to 250 VAC, 50 to 60 Hz Performance: Operating 90 to 260 VAC, 47 to 63 Hz Operating Range -0.1 to -1.8” -2.5 to –45.7 Supervisor 9.5W Nominal mm H...

  • Page 50: Appendix C: Recommended System Grounding

    8 Appendix C: Recommended System Grounding                     Instruction Manual #122251...

  • Page 51: Index

    9 Index address, hexadecimal ..........9, 29 memory ............37, 42, 43 air-bearing ............12, 13 menu ........9, 13, 30, 31, 37, 38, 42, 43 analog communication ........27, 38, 40 mini-environment ........... 7, 21, 23 analog ground ..........8, 28, 40 minimum static exhaust ........
  • Page 52 1000 and Tool Interface Module (TIM) with Automatic Set Point Control Installation and Operation Manual Customer Service / Technical Support: MKS Global Headquarters 2 Tech Drive, Suite 201 Andover MA, 01810 USA Phone: +1-833-986-1686 Email: insidesales@mksinst.com Visit our website at: www.mksinst.com Instruction Manual part number 122251 Revision E –...

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