MKS Automated SENTRY 1000-300 Installation And Operation Manual
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MKS Automated SENTRY 1000-300 Installation And Operation Manual

MKS Automated SENTRY 1000-300 Installation And Operation Manual

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Automated SENTRY™
1000-300
Installation and Operation Manual
Instruction Manual part number 122209
Revision E – February 2020
© 2020 MKS Instruments, Inc. All rights reserved.
®
Granville-Phillips
is a registered trademark of MKS Instruments, Inc.
SENTRY
TM
is a trademark of MKS Instruments, Inc. All other trademarks
and registered trademarks are the properties of their respective owners.
1
Instruction Manual #122209

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  • Page 1 © 2020 MKS Instruments, Inc. All rights reserved. ® Granville-Phillips is a registered trademark of MKS Instruments, Inc. SENTRY is a trademark of MKS Instruments, Inc. All other trademarks and registered trademarks are the properties of their respective owners. Instruction Manual #122209...
  • Page 2 Notice This product is intended for use by industrial customers and should be serviced only by MKS trained representatives. The service manuals and related materials are provided in English at no charge and are intended for use by experienced technicians. It is the responsibility of the user to obtain and assure the accuracy of any needed translations of manuals.
  • Page 3 This document contains confidential proprietary information belonging to MKS Instruments, Inc. This information is not for publication and has been provided to MKS on the condition that it not be copied, reproduced or disclosed, either wholly or in part, to third parties without the expressed written consent of MKS Instruments, Inc.

  • Page 4: Table Of Contents

    Table of Contents Quick Start Guide ........................ 11 SENTRY 1000-300 Installation Checklist ....................... 11 General Description......................12 Contents ................................ 12 Part Names and Descriptions ........................13 SENTRY 1000-300 ............................13 Piston-Cylinder .............................. 14 SENTRY TIM-100/120 UFSP ........................14 Tool Interfaced Operation of the Sentry 1000-300 ..............14 Guidelines ..........................
  • Page 5 Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of design, manufacture, and intended use of the instrument. MKS Instruments, Inc. disclaims all liability for the customer's failure to comply with these requirements.
  • Page 6 General Hazards Failure to review the Safety chapter and follow the safety warnings can result in serious injury or death. Do not attempt to perform installation, operation, or maintenance procedures on the product until you have read and understand the information in the Safety Chapter. Read and understand each procedure before performing the procedure.
  • Page 7 This equipment contains no user serviceable part. Refer all repairs to MKS. Do not operate this equipment without proper exhaust connections. Safety Alert Labels Safety labels and identification labels are placed on the robot and controller to provide operators with information. This section describes each label and identifies its location. For safety labels, instructions are provided on how to avoid the hazard.
  • Page 8 Grounding The power source to which this product is connected must be properly grounded in accordance with all electrical codes pertaining to high voltage electrical equipment in an industrial environment. See Grounding in the following documentation for more detailed requirements regarding gauge and system grounding.
  • Page 9 MKS Instruments, Inc. assumes no liability, whatsoever, for any personal injuries or damages resulting from the operation or service of this equipment in any manner inconsistent or contrary to the methods supplied in MKS literature including, but not limited to, manuals, instructions, bulletins, communications, and recommendations.
  • Page 10 Fig. 1, illustrates the airflow through your process and through the SENTRY 1000-300 The SENTRY 1000-300 system is configured, and fully tested at MKS to operate over the full operating range of 10 – 100 CFM. For a majority of applications and installations where the minimum facilities exhaust spec. is available (-2.5 in.H2O) the SENTRY 1000-300 flow controller will operate as configured at the factory without the...

  • Page 11: Quick Start Guide

    Quick Start Guide If you are familiar with the SENTRY 1000-300 Automated system and have previously installed the same model, you may wish to simply photocopy this checklist onto clean room paper or printout and refer to it during the installation. Review the notes and cautions located throughout this instruction manual prior to installation.

  • Page 12: General Description

    General Description Contents Unpacking the SENTRY 1000-300 system, make sure the contents shown below are not missing or damaged. Report missing or damaged components from the supplier from which the system was purchased. 1) SENTRY 1000-300 Controller 2) SENTRY Tool Interface Module (TIM-100120 UFSP Shown) (Model Shown without Booster Fan- optional)

  • Page 13: Part Names And Descriptions

    Automated SENTRY 1000-300 The Automated SENTRY 1000-300 is an innovative process exhaust controller. It is a pressure regulator designed to respond almost instantaneously to changes in static exhaust pressure. This maintains a constant exhaust condition at the process tool.

  • Page 14: Piston-Cylinder

    General Description Piston-Cylinder The SENTRY 1000-300 is based on the “floating piston” concept, with one moving part reacting within 50 milliseconds to changes in exhaust pressure.  Piston The piston is the single controlling component. It provides a continuous mechanical pressure regulation. The piston mechanically responds to changes in facility exhaust to maintain a stable exhaust.

  • Page 15: Guidelines

    Guidelines Installation Guidelines Before beginning to design an installation layout, one should consider the following general installation features, guidelines and limitations.   The SENTRY 1000-300 can only be mounted with the support base (  ) at the bottom and the automated throttle ( ...

  • Page 16: Installation Layout

    Installation Layout Design an installation layout and mounting strategy for the SENTRY 1000-300, TIM-100/120 UFSP, cables and grounding connections. Choose a location for mounting the SENTRY 1000-300 controller. This should be in a level, secure and accessible location. To allow for easier maintenance access, ensure clearance space is available below the SENTRY 1000-300.
  • Page 17 Installation & Power-Up 1. Align the SENTRY 1000-300 Output The bottom port of the SENTRY 1000-300 is the output and must be plumbed to the facility exhaust. Align the SENTRY 1000-300 output port facing towards the facility exhaust connection. 2. Mount the SENTRY 1000-300 Having selected a location for the SENTRY 1000-300, mount the SENTRY 1000-300 to the support structure using the bolt holes located on the support base.
  • Page 18 It is recommended that all upstream and downstream dampers be open. An optional booster fan is available from MKS for facilities that do not meet the minimum exhaust requirements.
  • Page 19 Other suitable cords may be used with the power supply, but it is up to the user to select an appropriate, approved cord according to their local electrical code specifications. MKS does not assume responsibility for damage to the equipment caused by cords other than the ones that are available for purchase through MKS.
  • Page 20 6. Connect the Process Pressure Sense Tube The 130 CFM SENTRY 1000-300 model you’ve purchased has been upgraded to include a new series pressure transducer. This Section describes additional detail necessary to install and operate the valve. The process pressure sense tube connects the onboard differential pressure transducer to the process exhaust to be controlled.
  • Page 21 8. Ground the SENTRY 1000-300 The SENTRY 1000-300 should be chassis grounded as shown below. for the recommended complete system grounding. Use an insulated lead wire with a minimum 16 AWG stranded wire. 9. Booster fan (Optional Configuration) Connect the Booster Fan Power Supply The SENTRY 1000-300 may have been purchased with an integrated booster fan to provide point-of-use increased exhaust.
  • Page 22  Connect one (1) AC wire [Line] to U1 (red). Use one (1) ring terminal (supplied).  Connect one (1) AC wire [Neutral] to the fuse assembly. Use one (1) 0.187” receptacle assembly (supplied).  Connect ground [Earth] wire. Use one (1) ring terminal (supplied).
  • Page 23 Clean Clean Chase Room Room Tool Tool   Clean Clean Tool Chase Room Room Sub-Fab  ✓ Tool Tool   Notice Do not block or restrict the reference port even if the use of a reference tube is not required. Instruction Manual #122209...
  • Page 24 11. Connect the Reference Tube (If Required) If the use of a reference tube was determined to be required, install the reference tube to the SENTRY 1000- 300. Installation of the reference tube fitting and the reference tube diameter used depend upon the model of the SENTRY 1000-300 installed.
  • Page 25 Weight Kit Determine If Weight Installation is Required In order for the system to reach set points within its operating range, it may be necessary to install one or more weights (included). The number of weights required to reach a desired set point is installation dependent.
  • Page 26 SENTRY 1000-300 model may be too small for the intended application. Review the troubleshooting section of this manual for possible causes. Contact MKS Technical Support if additional help is required. Be sure to use the appropriate column and chart for the SENTRY model •...
  • Page 27 If the house exhaust pressure is not great enough, there are booster fans available from MKS to provide the necessary exhaust increase. Number of...
  • Page 28 Install the Weights (If Required) If it was determined from the above sections that weights are required, follow the steps below for weight installation. Notice Use care in handling during weight installation. Do not drop, scratch or use tools to pry apart the assembly. Remove the piston-cylinder assembly ...

  • Page 29: Operation

    Operation Introduction well as actual mass flow set point control and read back. The SENTRY 1000-300 mass flow controller is designed to maintain a constant flow from a The theory of operation for the mechanical process exhaust while compensating for regulation aspect of the product can be fluctuating facility exhaust conditions.

  • Page 30: Operation

    Operation Affect of Forces on the Piston Once the facility exhaust provides a sufficient static exhaust pressure, the •A upward force will become larger than the downward force. Once this occurs, > F there is an imbalance in the forces and the piston lifts and accelerates upwards due to the net upward force on the piston.

  • Page 31: Maintenance & Troubleshooting

    Preventative Maintenance (PM) Inspection & Cleaning Schedules All process environments and production usage vary greatly from site to site. Therefore, MKS recommends checking the SENTRY 1000-300 piston and canister for foreign material once every two weeks during the first quarter-year of operation, and quarterly thereafter. This check can be a visual inspection through the viewing window.

  • Page 32: Maintenance & Troubleshooting

    Facility exhaust low or Open all dampers, increase facility exhaust or achieved (low set point ok) dampers not fully open add MKS booster fan. Not enough weights attached Install the required number of weights to reach to piston or model too small desired set points.

  • Page 33: Appendix A: Specifications And Facility Requirements

    5 x 20mm fuse. The fuse is a 0.8 10-100 CFM 280-2800LPM Process Flow Rates 100CFM amp fuse (MKS P/N 12270). The TIM-100/120 UFSP relies AC Disconnect Device Physical: upon the process tool or house facility for AC mains disconnect...

  • Page 34: Appendix B: Dimensional Schematic

    7. Appendix B: Dimensional Schematic SENTRY 1000-300 Instruction Manual #122209...

  • Page 35: Appendix B: Dimensional Schematic

    8. Appendix B: Dimensional Schematic SENTRY 1000-300 (With 115 Volt Booster Fan) SENTRY 1000-300 (With 230 Volt Booster Fan) Instruction Manual #122209...

  • Page 36: Appendix C: System Grounding

    7. Appendix C: System Grounding Instruction Manual #122209...

  • Page 37: Appendix D Sentry Tim Parameters

    7. Appendix D SENTRY TIM Parameters SENTRY TIM Parameters Application: 100 CFM, SENTRY 1000-300 Software Version: G2.3 “Universal Fast Set Point” Version Default Value Note Version Default Value Note G2.3 X = Not Applicable G2.3 X = Not Applicable Menu R = Read Only Menu R = Read Only...
  • Page 38 Automated SENTRY™ 1000-300 Installation and Operation Manual Customer Service / Technical Support: MKS Global Headquarters 2 Tech Drive, Suite 201 Andover MA, 01810 USA Phone: +1-833-986-1686 Email: insidesales@mksinst.com Visit our website at: www.mksinst.com Instruction Manual part number 122209 Revision E – February 2020...

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