Setup Of The Motf; Programming - Omron CK5M-CPU1 1 Series Application Manual

3-3

Setup of the MOTF

3-3-1

Programming

Set up the MOTF. This document assumes that you use a low-pass filter with EMA (Exponential Mov-
ing Average) to sort a positioning command into low frequency components and high frequency com-
ponents.
The input/output equation for the EMA is shown below. Here, u(n) is the input signal at time n and y(n)
is the output signal.
y(n)=KdGain*u(n)+(1-KdGain)*y(n-1)
The following is a block diagram of the MOTF. The low frequency components of a command to an
axis that passed through the low-pass filter are input to the motor, whereas the remaining travel dis-
tance is input to the Galvo Scanner. This enables high stroke and high responsivity to be compatible.
X Axis
Y Axis
In the above diagram, KdGain is set to 0 or greater, but less than 1. To increase the cutoff frequency of
the low-pass filter, set KdGain to a larger value.
The table below shows the relationship between axes on devices and motor numbers in this docu-
ment.
Axes on devices
Machine
XY stage
Galvo Scanner
Focus unit
Virtual axis for TCR calculation #6
Application Guide Laser Application (O052)
KdGain(X)
KdGain(Y)
Motor number
Direction
X axis #1
Y axis #2
X axis #3
Y axis #4
Z axis #5
3 Connection Procedures
Linear Motor(X)
-1
Z
Linear Motor(Y)
-1
Z
3
Galvano
Motor(X)
Galvano
Motor(Y)
3-7