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Technical Information
High Vacuum Flange Connection
To connect the Turbo pump to the ISO inlet flange, position the centering ring and
then fix the two flanges with the clamps (P/N IC63250DCMZ or equivalent) or claws
as shown in the following figure.
Figure 92
For ConFlat flange connections we recommend using Agilent hardware.
To facilitate assembly and dismantling, apply Fel-pro C-100 high temperature
lubricant to the screw threads protruding from the flange and between the nuts and
flange.
Attach the units and tighten each one in turn. Repeat the sequential tightening until
the flange faces meet.
Exercise care when tightening nuts and bolts to avoid creating dents in the
CAUTION
envelope as this may cause the pump rotor to lock.
Agilent TPS-mobile User Manual
257
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