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Technical Information
Foreline Pumps Description
TPS-mobile can be equipped both with a dry pump (Scroll type) or with an oil sealed
Rotary Vane Pump. TPS-mobile versions equipped with a Scroll pump are free of
contaminating agents and therefore are suitable for applications requiring "clean"
vacuum.
TPS-mobile versions equipped with Scroll pumps are reported in
the "Description of the TPS-mobile" section.
The Scroll pump principle of operation is described here following.
Scroll pump creates vacuum using a simple dual scroll mechanism in which one of
the nested scrolls orbits about the other, creating moving zones of captured gas.
Gas enters the scroll set at the perimeter and is displaced and compressed toward
the center hub where it is exhausted.
Figure 86
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Agilent TPS-mobile User Manual
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