Pneumatic Valves And Manifold - Micromeritics 3Flex Service Manual

Gas Inlet Subsystem

Pneumatic Valves and Manifold

The 3Flex uses pneumatically operated air valves. They are metal VCR diaphragm valves with Kel-F
seats and require 90-100 psi of house air to operate. The pneumatic valve actuator assembly is located
in the lower portion of the cabinet.
When the pneumatic valve actuator(s) receives a signal to open the valve(s), it sends air to the
appropriate valve(s).
To Valve
From Actuator
2-16
Air supply
Valve Actuators
3Flex Service Manual
Enlarged view of
pneumatic assembly
Aug 2013