3Flex Service Manual
Upper Manifold Assembly
Shown below is a graphical representation of the upper manifold assembly. Refer to the table below
the graphic for component identification, as well as a link to additonal information for each componet.
This configuration may differ depending on whether the instrument has 1, 2, or 3 ports.
I
A
10-Torr manifold transducer
B
0-1-Torr transducers
C
10-Torr transducers
D
1000-Torr manifold transducer
E
Po port button-head transducer
F
Sample ports button-head transducers
G
Dual transducer PCBs
H
Heater assembly
I
Gas inlets
J
Turbo pump
K
Po port
L
Sample Ports
Aug 2013
B
B
B
C
A
C
E
D
K
J
See also
Sample and Po Transducers
See also
Analysis Transducer Interface PCB, P/N:
350-17705-011
See also
Gas Inlet Subsystem
See also
Vacuum Subsystem
See also
Sample and Po Ports
Upper Manifold Assembly
C
G
H
F
L
on page
2-20
on page
2-15
on page
2-13
on page
2-9
on page
2-10
2-7
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