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3Flex Service Manual
Analysis Subsystem
Heater/Fan Assembly
The upper manifold resides in a heated, insulated, temperature-controlled cabinet. The heater/fan
assembly is located at the upper right side just in front of the dual transducer PCBs. It controls and
maintains the temperature to 45 C, 0.05 C.
Vacuum Gauge
The Pirani-Cold Cathode dual vacuum gauge is connected to the embedded controller via RS-232 for
control and status communication.. and is located below the insulated portion of the analysis
subsystem. It reads down to E-8 mmHg and switches from Pirani to Cold Cathode somewhere around
4 or 5 E-4.
Vacuum valve
Aug 2013
2-11
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