MKS 109030112 Manuals

Manuals and User Guides for MKS 109030112. We have 1 MKS 109030112 manual available for free PDF download: Instruction Manual

MKS 109030112 Instruction Manual

MKS 109030112 Instruction Manual (40 pages)

Inverted Magnetron Cold Cathode Ionization Vacuum Sensor

Brand: MKS | Category: Measuring Instruments | Size: 0 MB

Table of Contents

Table of Contents
5
Chapter 1 General Information

7
- Receiving Inspection
  7
- International Shipment
  7
- Warranty
  7
- Certification
  7
- Customer Service / Technical Support
  8
Chapter 2 Safety

9
- Safety Introduction
  9
- Responsibility
  10
- Grounding Requirements
  11
- High Voltage
  12
- Over Pressure Conditions
  13
- Damage Requiring Service
  14
Chapter 3 Specifications

15
- General Description
  15
- Intended Use
  15
- Improper Use
  15
- Transportation
  15
- Storage
  15
- Specifications
  16
- Dimensions
  17
Chapter 4 Installation

19
Chapter 5 Operation

23
- Introduction
  23
- Theory of a Cold Cathode Ionization Sensor
  24
- Starting the 903 Sensor
  25
- Reading Pressure
  25
- Equation for Converting Voltage to Pressure
  26
- Vacuum Indicator
  26
- Venting to Atmosphere
  27
- Analog-To-Digital (A/D) Converter
  27
- Using the 903 Sensor with Other Gases
  27
- Calibrating for Other Gases
  28
Chapter 6 Service & Maintenance

29
- Introduction
  29
- Service Guidelines
  29
- Damage Requiring Service
  30
- Troubleshooting
  31
- Inspect and Clean the Sensor
  31
- Disassembly
  31
- Cleaning
  33
- Assembly
  33
- Accessories and Spare Parts
  34
- Bakeout the Sensor
  35
- Leak Detection
  35
- Customer Service / Technical Support
  35
Chapter 7 Index

37

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