Ulvac C10T Manuals

Manuals and User Guides for Ulvac C10T. We have 1 Ulvac C10T manual available for free PDF download: Instruction Manual

Ulvac C10T Instruction Manual

Ulvac C10T Instruction Manual (56 pages)

Brand: Ulvac | Category: Air Compressor | Size: 1 MB

Table of Contents

Table of Contents
9
Safety Instructions
11
Disposal Considerations
15
Compressor Unit Description
17
General
17
Specifications
17
Table 1-1 Compressor Unit Standard Specifications
17
Figure 1-1 Dimensions
19
Major Components
20
Inspection
21
Shipping List
21
Table 2-1 Shipping List
21
Table 2-2 Optional Parts
21
Compressor
22
Connecting Piping (Flexible Hose)
22
Cables
22
Installation
23
Figure 3-1 Maintenance Space(Unit: MM)
23
Installation
24
Connecting Cooling Water Piping
24
Cooling Water
24
Figure 3-2 Cooling Water Requirement
26
Connecting the Compressor Unit to the Cryopump
27
Figure 3-3 Connecting Flexible Hose
28
Connecting Electrical Cables
29
Compressor Installation
30
Operation
31
Before Operation
31
Normal Operation
31
Disconnection and Storage
33
Disconnecting Flexible Hose
33
Storage
34
Figure 5-1 Disconnecting Flexible Hose
34
Maintenance
37
Scheduled and Unscheduled Maintenance
37
Charging Helium Gas
37
Charging Helium Gas
40
Table A-1 Troubleshooting Procedures
41
Table A-2 Operating Log
43
Appendix B Schematic Diagram
45
Appendix C Flexible Hose
49
Appendix D Flow Diagram
51
Figure D-1 C10T Flow Diagram
52

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