Ulvac C15T Manuals

Manuals and User Guides for Ulvac C15T. We have 1 Ulvac C15T manual available for free PDF download: Instruction Manual

Ulvac C15T Instruction Manual

Ulvac C15T Instruction Manual (63 pages)

Brand: Ulvac | Category: Air Compressor | Size: 2 MB

Table of Contents

Table of Contents
9
Safety Instructions
11
Disposal Considerations
15
Compressor Unit Description
17
General
17
Specifications
17
Table 1-1 Compressor Unit Standard Specifications
17
Figure 1-1 Dimensions
19
Figure 1-2 Major Components
20
Inspection
23
Shipping List
23
Inspect Compressor Unit
23
Table 2-1 Shipping List
23
Table 2-2 Optional Parts
23
Inspect Flexible Hoses
24
Inspect Cables
24
Installation
25
Figure 3-1 Maintenance Space(Unit: MM)
25
Installation
26
Connecting Cooling Water Piping
26
Cooling Water
26
Connecting the Compressor Unit to the Cryopump
29
Connecting Electrical Cables
31
Operation
33
Before Operation
33
Normal Operation
33
Disconnection and Storage
35
Disconnecting Flexible Hose
35
Storage
36
Figure 5-1 Disconnecting Flexible Hose
36
Maintenance
39
Scheduled and Unscheduled Maintenance
39
Adsorber Replacement
39
Charging Helium Gas
43
Table A-1 Troubleshooting Procedures
47
Table A-2 Operating Log
49
Appendix Bcircuit DIAGRAM
51
Appendix Cflexible HOSE
56
Appendix Dflow DIAGRAM
58
Service Network
60

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