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Instruction Manual
EL-FLOW® Prestige series
Thermal Mass Flow Meters/Controllers
Doc. no.: 9.17.084 rev. N
Date: 23-09-2020
ATTENTION
Please read this document carefully before installing and operating the product.
Not following the guidelines could result in personal injury and/or damage to the equipment.
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Table of Contents
Related Manuals for BRONKHORST EL-FLOW Prestige Series
Summary of Contents for BRONKHORST EL-FLOW Prestige Series
- Page 1 Instruction Manual EL-FLOW® Prestige series Thermal Mass Flow Meters/Controllers Doc. no.: 9.17.084 rev. N Date: 23-09-2020 ATTENTION Please read this document carefully before installing and operating the product. Not following the guidelines could result in personal injury and/or damage to the equipment.
- Page 2 Check the outside packaging box for damage incurred during shipment. If the box is damaged, the local carrier must be notified at once regarding his liability, if so required. At the same time a report should be submitted to your Bronkhorst representative.
- Page 3 Bronkhorst® Warranty Bronkhorst® products are warranted against defects in material and workmanship for a period of three years from the date of shipment, provided they are used in accordance with the ordering specifications and not subject to abuse or physical damage.
- Page 4 Bronkhorst® Instruction Manual EL-FLOW® Prestige 9.17.084N...
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Page 5: Table Of Contents
Bronkhorst® Table of contents Introduction ......................7 Scope of this manual . - Page 6 Bronkhorst® LED indications ......................27 Micro switch functions .
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Page 7: Introduction
Material Safety Data Sheets of the media to be used in the system (if applicable). Bronkhorst High-Tech B.V. cannot be held liable for any damage resulting from improper or unsafe use, use for other than the intended purpose or use with other media and/or under other conditions than specified on the purchase order. -
Page 8: El-Flow® Prestige Pi
RS232 communication, there are such options as RS485 communication, digital frequency/pulse output, alarm output/reset, valve purge/close and analog valve output. Furthermore Bronkhorst offers various integrated fieldbus options: DeviceNet™, PROFIBUS DP, Modbus RTU/ASCII, EtherCAT®, PROFINET and FLOW-BUS. -
Page 9: Documentation
The EL-FLOW® Prestige comes with all necessary documentation for basic operation and maintenance. Some parts of this manual refer to other documents, most of which can be downloaded from the Bronkhorst website. A calibration certificate for each ordered instrument is part of the scope of delivery. -
Page 10: Model Key
Bronkhorst® Model key The model key on the serial number label contains information about the technical properties of the instrument as ordered. The actual properties of your instrument can be retrieved from the diagram below. See section Customized I/O options (pin 5) for more information about the pin-5 configuration options. -
Page 11: Starting Up
· Valve type (NC = Normally Closed, NO = Normally Open) Operating conditions Test pressure Bronkhorst® instruments are pressure tested to at least 1.5 times the specified operating pressure and outboard leak tested to at least 2 * 10 mbar l/s Helium. -
Page 12: Piping Requirements
Bronkhorst® Piping requirements For reliable performance, make sure the fluid stream is uncontaminated. If necessary, use filters to assure a moisture, oil and particle free gas stream (recommended pore size: 5 µm). If back flow can occur, the use of a downstream filter and check valve is also recommended. -
Page 13: Analog / Digital Communication
Connecting the instrument with an RS232 cable or an RS232 cable with an RS232 to USB converter to a PC enables the use of the (free) Bronkhorst® FlowWare software for Windows, such as FlowDDE and FlowPlot. Make sure that the serial number label indicates RS232 settings for the 9-pin D-sub connector and apply the proper baud rate settings. -
Page 14: Micro Switch Operation
Inexpertly servicing instruments can lead to serious personal injury and/or damage to the instrument or the system it is used in. Servicing must therefore be performed by trained and qualified personnel. Contact your Bronkhorst representative for information about cleaning and calibration. Bronkhorst has a trained staff available. -
Page 15: Basic Operation
Bronkhorst® Basic operation Mass flow measurement and control After correct installation of the EL-FLOW® Prestige Mass Flow Meter (MFM) or Mass Flow Controller (MFC) and when all safety precautions have been taken into account the instrument can immediately be used for measuring/ controlling the required flow rate in the system by means of the selected communication interface(s). - Page 16 When switching to another fluid set, controller settings are automatically adjusted to the new process conditions, so there is no need to change PID controller settings manually. The FlowTune™ software and the associated documentation can be downloaded from the product pages on the Bronkhorst website: www.bronkhorst.com/products Note regarding instruments with active pressure compensation: For EL-FLOW®...
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Page 17: Valve Safe State
Bronkhorst® 3.1.2 Valve Safe State When a controlling instrument is not powered or cannot communicate with the fieldbus network (if applicable), the control valve automatically returns to its default state (also called Safe State), which is closed for a 'normally closed' valve (n/c) and fully open for a 'normally open' valve (n/o). -
Page 18: Analog Operation
Bronkhorst® Model key 2. Fieldbus (top connector) (example: none) Customized I/O setting (pin 5) 4. Analog interface (pin 2, 3) (example: inactive setpoint source, measure always available) 5. Digital interface (pin 1, 6) (example: RS232, active setpoint source) 6. Side connector digital interface settings (protocol, medium, baud rate, parity) -
Page 19: Cabling
· For more information about communication through the RS-232 interface, consult the RS-232 manual (document no. 9.17.027). · The FlowWare tools and accompanying documentation can be downloaded from the Accessories and software section on the Bronkhorst® product pages (www.bronkhorst.com/products). 9.17.084N Instruction Manual EL-FLOW® Prestige... -
Page 20: Rs232 Communication Powered By Fieldbus
Bronkhorst® instruments. If you need assistance with setting up a fieldbus system, contactyour Bronkhorst representative for information. 3.4.1.3 E-8000 power supply, readout and control Using an E-8000 module, instruments can be powered (100…240 Vac) and operated via RS-... -
Page 21: Bright Readout And Control
3.4.2 FlowDDE Digital Bronkhorst® instruments can be operated via RS-232 using the Bronkhorst® FlowDDE server application. Dynamic Data Exchange (DDE) provides a basic level of inter process communication between Windows applications. Together with a client application, either self-made or with a third party SCADA program, it is possible to create an easy way of data exchange between the flow meter/controller and a Windows application. -
Page 22: Software (Dde Applications)
DDE are for example MS-Office, LabVIEW, InTouch and Wizcon. Bronkhorst® software applications 'FlowView' (left) and 'FlowPlot' (right) FlowDDE and other Bronkhorst® applications are available on the support CD or can be downloaded from the product pages on the Bronkhorst website: www.bronkhorst.com/products 3.4.4... -
Page 23: Basic Rs485 Operation (Flow-Bus/Modbus)
9-pin D-sub side connector is set for FLOW-BUS or Modbus communication. The serial number label indicates the factory settings of the connector pinning. FLOW-BUS FLOW-BUS is a Bronkhorst® designed fieldbus, based on RS-485 technology, for digital communication between devices, offering the possibility of host-control by a Windows computer. Characteristics: ·... -
Page 24: Cabling
Bronkhorst® 3.5.1 Cabling This section shows cabling examples of some EL-FLOW® Prestige instruments in an RS485 fieldbus system. Note that many other fieldbus configurations are possible, contact your local sales representative for more information. Please check the total power consumption of your instruments and do not exceed the maximum power of the power supply. -
Page 25: Software
When using a Windows computer to communicate with EL-FLOW® Prestige instruments, only the ProPar protocol (used by FLOW-BUS) is supported by Bronkhorst® software. When using Modbus operation, software from third parties, such as LabVIEW, ModScan or a Modbus PLC must be used to serve as Modbus master. -
Page 26: Other Fieldbus Configurations
The DeviceNet™ interface offers a direct connection to a DeviceNet™ network, according to the mass flow controller profile specified by the ODVA. The Bronkhorst® DeviceNet™ instrument is a Group 2 Only Server device whose messages comply with the Controlled Area Network (CAN) 2.0A standard and with the DeviceNet™ protocol. -
Page 27: Baud Rate, Node Address And Parity Setup
Changing EtherCAT® Second Address EtherCAT® supports the use of a Second Address. Bronkhorst® instruments have 3 rotary switches, with which a Second Address can be set in the range of 0 – 4095 (0xFFF). This value of the rotary switches will be copied to the Configured Station Alias register (address 0x0012:0x0013) at instrument start-up. - Page 28 Bronkhorst® Ethernet indicators RJ-45 connection sockets on instruments with a EtherCAT® or PROFINET interface have two integrated LED indicators, with standard Ethernet functionality: Amber: Ethernet speed Green: Ethernet link/activity The tables below list the different LED indications: •...
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Page 29: Micro Switch Functions
Bronkhorst® • • Green and red (alternating) Pattern Time Indication slow wink 1 sec on, Alarm indication; minimum/maximum alarm, power-up alarm, limit reached or batch 1 sec off size reached normal wink 0.2 sec on, Wink mode; by sending a command to the Wink parameter, the instrument flashes its 0.2 sec off... -
Page 30: Power-Up Functions
Bronkhorst® 3.8.2 Power-up functions · In order to access these functions, press and hold the switch while powering up the instrument. · As long as the switch is held, the LEDs show a repeating sequence of patterns, where each pattern indicates a function. -
Page 31: Network Settings - Readout/Change
Bronkhorst® To execute a step, follow these instructions: · Press and hold the switch (flashing slows) · To select value 0 (zero), release the switch within 1 second, otherwise: · Count the number of LED flashes · Release the switch when the required value is reached ·... -
Page 32: Basic Parameters And Properties
Basic parameters and properties This section describes the most common parameters for digital communication with the instrument. Digital parameters are most easily accessible via FlowPlot or FlowView software or a Bronkhorst® readout and control unit (E-8000 or BRIGHT). 3.9.1 General This section describes the most commonly used parameters for digital operation of the EL-FLOW®... -
Page 33: Measurement And Control (Basic)
Bronkhorst® Access Parameter value can be read Parameter value can be written Parameter is secured and only accepts values if parameter Init Reset is set to 'unlocked' first Range Some parameters only accept values within a certain range: Minimum value of the range... -
Page 34: Secondary Outputs
BHT Model Number Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char[35] RW 113/2 0xF110…0xF117/ 61713…61720 This parameter shows the Bronkhorst® instrument model type information. Firmware Version Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char[6] 113/5 0xF128…0xF12A/ 61737…61739 Revision number of the firmware Instruction Manual EL-FLOW®... -
Page 35: Alarms And Counter
Adjusting zero point The zero point (the signal that corresponds to zero flow) of a Bronkhorst® flow meter/controller is factory adjusted at approximately 20 °C and atmospheric pressure, with the instrument in an upright position. If the ambient conditions or mounting position are significantly different, the instrument might detect a flow when actually there is none. -
Page 36: 3.10.2 Digital Procedure
Bronkhorst® 3.10.2 Digital procedure FlowPlot provides an easy way to adjust the zero point of an instrument via RS-232; the Auto zero function automatically performs the procedure described here To adjust the zero point using digital communication, set parameter values in the following sequence (see section... -
Page 37: Advanced Operation
When in doubt, do not hesitate to contact your Bronkhorst representative for more information. The table below lists compatibility with some commonly used gases: Sealing material Viton®... -
Page 38: Advanced Parameters And Properties
Bronkhorst® Advanced parameters and properties 4.2.1 Measurement and control (advanced) Fmeasure Type Access Range FlowDDE FLOW-BUS Modbus Float -3.4E+38… 33/0 0xA100…0xA101/ 41217…41218 3.4E+38 Floating point variant of Measure. Fmeasure shows the measured value in the capacity unit for which the instrument is set. -
Page 39: Special Parameters
Bronkhorst® 4.2.2 Special parameters Init Reset Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char 82/64 0/10 0x000A/11 Init Reset is used to unlock secured parameters (marked with a symbol) for writing. It supports the following values: Value Description unlocked, secured parameters can be read and written to locked, secured parameters are read-only At power-up, Init Reset is always set to ‘Locked’... -
Page 40: Fluid Set
When in doubt, consult your Bronkhorst representative. Fluid Set Index... - Page 41 Bronkhorst® Capacity Type Access Range FlowDDE FLOW-BUS Modbus Float RW 1E-10… 1/13 0x8168…0x8169/33129…33130 1E+10 This parameter sets the maximum readout/control value (100%) for the current fluid in readout units corresponding to Capacity Unit. Capacity Unit Type Access Range FlowDDE...
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Page 42: Advanced Fluid Set Parameters
Bronkhorst® 4.2.3.1 Advanced fluid set parameters Note that the parameters described in this section do not contain any actual measurement values, but only fixed reference values, which can be used for capacity calculations, etc. Inlet Pressure Type Access Range FlowDDE... -
Page 43: Fluid Mixture Parameters
Bronkhorst® 4.2.3.2 Fluid mixture parameters Mix Fraction Type Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char RW 0…2 126/4 0x0FC4/4037 Set the fraction type of the mixture: Value Description Volume fraction Mass fraction Mole fraction Mix Volume Temperature Type... -
Page 44: Alarms
Bronkhorst® 4.2.4 Alarms Alarm settings are most easily accessible using FlowPlot or FlowView or a Bronkhorst® readout and control unit. The built-in alarm functionality can be used to handle different alarm types: · system errors and warnings · min/max alarms ·... -
Page 45: Counter
Multifunctional switch Externally (deprecated) By parameter Reset Automatically (when alarm conditions no longer apply) 4.2.5 Counter Counter settings are most easily accessible using FlowPlot or FlowView or a Bronkhorst® readout and control unit. Counter Mode Type Access Range FlowDDE FLOW-BUS... - Page 46 Bronkhorst® Available modes: Value Description Counter off (default) Counting up continuously Counting up until limit reached (set by Counter Limit) Counter Unit Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char[4] see table 104/7 0xE838…0xE839/59449…59450 below This parameter contains the name of the counter readout unit.
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Page 47: Network Configuration
Bronkhorst® Reset Counter Enable Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char 0…15 104/9 0x0D09/3338 Available reset methods for counters. Up to 3 different methods can be specified. The value is a bitwise summation of the enabled reset methods; convert the value to binary to see which methods are enabled. -
Page 48: Master/Slave Configuration (Flow-Bus)
Bronkhorst® Fieldbus 2 Baud Rate Type Access Range FlowDDE FLOW-BUS Modbus Unsigned long RW 0…1.0E10 124/9 0xFC48…0xFC49/64585…64586 Fieldbus 2 Parity Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char RW 0…2 124/12 0x0F8C/3981 The following values are supported: Value... -
Page 49: Special Features
Bronkhorst® Special features 4.3.1 Customized I/O options (pin 5) EL-FLOW® Prestige instruments offer several customized input/output functions through the 9-pin D-sub side connector as an option. I/O options are factory installed as specified at ordering time, and cannot be changed manually. - Page 50 Bronkhorst® Code Description Digital output, high/low switch via remote parameter (e.g. for shut-off valve control) Pin 5 is pulled down to 0 Vdc when writing value 1 to parameter IO switch status, this is undone by writing value 0. A device connected to pin 5 (e.g. a shut-off valve) can be activated/deactivated by writing parameter IO switch status.
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Page 51: Changing Default Control Mode
Bronkhorst® 4.3.2 Changing default control mode IO Status Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char RW 0…255 114/11 0x0E4B/3660 The instrument is set to accept a setpoint from either an analog or a digital source. Although this setting can be changed... -
Page 52: Troubleshooting And Service
Energizing and de-energizing the equipment can indicate whether there is an electronic failure. After energizing, control behavior can be checked by applying fluid pressure. If you suspect leakage, do not disassemble the device for inspection, but contact your Bronkhorst representative for service or repairs. -
Page 53: Common Issues
Bronkhorst® Common issues Symptom Possible cause Action No power (LEDs not burning) No power supply Check power supply Check cable connection Internal fuse blown due to long lasting Return to factory shortage Zero output signal No setpoint accepted, incorrect control... -
Page 54: Service
Bronkhorst® Service For current information about Bronkhorst® and service addresses, please visit our website: www.bronkhorst.com Do you have any questions about our products? Our Sales Department will gladly assist you selecting the right product for your application. Contact sales by e-mail: ›... -
Page 55: Returns
All Bronkhorst® products covered by the WEEE directive (the majority) carry an image of a crossed-out waste bin (usually on the serial number label). If you wish to dispose of Bronkhorst® equipment bearing this... - Page 56 Bronkhorst® Instruction Manual EL-FLOW® Prestige 9.17.084N...
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Page 57: Parameter Index
Bronkhorst® Mix Fraction Type Parameter index Mix Volume Pressure Parameters Mix Volume Temperature Parameters - Master/Slave Parameters - Alarms Master Node Alarm Delay Time Slave Factor Alarm Info Parameters - Measurement and control Alarm Maximum Limit Analog Input Alarm Minimum Limit...