Sensor Head - Omron ZX2 Manual

Sensor Head

Sensor Heads for Various Applications-select
the Range and Type of Beam
New Regular-reflective Sensor Head Designed for Optimal Wafer Measurement
ZX2-LD50L
Line beam type
ZX2-LD50
Spot beam type
• 50 mm ±10 mm
Measurement range
• 1.5µm
Resolution
• ±0.05%F.S.
Linearity Line beam
±0.10%F.S.
Spot beam
•
Approx.60µm×2.6mm
Beam size Line beam
Approx.60µm dia.
Spot beam
Spot beam
Precise measurement on
micro-scale objects
Reliable measurements in harsh environments
IP67, robot cable
& temperature characteristic 0.02% F.S./°C
IP67 protection class enables to use the sensor in harsh
environments. A robot cable is used as standard between the
head and amplifier, that the unit can be used reliably on moving
parts. In addition, as 3D UV bond is used to fix the optical
components rather than screws, stress can be controlled and a
temperature characteristic 0.02% F.S./°C* is realized.
* If the room temperature varies 1°C, the measured value varies 0.02% F.S.
(corresponding to 4µm for the Model ZX2-LD50)
Compact sensor for easy mounting
World smallest*
The world's smallest CMOS laser displacement sensor
head is realized in a resin case. Enables to mount the
sensor in smallest spaces and to minimize measure-
ment errors arising from temperature fluctuations.
* According to OMRON investigation of CMOS laser
displacement sensors performed in September 2010.
ZX2-LD50V
Spot beam type
(regular-reflective)
48 mm ±5 mm
•
Measurement range
1.5µm
•
Resolution
*1
•
Linearity Spot beam
*1 •
Beam size Spot beam
Regular-reflective
Stable wafer
measurement
Cable can be
fed through
from the back
22.6mm
ZX2-LD100L
ZX2-LD100
•
Measurement range
•
Resolution
±0.3%F.S.
•
Linearity
Approx.60µm dia.
•
Beam size
Line beam
Stable measurement on
rough-surfaced objects
*1 Using 40 to 50mm
*2 Using 65 to 100mm
35.5mm
47. 47.5mm 47.5mm mm
ZX2
Line beam type
Spot beam type
100 mm ±35 mm
5µm
±0.05%F.S.
*2
Line beam
±0.10%F.S.
*2
Spot beam
Approx.110µm×2.7mm
Line beam
Approx.110µm dia.
Spot beam
3