PI A-311.F Series User Manual

PI A-311.F Series User Manual

Piglide compact planar xy air bearing stage

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User Manual
A311D0002 Rev 2.0
11-Nov-2021
A-311.F & G Series
PIglide Compact Planar XY Air Bearing Stage
Linear Motor Driven with Encoder Feedback
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: air@pi-usa.us
Page 1 of 26

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  • Page 1 A311D0002 Rev 2.0 11-Nov-2021 A-311.F & G Series PIglide Compact Planar XY Air Bearing Stage Linear Motor Driven with Encoder Feedback Page 1 of 26 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us...
  • Page 2 PI owns the following patents or patent applications for the technology field Magnetic Direct Drives (PIMag®): WO212146709A2, DE102012207082A1 © 2021 PI (Physik Instrumente) L.P. The text, photographs and drawings in this manual are protected by copyright. With regard thereto, PI (Physik Instrumente) L.P. retains all the rights. Use of said text, photographs and drawings is permitted only in part and only upon citation of the source.
  • Page 3: Table Of Contents

    Air & Vacuum Supply ______________________________________________________________ 15 6.5. Affixing the Payload to the Stage _____________________________________________________ 15 6.6. Connecting the Stage to Protective Earth ______________________________________________ 16 Page 3 of 26 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us...
  • Page 4 Figure 6 - Mounting of the protective earth conductor (profile view) __________________________________ 16 Figure 7 - A-311.F&G Series Stage Dimensions _________________________________________________ 24 Page 4 of 26 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506...
  • Page 5: About This Document

    Action consisting of one or several steps whose sequential order is ➢ irrelevant 1.3. Other Applicable Documents None at this time Page 5 of 26 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us...
  • Page 6: Safety

    Moving parts of the stage can cause crushing or shearing injuries. All personnel must remain clear of any moving parts. Page 6 of 26 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us...
  • Page 7 Dirt, oil, lubricants and condensation will damage the stage. Keep the stage clean and free of dirt, debris, oil, lubricants, and moisture. Page 7 of 26 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506...
  • Page 8: Organizational Measures

    1 = Standard motor F = 300mm x 300mm BiSS-C serial output 48 VDC nominal buss G = 300mm x 400mm Page 8 of 26 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us...
  • Page 9: Product Features

    5. Linear motor – upper axis 6. Moving beam 7. Encoder electrical connections 8. Motor electrical connections Air & Vacuum supply inlet ports Page 9 of 26 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us...
  • Page 10: Product Labeling

    A311D0002 User manual (this document) 3.5. Accessories & Cables The following accessories are offered to complement the A-311.F & G stageS. Contact PI for all available configurations. Part # Description Air Prep Kit (Filter & Regulation), with Vacuum Generation, Panel Mounted, A-805.28200...
  • Page 11: Compatible Controllers

    3.6. Compatible Controllers The A-311 must be connected to a suitable motion controller to be operated. The following standard controllers are available from PI to operate the A-311. Other controllers are also available, contact PI for options. Part # Description A-8xx.xxxxx...
  • Page 12: Unpacking And Handling

    Carefully unpack the air bearing stage and other components from the shipping packaging. Inspect the contents for signs of damage. If there is any sign of damage or missing parts, contact PI immediately. Compare the package contents to packing list and notify PI immediately if any parts are missing or incorrect. Keep all packaging materials in case the product needs to be returned.
  • Page 13: Installation

    Prepare the mounting surface and bottom of the stage base with precision flat stones to remove any burrs or high spots. Clean the mounting surface and bottom of the stage with the appropriate cleaners (isopropyl alcohol). Page 13 of 26 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506...
  • Page 14: Mounting Procedure

    Figure 4 - Shipping Lock Page 14 of 26 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506...
  • Page 15: Air & Vacuum Supply

    Prepare the payload mounting surface and the stage table with precision flat stones to remove any burrs or high spots. Clean the payload mounting surface and the stage table with the appropriate cleaners (isopropyl alcohol). Page 15 of 26 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506...
  • Page 16: Connecting The Stage To Protective Earth

    4. Make sure that the contact resistance at all connection points relevant for mounting the protective earth conductor is <0.1 Ω at 25 A. Page 16 of 26 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506...
  • Page 17: Connecting The Cables

    Connecting the Cables Stage interconnect cables are not in the scope of delivery of the A-311 series stage. However, PI offers several standard cable sets that can be used, depending on the motion controller being used. See Section 10.6 for connector pin assignments.
  • Page 18: Startup And Operation Of The Stage

    Note that the servo tuning values may need to be adjusted if the payload mass or size changes. If PI was not given user application information at the time of order, the servo was tuned with no payload mass.
  • Page 19: Maintenance

    Do not use cleaning agents other than isopropanol. Agents such as acetone or other detergents can damage certain parts of the stage. Page 19 of 26 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506...
  • Page 20: Preparing The Stage For Transport

    The A-311 stage weighs up to 55 kg in its largest size. Use care when lifting and use two people to lift. Page 20 of 26 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506...
  • Page 21: Customer Service

    User Manual A311D0002 Rev 2.0 11-Nov-2021 Customer Service For inquiries and orders, contact your PI sales engineer or use the following contacts: Email: air@pi-usa.us Address: 16 Albert Street, Auburn, MA 01501, USA Tel: 508-832-3456 Fax: 508-832-0506 If you have questions concerning your system, have the following information ready: ➢...
  • Page 22: Technical Data

    User Manual A311D0002 Rev 2.0 11-Nov-2021 Technical Data See the PI website for latest published specifications. 10.1. Basic Specifications Model A-311.FB1 A-311.GB1 300 mm x 400 mm (nominal) Travel 300 mm x 300 mm (nominal) Drive System Brushless ironless linear servo motor, 3-phase...
  • Page 23: Motor Electrical Specifications

    For optimum performance, the stage should be operated at 20°C. Any deviation from this temperature could degrade the precision and performance of the stage. Any deviation outside the range shown above may damage the stage. Page 23 of 26 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506...
  • Page 24: Dimensions

    User Manual A311D0002 Rev 2.0 11-Nov-2021 10.5. Dimensions Figure 7 - A-311.F&G Series Stage Dimensions Page 24 of 26 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us...
  • Page 25: Electrical Connector Pin Assignments (At Stage Io Panel)

    Encoder CLK+ (MA+) Encoder CLK- (MA-) Encoder power Encoder power SLO+ Encoder Data+ (SLO+) SLO- Encoder Data- (SLO-) Encoder ground Page 25 of 26 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us...
  • Page 26: Ec Declaration Of Conformity

    Dispose of your old equipment according to international, national, and local rules and regulations. In order to fulfil its responsibility as the product manufacturer, Physik Instrumente (PI) GmbH & Co. KG undertakes environmentally correct disposal of all old PI equipment made available on the market after 13 August 2005 without charge.

This manual is also suitable for:

A-311.g seriesA-311.fb1A-311.gb1

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