Table 1-4: Pro225Sl/Sle Series Specifications (-0400 To -1000) - Aerotech PRO22SL Hardware Manual

PRO225SL/SLE Hardware Manual
Table 1-4: PRO225SL/SLE Series Specifications (-0400 to -1000)
Travel
(1)
Accuracy
Resolution
(Minimum
Incremental
Motion)
Bidirectional
(1)
Repeatability
Horizontal Straightness
Vertical Straightness
Pitch
Roll
Yaw
Maximum Speed
Maximum Acceleration
(5)
Load Capacity
Moving Mass
(with tabletop)
Stage Mass
(no motor)
Material
Mean Time Before Failure (MTBF)
1. Certified with -PL1 and -PL2 option.
2. Achieved with Aerotech rotary motor with amplified sine encoder.
3. Achieved with Aerotech rotary motor with 2500 counts/rev digital encoder.
4. Requires the selection of an applicable amplifier with sufficient voltage and current.
5. Axis orientation for on-axis loading is listed.
6. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is
payload and workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
7. Specifications listed are non-foldback kit options. Contact the factory for specifications when a foldback kit (-FBx) is
used.
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400 mm
Standard ±11 µm
SL
Calibrated ±1.5 µm
Standard ±12 µm
SLE
Calibrated
SL
SLE
SL
SLE ±0.5 µm
(1)
±4.5 µm
(1)
±4.5 µm
60 µrad
arc·sec)
60 µrad
arc·sec)
60 µrad
arc·sec)
(4)
220 mm/s
(4)
Horizontal
Vertical (Axial)
Side
SL
SLE
SL
SLE
-0400 -0500
500 mm
±13 µm
±2 µm
±14 µm
±1 µm ±1.5 µm
0.1 µm
0.05 µm (-E1/-E3 encoder), 0.2 µm (-E2 encoder), 1.0 µm (-E4
±0.5 µm
±5.5 µm
±5.5 µm
70 µrad
(12.4 (14.4
arc·sec)
70 µrad
(12.4 (14.4
arc·sec)
70 µrad
(12.4 (14.4
arc·sec)
220 mm/s 220 mm/s
Function of motor, amplifier, payload, and maximum axial load
26.9 kg 29.2 kg
27.8 kg 30.2 kg
Anodized Aluminum
20,000 Hours
1.3. Basic Specifications
-0600 -0800
600 mm 800 mm
±15 µm ±17 µm
±2 µm ±2.5 µm
±15.5 µm ±17 µm
±1.5 µm ±1.5 µm
(2) (3)
, 1.0 µm
encoder)
±1 µm
±0.5 µm ±0.75 µm
±6.5 µm ±8 µm
±6.5 µm ±8 µm
80 µrad 90 µrad
(16.5 (18.6
arc·sec) arc·sec)
80 µrad 90 µrad
(16.5 (18.6
arc·sec) arc·sec)
80 µrad 90 µrad
(16.5 (18.6
arc·sec) arc·sec)
220 mm/s
100 kg
60 kg
100 kg
7.3 kg
7.5 kg
31.5 kg 36.2 kg
32.6 kg 37.5 kg
-1000
1000 mm
±18 µm
±3 µm
±18 µm
±1.5 µm
±0.75 µm
±9.5 µm
±9.5 µm
110 µrad
(22.7
arc·sec)
110 µrad
(22.7
arc·sec)
110 µrad
(22.7
arc·sec)
140 mm/s
40.9 kg
42.3 kg
17