Aerotech PRO22SL Hardware Manual page 60

Index
serial number
shimming
Solution
Specifications
BM250 Motor
BMS280 Motor
Brake
Encoder
Hall-Effect Sensors
Limit Switch
Linear Encoder
Rotary Encoder
Thermistor Specifications
stabilizing stage
stage
distortion
stabilizing
standoffs
Symptom
Table of Contents
Temperature Effects
thermal expansion coefficient
Thermistor Specifications
torque
Troubleshooting
Unpacking and Handling the Stage
vacuum guidelines
vacuum lubricant (Braycote 602EF)
Vacuum Operation
Vibration
Warnings
Warranty and Field Service
60
S
T
U
V
W
PRO225SL/SLE Hardware Manual
19
25
54
16
38
37
36
36
36
36
39
39
36
19
25
19
20
54
3
15
15
36
28
54
19
18
18
18
15
7
55
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