Aerotech PRO22SL Hardware Manual

Mechanical bearing, ball-screw stage
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PRO22SL and SLE Mechanical Bearing,
Ball-Screw Stage
HARDWARE MANUAL
Revision 2.00

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Summary of Contents for Aerotech PRO22SL

  • Page 1: Pro22Sl And Sle Mechanical Bearing, Ball-Screw Stage

    PRO22SL and SLE Mechanical Bearing, Ball-Screw Stage HARDWARE MANUAL Revision 2.00...
  • Page 2 This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies.
  • Page 3: Table Of Contents

    PRO225SL/SLE Hardware Manual Table of Contents Table of Contents PRO22SL and SLE Mechanical Bearing, Ball-Screw Stage Table of Contents List of Figures List of Tables Safety Procedures and Warnings EU Declaration of Incorporation Chapter 1: Overview 1.1. Environmental Specifications 1.2. Accuracy and Temperature Effects 1.3.
  • Page 4: List Of Figures

    Attach the Coupling Adapter to the Motor Shaft Figure 4-6: Attach the Motor the Stage Figure 4-7: Tighten the Shaft Coupling to the Drive Screw Figure 4-8: Foldback Motor Cover Removal Figure 4-9: Foldback Motor Part Callouts Figure 4-10: Lubricate the Pulley Flanges www.aerotech.com...
  • Page 5: List Of Tables

    Table 3-12: Limit Switch Specifications Table 3-13: Brake Specifications Table 3-14: PRO225SL/SLE Motor Specifications (BMS280) Table 3-15: PRO225SL/SLE Motor Specifications (BM250) Table 3-16: Rotary Encoder Specifications for PRO225SL/SLE Stages Table 3-17: Linear Encoder Specifications for PRO225SL/SLEE Stages Table 4-1: Hardware Requirements www.aerotech.com...
  • Page 6 List of Tables PRO225SL/SLE Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 7: Safety Procedures And Warnings

    To find the newest information about this product, refer to www.aerotech.com. If you do not understand the information in this manual, contact Aerotech Global Technical Support. IMPORTANT: This product has been designed for light industrial manufacturing or laboratory environments.
  • Page 8 DANGER: System travel can cause crush, shear, or pinch injuries. Restrict access to all motor and stage parts while your system is connected to a power source. Do not put yourself in the travel path of machinery. Motors are capable of very high speeds and acceleration rates. www.aerotech.com...
  • Page 9 Use it to shut down the drive if the motor overheats. Make sure that the product is securely mounted before you operate it. Use care when you move the PRO225SL/SLE or you could negatively affect the per- formance of it. WARNING: Securely mount and position all system cables. www.aerotech.com...
  • Page 10 Safety Procedures and Warnings PRO225SL/SLE Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 11: Eu Declaration Of Incorporation

    PRO225SL/SLE Hardware Manual EU Declaration of Incorporation EU Declaration of Incorporation Manufacturer Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: PRO225SL/SLE Linear Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;...
  • Page 12 EU Declaration of Incorporation PRO225SL/SLE Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 13: Chapter 1: Overview

    The specifications in this manual pertain to the second generation of PRO SL/SLE stages. Second generation stages can be distinguished from their first generation counterparts by the curved hardcover on the second generation. Contact Aerotech if you need a first generation manual. Table 1-1:...
  • Page 14 XY assembly; 5 arc sec orthogonality; alignment to within 3 µm orthogonality for short ALIGN-PA5 travel stages XZ or YZ assembly with L-bracket; 5 arc second orthogonality; alignment to within 5 µm ALIGN-PA5Z orthogonality for short travel stages HDZ225 Right angle L-bracket for 100 mm, 150 mm, and 200 mm travels only www.aerotech.com...
  • Page 15: Environmental Specifications

    Altitude Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level Contact Aerotech if your specific application involves use above 2,000 m or below sea level. Vibration Use the system in a low vibration environment. Excessive floor or acoustical vibration can affect system performance.
  • Page 16: Basic Specifications

    6. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications. 7. Specifications listed are non-foldback kit options. Contact the factory for specifications when a foldback kit (-FBx) is used.
  • Page 17: Table 1-4: Pro225Sl/Sle Series Specifications (-0400 To -1000)

    6. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications. 7. Specifications listed are non-foldback kit options. Contact the factory for specifications when a foldback kit (-FBx) is used.
  • Page 18: Vacuum Operation

    Teflon cables. Aerotech recommends that customers bake out vacuum systems when first installing them in the vacuum chamber. Contact Aerotech to discuss your application and the recommended bakeout procedure.
  • Page 19: Chapter 2: Installation

    Before you operate the stage, let it stabilize at room temperature for at least 12 hours. This will ensure that all of the alignments, preloads, and tolerances are the same as they were when they were tested at Aerotech. Each stage  has a label listing the system part number and serial number. These numbers contain information necessary for maintenance or system hardware and software updates.
  • Page 20: Figure 2-1: Lifting Features

    (see Figure 2-1). If the stage is part of a multi-axis system, the lifting hardware should be attached to the lower axis. The lifting hardware must be removed before the stage can be operated. Figure 2-1: Lifting Features www.aerotech.com...
  • Page 21: Dimensions

    PRO225SL/SLE Hardware Manual 2.2. Dimensions 2.2. Dimensions Figure 2-2: PRO225SL Dimensions www.aerotech.com...
  • Page 22: Figure 2-3: Pro225Sle Dimensions

    2.2. Dimensions PRO225SL/SLE Hardware Manual Figure 2-3: PRO225SLE Dimensions www.aerotech.com...
  • Page 23: Figure 2-4: Tabletop Accessory Dimensions (-Tt3 Option)

    PRO225SL/SLE Hardware Manual 2.2. Dimensions Figure 2-4: Tabletop Accessory Dimensions (-TT3 Option) www.aerotech.com...
  • Page 24: Figure 2-5: Z-Axis Bracket Dimensions

    2.2. Dimensions PRO225SL/SLE Hardware Manual Figure 2-5: Z-Axis Bracket Dimensions www.aerotech.com...
  • Page 25: Securing The Stage To The Mounting Surface

    Refer to Section 2.2. for mounting locations and dimensions. Table 2-2: Stage to Mounting Surface Hardware Mounting Hardware Typical Screw Torque M6 x 25 mm (or 1/4" x 1") SHCS with flat washers 7 N·m [5 ft·lb] www.aerotech.com...
  • Page 26: Attaching The Payload To The Stage

    If you start the PRO225SL/SLE without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur. Refer to the controller help file for tuning assistance.
  • Page 27: Figure 2-6: Stage Orientations

    PRO225SL/SLE Hardware Manual 2.4. Attaching the Payload to the Stage Figure 2-6: Stage Orientations Figure 2-7: Cantilevered Load Capability www.aerotech.com...
  • Page 28: Figure 2-8: Load Torque Equation

    Torque π (Efficiency) Figure 2-8: Load Torque Equation For PRO225SL/SLE series stages, the ball screw efficiency is rated at 90% (0.90). Refer to Section 1.3. Load Capacity specifications. Figure 2-9: Torque Required to Turn Ball Screw in Vertical Orientation www.aerotech.com...
  • Page 29: Chapter 3: Electrical Installation

    Electrical installation requirements will depend on the ordered product options. Installation instructions in this section are for Aerotech stages equipped with standard Aerotech motors intended for use with an Aerotech motion control system. Contact Aerotech for further information on products that are otherwise configured.
  • Page 30: Motor And Feedback Connectors

    IMPORTANT: Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech representative if there are any questions on system configuration. IMPORTANT: If you are using standard Aerotech motors and cables, motor and encoder connection adjustments are not required.
  • Page 31: Table 3-1: Brushless Motor Connector Pinout

    Motor Phase C Frame Ground (motor protective ground) Backshell Motor Cable Shield P/N:  MS3101A18-10P Table 3-2: Mating Connector Part Numbers for the Brushless Motor Connector Mating Connector Aerotech P/N Third Party P/N Plug MCM00475 Amphenol MS3106A18 Insert MCM00495 Amphenol 9718-10S...
  • Page 32: Table 3-5: Linear Encoder Connector Pinout (-Sle Only)

    Common ground Common ground Common ground Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Table 3-6: Mating Connector Part Numbers for the Encoder Connector Mating Connector Aerotech P/N Third Party P/N 25-Socket D-Connector ECK00300 FCI DB25S064TLF Backshell ECK00656 Amphenol 17E-1726-2 www.aerotech.com...
  • Page 33: Table 3-7: Limit Connector Wiring

    +Limit/CW (Positive/Clockwise Travel Limit) Home Limit -Limit/CCW (Negative/Counterclockwise Limit) Reserved Common ground Reserved Reserved Table 3-8: Mating Connector Part Numbers for the Limit Connector Mating Connector Aerotech P/N Third Party P/N 9-Pin D-Connector ECK00340 FCI DE09S064TLF Backshell ECK01021 Amphenol 17E-1724-2 www.aerotech.com...
  • Page 34: Motor And Feedback Wiring

    3.2. Motor and Feedback Wiring PRO225SL/SLE Hardware Manual 3.2. Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections. Figure 3-1: Brushless Motor and Feedback Wiring [-SL Option] www.aerotech.com...
  • Page 35: Figure 3-2: Brushless Motor And Feedback Wiring [-Sle Option]

    PRO225SL/SLE Hardware Manual 3.2. Motor and Feedback Wiring Figure 3-2: Brushless Motor and Feedback Wiring [-SLE Option] www.aerotech.com...
  • Page 36: Motor And Feedback Specifications

    Note: If the PRO225SL/SLE is driven beyond the electrical limit, it will encounter a mechanical stop. Impacting the mechanical stop could cause damage to the stage even at low speeds. Table 3-13: Brake Specifications Specification Supply Voltage 24 VDC Supply Current (typical) 500 mA Typical (current required to release the brake and allow motion) www.aerotech.com...
  • Page 37: Table 3-14: Pro225Sl/Sle Motor Specifications (Bms280)

    5. All performance and electrical specifications ±10% 6. Maximum winding temperature is 100 °C (thermistor trips at 100 °C) 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 8. All Aerotech amplifiers are rated A ;...
  • Page 38: Table 3-15: Pro225Sl/Sle Motor Specifications (Bm250)

    5. Torque constant and motor constant specified at stall 6. Maximum winding temperature is 130 °C 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 8. All Aerotech amplifiers are rated A ;...
  • Page 39: Table 3-16: Rotary Encoder Specifications For Pro225Sl/Sle Stages

    Digital Resolution Period 20 µm -E1 with x4000 Interpolation 20 µm 5 nm -E1 with x16000 Interpolation 20 µm 1.25 nm 20 µm 100 nm 1 nm 20 µm 0.5 µm 1. Quadrature decoding included in interpolated resolution calculations www.aerotech.com...
  • Page 40: Limits, Marker, And Machine Direction

    PRO225SL/SLE Hardware Manual 3.4. Limits, Marker, and Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring (refer Section 3.2.).
  • Page 41: Motor And Feedback Phasing

    PRO225SL/SLE Hardware Manual 3.5. Motor and Feedback Phasing 3.5. Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point. Figure 3-4: Hall Phasing Diagram www.aerotech.com...
  • Page 42: Figure 3-5: Encoder Phasing Reference Diagram (Standard/Square Wave)

    3.5. Motor and Feedback Phasing PRO225SL/SLE Hardware Manual Figure 3-5: Encoder Phasing Reference Diagram (Standard/Square Wave) Figure 3-6: Encoder Phasing Reference Diagram (Analog/Sine Wave) www.aerotech.com...
  • Page 43: Chapter 4: Maintenance

    Visually inspect the stage and cables. Re-tighten loose connectors. Replace or repair damaged cables. Clean the PRO225SL/SLE and any components and cables as needed. Repair any damage before operating the PRO225SL/SLE. Inspect and perform an operational check on all safeguards and protective devices. www.aerotech.com...
  • Page 44: Cleaning And Lubrication

    5. We recommend that you do not disassemble the stage beyond the instructions given in this manual. Proper assembly and calibration can only be done at the factory. Contact Aerotech for more information. For stages equipped with foldback motors, you should check the belt tension when you clean or lubricate the stage.
  • Page 45 9. Clean the linear bearing guides with a clean, lint-free cloth or swab. 10. Apply a thin, continuous film of lubricant to the ball-screw threads and linear bearing guides. Aerotech recommends that you use a good quality, natural bristle artist's brush.
  • Page 46: Figure 4-1: Hardcover Rear End Plate Removal

    4.2. Cleaning and Lubrication PRO225SL/SLE Hardware Manual Figure 4-1: Hardcover Rear End Plate Removal Figure 4-2: Hardcover Screw Removal www.aerotech.com...
  • Page 47: Figure 4-3: Hardcover Removal

    PRO225SL/SLE Hardware Manual 4.2. Cleaning and Lubrication Figure 4-3: Hardcover Removal www.aerotech.com...
  • Page 48: Motor Mounting

    4-4). Loctite products are printed with an expiration date. Before use, be sure that the expiration date is legible and the product has not expired. If your stage is used in a vacuum or cleanroom environment, contact Aerotech. Figure 4-4:...
  • Page 49: Figure 4-5: Attach The Coupling Adapter To The Motor Shaft

    6. Attach the Motor to the Stage in the correct orientation (Figure 4-6). Use a hex wrench to ensure that the motor flange is fully seated and the hardware is tight. The motor housing prevents the use of a torque wrench. Figure 4-6: Attach the Motor the Stage www.aerotech.com...
  • Page 50: Figure 4-7: Tighten The Shaft Coupling To The Drive Screw

    Tighten the Shaft Coupling to the Drive Screw 8. Rotate the drive screw by hand to ensure that the drive screw rotates freely. IMPORTANT: You must reapply Loctite to the mounting hardware if the Motor or Shaft Coupling screws are removed, adjusted, loosened, or replaced. www.aerotech.com...
  • Page 51: Belt Adjustment

    11. Check the pulley flanges for lubrication. 12. Add small amounts of Parker Super O-Lube lubricant around the circumference of both pulley flanges (Figure 4-10). 13. Replace the foldback cover and mounting screws. 14. Restore power to the stage and resume normal use. www.aerotech.com...
  • Page 52: Figure 4-8: Foldback Motor Cover Removal

    4.4. Belt Adjustment PRO225SL/SLE Hardware Manual Figure 4-8: Foldback Motor Cover Removal IMPORTANT: If the stage has been calibrated (-PL2 option), note the orientation of the two pulleys with regard to each other or recalibration might be required. www.aerotech.com...
  • Page 53: Figure 4-9: Foldback Motor Part Callouts

    PRO225SL/SLE Hardware Manual 4.4. Belt Adjustment Figure 4-9: Foldback Motor Part Callouts Figure 4-10: Lubricate the Pulley Flanges www.aerotech.com...
  • Page 54: Troubleshooting

    Chapter 3: Electrical Installation and Controller documentation). Stage moves uncontrollably Motor Connections (refer to Chapter 3: Electrical Installation and the Controller documentation). Gains misadjusted (refer to the Controller documentation). Stage oscillates or squeals Encoder signals (refer to the Controller documentation). www.aerotech.com...
  • Page 55: Appendix A: Warranty And Field Service

    Aerotech’s products are specifically designed and/or manufactured for buyer’s use or purpose. Aerotech’s liability on any claim for loss or damage arising out of the sale, resale, or use of any of its products shall in no event exceed the selling price of the unit.
  • Page 56 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for repair, and if Aerotech determines the problem could be warranty-related, then the following policy applies:...
  • Page 57: Appendix B: Revision History

    Updates have been made to: 2.00 Section 1.3. Basic Specifications Section 4.3. Motor Mounting 1.08 1.07 1.06 1.05 Revision changes have been archived. If you need a copy of this revision, contact 1.04 Aerotech Global Technical Support. 1.03 1.02 1.01 1.00 www.aerotech.com...
  • Page 58 Appendix B: Revision History PRO225SL/SLE Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 59: Index

    25-26 cleaning solvent securing stage MS3101A18-10P MS3102R20-29P Dimensions multiaxis combinations Directive 2006/42/EC part number Electrical Installation Possible Cause EN 60204-1 2010 Protection Rating EN ISO 12100 2010 protective ground connection Encoder Specifications EU 2015/863 eyebolts Rotary Encoder Specifications www.aerotech.com...
  • Page 60 Thermistor Specifications stabilizing stage stage distortion stabilizing standoffs Symptom Table of Contents Temperature Effects thermal expansion coefficient Thermistor Specifications torque Troubleshooting Unpacking and Handling the Stage vacuum guidelines vacuum lubricant (Braycote 602EF) Vacuum Operation Vibration Warnings Warranty and Field Service www.aerotech.com...

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