Basic Specifications; Table 1-3: Qnp3 Series Specifications - Aerotech QNP3 Series Hardware Manual

QNP3 Hardware Manual

1.4. Basic Specifications

Table 1-3: QNP3 Series Specifications
(1)
Specification
Closed-Loop Travel (X x Y x Z)
Open-Loop Travel, -30 to +150 V
(3)
Resolution
Closed-Loop
(3)
Resolution
Open-Loop
(4, 5)
Linearity
Bidirectional Repeatability
Straightness
2D Flatness (Over Full XY Travel)
Pitch
Yaw
(7)
Stiffness
(in direction of motion)
Unloaded Resonance of
(7)
Frequency
(7)
Resonant Frequency
(200 gram load)
(8)
Maximum Payload
(9)
Maximum Acceleration
(Unloaded)
Moving Mass (Unloaded)
Stage Mass
Material
Mean Time Between Failure
1. Specifications are per axis unless specified.
2. Value ±10%
3. Refer to Section C.4.2 Resolution
4. Certified with each stage (closed-loop feedback models only).
5. Measured approximately 15 mm above the carriage by an external metrology device. Refer to Section
for description of linearity specifications.
6. Specified as a 1 sigma (standard deviation) value. Refer to Section
repeatability.
7. Value ±20%
8. On-axis loading is listed.
9. Maximum acceleration listed is the stage mechanical limitation. Achievable acceleration is a function of amplifier selection and
move parameters.
10. External elements are anodized aluminum. Some internal components are stainless steel. Other materials upon request.
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100XYAZ-030-10
100 µm x 100 µm x
36 µm x 36 µm x
(2)
XY
Z
XY
Z
XY
Z
XY
(6)
Z
XY
Z
XY 10 µrad (2.1 arcsec)
Z 6 µrad (1.2 arcsec)
XY 5 µrad (1 arcsec)
Z 5 µrad (1 arcsec)
XY
Z
XY
Z
XY
Z
400 m/s
XY
2000 m/s
Z
XY
Z
for a description of resolution.
Chapter 1
100XYAZ-100-10
100 µm x 100 µm x
30 µm 10 µm
120 µm x 120 µm x
12 µm 12 µm
0.1 nm 0.30 nm
0.15 nm 0.15 nm
0.03 nm 0.15 nm
0.05 nm 0.05 nm
0.02% 0.01%
0.04% 0.02%
4 nm 2 nm
3 nm 1 nm
<25 nm <10 nm
<50 nm <20 nm
<10 nm <5 nm
2 µrad (0.4 arcsec)
6 µrad (1.2 arcsec)
10 µrad (2.1 arcsec)
5 µrad (1 arcsec)
10 N/µm 1.9 N/µm
25 N/µm 13 N/µm
1850 Hz 490 Hz
2200 Hz 1425 Hz
950 Hz 350 Hz
1390 Hz 910 Hz
1 kg 1 kg
2
115 m/s
2
2000 m/s
0.24 kg 0.21 kg
0.05 kg 0.05 kg
0.53 kg 0.56 kg
Anodized Aluminum
30,000 Hours
C.4.3 Repeatability for description of bidirectional
Overview
150XYAZ-200-20
200 µm x 200 µm x
20 µm
240 µm x 240 µm x
25 µm
0.40 nm
0.15 nm
0.20 nm
0.1 nm
0.01%
0.02%
2 nm
2 nm
10 nm
40 nm
<10 nm
2 µrad (0.4 arcsec)
6 µrad (1.2 arcsec)
20 µrad (4 arcsec)
6 µrad (1.2 arcsec)
1.3 N/µm
8.7 N/µm
330 Hz
910 Hz
260 Hz
670 Hz
3 kg
2
2
35 m/s
2 2
1000 m/s
0.58 kg
0.10 kg
1.3 kg
(10)
C.4.1 Accuracy/Linearity
13