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Related Manuals for Aerotech QNP3 Series
Summary of Contents for Aerotech QNP3 Series
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Page 1: Qnp3 Series Hardware Manual
QNP3 Series Hardware Manual Revision: 1.02.00... - Page 2 This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies.
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Page 3: Table Of Contents
QNP3 Hardware Manual Table of Contents Table of Contents QNP3 Series Hardware Manual Table of Contents List of Figures List of Tables Safety Procedures and Warnings EU Declaration of Conformity Chapter 1: Overview 1.1. Understanding Basic QNP3 Stage Operation 1.2. Environmental Specifications 1.3. -
Page 4: Table Of Contents
Table of Contents QNP3 Hardware Manual C.3.7.2 Temperature C.3.7.3 Vacuum C.4 Piezo Stage Properties and Nomenclature C.4.1 Accuracy/Linearity C.4.2 Resolution C.4.3 Repeatability C.4.4 Stiffness C.4.5 Resonant Frequency C.4.6 Load Ratings C.4.7 Expected Lifetime C.5 Amplifier Selection Index www.aerotech.com... -
Page 5: List Of Figures
Maximum sinusoidal peak-peak voltage of a given amplifier with various piezo stack capacitances Figure C-11: Voltage and current waveforms for the profile commanded in Example 1 Figure C-12: Voltage and current waveforms for the profile commanded in Example 2 www.aerotech.com... -
Page 6: List Of Tables
QNP3 Hardware Manual List of Tables Table 1-1: Model Numbers and Options Table 1-2: Minimum Acceptable Environmental Specifications Table 1-3: QNP3 Series Specifications Table 2-1: Stage to Mounting Surface Hardware Table 2-2: Customer Mounting Features Table 3-1: Piezo Connector Pin Description... -
Page 7: Safety Procedures And Warnings
Read this manual in its entirety before installing, operating, or servicing this product. If you do not understand the information contained herein, contact an Aerotech representative before proceeding. Strictly adhere to the statements given in this section and other handling, use, and operational information given throughout the manual to avoid injury to you and damage to the equipment. -
Page 8: Eu Declaration Of Conformity
Table of Contents QNP3 Hardware Manual EU Declaration of Conformity Manufacturer Aerotech, Inc. Address 101 Zeta Drive Pittsburgh, PA 15238-2811 Product QNP3 Model/Types This is to certify that the aforementioned product is in accordance with the applicable requirements of the... -
Page 9: Chapter 1: Overview
Overview Chapter 1: Overview N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. Refer to www.aerotech.com for the most up-to-date information. -
Page 10: Understanding Basic Qnp3 Stage Operation
Unless otherwise specified, QNP3 stages configured at Aerotech default to open-loop operation and must be commanded to enter closed-loop mode. By default, all open-loop motion commands control voltage and all closed-loop motion commands control position. -
Page 11: Environmental Specifications
Better control of the environment will yield better system performance. Contact Aerotech for more information regarding your specific application and environment. Humid environments are more detrimental to piezo actuators when they are held at high voltages for long periods of time. -
Page 12: Linearity And Temperature Effects
Section 2.3. to maintain the linearity measured at the factory. Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes could cause a decrease in performance or permanent damage to the QNP3. At a minimum, the environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the QNP3... -
Page 13: Basic Specifications
QNP3 Hardware Manual Overview 1.4. Basic Specifications Table 1-3: QNP3 Series Specifications Specification 100XYAZ-030-10 100XYAZ-100-10 150XYAZ-200-20 100 µm x 100 µm x 100 µm x 100 µm x 200 µm x 200 µm x Closed-Loop Travel (X x Y x Z) 30 µm... -
Page 14: Vacuum Operation
QNP3 Hardware Manual 1.5. Vacuum Operation Standard QNP3 stages are not designed to minimize outgassing in a vacuum environment. Aerotech can specially prepare any of the QNP3 stages for a wide range of vacuum environments. When using a QNP3 stage that has been specially prepared for vacuum environments several additional precautions must be taken to ensure proper operation. -
Page 15: Chapter 2: Mechanical Specifications And Installation
Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-less air to remove any dust or debris that has collected during shipping. -
Page 16: Dimensions
QNP3 Hardware Manual 2.2. Dimensions N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. - Page 17 QNP3 Hardware Manual Mechanical Specifications and Installation Figure 2-2: QNP3-100XYAZ-100-10 Dimensions www.aerotech.com Chapter 2...
- Page 18 Mechanical Specifications and Installation QNP3 Hardware Manual Figure 2-3: QNP3-150XYAZ-200-20 Dimensions Chapter 2 www.aerotech.com...
- Page 19 QNP3 Hardware Manual Mechanical Specifications and Installation Figure 2-4: QNP3-100XYAZ-030-10 Mounting Plate (-MP) Dimensions Figure 2-5: QNP3-100XYAZ-100-10 Mounting Plate (-MP) Dimensions Figure 2-6: QNP3-150XYAZ-200-20 Mounting Plate (-MP) Dimensions www.aerotech.com Chapter 2...
- Page 20 Mechanical Specifications and Installation QNP3 Hardware Manual Figure 2-7: QNP3-100XYAZ-030-10 Tabletop (-TT1) Dimensions Figure 2-8: QNP3-100XYAZ-100-10 Tabletop (-TT1) Dimensions Figure 2-9: QNP3-150XYAZ-200-20 Tabletop (-TT1) Dimensions Chapter 2 www.aerotech.com...
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Page 21: Securing The Stage To The Mounting Surface
QNP3. Shimming should be avoided if possible. If shimming is required, it should be minimized to retain maximum rigidity of the system. QNP3 series stages have a fixed mounting pattern as shown in Figure 2-10 Section 2.2. - Page 22 Mechanical Specifications and Installation QNP3 Hardware Manual Figure 2-10: Mounting Hole Locations Chapter 2 www.aerotech.com...
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Page 23: Attaching The Payload To The Stage
It is strongly recommended that stages with feedback be enabled with the servo off and adjusted according to the “Configuring the Servo Loop for a Piezo Stage” page in the Aerotech controller help documentation for all new payload configurations (this includes the no load configuration). -
Page 24: Table 2-2: Customer Mounting Features
Aerotech recommends determining the optimal acceleration for a given move experimentally with the help of advanced tools included with the Aerotech controller, such as the Digital Scope. Refer to controller documentation or contact Aerotech for more information. - Page 25 QNP3 Hardware Manual Mechanical Specifications and Installation Figure 2-11: Mounting Hole Locations (Tabletop) www.aerotech.com Chapter 2...
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Page 26: Cable Bend Radius
2.5. Cable Bend Radius The minimum static bend radius for a QNP3 main cable is 4 mm. Aerotech recommends that the cable not be used dynamically because it may affect linearity performance. If the piezo cable needs to pass through a dynamic cable chain, Aerotech recommends that the piezo stage cable be terminated before the cable chain and connected to an extension cable that routes through the cable chain. -
Page 27: Chapter 3: Electrical Specifications And Installation
W A R N I N G : Electrical installation must be performed by properly qualified personnel. Aerotech motion control systems are adjusted at the factory for optimum performance. When the QNP3 is part of a complete Aerotech motion control system, setup usually involves connecting a stage to the appropriate drive chassis with the cables provided. -
Page 28: Piezo Connectors
QNP3 Hardware Manual 3.1. Piezo Connectors N O T E : Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech representative if there are any questions on system configuration. The protective ground connection of the QNP3 grounds the entire stage frame to the common grounds on the stage connectors. -
Page 29: Table 3-1: Piezo Connector Pin Description
Piezo Actuator Return - Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Mating Connector Aerotech P/N Third Party P/N Backshell ECK01057 AMP 745173-4 Connector ECK00300 FCI DB25S064TLF www.aerotech.com Chapter 3... -
Page 30: Piezo Wiring
Electrical Specifications and Installation QNP3 Hardware Manual 3.2. Piezo Wiring Shielded cables are required for the piezo actuator connections. Figure 3-1: Piezo Actuator Wiring Chapter 3 www.aerotech.com... -
Page 31: Electrical Specifications
Electrical Specifications and Installation 3.3. Electrical Specifications N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. -
Page 32: Machine Direction
QNP3 Hardware Manual 3.4. Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and piezo signals and is dictated by the stage wiring. Programming direction of a stage is set by the controller that is used to move the stage. Programming direction is typically selectable in the controller, while machine direction is hardwired in the stage. -
Page 33: Travel Limits
They are only active when the stage is in closed-loop mode (SERVO ON). When the stage enters a limit, the controller will stop motion and return a limit fault. Refer to Aerotech controller documentation for more information on software limits. - Page 34 Electrical Specifications and Installation QNP3 Hardware Manual This page intentionally left blank. Chapter 3 www.aerotech.com...
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Page 35: Chapter 4: Maintenance
QNP3 Hardware Manual Maintenance Chapter 4: Maintenance The QNP3 series stages are designed to require minimum maintenance. This chapter will detail the cleaning process and specify recommended cleaning solvents. 4.1. Service and Inspection Schedule D A N G E R : To minimize the possibility of bodily injury or death, disconnect all electrical power prior to performing any maintenance or making adjustments to the equipment. -
Page 36: Poling The Piezo Actuator
1. Connect the stage to its drive electronics in accordance with the procedures in Chapter 2. Enable the stage in open-loop (servo off mode) at 0 V. 3. Drive the stage to 150 V. Hold for 10 seconds. 4. Drive the stage back to 0 V. 5. Resume normal operation. Chapter 4 www.aerotech.com... -
Page 37: Troubleshooting
Stage travel has shifted because of a heavy load condition. Run the Stage disables or faults AbsoluteFeedbackOffset Calculator to center the stage in its working range. inside normal closed- Travel limits are configured incorrectly in the controller. Consult Aerotech loop travel range for proper limit settings. www.aerotech.com... - Page 38 Maintenance QNP3 Hardware Manual This page intentionally left blank. Chapter 4 www.aerotech.com...
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Page 39: Appendix A: Warranty And Field Service
Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer, whether or not such use or purpose has been disclosed to Aerotech in specifications or drawings previously or subsequently provided, or whether or not Aerotech’s... - Page 40 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for repair, and if Aerotech determines the problem could be warranty-related, then the following policy applies:...
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Page 41: Appendix B: Revision History
QNP3 Hardware Manual Revision History Appendix B: Revision History Revision General Information 1.02.00 Added new model: QNP3-100XYAZ-030-10 Added new model: QNP3-150XYAZ-200-20 1.01.00 Product update 1.00.00 New manual www.aerotech.com Appendix B... - Page 42 Revision History QNP3 Hardware Manual This page intentionally left blank. Appendix B www.aerotech.com...
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Page 43: Appendix C: Piezo Engineering Tutorial
PZT stack would be approximately 170 to 250 mm long. Therefore, most piezo flexure stages with >50 μm of travel use lever amplification to achieve longer travels in a more compact package size. A tradeoff is made www.aerotech.com Appendix C... -
Page 44: Hysteresis Effects
Aerotech’s piezo nanopositioning stages are optimized to provide superior mechanical performance in a compact stage package. - Page 45 Typical hysteresis curve of a piezoelectric stack actuator operating from -30V to +150V Aerotech amplifiers take full advantage of the semi-bipolar operation of piezoelectric stack actuators. Our actuators are designated to operate from -30 V to +150 V with very high voltage resolutions. Over this voltage range, open-loop hysteresis values can be as large as 10-15% of the overall open-loop travel of the piezo stage.
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Page 46: Creep And Drift
“blocked” or not allowed to move. As the actuator expands, the force production capability reduces until the force output reaches zero at the maximum rated displacement of the actuator. Appendix C www.aerotech.com... -
Page 47: Displacement With A Constant External Load
ΔL but the stroke ΔL remains the same as the unloaded stage. Figure C-4: Displacement of a piezo stage or actuator with a constant external load That is: Equation 3 www.aerotech.com Appendix C... -
Page 48: Displacement With An External Spring Load
It is evident upon inspection of Equation 4 that in order to maximize the stroke of the piezo stage, the piezo stage stiffness (k ) should be much larger than the external spring stiffness (k Figure C-5: Displacement of a piezo stage or actuator driving against an external spring of stiffness k Appendix C www.aerotech.com... -
Page 49: Capacitance
Equation 7 Typical capacitances of low-voltage, multi-layer piezo actuators used in nanopositioning applications are between 0.01 to 40 μF. The capacitances specified in Aerotech data sheets are measured at small signal conditions (1 V at 1 kHz). For larger signal operation (100-150 V), an increase in capacitance by as much as 60% should be expected. -
Page 50: Heating And Power Dissipation
Figure C-6 shows an illustration of how the power loss changes as a function of frequency and applied voltage for a typical piezo actuator with a capacitance of 4 μF. Appendix C www.aerotech.com... -
Page 51: Environmental Effects
One of the most important factors for ensuring long life is to protect the piezo actuator against humidity. For this reason, Aerotech uses specially-sealed coatings on the actuators that protect the actuator from moisture. Operation at 60% or lower RH environments is preferred as it helps further prolong the life of the actuator. -
Page 52: Vacuum
C.4 Piezo Stage Properties and Nomenclature Aerotech’s piezo nanopositioning stage series are designed with the end-user in mind. As a result, it is important that our customers have a thorough understanding of our specifications so that they can best be matched to the application or end-process. - Page 53 For example, a 0.02% linearity for a 100 μm stage is a 20 nm maximum deviation. The approximated accuracy error is 2 x 20 nm or 40 nm pk-pk. Figure C-7: Raw measurement results from an accuracy and linearity test of a 100 μm piezo stage www.aerotech.com Appendix C...
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Page 54: Resolution
As a result, the resolution (or noise) of a piezo nanopositioner is a function of the sensor bandwidth of the feedback device. Aerotech’s piezo amplifiers and feedback electronics have been optimized to provide low noise and high resolution making them suitable for some of the most demanding performance applications. -
Page 55: Repeatability
QNP3 Hardware Manual Piezo Engineering Tutorial Aerotech specifies the resolution as a 1 sigma (rms) noise, or jitter, value as measured by an external sensor (either precision capacitance sensor or laser interferometer) at a measurement bandwidth of 1 kHz, unless noted. -
Page 56: Load Ratings
For some stages, the load rating may be different depending on the direction of the applied load. All Aerotech load ratings are a maximum value. If you require larger load ratings than what is provided in our data sheets, please contact an Aerotech Applications Engineer as we may be able to easily modify or customize a design to meet your exact needs. -
Page 57: Amplifier Selection
The example curve shown in Figure C-10 gives the maximum peak-peak voltage possible for an amplifier, based on the current ratings and frequency of operation for sinusoidal motion of various piezo stack capacitances. www.aerotech.com Appendix C... - Page 58 = 112 mA. The voltage and current waveforms are shown in Figure C-11. In this example, the peak and continuous currents are all less than the amplifier rating. Therefore, this amplifier is capable of supplying the necessary current to perform the desired move profile. Appendix C www.aerotech.com...
- Page 59 In this example, the continuous current is below the rating of the amplifier. However, the peak current exceeds the maximum current rating of the amplifier. Therefore, this amplifier is NOT capable of supplying the necessary current and power to perform the desired move profile. www.aerotech.com Appendix C...
- Page 60 Piezo Engineering Tutorial QNP3 Hardware Manual Figure C-12: Voltage and current waveforms for the profile commanded in Example 2 Appendix C www.aerotech.com...
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Page 61: Index
Closed-Loop stage distortion CW End-Of-Travel limit Support EN 61010-1 Technical Support End-of-Travel Limits Vacuum Operation field service Vibration Global Technical Support Warranty and Field Service Humidity inspect Linearity lubrication mounting surface cleaning multiaxis combinations www.aerotech.com Index... - Page 62 Index QNP3 Hardware Manual This page intentionally left blank. Index www.aerotech.com...